CN103671012B - Adopt opposed type moving-coil linear compressor and the manufacture method of long loop axial charging - Google Patents

本发明公开了一种采用长线圈轴向充磁的对置式动圈直线压缩机及制造方法，整体结构采用对置式以抵消左右两部分的机械振动；左部及右部除共用机座外，均由各自的气缸衬套、永磁体、上轭铁、下轭铁、载流线圈、线圈骨架、活塞、上板弹簧组、下板弹簧组、上压片结构、下压片结构、上支撑结构、下支撑结构、位移传感器铁芯、位移传感器线圈、位移传感器支撑、机壳组成；永磁体轴向充磁，载流线圈采用长线圈；左部及右部的上轭铁、活塞以及载流线圈需满足各自载流线圈的轴向高度大于各自上轭铁的轴向厚度与各自活塞的最大行程之和。本发明结构紧凑、振动低、电机效率高、预期寿命长，对高可靠、长寿命、高效率直线压缩机的发展具有重要意义。

The invention discloses an opposed moving coil linear compressor adopting axial magnetization of a long coil and a manufacturing method thereof. The overall structure adopts an opposed type to offset the mechanical vibration of the left and right parts; the left and right parts share a machine base, Each consists of a cylinder liner, a permanent magnet, an upper yoke, a lower yoke, a current-carrying coil, a coil frame, a piston, an upper plate spring set, a lower plate spring set, an upper pressing structure, a lower pressing structure, and an upper support structure, lower support structure, displacement sensor core, displacement sensor coil, displacement sensor support, and casing; the permanent magnet is axially magnetized, and the current-carrying coil adopts a long coil; the upper yoke, piston and load-carrying The current coils need to satisfy that the axial height of each current-carrying coil is greater than the sum of the axial thickness of each upper yoke and the maximum stroke of each piston. The invention has the advantages of compact structure, low vibration, high motor efficiency and long expected life, and is of great significance to the development of high reliability, long life and high efficiency linear compressors.

采用长线圈轴向充磁的对置式动圈直线压缩机及制造方法Opposite moving coil linear compressor adopting axial magnetization of long coil and manufacturing method

技术领域technical field

本发明涉及直线压缩机，特别涉及一种采用长线圈轴向充磁的对置式动圈直线压缩机及其制造方法。The invention relates to a linear compressor, in particular to an opposed moving coil linear compressor adopting axial magnetization of a long coil and a manufacturing method thereof.

背景技术Background technique

直线压缩机是往复式活塞压缩机的一种。传统的往复式活塞压缩机大多属于旋转压缩机，即采用旋转电机驱动、通过曲柄连杆机构等的机械传动来实现往复运动。旋转压缩机的技术较为成熟，但其能量传递环节多、振动和噪声大、整机控制复杂、能量转化效率偏低，特别是因结构特点而对活塞施加的侧向力，是产生无用功和机械磨损的主要来源之一，因而大大限制了其工作寿命。直线压缩机利用直线电机驱动活塞在气缸中作往复直线运动，理论上完全消除了对活塞的径向作用力，因而消除了活塞和气缸壁之间的机械磨损以及由此产生的无用功，工作寿命和能量转化效率都大大提高，故而在需要长寿命和高效率工作的航空、航天、军事等特殊领域有着非常重要的应用。Linear compressors are a type of reciprocating piston compressors. Most of the traditional reciprocating piston compressors are rotary compressors, which are driven by a rotary motor and achieve reciprocating motion through mechanical transmission such as a crank connecting rod mechanism. The technology of the rotary compressor is relatively mature, but its energy transmission links are many, the vibration and noise are large, the control of the whole machine is complicated, and the energy conversion efficiency is low. One of the main sources of wear, thus greatly limiting its working life. The linear compressor uses a linear motor to drive the piston to make a reciprocating linear motion in the cylinder, which theoretically completely eliminates the radial force on the piston, thus eliminating the mechanical wear between the piston and the cylinder wall and the resulting useless work. Both energy and energy conversion efficiency are greatly improved, so it has very important applications in special fields such as aviation, aerospace, and military that require long life and high-efficiency work.

直线压缩机的核心部件是直线电机。直线电机根据其中的运动部件主要分为三类：动铁式、动圈式和动磁式。动铁式直线电机不使用永磁体，因而价格较低廉，但是性能相对不稳定，控制较困难，其应用逐渐减少；动圈式和动磁式直线电机都包括三类核心部件：永磁体、轭铁和载流线圈，根据运动时是载流线圈还是永磁体运动而区分为动圈式和动磁式。其中，动圈式直线压缩机因其结构上的特点实现了径向力的完全消除，而且在开路时在载流线圈上不产生轴向力和扭矩，因而具有高效率、低噪声和高可靠的突出优点，因而成为近30年来国际范围内空间回热式低温制冷机（如脉冲管制冷机和斯特林制冷机）的首选动力源。以美国为代表的西方发达国家为例，在近20年间发射升空的航天脉冲管制冷机和斯特林制冷机中，绝大多数都采用了动圈式直线压缩机。The core component of the linear compressor is the linear motor. Linear motors are mainly divided into three categories according to the moving parts: moving iron type, moving coil type and moving magnet type. The moving iron linear motor does not use permanent magnets, so the price is relatively low, but the performance is relatively unstable, the control is difficult, and its application is gradually reduced; both the moving coil and the moving magnet linear motor include three types of core components: permanent magnet, yoke Iron and current-carrying coils are divided into moving coil and moving magnet according to whether the current-carrying coil or the permanent magnet moves when moving. Among them, the moving coil linear compressor realizes the complete elimination of radial force due to its structural characteristics, and does not generate axial force and torque on the current-carrying coil when the circuit is open, so it has high efficiency, low noise and high reliability. Because of its outstanding advantages, it has become the preferred power source for space regenerative cryogenic refrigerators (such as pulse tube refrigerators and Stirling refrigerators) in the past 30 years. Taking the western developed countries represented by the United States as an example, most of the aerospace pulse tube refrigerators and Stirling refrigerators launched into space in the past 20 years have adopted moving coil linear compressors.

目前，国际上应用于航天领域需要保证长寿命、高可靠、高效率工作的动圈式直线压缩机主要采用牛津型和对置式结构形式。所谓牛津型，其得名源于英国牛津大学的两项关键技术——间隙密封和板弹簧支撑，这两项技术是无油润滑而能长寿命运转的关键保障；所谓对置式结构形式，是指在主体结构中采用两个完全对等的运动及支撑结构来相互抵消自身产生的机械振动，该项技术是实现直线压缩机低振动的可靠保障。At present, the moving coil linear compressors used in the aerospace field in the world that need to ensure long life, high reliability and high efficiency work mainly adopt Oxford type and opposed structure. The so-called Oxford type is named after two key technologies of Oxford University in the United Kingdom - gap seal and leaf spring support. These two technologies are the key guarantees for long-life operation without oil lubrication; the so-called opposed structure is It refers to the use of two completely equal movement and support structures in the main structure to offset the mechanical vibration generated by itself. This technology is a reliable guarantee for the low vibration of the linear compressor.

如前所述，动圈式直线电机包括三类核心部件：永磁体、轭铁和载流线圈。工作时载流线圈在永磁体和轭铁共同形成的气隙内，受磁场力的作用，成往复的直线运动。根据载流线圈的长短和永磁体的充磁方向，可以将动圈式直线电机分为四种，图1给出了这四种形式的示意图，其中（1）为长线圈轴向充磁形式，（2）为短线圈轴向充磁形式，（3）为长线圈径向充磁形式，（4）为短线圈径向充磁形式，其中63为永磁体，64为上轭铁，65为下轭铁，66为载流线圈，67为中心通孔。As mentioned earlier, a moving coil linear motor consists of three core components: permanent magnets, yokes, and current-carrying coils. When working, the current-carrying coil is in the air gap formed by the permanent magnet and the yoke iron, and is affected by the magnetic field force to move in a reciprocating linear motion. According to the length of the current-carrying coil and the magnetization direction of the permanent magnet, the moving coil linear motor can be divided into four types. Figure 1 shows the schematic diagrams of these four forms, where (1) is the long coil axial magnetization form , (2) is the form of short coil axial magnetization, (3) is the form of long coil radial magnetization, (4) is the form of short coil radial magnetization, of which 63 is the permanent magnet, 64 is the upper yoke, 65 For the lower yoke, 66 is a current-carrying coil, and 67 is a central through hole.

