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CN101033948A - Measurement system for three-dimensional deformation based on splitting optical fiber - Google Patents

  • ️Wed Sep 12 2007
Measurement system for three-dimensional deformation based on splitting optical fiber Download PDF

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Publication number
CN101033948A
CN101033948A CN 200710038782 CN200710038782A CN101033948A CN 101033948 A CN101033948 A CN 101033948A CN 200710038782 CN200710038782 CN 200710038782 CN 200710038782 A CN200710038782 A CN 200710038782A CN 101033948 A CN101033948 A CN 101033948A Authority
CN
China
Prior art keywords
optical fiber
branch
fiber
branch optical
phase
Prior art date
2007-03-29
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Granted
Application number
CN 200710038782
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Chinese (zh)
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CN101033948B (en
Inventor
于瀛洁
王亮亮
张之江
周文静
胡孔明
张淑萍
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SHANGHAI UNIVERSITY
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SHANGHAI UNIVERSITY
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2007-03-29
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2007-03-29
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2007-09-12
2007-03-29 Application filed by SHANGHAI UNIVERSITY filed Critical SHANGHAI UNIVERSITY
2007-03-29 Priority to CN200710038782A priority Critical patent/CN101033948B/en
2007-09-12 Publication of CN101033948A publication Critical patent/CN101033948A/en
2010-05-19 Application granted granted Critical
2010-05-19 Publication of CN101033948B publication Critical patent/CN101033948B/en
Status Expired - Fee Related legal-status Critical Current
2027-03-29 Anticipated expiration legal-status Critical

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Abstract

本发明涉及了一种基于分束光纤的三维变形测量系统。它由一个提供光源的激光器、一个带CCD摄像机的图像接收系统和一个分光传光及相移系统组成,分光传光及相移系统是一个一分五型光纤分光传光及相移系统。通过光纤出口端的遮挡开关的选择,可以实现物体面内竖直方向、水平方向以及离面方向的变形测量。本发明结构合理紧凑,操作简便,适用于物体表面的准实时三维变形测量。

The invention relates to a three-dimensional deformation measurement system based on splitting optical fiber. It consists of a laser that provides a light source, an image receiving system with a CCD camera, and a light splitting and phase shifting system. Through the selection of the shielding switch at the outlet end of the optical fiber, the deformation measurement in the vertical direction, horizontal direction and out-of-plane direction of the object plane can be realized. The invention has a reasonable and compact structure and is easy to operate, and is suitable for quasi-real-time three-dimensional deformation measurement of object surfaces.

Description

Measurement system for three-dimensional deformation based on splitting optical fiber

Technical field

The present invention relates to the optical 3-dimensional deformation measuring system, particularly a kind of measurement system for three-dimensional deformation based on splitting optical fiber.

Background technology

Along with industrial expansion, people to material stressed after, the research of performance parameters such as the distortion of generation, stress, strain requires also to improve constantly.Can only be applied to metal stresses scale that object point measures to speckle The Application of Technology that can Measuring Object face zone from the past.Utilize the speckle technology that there have been many methods hardware system and the deformation process scheduling algorithm processing aspect that object carries out the deformation measurement of bidimensional or three-dimensional.

In the present at home document record, the technology of electronic speckle pattern interferometry commercial measurement body surface three-dimensional anamorphotic system is: adopt three laser instruments to shine to provide radiation source, the reference substance that irradiation testee and its side are placed from three different directions.Promote to stick on three catoptrons above the reference substance with PZT phase-shifter, being used to provides the reference light of corresponding three beams thing light interference and introduces phase shift.Before ccd video camera, place the big shearing prism, make the information on body surface information and the reference substance all enter among the CCD, in conjunction with four step phase-shifting techniques, three laser instruments shine measured object successively respectively, and the speckle pattern of being gathered is carried out computing and separate obtaining three independently deformation fields.But this system is because the quantity of laser instrument is many, and structure is huge, and three level crossing directions on the reference substance are adjusted difficulty, and because the separating effect of big shearing prism may influence the speckle image quality, and this system can not carry out the measurement of one dimension or two dimension separately.

In patent US 6188483 B1, measure in the system of three-dimensional object surface distortion, utilize a laser instrument that light source is provided, utilize spectroscope and reflective mirror characteristic, carry out beam split, pass light.Two twin-beam electronics diffusing class interference system and a surface deformation detection system are attached in the system, rely on four bundle laser beam finished surface internal strains of outgoing to detect respectively, and utilize a branch of and inner another light beams in the four bundle laser to constitute the surface deformation detection system.With the electronic speckle figure that obtains before and after the distortion use directly cut algorithm mutually handle after, obtain the 3 D deformation data.This system can carry out the measurement of one dimension, two dimension or 3 D deformation separately.Shortcoming is to adopt discrete element to carry out beam split, pass light, and optical device is various, and optics positions is placed the accuracy requirement height, and system debug precision prescribed height is adjusted operating difficulties.

Summary of the invention

The objective of the invention is at the defective that exists in the prior art, a kind of improved measurement system for three-dimensional deformation based on splitting optical fiber is provided, simple in structure, easy to operate, and can guarantee measuring accuracy.

