CN102789089A - Liquid crystal display substrate, manufacturing method thereof, liquid crystal panel and display device - Google Patents
- ️Wed Nov 21 2012
Info
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Publication number
- CN102789089A CN102789089A CN201210285371XA CN201210285371A CN102789089A CN 102789089 A CN102789089 A CN 102789089A CN 201210285371X A CN201210285371X A CN 201210285371XA CN 201210285371 A CN201210285371 A CN 201210285371A CN 102789089 A CN102789089 A CN 102789089A Authority
- CN
- China Prior art keywords
- groove
- liquid crystal
- display unit
- crystal display
- substrate Prior art date
- 2012-08-10 Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 142
- 239000004973 liquid crystal related substance Substances 0.000 title claims abstract description 102
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 239000011521 glass Substances 0.000 claims description 33
- 239000011159 matrix material Substances 0.000 claims description 27
- 239000012528 membrane Substances 0.000 claims description 27
- 238000000034 method Methods 0.000 claims description 25
- 238000005530 etching Methods 0.000 claims description 22
- 229920002120 photoresistant polymer Polymers 0.000 claims description 16
- 239000003795 chemical substances by application Substances 0.000 claims description 9
- 230000015572 biosynthetic process Effects 0.000 claims description 8
- 238000005286 illumination Methods 0.000 claims description 5
- DDFHBQSCUXNBSA-UHFFFAOYSA-N 5-(5-carboxythiophen-2-yl)thiophene-2-carboxylic acid Chemical compound S1C(C(=O)O)=CC=C1C1=CC=C(C(O)=O)S1 DDFHBQSCUXNBSA-UHFFFAOYSA-N 0.000 claims description 4
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 claims description 4
- 238000009413 insulation Methods 0.000 claims description 4
- 239000012212 insulator Substances 0.000 claims description 4
- 229910017604 nitric acid Inorganic materials 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 4
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 10
- 238000005516 engineering process Methods 0.000 description 4
- 239000010408 film Substances 0.000 description 4
- 238000002360 preparation method Methods 0.000 description 4
- 239000010409 thin film Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000007641 inkjet printing Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
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- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Liquid Crystal (AREA)
Abstract
The embodiment of the invention provides a liquid crystal display substrate and relates to the technical field of the liquid crystal display. According to the invention, the surface of the liquid crystal display substrate can achieve higher flat degree. The liquid crystal display substrate comprises a substrate and display parts, wherein a groove is arranged on the substrate; the display parts are formed in the groove; upper surfaces of the display parts formed at the top end in the groove are horizontal or in the same horizontal plane; when a single display part is formed at the top end in the groove, the upper surface of the single display part is horizontal; and when a plurality of display parts are formed at the top end in the groove, the upper surfaces of the display parts are in the same horizontal plane. The embodiment of the invention also provides a manufacturing method of the liquid crystal display substrate, a corresponding liquid crystal panel and a display device.
Description
Technical field
The present invention relates to technical field of liquid crystal display, relate in particular to liquid crystal display substrate and preparation method thereof, liquid crystal panel and display device.
Background technology
Thin Film Transistor-LCD (Thin Film Transistor-Liquid Crystal Display; Be called for short TFT-LCD) in liquid crystal panel by array base palte and color membrane substrates to box, and between to array base palte behind the box and color membrane substrates injection liquid crystal and forming.
Array base palte in the liquid crystal panel is through range upon range of being deposited on the glass substrate of various thin layers formed.But the diverse location place thickness that is deposited on the glass substrate owing to thin layer differs greatly, thereby, cause the degree of planarization on array base palte surface not high, and then influence the display quality of liquid crystal panel.Color membrane substrates is to form through the black matrix of formation on glass substrate, rgb pixels, and after forming black matrix, rgb pixels, make flattening surface through on them, increasing one deck planarization layer, but the degree of planarization of this mode is unsatisfactory.
Summary of the invention
Embodiments of the invention provide a kind of liquid crystal display substrate and preparation method thereof, liquid crystal panel and display device, can make the surface of liquid crystal display substrate reach very high degree of planarization, and then improve the display quality of liquid crystal display substrate.
