Surface micromachining, the Glossary
Surface micromachining builds microstructures by deposition and etching structural layers over a substrate.[1]
Table of Contents
26 relations: Accelerometer, Acid, Array, Bulk micromachining, Cantilever, Glass, Integrated circuit, Ion, Magnetic nanoparticles, MEMS, Microstructure, Nanoelectromechanical relay, Nanoparticle deposition, Photolithography, Plasma (physics), Plastic, Polycrystalline silicon, Polyethylene terephthalate, Polymer, Semiconductor device fabrication, Silicon, Silicon dioxide, Substrate (materials science), Thin-film solar cell, Thin-film transistor, Wafer (electronics).
- Microelectronic and microelectromechanical systems
Accelerometer
An accelerometer is a device that measures the proper acceleration of an object.
See Surface micromachining and Accelerometer
Acid
An acid is a molecule or ion capable of either donating a proton (i.e. hydrogen ion, H+), known as a Brønsted–Lowry acid, or forming a covalent bond with an electron pair, known as a Lewis acid.
See Surface micromachining and Acid
Array
An array is a systematic arrangement of similar objects, usually in rows and columns.
See Surface micromachining and Array
Bulk micromachining
Bulk micromachining is a process used to produce micromachinery or microelectromechanical systems (MEMS). Surface micromachining and Bulk micromachining are Microelectronic and microelectromechanical systems, Microtechnology and Nanotechnology.
See Surface micromachining and Bulk micromachining
Cantilever
A cantilever is a rigid structural element that extends horizontally and is unsupported at one end.
See Surface micromachining and Cantilever
Glass
Glass is an amorphous (non-crystalline) solid.
See Surface micromachining and Glass
Integrated circuit
An integrated circuit (IC), also known as a microchip, computer chip, or simply chip, is a small electronic device made up of multiple interconnected electronic components such as transistors, resistors, and capacitors.
See Surface micromachining and Integrated circuit
Ion
An ion is an atom or molecule with a net electrical charge.
See Surface micromachining and Ion
Magnetic nanoparticles
Magnetic nanoparticles (MNPs) are a class of nanoparticle that can be manipulated using magnetic fields.
See Surface micromachining and Magnetic nanoparticles
MEMS
MEMS (micro-electromechanical systems) is the technology of microscopic devices incorporating both electronic and moving parts. Surface micromachining and MEMS are Microelectronic and microelectromechanical systems and Microtechnology.
See Surface micromachining and MEMS
Microstructure
Microstructure is the very small scale structure of a material, defined as the structure of a prepared surface of material as revealed by an optical microscope above 25× magnification.
See Surface micromachining and Microstructure
Nanoelectromechanical relay
A nanoelectromechanical (NEM) relay is an electrically actuated switch that is built on the nanometer scale using semiconductor fabrication techniques. Surface micromachining and nanoelectromechanical relay are Microelectronic and microelectromechanical systems.
See Surface micromachining and Nanoelectromechanical relay
Nanoparticle deposition
Nanoparticle deposition refers to the process of attaching nanoparticles to solid surfaces called substrates to create coatings of nanoparticles.
See Surface micromachining and Nanoparticle deposition
Photolithography
Photolithography (also known as optical lithography) is a process used in the manufacturing of integrated circuits. Surface micromachining and Photolithography are Microtechnology.
See Surface micromachining and Photolithography
Plasma (physics)
Plasma is one of four fundamental states of matter (the other three being solid, liquid, and gas) characterized by the presence of a significant portion of charged particles in any combination of ions or electrons.
See Surface micromachining and Plasma (physics)
Plastic
Plastics are a wide range of synthetic or semi-synthetic materials that use polymers as a main ingredient.
See Surface micromachining and Plastic
Polycrystalline silicon
Polycrystalline silicon, or multicrystalline silicon, also called polysilicon, poly-Si, or mc-Si, is a high purity, polycrystalline form of silicon, used as a raw material by the solar photovoltaic and electronics industry.
See Surface micromachining and Polycrystalline silicon
Polyethylene terephthalate
Polyethylene terephthalate (or poly(ethylene terephthalate), PET, PETE, or the obsolete PETP or PET-P), is the most common thermoplastic polymer resin of the polyester family and is used in fibres for clothing, containers for liquids and foods, and thermoforming for manufacturing, and in combination with glass fibre for engineering resins.
See Surface micromachining and Polyethylene terephthalate
Polymer
A polymer is a substance or material consisting of very large molecules linked together into chains of repeating subunits.
See Surface micromachining and Polymer
Semiconductor device fabrication
Semiconductor device fabrication is the process used to manufacture semiconductor devices, typically integrated circuits (ICs) such as computer processors, microcontrollers, and memory chips (such as NAND flash and DRAM). Surface micromachining and semiconductor device fabrication are Microtechnology.
See Surface micromachining and Semiconductor device fabrication
Silicon
Silicon is a chemical element; it has symbol Si and atomic number 14.
See Surface micromachining and Silicon
Silicon dioxide
Silicon dioxide, also known as silica, is an oxide of silicon with the chemical formula, commonly found in nature as quartz.
See Surface micromachining and Silicon dioxide
Substrate (materials science)
Substrate is a term used in materials science and engineering to describe the base material on which processing is conducted.
See Surface micromachining and Substrate (materials science)
Thin-film solar cell
Thin-film solar cells are a type of solar cell made by depositing one or more thin layers (thin films or TFs) of photovoltaic material onto a substrate, such as glass, plastic or metal.
See Surface micromachining and Thin-film solar cell
Thin-film transistor
A thin-film transistor (TFT) is a special type of field-effect transistor (FET) where the transistor is made by thin film deposition.
See Surface micromachining and Thin-film transistor
Wafer (electronics)
In electronics, a wafer (also called a slice or substrate) is a thin slice of semiconductor, such as a crystalline silicon (c-Si, silicium), used for the fabrication of integrated circuits and, in photovoltaics, to manufacture solar cells.
See Surface micromachining and Wafer (electronics)
See also
Microelectronic and microelectromechanical systems
- Bio-MEMS
- Bulk micromachining
- CEA-Leti: Laboratoire d'électronique des technologies de l'information
- Electromechanical modeling
- Fariborz Maseeh
- InvenSense
- Journal of Microelectromechanical Systems
- List of MEMS foundries
- List of piezoelectric materials
- MEMS
- Microelectromechanical system oscillator
- Micromirror device
- Microscanner
- Nanoelectromechanical relay
- Piezoelectric microelectromechanical systems
- Radio-frequency microelectromechanical system
- Scratch drive actuator
- Smartdust
- Surface acoustic wave sensor
- Surface activated bonding
- Surface micromachining
- T-MOS thermal sensor
- Three-Axis Acceleration Switch
- Trojan wave packet