In order to achieve the above object, design of the present invention is:

The present invention is primarily aimed at hardware system and improves and innovate, adopt one fen five type optical fiber to carry out beam split, pass light, getting wherein, four bundle branch optical fibers constitute two opposite internal strains detections, by being scheduled to of optical fiber exit ports angle of divergence parameter, can directly be met the divergent beams of system requirements, need not beam expander spare.In order to improve the deformation measurement precision, still adopt four step phase shift algorithm, adopt traditional introducing phase shifting method, in above-mentioned two pairs of coherent light beams, select wherein a branch of branch optical fiber exit ports position to paste a PZT phase-shifter respectively respectively, promotion by the PZT phase-shifter drives the branch optical fiber fine motion, just can introduce phase shift in this light beam.The light beam of shared wherein a branch of introducing phase shift in conjunction with the 5th bundle branch optical fiber, obtains to satisfy the coherent light beam of system requirements.Therefore, entire system is owing to the employing of optical fiber, and structure is simplified greatly, debugging operations is convenient, because the use of blocking switch, this system can carry out the measurement of one dimension, two dimension or 3 D deformation separately, and make the software configuration of image post-processed simply, and guaranteed measuring accuracy.

According to above-mentioned inventive concept, the present invention adopts following technical proposals:

A kind of measurement system for three-dimensional deformation based on splitting optical fiber, pass light and Phase Shifting System is formed by the image receiving system of a laser instrument that light source is provided, a band ccd video camera and beam split, it is characterized in that described beam split passes light and Phase Shifting System is one fen five type optical fibre light splitting biography light and Phase Shifting System.

The structure that above-mentioned one minute five type optical fibre light splitting passes light and Phase Shifting System is: the main fiber that comes from described laser instrument connects one fen fiber coupler input port of five through a fiber adjusting mount, the output port of fiber coupler connects five bundle fiber optic taps to carry out beam split and pass light: a branch of branch optical fiber is connected the image receiving system of described band ccd video camera, the output port of four bundle branch beams is respectively placed one and is blocked switch, the output port of four bundle branch optical fibers is aimed at testee respectively, wherein two branch optical fibers are fixed by Phase Shifting System, respectively paste a PZT phase-shifter in the Phase Shifting System, expansion by the PZT phase-shifter is moved, the branch optical fiber that drives its stickup moves, and phase shift is introduced in the light beam.

The structure of above-mentioned Phase Shifting System is: branch optical fiber is fixed on the L type optical fiber fixed block, and L type optical fiber fixed block is pasted to become to be rigidly connected with the PZT phase-shifter, and then, the PZT phase-shifter is pasted to become to be rigidly connected with the fiber support frame.Branch optical fiber is not connected with the PZT phase-shifter with the fiber support frame.The PZT phase-shifter is moved forward by driven promotion L type optical fiber fixed block, moves axially along optical fiber thereby make L type optical fiber fixed block drive branch optical fiber, and phase shift is introduced in the branch optical fiber.

Above-mentioned no phase shift optical fiber fixed sturcture is: branch optical fiber directly is fixed on the fiber support frame.

The structure of the image receiving system of above-mentioned band ccd video camera is: from described laser emitting light beam through a microscope and fiber adjusting mount, pass light by branch optical fiber, by the spectroscope beam split, spectroscope places between ccd video camera and the CCD camera lens light beam after protecting the bundle collimating mirror, blocking switch.

Above-mentioned ccd video camera connects a computing machine.

The present invention compares with existing three-dimensional electronic speckle deformation detection system, has following conspicuous outstanding substantive distinguishing features and remarkable advantage: adopted one minute five type optical fibre light splitting in the system of the present invention, passed light; A shared light beams; Be met two of requirement of experiment by two PZT phase-shifters and restraint the laser branch beam that to introduce phase shift.By the beam split of optical fiber, three pairs of coherent light beams that the system that just can obtain is required.Optical device required for the present invention is few, and compactness rational in infrastructure is easy and simple to handle, is applicable to that the quasi real time 3 D deformation of body surface is measured.

Description of drawings

Fig. 1 is the system architecture synoptic diagram of one embodiment of the invention.

Fig. 2 is the structural representation that one minute five type optical fibre light splitting in Fig. 1 example passes light and Phase Shifting System.

Fig. 3 is the no phase shift branch beam fixed sturcture synoptic diagram in Fig. 2 example.

Fig. 4 is the phase shift branch beam fixed sturcture synoptic diagram in Fig. 2 example.

Fig. 5 is the adjustment schematic diagram of the harvester in Fig. 1 example.

Fig. 6 is that two pedal line coplanes are adjusted synoptic diagram.

Fig. 7 is the projection coplane principle schematic that vertical direction two branch beams are adjusted coplane.

Fig. 8 is vertical direction two branch optical fiber exit ports locus synoptic diagram.

Fig. 9 is that two horizontal line coplanes are adjusted synoptic diagram.

Figure 10 is the projection coplane principle schematic that horizontal direction two branch beams are adjusted coplane.

