CN101694013A - Corrosion method for increasing strength of solar sige substrate sheets - Google Patents
- ️Wed Apr 14 2010
CN101694013A - Corrosion method for increasing strength of solar sige substrate sheets - Google Patents
Corrosion method for increasing strength of solar sige substrate sheets Download PDFInfo
-
Publication number
- CN101694013A CN101694013A CN200910233351A CN200910233351A CN101694013A CN 101694013 A CN101694013 A CN 101694013A CN 200910233351 A CN200910233351 A CN 200910233351A CN 200910233351 A CN200910233351 A CN 200910233351A CN 101694013 A CN101694013 A CN 101694013A Authority
- CN
- China Prior art keywords
- corrosion
- pure water
- thickness
- seconds
- corrosive Prior art date
- 2009-10-20 Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Weting (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
Abstract
The invention discloses a corrosion method for increasing strength of solar sige substrate sheets, which includes steps of firstly preparing corrosive liquid such as corrosive 1# liquid: HF+H2O=150ml+1200ml, corrosive 2# liquid: CH3COOH+Br2+HNO3=150ml+3ml+250ml, secondly utilizing the corrosive 1# liquid to corrode: taking a case of polished sige substrate sheets, showering the sige substrate sheets by pure water, horizontally placing a sheet frame into a corrosion groove, completely immersing the portion of the sige substrate sheets inside the sheet frame into the corrosive 1# liquid, softly horizontally shaking the same for 10 seconds in first corrosion, taking out the sheet frame after 10 seconds, showering the sheet frame by aid of pure water, placing the sheet frame into a cleaning groove, taking out a sige substrate sheet to measure the thickness thereof, and determining time of next corrosion according to corrosion thickness, finally utilizing the corrosive 2# liquid to corrode: corroding 10 sige substrate sheets at a time for 20-30 seconds, taking out the sheet frame after 20-30 seconds, showering the sheet frame by aid of pure water, and then placing the sheet frame into the cleaning groove.
Description
Technical field
The present invention relates to a kind of caustic solution that increases strength of solar sige substrate sheets.
Background technology
The germanium substrate that is used for solar cell needed to grind or thinning back side before carrying out chemically machinery polished, to remove the defective that saw line or other preceding road technology stay, often intensity is lower for wafer after the processing like this, fragmentation very easily, adopt the method for chemical corrosion can increase its intensity greatly, prevent fragmentation.
Summary of the invention
The present invention is directed to needs of the prior art, adopt following technical scheme to carry out the configuration of corrosive fluid and the corrosion of germanium substrate:
A kind of caustic solution that increases strength of solar sige substrate sheets relates generally to the configuration of corrosive fluid and corrosion two aspects of germanium substrate,
The escharotica configuration
Corrosion 1# soup:
HF+H 2O (pure water)=150ml+1200ml
Get the 1200ml pure water and put into etching tank, measure 150ml HF again and pour in the etching tank.
Corrosion 2# soup:
CH 3COOH+Br 2+HNO 3＝150ml+3ml+250ml
Measure 150ml CH 3COOH splashes into 3ml Br 2, treat Br 2After the dissolving, add 250ml HNO 3
The germanium substrate corrosion:
(1) 1# corrosion
Get the germanium substrate that a box ground, after pouring, the horse level is put into etching tank with pure water, the part of germanium substrate will all immerse in the 1# corrosive fluid in the horse, and gently with its horizontal jitter.
Corrosion is 10 seconds for the first time, takes out horse after 10 seconds, dashes with pure water and drenches, and puts into rinse bath again.Take out its thickness of a slice amount, determine etching time next time according to corrosive thickness.
The thickness that the 1# corrosion falls is minimum to be 3 μ m, and the 1# corrosive fluid life-span is no more than 500pcs.
(2) 2# corrosion
10 of each corrosion,
Etching time is 20～30 seconds, takes out horse after 20～30 seconds, dashes with pure water and drenches, and puts into rinse bath again.Take out a slice and dry its thickness of back survey, the 2# corrosive fluid life-span is 400pcs, erodes thickness 8～12 μ m.
As reach required thickness and then use a large amount of pure water rinsing slice, thin pieces, dry the back and check, enter next road technology after qualified.
The beneficial effect of the invention:
Technology is simple, and effect is remarkable; Germanium substrate intensity after the corrosion increases greatly, has prevented fragmentation.
Embodiment
Below by specific embodiment technical solution of the present invention is described further.
The caustic solution of the increase strength of solar sige substrate sheets of present embodiment relates generally to the configuration of corrosive fluid and corrosion two aspects of germanium substrate,
Escharotica configuration and work-ing life:
(1) configuration
Corrosion 1# soup:
HF+H 2O (pure water)=150ml+1200ml
Get the 1200ml pure water and put into etching tank, measure 150ml HF again and pour in the etching tank.