For achieving the above object, embodiments of the invention adopt following technical scheme:
On the one hand, a kind of liquid crystal display substrate is provided, comprises substrate and display unit; Said substrate is provided with groove; Be formed with display unit in the said groove, and be formed on the top in the said groove display unit upper surfaces level or on same surface level, wherein; When the display unit of the top in being formed on said groove is single display unit; The upper surfaces level of said single display unit, when the display unit of the top in being formed on said groove was a plurality of display unit, the upper surface of said a plurality of display units was on same surface level.
Alternatively, upper surface and the surface that said liquid crystal display substrate is provided with groove one side of display unit that is formed on the top in the said groove is on same surface level.
In one embodiment, said liquid crystal display substrate is an array base palte, and said display unit comprises thin layer.
In another embodiment, said liquid crystal display substrate is a color membrane substrates, and said display unit comprises black matrix and pixel cell, and the upper surface of the upper surface of said black matrix and said pixel cell is on same surface level.
Further, the upper surface of the upper surface of said black matrix, said pixel cell and said liquid crystal display substrate be provided with groove one side the surface all on same surface level.
Alternatively; The plane at the upper surface of said black matrix and the upper surface of said pixel cell place is higher than the surface that said liquid crystal display substrate is provided with groove one side, and the surface that the lower surface of said black matrix and said liquid crystal display substrate are provided with groove one side is on same surface level.
On the other hand, a kind of liquid crystal panel is provided, said liquid crystal panel comprises liquid crystal display substrate recited above.
On the other hand, a kind of display device is provided, said display device comprises liquid crystal panel recited above.
On the other hand, a kind of method for making of liquid crystal display substrate is provided, said method can comprise:
Formation has the glass substrate of groove;
In said groove, form display unit, to form liquid crystal display substrate;
Wherein, the upper surface of display unit that is formed on the top in the said groove is on same surface level;
When the display unit of the top in being formed on said groove is single display unit, the upper surfaces level of said single display unit;
When the display unit of the top in being formed on said groove was a plurality of display unit, the upper surface of said a plurality of display units was on same surface level.
Wherein, the glass substrate of said formation with groove can comprise:
See through patterned mask plate, the white glass substrate that is coated with photoresist is carried out illumination;
With etching agent the said white glass plate that is coated with photoresist is handled,, formed groove to etch away photoresist and the glass below it that is not hidden by said mask plate;
Peel off photoresist on the said white glass substrate has the groove of one patterned with formation glass substrate.
Wherein, said etching agent is a hydrofluorite, hydrofluorite adds ammonium fluoride or hydrofluorite adds nitric acid.
Wherein, the degree of depth of said groove is controlled through changing mask plate thickness and etching time.
In one embodiment, saidly in said groove, form display unit, can comprise to form liquid crystal display substrate:
In said groove, form grid layer, gate insulator, semiconductor layer, source-drain electrode layer, insulation course and indium tin oxide layer, to form array base palte.
In another embodiment, saidly in said groove, form display unit, can comprise to form liquid crystal display substrate:
In said groove, form black matrix and pixel cell, to form color membrane substrates.
After adopting technique scheme; The liquid crystal display substrate that the embodiment of the invention provides and the method for making of liquid crystal display substrate, liquid crystal panel and display device; Groove is set on liquid crystal display substrate, is formed with display unit in the said groove, and be formed on the top in the said groove display unit upper surfaces level or on same surface level; Thereby; Can make the surface of liquid crystal display substrate reach very high degree of planarization, and then significantly improve the quality of liquid crystal panel, improve yields simultaneously.
Description of drawings
In order to be illustrated more clearly in the embodiment of the invention or technical scheme of the prior art; To do to introduce simply to the accompanying drawing of required use in embodiment or the description of the Prior Art below; Obviously, the accompanying drawing in describing below only is some embodiments of the present invention, for those of ordinary skills; Under the prerequisite of not paying creative work, can also obtain other accompanying drawing according to these accompanying drawings.
