CN102109331A - Laser flatness detector - Google Patents

本发明为一种激光平面度检测仪由激光器、五棱镜、转台、激光器、四维工作台、PSD位置传感器、计算机数据采集单元、数据处理单元、基座及平面反射镜组成。激光器发出的光经转台中心经五棱镜反射后水平射出。五棱镜随转台转动，经五棱镜水平射出的激光也随之水平转动，此水平的激光光束转动形成了基准平面。在被测平面上放置PSD位置传感器便可测量出被测点相对于激光光束基准平面的高度差，经数据处理后便可得出被检面平面度误差。

The invention relates to a laser flatness detector, which is composed of a laser, a pentaprism, a turntable, a laser, a four-dimensional workbench, a PSD position sensor, a computer data acquisition unit, a data processing unit, a base and a plane reflector. The light emitted by the laser passes through the center of the turntable and is reflected by the pentaprism before being emitted horizontally. The pentaprism rotates with the turntable, and the laser beam emitted horizontally through the pentaprism also rotates horizontally, and the horizontal laser beam rotation forms a reference plane. Placing the PSD position sensor on the measured plane can measure the height difference of the measured point relative to the laser beam reference plane, and the flatness error of the tested surface can be obtained after data processing.

Laser plane degree detector

Technical field

The present invention relates to a kind of flatness and survey detector, particularly a kind of detection large-scale discontinuous plane flatness.

Background technology

Heavy parts flatness detection method has electrolevel-stride bridge method, three-point support method (being mainly used in the annular plane) and three-dimensional coordinates measurement method.Preceding two kinds of methods all can only detect continuous level, can not be used for discontinuous plane (with holes, have that there is boss groove, centre, middle is interrupted, special-shaped level) and detect.The three-dimensional coordinates measurement method is the best approach of the non-continuous level measurement of planeness, and in present main equipment, its large-scale workpiece size head and shoulders above the measurement range of three-dimensional.Therefore carried out the method measuring flatness research on big plane, annulus and discontinuous plane, and to have developed a kind of novel measurement mechanism be laser plane degree instrument.This instrument can solve big plane, annulus and a discontinuous plane measurement of planeness difficult problem.

Summary of the invention

The objective of the invention is in the existing development process main equipment, the large-scale workpiece flatness is detected, a kind of industrial detector that discontinuous plane (with holes, have that there is boss groove, centre, middlely is interrupted, special-shaped level) and large-scale workpiece flatness are detected of being used for that is suitable for is provided.

In order to reach described purpose, the technical scheme that the technical solution problem of laser plane degree detector provided by the invention is adopted is made up of pentaprism, turntable, laser instrument, four-dimensional worktable, PSD position transducer, data acquisition unit, data processing unit, pedestal and plane mirror; Plane mirror is placed in centre position in base bottom, place four-dimensional worktable in the position of base bottom and sidepiece, laser instrument is fixed on the four-dimensional worktable, turntable has a center pit, pentaprism is placed on the workplace at turntable central hole location place, and the incident light with pentaprism is vertical all the time for the reference plane that the pentaprism emergent light is rotated into turntable; The laser beam that laser instrument sends passes turntable vertically upward, and level penetrates behind pentaprism; The laser beam of laser instrument overlaps with the rotating shaft of turntable; Horizontal emitting laser light beam is vertical with the rotating shaft of turntable with the rotation formation horizontal reference plane of turntable; Pedestal is placed on the central authorities of measured workpiece, and the measured point that the PSD position transducer is placed on measured workpiece is located, and laser beam is rotated on the target surface of PSD position transducer; The PSD position transducer is measured the difference in height of the reference plane that measured piece measured point place and pentaprism be rotated into, and through data acquisition unit, data processing unit difference in height is carried out the flatness that data processing draws measured workpiece.

The present invention compared with prior art has following advantage:

The present invention detects the large-scale workpiece flatness, and the plane of its detection is continuous level not necessarily.Laser plane degree detector characteristics of the present invention are that the size of detection workpiece is big, can detect discontinuous plane.Under the prerequisite that guarantees measuring accuracy, effectively improve sensing range and detection speed.

1. detector of the present invention, its scope that detects workpiece is bigger;

2. detector of the present invention can detect the flatness on discontinuous plane.

Description of drawings

Fig. 1 is a laser plane degree detector structural representation;

Fig. 2 is the position measurement schematic diagram of PSD position transducer.

Parts shown in the figure and mark mark:

1 is measured workpiece, and 2 is pentaprism,

3 is turntable, and 4 is laser instrument,

5 is the four-dimensional platform of adjusting, and 6 is the PSD position transducer,

7 is data acquisition unit, and 8 is data processing unit,

9 is pedestal, and 10 is plane mirror.

Embodiment

For making the purpose, technical solutions and advantages of the present invention clearer, below in conjunction with specific embodiment, and with reference to accompanying drawing, the present invention is described in more detail.

As shown in Figure 1, the embodiment of laser plane degree detector is:

Principle of the present invention is: pentaprism 2 is fixed on the workplace of the porose turntable in center 3, uses four-dimensional worktable 5 that laser beam is adjusted to the rotating shaft of turntable 3 and overlap, promptly the laser that goes out through pentaprism 2 is vertical with the rotating shaft of turntable 3.According to the vertical principle with emergent ray of incident ray of pentaprism 2, the emergent light of pentaprism 2 is vertical with the rotating shaft of turntable 3 with the reference plane that turntable 3 rotations form.

During measurement, earlier laser plane degree detector is placed on by the central authorities of measured workpiece 1, adjusts the laser plane detector, make its reference plane and tested plane parallel.Utilization PSD position transducer detects the tested each point of measured workpiece 1 and the difference in height of reference plane, just can draw by the flatness of measured workpiece 1 after data processing.

According in the vertical plane of pentaprism 2, the incident light of pentaprism 2 and vertical all the time this principle of emergent light, when testing, the laser that incides pentaprism 2 is fixed, the emergent light of pentaprism 2 is with rotate rotating shaft reference plane of shape face in surface level of platform 3 of the rotation of turntable 3, and this reference plane is vertical with the rotating shaft of turntable 3; During detection, laser plane degree detector is placed on the plane central authorities of measured workpiece 1, with PSD position transducer 6 (Pacific Silicon Sensor, DL100-7PCBA3) survey the plane of measured workpiece 1 and the difference in height of the reference plane that laser forms, just can detect the flatness on the plane of measured workpiece 1;

Data acquisition unit 7 (being ZTIC, USB7333, the data acquisition unit of USB interface) links with USB interface and data processing unit 8 (computing machine), links with parallel port data line and PSD position transducer 6 again; The difference in height information that PSD position transducer 6 is surveyed is sent to data processing unit 8, and after having detected, data processing unit 8 utilization frequency analysis data processing methods are analyzed and handled, and will obtain the flatness on measured workpiece 1 plane.

Be illustrated in figure 2 as the position measurement principle of PSD position transducer 6:

X = k × I 3 - I 4 I 3 + I 4

Y = k × I 1 - I 2 I 1 + I 2

X, Y are for being that the laser that the laser instrument 4 of initial point sends is beaten in the position of PSD position transducer 6 I with PSD position transducer 6 centers ₁, I ₂, I ₃, I ₄Be the output current after PSD position transducer 6 photosurfaces are subjected to rayed, K is a scale-up factor.

The above; only be the embodiment among the present invention, but protection scope of the present invention is not limited thereto, anyly is familiar with the people of this technology in the disclosed technical scope of the present invention; can understand conversion or the replacement expected, all should be encompassed within the protection domain of claims of the present invention.