Corrosion 2# soup:
CH 3COOH+Br 2+HNO 3＝150ml+3ml+250ml
Measure 150ml CH 3COOH splashes into 3ml Br 2, treat Br 2After the dissolving, add 250ml HNO 3
Corrosion:
(1) 1# corrosion
Get the germanium substrate that a box ground, after pouring, the horse level is put into etching tank with pure water, the part of germanium substrate will all immerse in the 1# corrosive fluid in the horse, and gently with its horizontal jitter.
Corrosion is 10 seconds for the first time, takes out horse after 10 seconds, dashes with pure water and drenches, and puts into rinse bath again.
Take out its thickness of a slice amount, determine etching time next time according to corrosive thickness.
The thickness that the 1# corrosion falls is minimum to be 3 μ m, and the 1# corrosive fluid life-span is no more than 500pcs.
(2) 2# corrosion
10 of each corrosion,
Etching time is 20～30 seconds, takes out horse after 20～30 seconds, dashes with pure water and drenches, and puts into rinse bath again.Take out a slice and dry its thickness of back survey, the 2# corrosive fluid life-span is 400pcs, erodes thickness 8-12 μ m.
As reach required thickness and then use a large amount of pure water rinsing slice, thin pieces, dry the back and check, enter next road technology after qualified.
Though the present invention with preferred embodiment openly as above; but they are not to be used for limiting the present invention; anyly be familiar with this skill person; without departing from the spirit and scope of the invention; from when can doing various variations or retouching, so being as the criterion of should being defined with the application's claim protection domain of protection scope of the present invention.
Claims (3)
1. a caustic solution that increases strength of solar sige substrate sheets is characterized in that,
The escharotica configuration:
Corrosion 1# soup:
HF+H 2O (pure water)=150ml+1200ml;
Get the 1200ml pure water and put into etching tank, measure 150ml HF again and pour in the etching tank;
Corrosion 2# soup:
CH3COOH+Br 2+HNO 3＝150ml+3ml+250ml；
Measure 150ml CH3COOH and splash into 3ml Br 2, treat Br 2After the dissolving, add 250ml HNO 3:
Corrosion:
(1) 1# corrosion
Get the germanium substrate that a box ground, after pouring, the horse level is put into etching tank with pure water, the part of germanium substrate will all immerse in the 1# corrosive fluid in the horse, and gently with its horizontal jitter;
Corrosion is about 10 seconds for the first time, takes out horse after 10 seconds, dashes with pure water and drenches, and puts into rinse bath again; Take out its thickness of a slice amount, determine etching time next time according to corrosive thickness;
(2) 2# corrosion
About 10 of each corrosion,
Etching time is about 20～30 seconds, takes out horse after 20～30 seconds, dashes with pure water and drenches, and puts into rinse bath again; Take out a slice and dry the back and survey its thickness, as reach required thickness and then use a large amount of pure water rinsing slice, thin pieces, dry the back and check, enter next road technology after qualified.
2. germanium substrate caustic solution according to claim 1 is characterized in that,
The thickness that the 1# corrosive fluid erodes is minimum to be 3 μ m, and the 1# corrosive fluid life-span is no more than 500pcs.
3. germanium substrate caustic solution according to claim 1 is characterized in that,
The 2# corrosive fluid life-span is about 400pcs, erodes about thickness 8～12 μ m.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200910233351A CN101694013A (en) | 2009-10-20 | 2009-10-20 | Corrosion method for increasing strength of solar sige substrate sheets |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200910233351A CN101694013A (en) | 2009-10-20 | 2009-10-20 | Corrosion method for increasing strength of solar sige substrate sheets |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101694013A true CN101694013A (en) | 2010-04-14 |
Family
ID=42093006
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200910233351A Pending CN101694013A (en) | 2009-10-20 | 2009-10-20 | Corrosion method for increasing strength of solar sige substrate sheets |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101694013A (en) |
Cited By (6)
* Cited by examiner, † Cited by third party| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103236471A (en) * | 2013-04-28 | 2013-08-07 | 扬州乾照光电有限公司 | Wet-method chemical preparation method of Ce substrate for patterned solar cell |
| CN103233228A (en) * | 2013-05-15 | 2013-08-07 | 中锗科技有限公司 | Corrosion method for germanium substrate sheet of solar battery |
| CN107604445A (en) * | 2017-09-12 | 2018-01-19 | 中国电子科技集团公司第四十六研究所 | A kind of caustic solution for improving single germanium wafer mechanical strength |
| CN110600373A (en) * | 2019-07-31 | 2019-12-20 | 富芯微电子有限公司 | Chemical etching process for silicon wafer |