Figure 11 is vertical direction and horizontal direction four bundle branch optical fiber exit ports locus synoptic diagram.

Embodiment

A preferred embodiment of the present invention is: referring to Fig. 1, this passes light based on the measurement system for three-dimensional deformation of splitting optical fiber by the image receiving system of a laser instrument that light source is provided 1, a band

ccd video camera

6 and beam split and Phase Shifting System is formed, described beam split, passes light and Phase Shifting System is one fen five type optical fibre light splitting biography light and Phase Shifting System.

The structure that above-mentioned one minute five type optical fibre light splitting passes light and Phase Shifting System is: connect one

fen fiber coupler

4 input port of five from the main fiber of described laser instrument 1 through a

fiber adjusting mount

3, the output port of

fiber coupler

4 connects five bundle fiber

optic taps

11,12,13,14,15 carry out beam split and pass light: a branch of branch

optical fiber

11 is connected the image receiving system of described band

ccd video camera

6, four

bundle branch beams

12,13,14,15 output port respectively has one to

block switch

20,21,19,18, the output port of this four bundles branch beam is aimed at

testee

22 respectively, and wherein branch

optical fiber

14 sticks on the identical Phase Shifting System of structure 23 with 15 exit ports by L type optical fiber fixed block 25, on 24.Expansion by PZT phase-

shifter

17,16 is moved, and drives

branch beam

14,15 and moves, and phase shift is introduced in the light beam.

The structure of above-mentioned Phase Shifting System 23,24 is: branch

optical fiber

14,15 is fixed on the L type optical fiber fixed block 25, L type optical fiber fixed block 25 is pasted to become to be rigidly connected with PZT phase-

shifter

16,17, then, PZT phase-

shifter

16,17 is pasted to become to be rigidly connected with fiber support frame 26.Optical fiber is not connected with PZT phase-

shifter

16,17 with fiber support frame 26.PZT phase-

shifter

16,17 is subjected to driven to promote L type optical fiber fixed block 25 to move forward, and moves axially along optical fiber thereby make L type optical fiber fixed block 25 drive branch

optical fiber

14,15, and phase shift is introduced in the

optical fiber

14,15.

The structure of the image receiving system of above-mentioned band

ccd video camera

6 is: from described laser instrument 1 outgoing beam through a microscope 2 and

fiber adjusting mount

3, pass light by branch

optical fiber

11, light beam through beam-expanding

collimation mirror

10,

block switch

9 after by spectroscope 7 beam split, spectroscope 7 places between

ccd video camera

6 and the

CCD camera lens

8.

Above-mentioned

ccd video camera

6 connects a

computing machine

5.

The image receiving system of above-mentioned laser instrument 1, band ccd video camera and one minute five type optical fibre light splitting pass light and Phase Shifting System all form components and parts and be installed on the

base plate

27.

Above-mentioned

fiber coupler

4 claims splitter again, is to divide element in the bar optical fiber at the most with the light signal from an optical fiber, and we mainly use it and carry out beam split in system, pass light.In the native system, adopt starlike/tree-shaped fiber coupler,, with five optical fiber and burn and melt stretching together, make the polymerization of nuclear core together, to reach the optically-coupled effect by the facture of sintering processing.The length of drawing awl by adjustment, and, realize the energy proportion of optical fibre light splitting to the control of sintering temperature, with reach native system to the ratio of five bundle branch beam energy near impartial requirements.

System's adjustment process

The purpose of adjusting mainly contains 3 points:

1. horizontal direction two is restrainted branch beams about sample surface centre normal symmetry in the assurance face;

2. vertical direction two is restrainted branch beams about sample surface centre normal symmetry in the assurance face;

3. the size of obtaining four bundle branch beam space requirements is used for the demarcation of incident angle.

1. the adjustment of image collecting device

Suppose that

CCD camera lens

8 axis directions are the Z axle, crosscut surface level and rip cutting vertical plane by

CCD camera lens

8 axis are respectively X-axis and Y-axis.

Adopt the method for adjustment shown in Fig. 5 (a), revise the collection direction of

CCD camera lens

8 and the relative position of camera lens and

ccd video camera

6, purpose is: reach the consistance of irradiation area and pickup area, the collection direction that makes

CCD camera lens

8 is along Z-direction.

Among Fig. 5 (b), select for

use sample

28 as adjusting additional device,

sample

28 front center are decorated with reference to cross, it is the center of circle with the cross center, at least be decorated with the circle that a diameter equates with CCD camera lens peripheral diameter, in sample surface with literal (regulating the imaging samples position, i.e. object distance).

Spectroscope 7

usefulness fixture blocks

29 are fixed in about two millimeters places before the target surface of

ccd video camera

6, and make spectroscope 7 sides parallel with the target surface of ccd video camera 6.Place

CCD camera lens

8 then, the center that makes the center of

CCD camera lens

8 and

ccd video camera

6 is on same

horizontal line.Sample

28 is positioned over a place, position, and is adjusted to the center of

CCD camera lens

8 identical substantially with reference to the central space position of cross.With

sample

28 along

CCD camera lens

8 axially slowly away from camera lens, move to till the picture that can in display, see the literal on the sample A clearly i.e. position b place, and guarantee that the collection direction of

CCD camera lens

8 is parallel with the surface normal of sample 28.Finely tune the position, space (in height and the surface level and the angle of CCD camera lens 8) of

ccd video camera

6 then, make with reference to the image space of cross center at monitor.