动圈式直线压缩机根据其采用的直线电机的种类，也被相应地分为四种形式，即：采用长线圈轴向充磁的动圈式直线压缩机、采用短线圈轴向充磁的动圈式直线压缩机、采用长线圈径向充磁的动圈式直线压缩机、采用短线圈径向充磁的动圈式直线压缩机。动圈式直线压缩机无论采用上述四种形式中的哪一种，如果要确保其能稳定工作，都必须遵循以下基本原则：（1）要么是在整个活塞行程中，始终保证稳定磁场处在载流线圈之内（对应于长线圈形式）；（2）要么是在整个活塞行程中，始终保证载流线圈处于稳定的磁场之内（对应于短线圈形式）。目前这四种形式的动圈式直线压缩机在国内的发展都刚刚起步。Moving coil linear compressors are also divided into four types according to the types of linear motors they use, namely: moving coil linear compressors using long coils for axial magnetization, and using short coils for axial magnetization Moving coil linear compressor, moving coil linear compressor using long coil radial magnetization, moving coil linear compressor using short coil radial magnetization. Regardless of which of the above four forms the moving coil linear compressor adopts, if it is to ensure that it can work stably, the following basic principles must be followed: (1) Either in the entire piston stroke, the stable magnetic field must always be at (corresponding to the long coil form); (2) either throughout the entire piston stroke, always ensure that the current-carrying coil is within a stable magnetic field (corresponding to the short coil form). At present, the development of these four types of moving coil linear compressors has just started in China.

发明内容Contents of the invention

本发明提出一种采用长线圈轴向充磁的对置式动圈直线压缩机及其制造方法。The invention proposes an opposed moving-coil linear compressor adopting axial magnetization of long coils and a manufacturing method thereof.