| CN112750698A (en) * | 2020-12-30 | 2021-05-04 | 中锗科技有限公司 | Corrosion method for reducing defects on back of germanium substrate wafer |
| CN115386962A (en) * | 2022-08-22 | 2022-11-25 | 中锗科技有限公司 | High-strength high-toughness ultrathin germanium single crystal wafer corrosion method |
-
2009
- 2009-10-20 CN CN200910233351A patent/CN101694013A/en active Pending
Cited By (8)
* Cited by examiner, † Cited by third party| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103236471A (en) * | 2013-04-28 | 2013-08-07 | 扬州乾照光电有限公司 | Wet-method chemical preparation method of Ce substrate for patterned solar cell |
| CN103236471B (en) * | 2013-04-28 | 2015-06-24 | 扬州乾照光电有限公司 | Wet-method chemical preparation method of Ce substrate for patterned solar cell |
| CN103233228A (en) * | 2013-05-15 | 2013-08-07 | 中锗科技有限公司 | Corrosion method for germanium substrate sheet of solar battery |
| CN107604445A (en) * | 2017-09-12 | 2018-01-19 | 中国电子科技集团公司第四十六研究所 | A kind of caustic solution for improving single germanium wafer mechanical strength |
| CN110600373A (en) * | 2019-07-31 | 2019-12-20 | 富芯微电子有限公司 | Chemical etching process for silicon wafer |
| CN112750698A (en) * | 2020-12-30 | 2021-05-04 | 中锗科技有限公司 | Corrosion method for reducing defects on back of germanium substrate wafer |
| CN115386962A (en) * | 2022-08-22 | 2022-11-25 | 中锗科技有限公司 | High-strength high-toughness ultrathin germanium single crystal wafer corrosion method |
| CN115386962B (en) * | 2022-08-22 | 2023-12-22 | 中锗科技有限公司 | High-strength high-toughness ultrathin germanium single-crystal corrosion method |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101694013A (en) | 2010-04-14 | Corrosion method for increasing strength of solar sige substrate sheets |
| CN102299207B (en) | 2013-04-03 | Method for manufacturing porous pyramid-type silicon surface light trapping structure for solar cell |
| CN102102227B (en) | 2012-08-29 | Preparation method of hydrophobic light trapping structure on silicon surface |
| CN103464415A (en) | 2013-12-25 | Solar monocrystalline silicon cleaning solution and cleaning method |
| CN104409396B (en) | 2017-08-25 | The wet etch process and device of a kind of solar battery sheet |
| CN102021657A (en) | 2011-04-20 | Corrosion process for heavily doped monocrystalline silicon wafers sequentially subjected to acid corrosion and alkaline corrosion |
| CN107523881A (en) | 2017-12-29 | A kind of preprocess method for preparing monocrystalline silicon suede |
| CN101590476A (en) | 2009-12-02 | A kind of cleaning method of monocrystalline silicon piece |
| CN106833954A (en) | 2017-06-13 | The additive of fine-hair maring using monocrystalline silicon slice prerinse liquid and its application |
| CN104766793B (en) | 2017-10-31 | A kind of acid tank back side silicon caustic solution |
| CN103233228A (en) | 2013-08-07 | Corrosion method for germanium substrate sheet of solar battery |
| CN102698989A (en) | 2012-10-03 | Method for precleaning silicon wafer |
| CN103590113B (en) | 2016-08-17 | Monocrystalline silicon dislocation corrosive agent and detection method |
| CN107611016A (en) | 2018-01-19 | A kind of cleaning method of solar power silicon sheet stock |
| CN103042009B (en) | 2015-08-05 | A kind of polycrystalline silicon material produces the cleaning method of reduction furnace electrode protective cover |
| CN101875048A (en) | 2010-11-03 | Method for removing impurities on surface of silicon chip |
| CN103681239A (en) | 2014-03-26 | Method for cleaning surface of monocrystalline silicon wafer |
| CN109427930A (en) | 2019-03-05 | A method of flannelette is selectively prepared on crystal silicon chip surface |
| CN105655248A (en) | 2016-06-08 | Alkali corrosion processing method for photoetching alignment mark of non-polished monocrystal-silicon-based device |
| WO2012001874A1 (en) | 2012-01-05 | Method for cleaning semiconductor wafer for solar cell substrate |
| CN104028503B (en) | 2016-06-29 | The cleaning method of silicon material |
| CN108372182A (en) | 2018-08-07 | A kind of recovery and treatment method of waste and old crystal-silicon battery slice |
| CN101701360A (en) | 2010-05-05 | Dislocation etching solution and etching method of (100) germanium monocrystal |
| CN204885104U (en) | 2015-12-16 | Diode corrodes cleaning machine |
| CN103740513A (en) | 2014-04-23 | Plastic mold high temperature hardening plastic residual film electrolysis ultrasonic combined detergent |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 2010-04-14 | C06 | Publication | |
| 2010-04-14 | PB01 | Publication | |
| 2010-05-26 | C10 | Entry into substantive examination | |
| 2010-05-26 | SE01 | Entry into force of request for substantive examination | |
| 2012-06-20 | C12 | Rejection of a patent application after its publication | |
| 2012-06-20 | RJ01 | Rejection of invention patent application after publication |
Open date: 20100414 |