The synoptic diagram of the liquid crystal display substrate that Fig. 1 provides for the embodiment of the invention;
The synoptic diagram of the array base palte that Fig. 2 provides for the embodiment of the invention;
The synoptic diagram of a kind of color membrane substrates that Fig. 3 provides for the embodiment of the invention;
The synoptic diagram of the another kind of color membrane substrates that Fig. 4 provides for the embodiment of the invention;
The process flow diagram of the method for making of the liquid crystal display substrate that Fig. 5 provides for the embodiment of the invention.
Embodiment
To combine the accompanying drawing in the embodiment of the invention below, the technical scheme of the embodiment of the invention is carried out clear, intactly description, obviously, described embodiment only is a part of embodiment of the present invention, rather than whole embodiment.Based on the embodiment among the present invention, all other embodiment that those of ordinary skills are obtained under the prerequisite of not making creative work belong to the scope that the present invention protects.
The synoptic diagram of the liquid crystal display substrate that Fig. 1 provides for the embodiment of the invention.With reference to Fig. 1, the embodiment of the invention provides a kind of liquid crystal display substrate, and said liquid crystal display substrate comprises
substrate10 and display unit (not shown), and said substrate can be
glass substrate.Substrate10 is provided with groove 11 (shown in dash area among the figure), and the degree of depth of
groove11 can be controlled through changing mask plate thickness and etching time.Can be formed with various display unit (not shown)s in the
groove11 of said
substrate10, and be formed on the top in the said groove display unit upper surfaces level or on same surface level.Wherein, When the display unit of the top in being formed on said groove is single display unit; The upper surfaces level of said single display unit; When the display unit of the top in being formed on said groove was a plurality of display unit, the upper surface of said a plurality of display units was on same surface level.Alternatively, be formed on surface that the upper surface of the display unit of the top in the said groove can be provided with groove one side with said liquid crystal display substrate on same surface level.
In embodiments of the present invention, said liquid crystal display substrate can be array base palte, can certainly be color membrane substrates.
The particular content that said display unit comprised depends on the particular type of liquid crystal display substrate, promptly is array base palte or color membrane substrates.When said liquid crystal display substrate was array base palte, said display unit can comprise each layer metal, the nonmetal film that is formed in the
groove11; When said liquid crystal display substrate was color membrane substrates, said display unit can comprise the black matrix that is formed in the
groove11, pixel cell etc., and said pixel cell specifically can be red pixel cell, green pixel unit, blue pixel cell.
The liquid crystal display substrate that the embodiment of the invention provides comprises substrate and display unit, is provided with groove above the said substrate; Be formed with display unit in the said groove; And be formed on the top in the said groove display unit upper surfaces level or on same surface level, thereby, can make the surface of liquid crystal display substrate reach very high degree of planarization; And then significantly improve the quality of liquid crystal panel, improve yields simultaneously.
Be pointed out that the liquid crystal display substrate shown in Fig. 1 can be array base palte, also can be color membrane substrates.Explain respectively to both of these case below.
The synoptic diagram of the array base palte that Fig. 2 provides for the embodiment of the invention.With reference to Fig. 2; Array base palte shown in Fig. 2 comprises
substrate20 and display unit;
Substrate20 is provided with
groove28, and said display unit is formed in the
groove28, and be formed on the top in the said groove display unit upper surfaces level or on same surface level.Wherein, said display unit can comprise each layer film that is formed in the said groove 11.Particularly, as shown in Figure 2, said each layer film can be
grid layer21,
gate insulator22,
semiconductor layer23, source-
drain electrode layer24,
insulation course25 and
planarization layer26, and these layers can be formed in the
groove11 through mask etching technology.In Fig. 2, preferably, upper surface and the
surface29 that said liquid
crystal display substrate20 is provided with
groove28 1 sides of display unit (can be
planarization layer26 among Fig. 2) that is formed on the top in the said
groove28 is on same surface level.