所发明的采用长线圈轴向充磁的对置式动圈直线压缩机由共用机座0、左部气缸衬套1、左部永磁体2、左部上轭铁3、左部下轭铁4、左部载流线圈5、左部线圈骨架6、左部活塞7、左部上板弹簧组8、左部下板弹簧组9、左部上压片结构10、左部下压片结构11、左部上支撑结构12、左部下支撑结构13、左部位移传感器铁芯14、左部位移传感器线圈15、左部位移传感器支撑16、左部机壳17以及右部气缸衬套1′、右部永磁体2′、右部上轭铁3′、右部下轭铁4′、右部载流线圈5′、右部线圈骨架6′、右部活塞7′、右部上板弹簧组8′、右部下板弹簧组9′、右部上压片结构10′、右部下压片结构11′、右部上支撑结构12′、右部下支撑结构13′、右部位移传感器铁芯14′、右部位移传感器线圈15′、右部位移传感器支撑16′、右部机壳17′共同组成，其特征在于，整体结构采用对置式以抵消左右两部分产生的机械振动，即以垂直中心线40为对称轴，左部所有部件及结构布置与右部相应部件及结构布置互为镜像体；水平轴线50所指示为轴向方向；共用机座0由左部气缸41、右部气缸41′以及共用出气孔42组成；左部气缸衬套1过盈配合镶嵌于左部气缸41的内部，右部气缸衬套1′过盈配合镶嵌于右部气缸41′的内部；左部永磁体2为圆筒状结构，中心位置沿轴向加工有直径为d的左部磁体内通孔43；左部上轭铁3为圆筒状结构，其外径与左部永磁体2的外径相等，中心位置沿轴向加工有直径为d的左部上轭铁内通孔44；左部下轭铁4为U型结构，U形体的内径大于左部永磁体2的外径，在U形体底部的中心位置沿轴向加工有直径为d的左部下轭铁内通孔45；左部永磁体2沿轴向充磁至饱和，之后左部上轭铁3与左部下轭铁4将左部永磁体2完全包裹其中，左部上轭铁左端面18与左部下轭铁左端面19齐平，左部上轭铁右端面20与左部永磁体左端面21紧贴在一起，左部永磁体右端面22与左部下轭铁左端面23紧贴在一起；左部永磁体2、左部上轭铁3、左部下轭铁4共同形成左部环状气隙46，左部载流线圈5同心地插入左部环状气隙46内，右部永磁体2′、右部上轭铁3′、右部下轭铁4′共同形成右部环状气隙46′，右部载流线圈5′同心地插入右部环状气隙46′内；左部载流线圈5与右部载流线圈5′的轴向高度均为h；左部活塞7与右部活塞7′工作时的最大行程均为s；左部上轭铁3与右部上轭铁3′的轴向厚度均为δ，并满足关系：h＞s+δ，以保证在整个活塞行程中，始终确保稳定磁场处在载流线圈之内；左上支撑右端面24支撑于左部下轭铁左端面19之上，二者通过螺钉紧固，左部上支撑结构12的左侧加工成上环状平面25；左下支撑右端面47支撑于共用机座左侧面48之上，二者焊接在一起；左下支撑左前侧面26支撑于左部下轭铁右端面27之上，二者通过螺钉紧固，左部下支撑结构13的左下侧面加工成下环状平面28；左部上板弹簧组8由若干单片板弹簧薄片叠加而成，在外缘形成左上组外缘29，在内缘形成左上组内缘30，在中心部位沿轴向加工有直径为d的左上组簧体中心孔31，其中左上组外缘29放置于左部上支撑结构12的上环状平面25之上，并通过螺钉紧固；左部下板弹簧组9由若干单片板弹簧薄片叠加而成，在外缘形成左下组外缘32，在内缘形成左下组内缘33，在中心部位沿轴向加工有直径为d的左下组簧体中心孔34，其中左下组外缘32放置于左部下支撑结构13的下环状平面28之上，并通过螺钉紧固；左部活塞7由左部活塞头35、左部活塞中间过渡台36以及左部活塞杆37组成，在左部活塞杆37的末端加工有长1～3mm的左杆螺纹段49，左部活塞头35的外径较之左部气缸41的内径小10～30μm，同时保证左部活塞杆37的直径小于d；左部活塞杆37依次贯穿左下组簧体中心孔34、左部下轭铁内通孔45、左部磁体内通孔43、左部上轭铁内通孔44、左上组簧体中心孔31；左部上压片结构10将左上组内缘30以及左部线圈骨架6与左部活塞杆37紧固在一起，左部下压片结构11将左下组内缘33与左部活塞中间过渡台36紧固在一起，从而保证左部载流线圈5、左部线圈骨架6与左部活塞7、左部上板弹簧组8、左部下板弹簧组9连接为一个可同时运动的整体；左部位移传感器铁芯14内部加工有与左杆螺纹段49相配合的左铁芯螺纹段51，左杆螺纹段49旋入左铁芯螺纹段51内并紧固；在左部位移传感器铁芯14之外设置与左部位移传感器支撑16紧固在一起的左部位移传感器线圈15，左部位移传感器支撑16进而支撑于左部上支撑结构12之上并与之紧固在一起；左部机壳17通过左部机壳外端面61与左下支撑外端面52焊接固定，从而形成左部密闭腔体，将左部气缸衬套1、左部永磁体2、左部上轭铁3、左部下轭铁4、左部载流线圈5、左部线圈骨架6、左部活塞7、左部上板弹簧组8、左部下板弹簧组9、左部上压片结构10、左部下压片结构11、左部上支撑结构12、左部下支撑结构13、左部位移传感器铁芯14、左部位移传感器线圈15、左部位移传感器支撑16、左部机壳17全部罩于其中；右部所有部件及结构布置是左部相应部件及结构布置关于垂直中心线40的镜像体，右部机壳17′通过右部机壳外端面61′与右下支撑外端面52′焊接固定，形成右部密闭腔体，将右部气缸衬套1′、右部永磁体2′、右部上轭铁3′、右部下轭铁4′、右部载流线圈5′、右部线圈骨架6′、右部活塞7′、右部上板弹簧组8′、右部下板弹簧组9′、右部上压片结构10′、右部下压片结构11′、右部上支撑结构12′、右部下支撑结构13′、右部位移传感器铁芯14′、右部位移传感器线圈15′、右部位移传感器支撑16′、右部机壳17′全部罩于其中，从而形成一种采用长线圈轴向充磁的对置式动圈直线压缩机。The invented opposed moving coil linear compressor adopting long coil axial magnetization consists of a common base 0, a left cylinder liner 1, a left permanent magnet 2, a left upper yoke 3, a left lower yoke 4, Left current-carrying coil 5, left coil bobbin 6, left piston 7, left upper plate spring group 8, left lower plate spring group 9, left upper pressing structure 10, left lower pressing structure 11, left Upper support structure 12, left lower support structure 13, left displacement sensor core 14, left displacement sensor coil 15, left displacement sensor support 16, left casing 17, right cylinder liner 1′, right permanent Magnet 2', right upper yoke 3', right lower yoke 4', right current-carrying coil 5', right bobbin 6', right piston 7', right upper plate spring group 8', right The lower leaf spring group 9', the right upper pressing structure 10', the right lower pressing structure 11', the right upper supporting structure 12', the right lower supporting structure 13', the right displacement sensor core 14', the right The displacement sensor coil 15', the right displacement sensor support 16', and the right casing 17' are composed together. It is characterized in that the overall structure adopts an opposed type to offset the mechanical vibration generated by the left and right parts, that is, it is symmetrical with the vertical center line 40 Shaft, all parts and structural arrangement of the left part and the corresponding parts and structural arrangement of the right part are mirror images of each other; the horizontal axis 50 indicates the axial direction; the common machine base 0 is composed of the left part cylinder 41, the right part cylinder 41' and the common outlet Composed of air holes 42; the left cylinder liner 1 is embedded in the left cylinder 41 with an interference fit, and the right cylinder liner 1' is embedded in the right cylinder 41' with an interference fit; the left permanent magnet 2 is a cylinder shaped structure, the central position is processed with a left magnet internal through hole 43 with a diameter of d along the axial direction; the left upper yoke 3 is a cylindrical structure, and its outer diameter is equal to that of the left permanent magnet 2, and the central position The inner through hole 44 of the left upper yoke with a diameter of d is machined in the axial direction; the left lower yoke 4 is a U-shaped structure, and the inner diameter of the U-shaped body is greater than the outer diameter of the left permanent magnet 2, at the center of the bottom of the U-shaped body The inner through hole 45 of the left lower yoke with a diameter of d is machined in the axial direction; the left permanent magnet 2 is magnetized to saturation in the axial direction, and then the left upper yoke 3 and the left lower yoke 4 connect the left permanent magnet 2 Completely wrapped in it, the left end face 18 of the left upper yoke is flush with the left end face 19 of the left lower yoke, the right end face 20 of the left upper yoke is closely attached to the left end face 21 of the left permanent magnet, and the right end face of the left permanent magnet 22 and the left end surface 23 of the left lower yoke are closely attached together; the left permanent magnet 2, the left upper yoke 3, and the left lower yoke 4 jointly form a left annular air gap 46, and the left current-carrying coil 5 concentrically Inserted into the left annular air gap 46, the right permanent magnet 2', the right upper yoke 3', and the right lower yoke 4' jointly form the right annular air gap 46', and the right current-carrying coil 5' is the same as The center is inserted into the right annular air gap 46'; the axial heights of the left current-carrying coil 5 and the right current-carrying coil 5' are both h; the maximum strokes of the left piston 7 and the right piston 7' are equal is s; the axial thicknesses of the left upper yoke 3 and the right upper yoke 3′ are both δ, and satisfy the relation: h>s+δ, to ensure that the stable magnetic field is always within the current-carrying coil during the entire piston stroke; the upper left support and the right end surface 24 are supported on the left end surface 19 of the left lower yoke, and the two are fastened by screws. The left side of the left upper support structure 12 is processed into an upper annular plane 25; the right end surface 47 of the lower left support is supported on the left side 48 of the common machine base, and the two are welded together; the left front side 26 of the lower left support is supported on the left lower yoke On the right end face 27 of the iron, the two are fastened by screws, and the lower left side of the left lower support structure 13 is processed into a lower annular plane 28; The left upper group outer edge 29 is formed, and the left upper group inner edge 30 is formed on the inner edge, and a left upper group spring center hole 31 with a diameter of d is machined in the axial direction at the central part, wherein the left upper group outer edge 29 is placed on the left upper support structure 12 above the upper annular plane 25, and fastened by screws; the left lower plate spring group 9 is formed by superimposing a number of single leaf spring sheets, forming the outer edge 32 of the lower left group on the outer edge, and the inner edge of the lower left group on the inner edge 33. A central hole 34 of the left lower group spring body with a diameter of d is machined axially at the central part, wherein the outer edge 32 of the left lower group is placed on the lower annular plane 28 of the left lower support structure 13 and fastened by screws; The left piston 7 is made up of the left piston head 35, the left piston middle transition table 36 and the left piston rod 37. A left rod thread section 49 with a length of 1-3mm is processed at the end of the left piston rod 37. The left piston The outer diameter of the head 35 is 10-30 μm smaller than the inner diameter of the left cylinder 41, while ensuring that the diameter of the left piston rod 37 is smaller than d; Through hole 45, through hole 43 in the left magnet, through hole 44 in the left upper yoke, center hole 31 of the spring body on the left upper group; The left piston rod 37 is fastened together, and the left lower plate structure 11 fastens the inner edge 33 of the left lower group and the middle transition table 36 of the left piston together, thereby ensuring that the left current-carrying coil 5, the left coil bobbin 6 and the The left piston 7, the left upper leaf spring group 8, and the left lower leaf spring group 9 are connected as a whole that can move simultaneously; the left iron core 14 of the left displacement sensor is internally processed with a left iron core that matches the threaded section 49 of the left rod The threaded section 51, the left rod threaded section 49 is screwed into the left iron core threaded section 51 and fastened; the left part displacement sensor coil fastened together with the left part displacement sensor support 16 is set outside the left part displacement sensor iron core 14 15. The left displacement sensor support 16 is further supported on the left upper support structure 12 and fastened together with it; the left casing 17 is welded and fixed to the left lower support outer end surface 52 through the left casing outer end surface 61, thereby Form the left airtight cavity, the left cylinder liner 1, the left permanent magnet 2, the left upper yoke 3, the left lower yoke 4, the left current-carrying coil 5, the left coil skeleton 6, and the left piston 7. Left upper leaf spring group 8, left lower leaf spring group 9, left upper pressing structure 10, left lower pressing structure 11 , the left upper support structure 12, the left lower support structure 13, the left displacement sensor core 14, the left displacement sensor coil 15, the left displacement sensor support 16, and the left casing 17 are all covered therein; all parts of the right And the structural arrangement is a mirror image of the corresponding components and structural arrangement on the left with respect to the vertical centerline 40. The right casing 17' is welded and fixed to the right lower support outer end surface 52' through the right casing outer end surface 61' to form a right airtight Cavity, the right cylinder liner 1', the right permanent magnet 2', the right upper yoke 3', the right lower yoke 4', the right current-carrying coil 5', the right coil bobbin 6', the right Piston 7', right upper leaf spring group 8', right lower leaf spring group 9', right upper pressing structure 10', right lower pressing structure 11', right upper support structure 12', right lower support The structure 13', the right displacement sensor core 14', the right displacement sensor coil 15', the right displacement sensor support 16', and the right casing 17' are all covered therein, thus forming a long coil axially filled Magnetic opposed moving coil linear compressor.