Like this, can finish the adjustment of harvester, make the consistance of irradiation area and pickup area, and make the collection direction be positioned at perpendicular (y-z).

2. the adjustment of vertical direction illumination beam

After the image collecting device adjustment finishes, for two branch

optical fibers

13 guaranteeing vertical direction and 15 exit ports surface with the angular illumination testee that is symmetrical in the testee surface normal, this device adopts the geometrical principle of two straight lines formations plane principle, projection theory and an equilateral triangle as adjusting mathematical model, and two

illumination beams

13 and 15 of vertical direction are adjusted to position accurately.At this, substep is told about adjustment process.

The coplane of the first step, two pedal line (being in the y-z face) is adjusted;

Adopt principle (two straight lines constitute a plane principle) adjustment as shown in Figure 6, purpose is: adjust two pedal line and make its coplane, and in the y-z face.

Among Fig. 6, two lines are hung on the

weight support

32 by weight is unsettled respectively, will guarantee that here two lines are free vertical,

form pedal line

30 and 31.Two

pedal line

30,31 will be between

sample

28 surface and

CCD camera lens

8 and

pedal line

30 from about 5 millimeters of

sample

28 surfaces,

pedal line

30,31 at interval should not be excessive, so that can obtain the imaging clearly of two pedal line.

Because after the image collecting device adjustment finishes, guaranteed the CCD camera lens along its axial images acquired, then, can guarantee two pedal line, 30,31 coplanes as long as guaranteeing the picture of two

pedal line

30 and 31 can overlap.

Utilize

light

33 irradiations,

pedal line

30 and 31 is imaged on the display screen, the picture of

pedal line

30 and 31 is overlapped, then finish its coplane (in the y-z face) and adjust by the position of adjusting

support

32.

Be positioned at the adjustment of the branch

optical fiber

13 exit ports light beams of lower end on second step, the vertical direction;

To close as the light among Fig. 6 33, open the branch

optical fiber

13 that is positioned at the lower end on the vertical direction, make two pedal line of shoot laser light beam irradiates 30,31 of branch optical fiber 13.Purpose is: the direction of illumination of adjusting branch

optical fiber

13 shoot laser light beams is positioned at the y-z face.

Adopt principle (projection theory) as shown in Figure 7, because two

pedal line

30,31 coplane, as long as two projections of two

pedal line

30,31 are dropped in the y-z face simultaneously, just then the direction of illumination of the shoot laser light beam of branch

optical fiber

13 drops in the y-z face.

At first, observe the image space above the display of being projected in of two

pedal line

30,31, according near their position of projection imaging reference cross vertical curve, adjust the locus of the exit ports of branch

optical fiber

13, make the projection imaging of two

pedal line

30,31 be positioned at same straight line and the image space of the lip-deep vertical curve with reference to cross that drops on

sample

28 on.Article two, the projection imaging of

pedal line

30,31 after the shoot laser light beam irradiates of branch

optical fiber

13 is on the same straight line, shows that the direction of illumination of outgoing laser beam is positioned at the y-z face.

Secondly, adjust the irradiating angle (angle of light beam in the vertical direction and Z-direction) of branch

optical fiber

13, make beam center and overlap with reference to the cross intersection point.

At last, measure exit ports and the axis of

CCD camera lens

8 and the surface distance of

sample

28 of lower end branch

optical fiber

13, be recorded as L respectively 1And C 1

The adjustment of the exit ports light beam of the branch

optical fiber

15 on being positioned on the 3rd step, the vertical direction;

Still adopt branch

optical fiber

13 to adjust principles, purpose is: the exit ports light beam irradiates direction that makes branch

optical fiber

15 in the y-z face, and with the light beam irradiates direction of branch

optical fiber

13 about the Z rotational symmetry.

At first,,, open the shoot laser light beam of branch

optical fiber

15, make two pedal line of shoot laser light beam irradiates 30,31 of

optical fiber

15 by blocking

switch

18 by blocking

switch

21 close fork

optical fiber

13.

Secondly, observe the image space above the display of being projected in of two

pedal line

30,31, according near their position of projection imaging reference cross vertical curve, the distance of adjusting branch

optical fiber

15 exit ports and CCD camera lens axis and reference substance surface is respectively L 1And C 1, make beam center and overlap, and make the projection imaging of two

pedal line

30,31 be positioned at same straight line and drop on the image space of the lip-deep vertical curve with reference to cross of object of reference with reference to the cross intersection point.Article two, the projection imaging of

pedal line

30,31 after the shoot laser light beam irradiates of branch

optical fiber

15 is on the same straight line, shows that the direction of illumination of the shoot laser light beam of branch

optical fiber

15 is positioned at the y-z face.