Being pointed out that, in embodiments of the present invention, is single thin layer if be formed on the display unit of the top in the said groove, then only needs to guarantee that the upper surface of this thin layer is smooth; But if be formed on the display unit of the top in the said groove various thin layer is arranged, all on same surface level, promptly said various thin layer has public surface level to the upper surface that then need guarantee said various thin layer.
The array base palte that present embodiment provides can form each layer film successively through mask etching technology in
groove28; And can control the degree of depth of
groove28 through changing mask plate thickness and etching time; The upper surface of the final display unit that keeps being formed on the top in the
groove28 and the
surface29 of liquid
crystal display substrate20 are on same surface level; Can make array base palte reach very high degree of planarization, thereby significantly improve the quality of liquid crystal panel, improve yields simultaneously.
When liquid crystal display substrate is color membrane substrates, particularly, can comprise following two kinds of situations.Explain respectively below in conjunction with Fig. 3 and Fig. 4.
The synoptic diagram of a kind of color membrane substrates that Fig. 3 provides for the embodiment of the invention.With reference to Fig. 3; Color membrane substrates shown in Fig. 3 comprises
substrate30 and display unit;
Substrate30 is provided with groove; Said display unit is formed in this groove, and said display unit can comprise
red pixel31,
green pixel32,
blue pixel33 and
black matrix34, and cylindrical spacer (not shown among Fig. 3) can be set on the said black matrix 34.In Fig. 3, the upper surface of the upper surface of said
black matrix34 and said
red pixel31,
green pixel32,
blue pixel33 is on same surface level.Simultaneously for obtaining better planarization effect; The upper surface of said
black matrix34, the upper surface of each pixel cell and said liquid
crystal display substrate30 are provided with the surface (being the
surface35 of color membrane substrates among Fig. 3) of groove one side all on same surface level; That is, the
upper surface35 of the upper surface of the upper surface of said
black matrix34, said
red pixel31,
green pixel32,
blue pixel33 and
color membrane substrates30 is all on same surface level.
The synoptic diagram of the another kind of color membrane substrates that Fig. 4 provides for the embodiment of the invention.With reference to Fig. 4; The upper surface of the upper surface of said
black matrix34 and said
red pixel31,
green pixel32,
blue pixel33 is on same surface level; Simultaneously in Fig. 4; The upper surface of the upper surface of said
black matrix34, said
red pixel31,
green pixel32,
blue pixel33 all is higher than the
upper surface35 of said
color membrane substrates30, and the
upper surface35 of the lower surface of said
black matrix34 and said
color membrane substrates30 is on same surface level.
The color membrane substrates that the embodiment of the invention provides is through being embedded in inside grooves with
red pixel31,
green pixel32,
blue pixel33 and
black matrix34; And the upper surface of upper surface and said
red pixel31,
green pixel32,
blue pixel33 that keeps said
black matrix34 is on same surface level; Can make the color membrane substrates surface reach very high degree of planarization, and then improve the display quality of liquid crystal panel.
Correspondingly, the embodiment of the invention also provides a kind of method for making of liquid crystal display substrate, uses this method and can make the liquid crystal display substrate described in the preceding text.The process flow diagram of the method for making of the liquid crystal display substrate that Fig. 5 provides for the embodiment of the invention.As shown in Figure 5, said method can comprise:
51, form the glass substrate with groove, wherein, said groove can be the groove of one patterned;
52, in said groove, form display unit; To form liquid crystal display substrate; Wherein, Be formed on the top in the said groove display unit upper surfaces level or on same surface level, and the display unit of the top in being formed on said groove is when being single display unit, the upper surfaces level of said single display unit; When the display unit of the top in being formed on said groove was a plurality of display unit, the upper surface of said a plurality of display units was on same surface level.
The method for making of the liquid crystal display substrate that the embodiment of the invention provides; Groove is set on liquid crystal display substrate, is formed with display unit in the said groove, and be formed on the top in the said groove display unit upper surfaces level or on same surface level; Thereby; Can make the surface of liquid crystal display substrate reach very high degree of planarization, and then significantly improve the quality of liquid crystal panel, improve yields simultaneously.