下面结合附图对所发明的采用长线圈轴向充磁的对置式动圈直线压缩机的制造方法进行说明如下：The manufacturing method of the invented opposed moving-coil linear compressor adopting axial magnetization of the long coil is described as follows in conjunction with the accompanying drawings:

图2为所发明的采用长线圈轴向充磁的对置式动圈直线压缩机的平面剖视图；以垂直中心线40为对称轴而互为镜像体的左部所有部件与右部相应部件需采用同一批次生产的零件以使个体间的差异最小化；Fig. 2 is a plane sectional view of the invented opposed moving coil linear compressor adopting long coil axial magnetization; with the vertical center line 40 as the axis of symmetry, all the parts on the left and the corresponding parts on the right that are mirror images of each other need to adopt Parts produced in the same batch to minimize individual variation;

图3为共用机座0的立体剖视图；共用机座0采用机械强度高、热膨胀系数小的钛合金材料制作，采用五轴机床同时加工出左部气缸41和右部气缸41′，保证左部气缸41和右部气缸41′关于垂直中心线40对称，并保证左部气缸41和右部气缸41′的同轴度优于1.0μm，同时保证上述两气缸的内孔圆度均优于0.5μm；在左部气缸41和右部气缸41′加工完毕后，使用同一五轴机床加工出共用出气孔42，保证共用出气孔42与左部气缸41以及右部气缸41′的垂直度均优于2.0μm；Figure 3 is a three-dimensional sectional view of the shared machine base 0; the shared machine base 0 is made of titanium alloy material with high mechanical strength and small thermal expansion coefficient, and the left cylinder 41 and the right cylinder 41' are simultaneously processed by a five-axis machine tool to ensure that the left cylinder The cylinder 41 and the right cylinder 41' are symmetrical about the vertical center line 40, and the coaxiality between the left cylinder 41 and the right cylinder 41' is guaranteed to be better than 1.0 μm, and the roundness of the inner holes of the above two cylinders is better than 0.5 μm; After the left cylinder 41 and the right cylinder 41 ' are processed, use the same five-axis machine tool to process the shared air outlet 42 to ensure that the verticality of the shared air outlet 42 and the left cylinder 41 and the right cylinder 41 ' is uniform Better than 2.0μm;

图4为左部气缸衬套1的立体剖视图（对于左右互为镜像体的部件，附图中一般只给出左部的详细示意图，而制造方法则将左部和右部部件一同叙述，下同）；左部气缸衬套1及右部气缸衬套1′均采用硬度大于58的模具钢材料使用慢走丝线切割的方法加工成圆筒状，保证左部气缸衬套1及右部气缸衬套1′的外径分别比左部气缸41及右部气缸41′的内径大0.5～1.0mm，然后采用过盈配合和热胀冷缩的方式分别镶嵌入左部气缸41及右部气缸41′内，具体镶嵌方法如下：将如图3所示的共用机座0整体放置于内部温度为160℃的恒温加热箱内均匀加热4～6小时，在共用机座0取出恒温加热箱前5～10分钟，将左部气缸衬套1及右部气缸衬套1′同时放置于液氮中浸泡，在共用机座0从恒温加热箱取出的同时，将左部气缸衬套1及右部气缸衬套1′从液氮中取出，然后使用机械外力将左部气缸衬套1及右部气缸衬套1′分别推入左部气缸41及右部气缸41′内部，从而保证左部气缸衬套1及右部气缸衬套1′的外壁分别与左部气缸41及右部气缸41′的内壁紧密结合；然后使用坐标磨床对左部气缸衬套1及右部气缸衬套1′的内孔进行精细研磨，保证其内孔圆度均优于0.5μm；Figure 4 is a three-dimensional sectional view of the left cylinder liner 1 (for the left and right parts that are mirror images of each other, generally only the detailed schematic diagram of the left part is given in the drawings, and the manufacturing method is described together with the left and right parts, below The same); the left cylinder liner 1 and the right cylinder liner 1′ are made of mold steel with a hardness greater than 58 and processed into a cylindrical shape by slow wire cutting to ensure that the left cylinder liner 1 and the right cylinder The outer diameter of the bushing 1' is 0.5-1.0mm larger than the inner diameter of the left cylinder 41 and the right cylinder 41' respectively, and then it is inserted into the left cylinder 41 and the right cylinder respectively by means of interference fit and thermal expansion and contraction. 41', the specific inlay method is as follows: place the shared machine base 0 as shown in Figure 3 in a constant temperature heating box with an internal temperature of 160°C and heat it evenly for 4 to 6 hours. For 5 to 10 minutes, place the left cylinder liner 1 and the right cylinder liner 1′ in liquid nitrogen for soaking at the same time, and take the left cylinder liner 1 and the right The upper cylinder liner 1' is taken out from the liquid nitrogen, and then the left cylinder liner 1 and the right cylinder liner 1' are pushed into the left cylinder 41 and the right cylinder 41' by mechanical external force, so as to ensure that the left The outer walls of the cylinder liner 1 and the right cylinder liner 1' are closely combined with the inner walls of the left cylinder 41 and the right cylinder 41' respectively; The inner hole is finely ground to ensure that the roundness of the inner hole is better than 0.5μm;

图5为左部活塞7的平面剖视图；左部活塞7及右部活塞7′均采用机械强度高、热膨胀系数小的钛合金材料制作，首先采用数控机床加工出毛坯，然后采用坐标磨床进行精细研磨，保证左部活塞头35及右部活塞头35′的圆度均优于0.5μm，并保证左部活塞杆37和右部活塞杆37′沿轴向的跳动低于3.0μm，以及左部活塞杆37与左部活塞头35的垂直度优于1.0μm，右部活塞杆37′与右部活塞头35′的垂直度优于1.0μm；在左部活塞杆37和右部活塞杆37′的末端使用精密数控机床分别加工出左杆螺纹段49和右杆螺纹段49′；左部活塞7及右部活塞7′工作时的最大行程均设计为s，由限位结构保证行程精度优于2.0μm；Figure 5 is a plane sectional view of the left piston 7; both the left piston 7 and the right piston 7' are made of titanium alloy material with high mechanical strength and small thermal expansion coefficient, and the blank is first processed by a numerical control machine tool, and then refined by a jig grinder. Grinding, to ensure that the roundness of the left piston head 35 and the right piston head 35' is better than 0.5 μm, and to ensure that the axial runout of the left piston rod 37 and the right piston rod 37' is less than 3.0 μm, and that the left The verticality of the first piston rod 37 and the left piston head 35 is better than 1.0 μm, and the verticality of the right piston rod 37 ′ and the right piston head 35 ′ is better than 1.0 μm; The end of 37' uses precision numerical control machine tools to process the left rod thread section 49 and the right rod thread section 49' respectively; the maximum stroke of the left piston 7 and the right piston 7' is designed to be s, and the stroke is guaranteed by the limit structure Accuracy better than 2.0μm;