So far, vertical direction upper and lower side two ends branch

optical fiber

13 and 15 exit ports locus are as shown in Figure 8.

The 4th step, checking branch

optical fiber

13 and 15 shoot laser light beam coexist in the y-z face.

Open the shoot laser light beam of branch

optical fiber

13 and 15 simultaneously by blocking

switch

21 and 18, observe two

pedal line

30,31 through branch

optical fiber

13 and the postradiation image space that is projected on the display of 15 whiles, still at the vertical curve image space place of reference cross, checking is adjusted correct.

3. the adjustment of horizontal direction illumination beam

After the shoot laser light beam adjustment of image collecting device and vertical direction branch

optical fiber

13 and 15 finishes, for the exit ports of two branch

optical fibers

12 guaranteeing horizontal direction and 14 surface with the angular illumination testee that is symmetrical in the testee surface normal, this experiment still adopts the geometrical principle of two straight lines formations plane principle, projection theory and an equilateral triangle as adjusting mathematical model, and two branch

optical fibers

13 of horizontal direction and 15 shoot laser light beam are adjusted to position accurately.At this, still substep is told about adjustment process.

The first step, two horizontal coplanes (being in the x-z face) are adjusted;

Adopt principle (two straight lines constitute a plane principle) adjustment as shown in Figure 9, purpose is: adjust two horizontal lines and make its coplane, and in the x-z face.

Among Fig. 9,

horizontal stand

34 and 35 is in sustained height, and two lines are hung on

horizontal stand

34 and 35 by weight is unsettled respectively, will guarantee that here two lines tighten, and forms two

horizontal lines

36 and 37.Two

horizontal lines

36,37 will and guarantee that

horizontal line

36 and 37 all has imaging clearly in display between

sample

28 surfaces and

CCD camera lens

8 equally.

After the image collecting device adjustment finishes, guaranteed the CCD camera lens, can overlap, can guarantee two horizontal line coplanes as long as guarantee the picture of two

horizontal lines

36 and 37 along its axial images acquired.

Adopt branch

optical fiber

13 and 15 identical adjustment principle, as long as the horizontality of

support

34 and 35 is guaranteed, then

horizontal line

36 and 37 picture must overlap, adjust the height of

support

34 and 35, the imaging of

horizontal line

36 and 37 is on the horizontal line with reference to cross, finishes its coplane (in the x-z face) and adjust.

Second step, be positioned at the adjustment of shoot laser light beam of the branch

optical fiber

14 of left end (towards tested sample) on the horizontal direction;

Adopt and close as the light among Fig. 9 33, open the branch

optical fiber

14 that is positioned at left end on the horizontal direction by blocking

switch

19, make two horizontal lines of shoot laser light beam irradiates 36,37 of branch

optical fiber

14, purpose is: the direction of illumination of adjusting the shoot laser light beam of branch

optical fiber

14 is positioned at the x-z face.

Adopt principle (projection theory) as shown in figure 10, because two

horizontal lines

36,37 coplane, as long as two projections of two

horizontal lines

36,37 are dropped in the x-z face simultaneously, just the direction of illumination of the shoot laser light beam of branch

optical fiber

14 is in the x-z face.

At first, observe the image space above the display of being projected in of two

horizontal lines

36,37, according near their position of projection imaging reference cross horizontal line, adjust the locus of the exit ports of branch

optical fiber

14, make the projection imaging of two

horizontal lines

36,37 be positioned at same straight line and drop on the lip-deep horizontal image space of

sample

28 with reference to cross.Article two, the projection imaging of

horizontal line

36,37 after the shoot laser light beam irradiates of branch

optical fiber

14 is on the same straight line, shows that the direction of illumination of the shoot laser light beam of branch

optical fiber

14 is positioned at the x-z face.

Secondly, adjust the irradiating angle (light beam in the horizontal direction with the angle of Z-direction) of branch

optical fiber

14, make beam center and overlap with reference to the cross intersection point.

At last, the distance on the axis of the exit ports of measurement branches

optical fiber

14 and

CCD camera lens

8 and the surface of

sample

28 is recorded as L respectively 2And C 2

The 3rd step, be positioned at the adjustment of shoot laser light beam of the branch

optical fiber

12 of right-hand member on the horizontal direction;

Adopt the adjustment principle of branch

optical fiber

14, purpose is: the direction of illumination of shoot laser light beam that makes the branch

optical fiber

12 that is positioned at right-hand member on the horizontal direction is at the x-z face, and with the direction of illumination of the shoot laser light beam of branch

optical fiber

14 about the Z rotational symmetry.

At first, by blocking the shoot laser light beam of

switch

19 close fork

optical fiber

14,, make two horizontal lines of shoot laser light beam irradiates 36,37 of branch

optical fiber

12 by blocking the fetch boiling water shoot laser light beam of square branch optical fiber that upwards is positioned at right-

hand member

12 of

switch

20.