Wherein, forming the glass substrate with groove described in 51 can comprise:
See through patterned mask plate, the white glass substrate that is coated with photoresist is carried out illumination;
With etching agent the said white glass substrate that is coated with photoresist is handled; To etch away photoresist and the glass below it that is not hidden by said mask plate; Form the groove of one patterned, wherein, said etching agent can add ammonium fluoride or hydrofluorite adds nitric acid etc. for hydrofluorite, hydrofluorite;
Peel off photoresist on the said white glass substrate has groove with formation glass substrate.
In above-mentioned technology, the degree of depth of said groove can be controlled through changing mask plate thickness and etching time.
The method of above-mentioned making glass substrate is described with object lesson below.
The method for making of the liquid crystal display substrate that present embodiment provides comprises: on the glass substrate that is covered in dry cleansing that photoresist is smooth, confirm the pattern of required etching, on photoresist, cover the patterned mask plate of one deck then again, carry out illumination.After the illumination, use etching agent (for example, hydrofluorite) to carry out etching again; Behind certain hour (for example, tens seconds to dozens of minutes), the photoresist and the glass below it that are not hidden by mask plate can be etched; And can not be etched away by photoresist and the glass below it that mask plate hides; Accomplish etching process like this, the mask material on it is peeled off promptly processed required glass again, the thickness difference of etching can be regulated through mask plate variation in thickness and etching time.Said etching agent can be hydrofluorite, and hydrofluorite adds ammonium fluoride, and hydrofluorite adds a kind of in the nitric acid, and the concentration of the etching agent that speed of etching receives to be adopted determines.
After adopting said method, promptly can be made into glass substrate with certain position and depth recess.Can adopt existing mask process or ink-jetting style to form color membrane substrates or array base palte afterwards.
Particularly, when needs were made array base palte, said display unit can comprise various thin layers, in said groove, forms display unit described in 52, can comprise to form liquid crystal display substrate:
In said groove, form grid layer, gate insulator, semiconductor layer, source-drain electrode layer, insulation course and indium tin oxide layer, to form array base palte.
And when needs were made color membrane substrates, said display unit can comprise deceived matrix and pixel cell, in said groove, formed display unit described in 52, can comprise to form liquid crystal display substrate:
In said groove, form black matrix and pixel cell, to form color membrane substrates.
Wherein, said pixel cell comprises red pixel cell, green pixel unit and blue pixel cell.
In addition, the embodiment of the invention also provides a kind of liquid crystal panel, and said liquid crystal panel can comprise the liquid crystal display substrate among the top said liquid crystal display substrate embodiment.
Simultaneously, the embodiment of the invention also provides a kind of display device, and said display device can comprise above-mentioned liquid crystal panel.
The display device that the embodiment of the invention provides, said display device can have the product or the parts of Presentation Function for LCD, LCD TV, DPF, mobile phone, panel computer etc., and the present invention does not limit.
Liquid crystal display substrate that the embodiment of the invention provides and preparation method thereof, liquid crystal panel and display device; The glass substrate that has groove through employing; Make the various display units on array base palte or the color membrane substrates all be formed on said glass substrate inside; And be formed on the top in the said groove display unit upper surfaces level or on same surface level; Can make the surface of liquid crystal display substrate reach very high degree of planarization, thereby significantly improve the quality of liquid crystal panel, improve yields simultaneously.
The above; Be merely embodiment of the present invention, but protection scope of the present invention is not limited thereto, any technician who is familiar with the present technique field is in the technical scope that the present invention discloses; Can expect easily changing or replacement, all should be encompassed within protection scope of the present invention.Therefore, protection scope of the present invention should be as the criterion with the protection domain of claim.