图6为左部上板弹簧组8与左部上压片结构10的组合示意图，图7为左部下板弹簧组9与左部下压片结构11的组合示意图；左部上压片结构10、左部下压片结构11以及右部上压片结构10′、右部下压片结构11′均由机械强度较高、剩磁较低的金属材料采用数控机床加工制作而成，加工精度均优于9.0μm；左部上板弹簧组8、左部下板弹簧组9以及右部上板弹簧组8′、右部下板弹簧组9′均由若干片薄片板弹簧叠加组成，单片薄片板弹簧的厚度和数量由具体应用所需要的弹性刚度决定，材质为铍青铜或不锈钢，采用光刻的方法精确加工出内部型线，内部型线可以是螺旋形，也可以是直臂形，型线要求平滑、无毛刺、无折角，并通过板簧振动试验机进行超过10⁸个循环以上的疲劳检验；Fig. 6 is a schematic diagram of the combination of the left upper leaf spring group 8 and the left upper pressing structure 10, and Fig. 7 is a combined schematic diagram of the left lower leaf spring group 9 and the left lower pressing structure 11; the left upper pressing structure 10, The lower tablet structure 11 on the left, the upper tablet structure 10' on the right, and the lower tablet structure 11' on the right are all made of metal materials with high mechanical strength and low residual magnetism using CNC machine tools, and the machining accuracy is better than 9.0 μm; the left upper leaf spring group 8, the left lower leaf spring group 9, the right upper leaf spring group 8', and the right lower leaf spring group 9' are all composed of several thin leaf springs. The thickness and quantity are determined by the elastic stiffness required by the specific application. The material is beryllium bronze or stainless steel. The internal molding line is precisely processed by photolithography. The internal molding line can be spiral or straight arm. The molding line requirements Smooth, no burrs, no knuckles, and more than 10 ⁸ cycles of fatigue testing through the leaf spring vibration testing machine;

内部型线为螺旋形的单片薄片板弹簧的示意图如图8所示，在薄片上以光刻法刻蚀出螺旋形型线38，从而自然形成螺旋形板簧臂39，外侧留出单片板弹簧外缘53，并在其上以光刻法均匀刻蚀出若干用于螺钉固定的螺钉孔54，在内侧留出单片板弹簧内缘55；As shown in Figure 8, the schematic diagram of a single-piece thin leaf spring with a spiral inner shape line is etched with a spiral shape line 38 on the sheet by photolithography, thereby naturally forming a spiral shape leaf spring arm 39, leaving a single leaf spring arm 39 outside. Leaf spring outer edge 53, and a number of screw holes 54 for screw fixing are evenly etched on it by photolithography, leaving a single leaf spring inner edge 55 on the inside;

内部型线为直臂形的单片薄片板弹簧的示意图如图9所示，在薄片上以光刻法刻蚀出直臂型板弹簧臂56以及运动臂57，外侧留出单片板弹簧外缘58，并在其上以光刻法均匀刻蚀出若干用于螺钉固定的螺钉孔59，在内侧留出单片板弹簧内缘60；The schematic diagram of a single-piece leaf spring with a straight arm-shaped internal profile is shown in Figure 9. A straight-arm leaf spring arm 56 and a moving arm 57 are etched on the sheet by photolithography, and a single leaf spring is left on the outside. Outer edge 58, and on it, evenly etches some screw holes 59 for screw fixing with photolithography method, leaves the inner edge 60 of monolithic plate spring in the inner side;

图10和图11分别为左部上支撑结构12和左部下支撑结构13的平面剖视图；左部上支撑结构12及左部下支撑结构13均由机械强度较高、剩磁较低的金属材料采用数控机床加工制作而成，加工精度均优于5.0μm；左部上支撑结构12的左侧使用精密数控机床加工成上环状平面25；左上支撑右端面24支撑于左部下轭铁左端面19之上，二者通过螺钉紧固；左下支撑右端面47支撑于共用机座左侧面48之上，二者通过电子束焊接技术焊接在一起，左下支撑左前侧面26支撑于左部下轭铁右端面27之上，二者通过螺钉紧固，左部下支撑结构13的左下侧面使用精密数控机床加工出下环状平面28，左部下支撑结构13的左上侧面使用精密数控机床加工出左下支撑外端面52；Fig. 10 and Fig. 11 are respectively the plane sectional views of the left upper support structure 12 and the left lower support structure 13; the left upper support structure 12 and the left lower support structure 13 are all made of metal materials with higher mechanical strength and lower residual magnetism Manufactured by CNC machine tools, the machining accuracy is better than 5.0 μm; the left side of the left upper support structure 12 is processed into an upper ring-shaped plane 25 using a precision CNC machine tool; the right end surface 24 of the left upper support is supported by the left end surface 19 of the left lower yoke Above, the two are fastened by screws; the lower left support and the right end surface 47 are supported on the left side 48 of the shared machine base, the two are welded together by electron beam welding technology, the left lower support and the left front side 26 are supported on the right end of the left lower yoke On the surface 27, the two are fastened by screws, the lower left side of the left lower support structure 13 is processed with a precision numerical control machine tool to form a lower annular plane 28, and the upper left side of the left lower support structure 13 is processed with a precision numerical control machine tool to produce the outer end surface of the left lower support 52;

图12为右部下支撑结构13′的平面剖视图；右部下支撑结构13′由机械强度较高、剩磁较低的金属材料采用数控机床加工制作而成，加工精度优于5.0μm，其右上侧面使用精密数控机床加工出左下支撑外端面52′；Figure 12 is a plane sectional view of the lower support structure 13' on the right; the lower support structure 13' on the right is made of a metal material with high mechanical strength and low residual magnetism by CNC machine tools, and the machining accuracy is better than 5.0 μm. Use a precision numerical control machine tool to process the outer end surface 52' of the lower left support;

图13为左部位移传感器铁芯14的平面剖视图；左部位移传感器铁芯14及右部位移传感器铁芯14′均由纯铁材料制作，内部分别加工有与左杆螺纹段49及右杆螺纹段49′相配合的左铁芯螺纹段51及右铁芯螺纹段51′，左杆螺纹段49及右杆螺纹段49′分别旋入左铁芯螺纹段51及右铁芯螺纹段51′内并紧固；Fig. 13 is the plane sectional view of the left part displacement sensor iron core 14; Left part displacement sensor iron core 14 and right part displacement sensor iron core 14 ' are all made of pure iron material, and the inside is respectively processed with left rod threaded section 49 and right rod The threaded section 49' matches the left iron core threaded section 51 and the right iron core threaded section 51', and the left bar threaded section 49 and the right bar threaded section 49' are screwed into the left iron core threaded section 51 and the right iron core threaded section 51 respectively. 'inside and fastened;

左部线圈骨架6、右部线圈骨架6′、左部位移传感器支撑16、左部位移传感器支撑16′均由机械强度较高、剩磁较低的金属材料采用数控机床加工制作而成，加工精度均优于9.0μm；左部位移传感器线圈15及右部位移传感器线圈15′均由漆包铜线在相应骨架上绕制而成；The left bobbin 6, the right bobbin 6', the left displacement sensor support 16, and the left displacement sensor support 16' are all made of metal materials with high mechanical strength and low residual magnetism using CNC machine tools. The accuracy is better than 9.0μm; the left displacement sensor coil 15 and the right displacement sensor coil 15' are all wound on the corresponding skeleton by enamelled copper wire;

图14为左部永磁体2的平面剖视图；左部永磁体2及右部永磁体2′均采用磁能积较高的稀土永磁材料制作，使用激光加工的方式加工成型，左部永磁体2及右部永磁体2′均使用脉冲充磁机沿轴向充磁至饱和；Figure 14 is a plane sectional view of the left permanent magnet 2; the left permanent magnet 2 and the right permanent magnet 2' are made of rare earth permanent magnet materials with high magnetic energy products, and are processed and formed by laser processing. The left permanent magnet 2 and the right permanent magnet 2' are magnetized axially to saturation using a pulse magnetizer;

图15为左部上轭铁3的平面剖视图；左部上轭铁3及右部上轭铁3′均采用导磁率较高的纯铁材料，使用精密数控机床加工而成，左部上轭铁3及右部上轭铁3′的轴向厚度均为δ，加工精度均优于2.0μm；Figure 15 is a plane sectional view of the upper yoke 3 on the left; the upper yoke 3 on the left and the upper yoke 3' on the right are made of pure iron materials with high magnetic permeability, processed by precision numerical control machine tools, and the upper yoke on the left The axial thickness of the iron 3 and the right upper yoke 3′ are both δ, and the machining accuracy is better than 2.0 μm;