Secondly, observe the image space above the display of being projected in of two

horizontal lines

36,37, according near their position of projection imaging reference cross horizontal line, the distance on the surface of the exit ports of adjustment branch

optical fiber

12 and the axis of

CCD camera lens

8 and

sample

28 is respectively L 2And C 2, make beam center and overlap, and make the projection imaging of two

horizontal lines

36,37 be positioned at same straight line and drop on the lip-deep horizontal image space of

sample

28 with reference to cross with reference to the cross intersection point.Article two, the projection imaging of

horizontal line

36,37 after the shoot laser light beam irradiates of branch

optical fiber

12 is on the same straight line, shows that the direction of illumination of the shoot laser light beam of branch

optical fiber

12 is positioned at the x-z face.

The 4th step, checking branch

optical fiber

12 and 14 shoot laser light beam coexist in the y-z face.

Open the shoot laser light beam of branch

optical fiber

12 and 14 simultaneously by blocking

switch

20 and 19, observe two

horizontal lines

36,37 through branch

optical fiber

12 and the postradiation image space that is projected on the display of 14 whiles, still at the horizontal line image space place of reference cross, checking is adjusted correct.

So far, on level and the vertical direction four the bundle branch

optical fibers

12,14,13,15 the exit ports locus as shown in figure 11.

4. from the adjustment of face direction reference beam

The exit ports position of branch

optical fiber

11 is put in the side of spectroscope 7, make its outgoing beam process beam-expanding

collimation mirror

10 and

block switch

9 and enter spectroscope 7, enter the reception target surface of

ccd video camera

6 after reflection, form the surface deformation detection system with the shoot laser light beam of branch

optical fiber

14, the locus of the exit ports of fine setting branch

optical fiber

11 is up to seeing speckle at the display middle section.

So far, the locus of system's five bundle branch

optical fibers

11,12,13,14,15 is all adjusted and is finished.The branch beam irradiating angle is demarcated

According to the bulk data that the four adjustment results that restraint branch

optical fibers

12,13,14,15 obtain, carry out the demarcation of irradiating angle.

On the vertical direction, because the exit ports of branch

optical fiber

13,15 is about the surface of Z rotational symmetry irradiation tested

sample

28, according to geometric relationship shown in Figure 8, its irradiating angle α equates as can be known, promptly

α = arctan ( L 1 C 1 ) - - - ( 1 )

On the horizontal direction, because the exit ports of branch

optical fiber

12,14 is about the surface of Z rotational symmetry irradiation tested

sample

28, according to geometric relationship shown in Figure 11, its irradiating angle θ equates as can be known, promptly

θ = arctan ( L 1 C 1 ) - - - ( 2 )

Principle of work of the present invention

As shown in Figure 1, laser instrument 1 provides LASER Light Source, and after laser beam focused on through microscope 2, the adjustment by

fiber adjusting mount

3 made light beam enter the main fiber of one minute five

fiber coupler

4, obtains 11,12,13,14,15 5 light

beams.Light beam

11 enters spectroscope 7 by blocking

switch

9 after by beam-expanding

collimation device

10 beam-expanding collimations;

Light beam

12 and 14 is placed in the surface level and about body surface normal symmetrical illumination tested

sample

22, and wherein the output port of

light beam

14 is pasted with PZT phase-

shifter

17 so that phase shift is introduced in the

light beam

14, horizontal direction deformation detection system in the formation face;

Light beam

13 and 15 is placed in the vertical plane and about body surface normal symmetrical illumination tested

sample

22, and wherein the output port of

light beam

15 is pasted with PZT phase-

shifter

16 so that phase shift is introduced in the

light beam

15, vertical direction deformation detection system in the formation face.Output end position at

light beam

12,13,14,15 blocks switch 20,21,19,18 respectively, and the order that controlled deformation detects is carried out.

In the said system, shining on the testee through after blocking

switch

20,21,19,18 respectively behind

branch beam

12,13,14,15 outgoing

beams.Branch beam

11,12,13 is fixing as shown in Figure 3 respectively, branch

optical fiber

14,15 respectively as shown in Figure 4 structure fix.

In the said system, the data acquisition operation steps is:

At first, carry out vertical direction (Y direction) deformation detection in the face, open and block

switch

18,21, close and

block switch

9 and block

switch

19,20, make the shoot laser light beam of branch

optical fiber

13 and 15 constitute vertical direction deformation detection system in the face;

Utilize four width of cloth images before the distortion of vertical direction deformation detection system acquisition in the face, utilize the PZT phase-

shifter

16 at branch

optical fiber

15 endpiece places to introduce phase shift between the image, the position of four width of cloth images is mutually: 0, pi/2, π, 3 pi/2s.

Secondly, carry out horizontal direction (X-direction) deformation detection in the face, closing and working as

switch

18,21, open and block

switch

19,20,

block switch

9 and still be in closed condition, make the shoot laser light beam of branch

optical fiber

12 and 14 constitute horizontal direction deformation detection system in the face like this;

Utilize four width of cloth phase shifted images before the distortion of horizontal direction deformation detection system acquisition in the face, utilize the PZT phase-

shifter

17 at the endpiece place of branch

optical fiber

14 to introduce phase shift between the image.The position of four width of cloth images is mutually: 0, pi/2, π, 3 pi/2s.