Claims (14)
1. a liquid crystal display substrate comprises substrate and display unit, it is characterized in that; Said substrate is provided with groove, is formed with display unit in the said groove, and be formed on the top in the said groove display unit upper surfaces level or on same surface level; Wherein
When the display unit of the top in being formed on said groove is single display unit, the upper surfaces level of said single display unit,
When the display unit of the top in being formed on said groove was a plurality of display unit, the upper surface of said a plurality of display units was on same surface level.
2. liquid crystal display substrate according to claim 1 is characterized in that, upper surface and the surface that said liquid crystal display substrate is provided with groove one side of display unit that is formed on the top in the said groove is on same surface level.
3. liquid crystal display substrate according to claim 1 and 2 is characterized in that, said liquid crystal display substrate is an array base palte, and said display unit comprises thin layer.
4. liquid crystal display substrate according to claim 1; It is characterized in that; Said liquid crystal display substrate is a color membrane substrates, and said display unit comprises black matrix and pixel cell, and the upper surface of the upper surface of said black matrix and said pixel cell is on same surface level.
5. liquid crystal display substrate according to claim 4 is characterized in that, the upper surface of said black matrix, the upper surface of said pixel cell and said liquid crystal display substrate are provided with the surface of groove one side all on same surface level.
6. liquid crystal display substrate according to claim 4; It is characterized in that; The plane at the upper surface of said black matrix and the upper surface of said pixel cell place is higher than the surface that said liquid crystal display substrate is provided with groove one side, and the surface that the lower surface of said black matrix and said liquid crystal display substrate are provided with groove one side is on same surface level.
7. a liquid crystal panel is characterized in that, comprises according to each described liquid crystal display substrate in the claim 1 to 6.
8. a display device is characterized in that, comprises liquid crystal panel according to claim 7.
9. the method for making of a liquid crystal display substrate is characterized in that, said method comprises:
Formation has the glass substrate of groove;
In said groove, form display unit, to form liquid crystal display substrate;
Wherein, be formed on the top in the said groove display unit upper surfaces level or on same surface level;
When the display unit of the top in being formed on said groove is single display unit, the upper surfaces level of said single display unit;
When the display unit of the top in being formed on said groove was a plurality of display unit, the upper surface of said a plurality of display units was on same surface level.
10. method according to claim 9 is characterized in that, the glass substrate that said formation has groove comprises:
See through patterned mask plate, the white glass substrate that is coated with photoresist is carried out illumination;
With etching agent the said white glass plate that is coated with photoresist is handled,, formed groove to etch away photoresist and the glass below it that is not hidden by said mask plate;
Peel off photoresist on the said white glass substrate has groove with formation glass substrate.
11. method according to claim 10 is characterized in that, said etching agent is a hydrofluorite, hydrofluorite adds ammonium fluoride or hydrofluorite adds nitric acid.
12. method according to claim 11 is characterized in that, the degree of depth of said groove is controlled through changing mask plate thickness and etching time.
13., it is characterized in that according to each described method among the claim 9-12, saidly in said groove, form display unit, comprise to form liquid crystal display substrate:
In said groove, form grid layer, gate insulator, semiconductor layer, source-drain electrode layer, insulation course and indium tin oxide layer, to form array base palte.
14., it is characterized in that according to each described method among the claim 9-12, saidly in said groove, form display unit, comprise to form liquid crystal display substrate:
In said groove, form black matrix and pixel cell, to form color membrane substrates.
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WO2016074353A1 (en) * | 2014-11-13 | 2016-05-19 | 深圳市华星光电技术有限公司 | Boa-type liquid crystal panel and manufacturing method therefor |
CN105974642A (en) * | 2016-06-27 | 2016-09-28 | 京东方科技集团股份有限公司 | Color filter substrate, preparation method thereof and display panel |
WO2017016203A1 (en) * | 2015-07-30 | 2017-02-02 | 京东方科技集团股份有限公司 | Substrate, color optical filter module, method for forming substrate module, and display device |
CN107966844A (en) * | 2017-11-22 | 2018-04-27 | 深圳市华星光电半导体显示技术有限公司 | The preparation method of color membrane substrates, display panel and color membrane substrates |
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