图16为左部下轭铁4的平面剖视图；左部下轭铁4及右部下轭铁4′均采用导磁率较高的纯铁材料，使用精密数控机床加工而成；Figure 16 is a plane sectional view of the lower yoke 4 on the left; the lower yoke 4 on the left and the lower yoke 4' on the right are all made of pure iron materials with high magnetic permeability and processed by precision numerical control machine tools;

图17为左部载流线圈5的示意图；左部载流线圈5及右部载流线圈5′均采用漆包铜线在固体支撑上绕制而成，漆包铜线的直径和厚度由需要提供的电机力决定；左部载流线圈5与右部载流线圈5′的轴向高度均为h，制作时由机床精度及绕制工艺保证h的精度优于2.0μm；Fig. 17 is the schematic diagram of left part current-carrying coil 5; Left part current-carrying coil 5 and right part current-carrying coil 5 ' all adopt enamelled copper wire to be wound on solid support and form, and the diameter and thickness of enameled copper wire are determined by The motor force that needs to be provided is determined; the axial heights of the left current-carrying coil 5 and the right current-carrying coil 5' are both h, and the accuracy of h is guaranteed to be better than 2.0 μm by the precision of the machine tool and the winding process during production;

图18为左部永磁体2、左部上轭铁3、左部下轭铁4以及左部载流线圈5的组合平面剖视图；左部上轭铁3与左部下轭铁4将左部永磁体2完全包裹其中，共同形成左部环状气隙46，左部载流线圈5同心地插入左部环状气隙46内；右部上轭铁3′与右部下轭铁4′将右部永磁体2′完全包裹其中，共同形成右部环状气隙46′，右部载流线圈5′同心地插入右部环状气隙46′内；左部上轭铁3、左部载流线圈5、左部活塞7以及右部上轭铁3′与右部载流线圈5′、右部活塞7′在制作时均需保证满足：h＞s+δ，以保证在整个活塞行程中，始终确保稳定磁场处在载流线圈之内；Figure 18 is a combined plane sectional view of the left permanent magnet 2, the left upper yoke 3, the left lower yoke 4, and the left current-carrying coil 5; the left upper yoke 3 and the left lower yoke 4 combine the left permanent magnet 2 completely wrapped in it to form the left annular air gap 46 together, and the left current-carrying coil 5 is concentrically inserted into the left annular air gap 46; the right upper yoke 3' and the right lower yoke 4' connect the right The permanent magnet 2' is completely wrapped in it, together forming the right annular air gap 46', the right current-carrying coil 5' is concentrically inserted into the right annular air gap 46'; the left upper yoke 3, the left current-carrying coil The coil 5, the left piston 7, the right upper yoke 3', the right current-carrying coil 5', and the right piston 7' all need to meet the following requirements during production: h>s+δ, so as to ensure that during the entire piston stroke , always ensure that the stable magnetic field is within the current-carrying coil;

图19和图20分别为左部机壳17及右部机壳17′的平面剖视图；左部机壳17及右部机壳17′均由机械强度高、结构致密、剩磁较低的金属材料使用精密数控机床加工制作成形；左部机壳外端面61与左下支撑外端面52使用电子束技术焊接在一起，形成左侧密闭腔体；右部机壳外端面61′与右下支撑外端面52′使用电子束技术焊接在一起，形成右部密闭腔体，对上述两个焊接完毕的密闭腔体均充入高纯氦气检验，耐压强度均需高于5.0MPa，氦气泄漏率均需低于3.0×10^-8Pa·m³/s。Fig. 19 and Fig. 20 are the plane sectional views of left part casing 17 and right part casing 17'respectively; Left part casing 17 and right part casing 17' are all made of metal with high mechanical strength, compact structure and low residual magnetism. The material is processed and formed by precision CNC machine tools; the outer end surface 61 of the left casing and the outer end surface 52 of the lower left support are welded together by electron beam technology to form a closed cavity on the left; the outer end surface 61' of the right casing is connected to the outer surface of the lower right support. The end faces 52' are welded together by electron beam technology to form a closed cavity on the right. The above two welded closed cavities are filled with high-purity helium for inspection, and the compressive strength must be higher than 5.0MPa. Helium leakage All rates need to be lower than 3.0×10 ^-8 Pa·m ³ /s.

本发明的优点在于：以长线圈和轴向充磁的方式实现了动圈直线压缩机的稳定、可靠和连续运转，具有结构紧凑、振动低、电机效率高、预期寿命长的突出优点，对高可靠、长寿命、高效率直线压缩机的发展具有重要意义。The advantages of the present invention are: the stable, reliable and continuous operation of the moving coil linear compressor is realized by means of long coil and axial magnetization, and it has the outstanding advantages of compact structure, low vibration, high motor efficiency and long expected life. The development of high reliability, long life and high efficiency linear compressor is of great significance.

附图说明Description of drawings

图1为动圈式直线电机四种形式的示意图，其中（1）为长线圈轴向充磁形式，（2）为短线圈轴向充磁形式，（3）为长线圈径向充磁形式，（4）为短线圈径向充磁形式。其中63为永磁体，64为上轭铁，65为下轭铁，66为载流线圈，67为中心通孔；Figure 1 is a schematic diagram of four types of moving coil linear motors, in which (1) is the axial magnetization form of the long coil, (2) is the axial magnetization form of the short coil, and (3) is the radial magnetization form of the long coil , (4) is the form of short coil radial magnetization. Wherein 63 is a permanent magnet, 64 is an upper yoke, 65 is a lower yoke, 66 is a current-carrying coil, and 67 is a central through hole;

图2为所发明的采用长线圈轴向充磁的对置式动圈直线压缩机的平面剖视图，其中：0为共用机座、1为左部气缸衬套、2为左部永磁体、3为左部上轭铁、4为左部下轭铁、5为左部载流线圈、6为左部线圈骨架、7为左部活塞、8为左部上板弹簧组、9为左部下板弹簧组、10为左部上压片结构、11为左部下压片结构、12为左部上支撑结构、13为左部下支撑结构、14为左部位移传感器铁芯、15为左部位移传感器线圈、16为左部位移传感器支撑、17为左部机壳；1′为右部气缸衬套、2′为右部永磁体、3′为右部上轭铁、4′为右部下轭铁、5′为右部载流线圈、6′为右部线圈骨架、7′为右部活塞、8′为右部上板弹簧组、9′为右部下板弹簧组、10′为右部上压片结构、11′为右部下压片结构、12′为右部上支撑结构、13′为右部下支撑结构、14′为右部位移传感器铁芯、15′为右部位移传感器线圈、16′为右部位移传感器支撑、17′为右部机壳；Fig. 2 is a planar cross-sectional view of the invented opposed moving coil linear compressor adopting axial magnetization of long coils, wherein: 0 is the common base, 1 is the left cylinder liner, 2 is the left permanent magnet, 3 is Left upper yoke, 4 is left lower yoke, 5 is left current-carrying coil, 6 is left coil bobbin, 7 is left piston, 8 is left upper plate spring group, 9 is left lower plate spring group , 10 is the left upper tablet structure, 11 is the left lower tablet structure, 12 is the left upper support structure, 13 is the left lower support structure, 14 is the left displacement sensor core, 15 is the left displacement sensor coil, 16 is the left displacement sensor support, 17 is the left casing; 1' is the right cylinder liner, 2' is the right permanent magnet, 3' is the right upper yoke, 4' is the right lower yoke, 5 ' is the right current-carrying coil, 6' is the right coil bobbin, 7' is the right piston, 8' is the right upper plate spring group, 9' is the right lower plate spring group, 10' is the right upper plate Structure, 11' is the right lower plate structure, 12' is the right upper support structure, 13' is the right lower support structure, 14' is the right displacement sensor core, 15' is the right displacement sensor coil, 16' is Right displacement sensor support, 17' is the right casing;

图3为共用机座0的立体剖视图，其中41为左部气缸，41′为右部气缸，42为共用出气孔，48为共用机座左侧面；Fig. 3 is the three-dimensional sectional view of shared machine base 0, and wherein 41 is left cylinder, and 41 ' is right cylinder, and 42 is shared air outlet, and 48 is the left side of shared machine base;