At last, carry out, close and

block switch

18,20,21, open and block

switch

9, the shoot laser light beam of branch

optical fiber

11 and 14 is constituted from face direction deformation detection system from face direction (Z-direction) deformation detection.

Four width of cloth phase shifted images of utilization before the distortion of face direction deformation detection system acquisition utilize the PZT phase-

shifter

17 at branch

optical fiber

14 endpiece places to introduce phase shift between the image.The position of four width of cloth images is mutually: 0, pi/2, π, 3 pi/2s.

Speckle image before the distortion in three direction deformation detection systems is represented that with same form four width of cloth speckle images are expressed as respectively: I Ba, I Bb, I Bc, I Bd, that is:

I Ba = I 1 ( x , y ) + I 2 ( x , y ) + 2 I 1 ( x , y ) I 2 ( x , y ) cos [ φ R ( x , y ) - φ B ( x , y ) ] - - - ( 3 )

I Bb = I 1 ( x , y ) + I 2 ( x , y ) + 2 I 1 ( x , y ) I 2 ( x , y ) cos [ φ R ( x , y ) - φ B ( x , y ) - π 2 ] - - - ( 4 )

I Bc = I 1 ( x , y ) + I 2 ( x , y ) + 2 I 1 ( x , y ) I 2 ( x , y ) cos [ φ R ( x , y ) - φ B ( x , y ) - π ] - - - ( 5 )

I Bd = I 1 ( x , y ) + I 2 ( x , y ) + 2 I 1 ( x , y ) I 2 ( x , y ) cos [ φ R ( x , y ) - φ B ( x , y ) - 3 2 π ] - - - ( 6 )

Speckle image after the distortion in three direction deformation detection systems is represented with same form the width of cloth speckle image that gather the distortion back is designated as I A, that is:

I A = I 1 ( x , y ) + I 2 ( x , y ) + 2 I 1 ( x , y ) I 2 ( x , y ) cos [ φ R ( x , y ) - φ B ( x , y ) + Δφ ( x , y ) ] - - - ( 7 )

In the formula, I 1(x, y) and I 2(x y) refers to the light intensity of thing light wave and reference light wave respectively; φ B(x, y) and φ R(x, y) refer to respectively thing light wave and reference light wave the position mutually; (x y) refers to be out of shape the phasic difference that causes to Δ φ.

Utilize " 4+1 " phase shift algorithm, formula (3), (4), (5), (6) are subtracted each other respectively with formula (7) respectively, then square, after being averaged, be expressed as respectively;<I FA 2,<I FB 2,<I FC 2,<I FD 2, that is:

<I FA 2>=<[I Ba(x,y)-I A(x,y)] 2>

≈4I 1(x,y)I 2(x,y){1-cos[Δφ(x,y)]}

(8)

<I FB 2>=<[I Bb(x,y)-I A(x,y)] 2>

≈4I 1(x,y)I 2(x,y){1+sin[Δφ(x,y)]}

(9)

<I FC 2>=<[I Bc(x,y)-I A(x,y)] 2>

≈4I 1(x,y)I 2(x,y){1+cos[Δφ(x,y)]}

(10)

<I FD 2>=<[I Bd(x,y)-I YA(x,y)] 2>

≈4I 1(x,y)I 2(x,y){1-sin[Δφ(x,y)]}

(11)

With formula (8), (9), (10), (11) utilize trigonometric function operation handle the phase Δ φ that puts in place (x, y), that is:

Δφ(x,y)=atan2(I FB 2-I FD 2,I FC 2-I FA 2)?(12)

According to vertical direction position in the face mutually and deformation relationship:

Figure A20071003878200131

In the formula, α is illumination beam and body surface normal angle, and v is the distortion of vertical direction in the face, and λ is an optical maser wavelength.The position phase and the deformation relationship of horizontal direction in the face:

Figure A20071003878200132

In the formula, θ is illumination beam and body surface normal angle, and u is the distortion of horizontal direction in the face, and λ is an optical maser wavelength.

And mutually and deformation relationship from the position of face direction:

Figure A20071003878200133

In the formula, α is illumination beam and body surface normal angle, and v is the distortion of vertical direction in the face, and w for the quantification system of equations that obtains 3 D deformation from the face direction is:

Figure A20071003878200134

The collection of the deformation data of above-mentioned three directions and handle and all to pass through identical process: image on the target surface of

ccd video camera

6 through

CCD camera lens

8 from the testee beam reflected, and then image is transferred to computing

machine

5 carries out data processing.

Claims (6)

1.一种基于分束光纤的三维变形测量系统,由一个提供光源的激光器(1)、一个带CCD摄像机(6)的图像接收系统和一个分光传光及相移系统组成,其特征在于所述的分光传光及相移系统是一个一分五型光纤分光传光及相移系统。1. A three-dimensional deformation measurement system based on beam splitting optical fiber is composed of a laser (1) providing a light source, an image receiving system with a CCD camera (6) and a split light transmission and phase shifting system, characterized in that the The light splitting light transmission and phase shifting system described above is a one-to-five fiber optic light splitting light transmission and phase shifting system. 2.根据权利要求1所述的基于分束光纤的三维变形测量系统,其特征在于所述的一分五型光纤分光传光及相移系统的结构是:从所述的激光器(1)来的主光纤经一个光纤调整架(3)连接一个一分五的光纤耦合器(4)输入端口,光纤耦合器(4)的输出端口连接五束光纤分支(11、12、13、14、15)进行分光和传光:一束分支光纤(11)连接所述的带CCD摄像机(6)的图像接收系统,四束分支光束(12、13、14、15)的输出端口各放置一个遮挡开关(20、21、19、18),四束分支光束(12、13、14、15)的输出端口分别对准被测物体(22),其中两个分支光纤(14、15)通过相移系统(23、24)固定,相移系统(23、24)中分别各粘贴一个PZT相移器(17、16),通过PZT相移器(17、16)的膨胀移动,带动其粘贴的分支光纤(14、15)移动,将相移引入光束内。2. The three-dimensional deformation measurement system based on splitting optical fiber according to claim 1, characterized in that the structure of the one-to-five optical fiber splitting light transmission and phase shifting system is: from the described laser (1) The main optical fiber is connected to the input port of a one-to-five fiber coupler (4) through a fiber adjustment frame (3), and the output port of the fiber coupler (4) is connected to five fiber branches (11, 12, 13, 14, 15 ) for light splitting and light transmission: a branch optical fiber (11) is connected to the image receiving system with a CCD camera (6), and a blocking switch is respectively placed at the output ports of the four branch light beams (12, 13, 14, 15) (20, 21, 19, 18), the output ports of the four branch light beams (12, 13, 14, 15) are respectively aligned with the measured object (22), wherein two branch optical fibers (14, 15) pass through the phase shifting system (23, 24) are fixed, and a PZT phase shifter (17, 16) is respectively pasted in the phase shifting system (23, 24), and the branch optical fiber pasted by it is driven by the expansion and movement of the PZT phase shifter (17, 16). (14,15) moves, introducing a phase shift into the beam. 3.根据权利要求2所述的基于分束光纤的三维变形测量系统,其特征在于所述的相移系统(23、24)的结构是:分支光纤(14、15)固定在一个L型光纤固定块(25)上,L型光纤固定块(25)与PZT相移器(16、17)粘贴成刚性连接,然后,PZT相移器(16、17)与光纤支撑架(26)粘贴成刚性连接。分支光纤(14、15)与光纤支撑架(26)和PZT相移器(16、17)不连接。PZT相移器(16、17)受电压驱动推动L型光纤固定块(25)向前移动,从而使L型光纤固定块(25)带动分支光纤(14、15)沿光纤轴向移动,将相移引入分支光纤(14、15)中。3. The three-dimensional deformation measurement system based on split optical fiber according to claim 2, characterized in that the structure of the phase shift system (23, 24) is: the branch optical fiber (14, 15) is fixed on an L-shaped optical fiber On the fixed block (25), the L-shaped optical fiber fixed block (25) is pasted into a rigid connection with the PZT phase shifter (16, 17), and then the PZT phase shifter (16, 17) is pasted into an optical fiber support frame (26) Rigid connection. The branch optical fibers (14, 15) are not connected to the optical fiber support frame (26) and the PZT phase shifter (16, 17). The PZT phase shifter (16, 17) is driven by the voltage to push the L-shaped fiber fixing block (25) to move forward, so that the L-shaped fiber fixing block (25) drives the branch fiber (14, 15) to move along the fiber axis, and the A phase shift is introduced into the branch fibers (14, 15). 4.根据权利要求2所述的基于分束光纤的三维变形测量系统,其特征在于所述的无相移光纤固定结构是:将分支光纤(12、13)直接固定于光纤支撑架26上。4. The three-dimensional deformation measurement system based on split optical fiber according to claim 2, characterized in that the phase-shift-free optical fiber fixing structure is: directly fixing the branch optical fibers (12, 13) on the optical fiber support frame 26. 5.根据权利要求1、或2、或3所述的基于分束光纤的三维变形测量系统,其特征在于所述的带CCD摄像机的图像接收系统的结构是:从所述的激光器(1)出射光束经一个显微镜(2)和光纤调整架(3),由分支光纤(11)传光,光束经护束准直镜(10)、遮挡开关(9)后由分光镜(7)分光,分光镜(7)置于CCD摄像机(6)与CCD镜头(8)之间。5. according to claim 1, or 2, or 3 described three-dimensional deformation measuring systems based on splitting optical fiber, it is characterized in that the structure of the image receiving system of described band CCD camera is: from described laser (1) The outgoing beam passes through a microscope (2) and optical fiber adjustment frame (3), and is transmitted by the branch optical fiber (11). The beam splitter (7) is placed between the CCD camera (6) and the CCD lens (8). 6.根据权利要求4所述的基于分束光纤的三维变形测量系统,其特征在于所述的CCD摄像机(6)连接一个计算机(5)。6. The three-dimensional deformation measurement system based on split optical fiber according to claim 4, characterized in that said CCD camera (6) is connected to a computer (5).

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