图4为左部气缸衬套1的立体剖视图；Fig. 4 is a three-dimensional sectional view of the left cylinder liner 1;

图5为左部活塞7的平面剖视图，其中35为左部活塞头，36为左部活塞中间过渡台，37为左部活塞杆，49为左杆螺纹段；Fig. 5 is the plane sectional view of left piston 7, and wherein 35 is left piston head, and 36 is left piston middle transition table, and 37 is left piston rod, and 49 is left rod thread section;

图6为左部上板弹簧组8与左部上压片结构10的组合示意图，其中29为左上组外缘，30为左上组内缘，左上组簧体中心孔31；Fig. 6 is a schematic diagram of the combination of the left upper plate spring group 8 and the left upper plate structure 10, wherein 29 is the outer edge of the left upper group, 30 is the inner edge of the left upper group, and the spring body center hole 31 of the left upper group;

图7为左部下板弹簧组9与左部下压片结构11的组合示意图，其中32为左下组外缘，33为左下组内缘，34为左下组簧体中心孔；Fig. 7 is a schematic diagram of the combination of the left lower plate spring group 9 and the left lower plate structure 11, wherein 32 is the outer edge of the left lower group, 33 is the inner edge of the left lower group, and 34 is the center hole of the left lower group spring body;

图8为内部型线为螺旋形的单片薄片板弹簧的示意图，其中38为螺旋形型线，39为螺旋形板簧臂，53为单片板弹簧外缘，54为螺钉孔，55为单片板弹簧内缘；Fig. 8 is the schematic diagram of the monolithic thin plate spring whose internal profile is spiral, wherein 38 is the spiral profile, 39 is the spiral leaf spring arm, 53 is the outer edge of the single plate spring, 54 is the screw hole, and 55 is Single leaf spring inner edge;

图9为内部型线为直臂形的单片薄片板弹簧的示意图，其中56为直臂型板弹簧臂，57为运动臂，58为单片板弹簧外缘，59为螺钉孔，60为单片板弹簧内缘；Fig. 9 is the schematic diagram of the monolithic thin plate spring whose internal profile is straight arm shape, wherein 56 is the straight arm type leaf spring arm, 57 is the movement arm, 58 is the outer edge of the single leaf spring, 59 is the screw hole, and 60 is Single leaf spring inner edge;

图10为左部上支撑结构12的平面剖视图，其中24为左上支撑右端面，25为上环状平面；Figure 10 is a plane sectional view of the upper support structure 12 on the left, wherein 24 is the right end face of the upper left support, and 25 is the upper annular plane;

图11为左部下支撑结构13的平面剖视图，其中26为左下支撑左前侧面，28为下环状平面，47为左下支撑右端面，52为左下支撑外端面；Fig. 11 is a plane sectional view of the left lower support structure 13, wherein 26 is the left front side of the left lower support, 28 is the lower annular plane, 47 is the right end face of the left lower support, and 52 is the outer end face of the left lower support;

图12为右部下支撑结构13′的平面剖视图，其中52′为右下支撑外端面；Fig. 12 is a plane sectional view of the right lower support structure 13', wherein 52' is the outer end surface of the right lower support;

图13为左部位移传感器铁芯14的平面剖视图，其中51为左铁芯螺纹段；Fig. 13 is a plane sectional view of the left displacement sensor core 14, wherein 51 is a threaded section of the left core;

图14为左部永磁体2的平面剖视图，其中21为左部永磁体左端面；22为左部永磁体右端面；43为左部磁体内通孔；Fig. 14 is the plane sectional view of left permanent magnet 2, and wherein 21 is the left end face of left permanent magnet; 22 is the right end face of left permanent magnet; 43 is through hole in the left magnet;

图15为左部上轭铁3的平面剖视图，其中18为左部上轭铁左端面；20为左部上轭铁右端面；44为左部上轭铁内通孔；Fig. 15 is a plane sectional view of the left upper yoke 3, wherein 18 is the left end face of the left upper yoke; 20 is the right end face of the left upper yoke; 44 is the inner through hole of the left upper yoke;

图16为左部下轭铁4的平面剖视图，其中19为左部下轭铁左端面；23为左部下轭铁左端面，27为左部下轭铁右端面；45为左部下轭铁内通孔；Fig. 16 is a plane sectional view of the left lower yoke 4, wherein 19 is the left end face of the left lower yoke; 23 is the left end face of the left lower yoke, 27 is the right end face of the left lower yoke; 45 is the inner through hole of the left lower yoke;

图17为左部载流线圈5的示意图；Fig. 17 is a schematic diagram of the left current-carrying coil 5;

图18为左部永磁体2、左部上轭铁3、左部下轭铁4以及左部载流线圈5的组合平面剖视图，其中46为左部环状气隙；Fig. 18 is a combined plane sectional view of the left permanent magnet 2, the left upper yoke 3, the left lower yoke 4 and the left current-carrying coil 5, wherein 46 is the left annular air gap;

图19为左部机壳17的平面剖视图，其中61为左部机壳外端面，62为左部机壳体；Figure 19 is a plane sectional view of the left casing 17, wherein 61 is the outer end face of the left casing, and 62 is the left casing;

图20为右部机壳17′的平面剖视图，其中61′为右部机壳外端面，62′为右部机壳体。Fig. 20 is a plane sectional view of the right casing 17', wherein 61' is the outer end surface of the right casing, and 62' is the right casing.

具体实施方式detailed description

下面结合附图及实施例对本发明的具体实施方式作进一步地详细说明：Below in conjunction with accompanying drawing and embodiment the specific embodiment of the present invention is described in further detail:

所发明的采用长线圈轴向充磁的对置式动圈直线压缩机由共用机座0、左部气缸衬套1、左部永磁体2、左部上轭铁3、左部下轭铁4、左部载流线圈5、左部线圈骨架6、左部活塞7、左部上板弹簧组8、左部下板弹簧组9、左部上压片结构10、左部下压片结构11、左部上支撑结构12、左部下支撑结构13、左部位移传感器铁芯14、左部位移传感器线圈15、左部位移传感器支撑16、左部机壳17以及右部气缸衬套1′、右部永磁体2′、右部上轭铁3′、右部下轭铁4′、右部载流线圈5′、右部线圈骨架6′、右部活塞7′、右部上板弹簧组8′、右部下板弹簧组9′、右部上压片结构10′、右部下压片结构11′、右部上支撑结构12′、右部下支撑结构13′、右部位移传感器铁芯14′、右部位移传感器线圈15′、右部位移传感器支撑16′、右部机壳17′共同组成，其特征在于，整体结构采用对置式以抵消左右两部分产生的机械振动，即以垂直中心线40为对称轴，左部所有部件及结构布置与右部相应部件及结构布置互为镜像体；水平轴线50所指示为轴向方向；共用机座0由左部气缸41、右部气缸41′以及共用出气孔42组成；左部气缸衬套1过盈配合镶嵌于左部气缸41的内部，右部气缸衬套1′过盈配合镶嵌于右部气缸41′的内部；左部永磁体2为圆筒状结构，中心位置沿轴向加工有直径为d的左部磁体内通孔43；左部上轭铁3为圆筒状结构，其外径与左部永磁体2的外径相等，中心位置沿轴向加工有直径为d的左部上轭铁内通孔44；左部下轭铁4为U型结构，U形体的内径大于左部永磁体2的外径，在U形体底部的中心位置沿轴向加工有直径为d的左部下轭铁内通孔45；左部永磁体2沿轴向充磁至饱和，之后左部上轭铁3与左部下轭铁4将左部永磁体2完全包裹其中，左部上轭铁左端面18与左部下轭铁左端面19齐平，左部上轭铁右端面20与左部永磁体左端面21紧贴在一起，左部永磁体右端面22与左部下轭铁左端面23紧贴在一起；左部永磁体2、左部上轭铁3、左部下轭铁4共同形成左部环状气隙46，左部载流线圈5同心地插入左部环状气隙46内，右部永磁体2′、右部上轭铁3′、右部下轭铁4′共同形成右部环状气隙46′，右部载流线圈5′同心地插入右部环状气隙46′内；左部载流线圈5与右部载流线圈5′的轴向高度均为h；左部活塞7与右部活塞7′工作时的最大行程均为s；左部上轭铁3与右部上轭铁3′的轴向厚度均为δ，并满足关系：h＞s+δ，以保证在整个活塞行程中，始终确保稳定磁场处在载流线圈之内；左上支撑右端面24支撑于左部下轭铁左端面19之上，二者通过螺钉紧固，左部上支撑结构12的左侧加工成上环状平面25；左下支撑右端面47支撑于共用机座左侧面48之上，二者焊接在一起；左下支撑左前侧面26支撑于左部下轭铁右端面27之上，二者通过螺钉紧固，左部下支撑结构13的左下侧面加工成下环状平面28；左部上板弹簧组8由若干单片板弹簧薄片叠加而成，在外缘形成左上组外缘29，在内缘形成左上组内缘30，在中心部位沿轴向加工有直径为d的左上组簧体中心孔31，其中左上组外缘29放置于左部上支撑结构12的上环状平面25之上，并通过螺钉紧固；左部下板弹簧组9由若干单片板弹簧薄片叠加而成，在外缘形成左下组外缘32，在内缘形成左下组内缘33，在中心部位沿轴向加工有直径为d的左下组簧体中心孔34，其中左下组外缘32放置于左部下支撑结构13的下环状平面28之上，并通过螺钉紧固；左部活塞7由左部活塞头35、左部活塞中间过渡台36以及左部活塞杆37组成，在左部活塞杆37的末端加工有长2mm的左杆螺纹段49，左部活塞头35的外径较之左部气缸41的内径小20μm，同时保证左部活塞杆37的直径小于d；左部活塞杆37依次贯穿左下组簧体中心孔34、左部下轭铁内通孔45、左部磁体内通孔43、左部上轭铁内通孔44、左上组簧体中心孔31；左部上压片结构10将左上组内缘30以及左部线圈骨架6与左部活塞杆37紧固在一起，左部下压片结构11将左下组内缘33与左部活塞中间过渡台36紧固在一起，从而保证左部载流线圈5、左部线圈骨架6与左部活塞7、左部上板弹簧组8、左部下板弹簧组9连接为一个可同时运动的整体；左部位移传感器铁芯14内部加工有与左杆螺纹段49相配合的左铁芯螺纹段51，左杆螺纹段49旋入左铁芯螺纹段51内并紧固；在左部位移传感器铁芯14之外设置与左部位移传感器支撑16紧固在一起的左部位移传感器线圈15，左部位移传感器支撑16进而支撑于左部上支撑结构12之上并与之紧固在一起；左部机壳17通过左部机壳外端面61与左下支撑外端面52焊接固定，从而形成左部密闭腔体，将左部气缸衬套1、左部永磁体2、左部上轭铁3、左部下轭铁4、左部载流线圈5、左部线圈骨架6、左部活塞7、左部上板弹簧组8、左部下板弹簧组9、左部上压片结构10、左部下压片结构11、左部上支撑结构12、左部下支撑结构13、左部位移传感器铁芯14、左部位移传感器线圈15、左部位移传感器支撑16、左部机壳17全部罩于其中；右部所有部件及结构布置是左部相应部件及结构布置关于垂直中心线40的镜像体，右部机壳17′通过右部机壳外端面61′与右下支撑外端面52′焊接固定，形成右部密闭腔体，将右部气缸衬套1′、右部永磁体2′、右部上轭铁3′、右部下轭铁4′、右部载流线圈5′、右部线圈骨架6′、右部活塞7′、右部上板弹簧组8′、右部下板弹簧组9′、右部上压片结构10′、右部下压片结构11′、右部上支撑结构12′、右部下支撑结构13′、右部位移传感器铁芯14′、右部位移传感器线圈15′、右部位移传感器支撑16′、右部机壳17′全部罩于其中，从而形成一种采用长线圈轴向充磁的对置式动圈直线压缩机。The invented opposed moving coil linear compressor adopting long coil axial magnetization consists of a common base 0, a left cylinder liner 1, a left permanent magnet 2, a left upper yoke 3, a left lower yoke 4, Left current-carrying coil 5, left coil bobbin 6, left piston 7, left upper plate spring group 8, left lower plate spring group 9, left upper pressing structure 10, left lower pressing structure 11, left Upper support structure 12, left lower support structure 13, left displacement sensor core 14, left displacement sensor coil 15, left displacement sensor support 16, left casing 17, right cylinder liner 1′, right permanent Magnet 2', right upper yoke 3', right lower yoke 4', right current-carrying coil 5', right bobbin 6', right piston 7', right upper plate spring group 8', right The lower leaf spring group 9', the right upper pressing structure 10', the right lower pressing structure 11', the right upper supporting structure 12', the right lower supporting structure 13', the right displacement sensor core 14', the right The displacement sensor coil 15', the right displacement sensor support 16', and the right casing 17' are composed together. It is characterized in that the overall structure adopts an opposed type to offset the mechanical vibration generated by the left and right parts, that is, it is symmetrical with the vertical center line 40 Shaft, all parts and structural arrangement of the left part and the corresponding parts and structural arrangement of the right part are mirror images of each other; the horizontal axis 50 indicates the axial direction; the common machine base 0 is composed of the left part cylinder 41, the right part cylinder 41' and the common outlet Composed of air holes 42; the left cylinder liner 1 is embedded in the left cylinder 41 with an interference fit, and the right cylinder liner 1' is embedded in the right cylinder 41' with an interference fit; the left permanent magnet 2 is a cylinder shaped structure, the central position is processed with a left magnet internal through hole 43 with a diameter of d along the axial direction; the left upper yoke 3 is a cylindrical structure, and its outer diameter is equal to that of the left permanent magnet 2, and the central position The inner through hole 44 of the left upper yoke with a diameter of d is machined in the axial direction; the left lower yoke 4 is a U-shaped structure, and the inner diameter of the U-shaped body is greater than the outer diameter of the left permanent magnet 2, at the center of the bottom of the U-shaped body The inner through hole 45 of the left lower yoke with a diameter of d is machined in the axial direction; the left permanent magnet 2 is magnetized to saturation in the axial direction, and then the left upper yoke 3 and the left lower yoke 4 connect the left permanent magnet 2 Completely wrapped in it, the left end face 18 of the left upper yoke is flush with the left end face 19 of the left lower yoke, the right end face 20 of the left upper yoke is closely attached to the left end face 21 of the left permanent magnet, and the right end face of the left permanent magnet 22 and the left end surface 23 of the left lower yoke are closely attached together; the left permanent magnet 2, the left upper yoke 3, and the left lower yoke 4 jointly form a left annular air gap 46, and the left current-carrying coil 5 concentrically Inserted into the left annular air gap 46, the right permanent magnet 2', the right upper yoke 3', and the right lower yoke 4' jointly form the right annular air gap 46', and the right current-carrying coil 5' is the same as The center is inserted into the right annular air gap 46'; the axial heights of the left current-carrying coil 5 and the right current-carrying coil 5' are both h; the maximum strokes of the left piston 7 and the right piston 7' are equal is s; the axial thicknesses of the left upper yoke 3 and the right upper yoke 3′ are both δ, and satisfy the relation: h>s+δ, to ensure that the stable magnetic field is always within the current-carrying coil during the entire piston stroke; the upper left support and the right end surface 24 are supported on the left end surface 19 of the left lower yoke, and the two are fastened by screws. The left side of the left upper support structure 12 is processed into an upper annular plane 25; the right end surface 47 of the lower left support is supported on the left side 48 of the common machine base, and the two are welded together; the left front side 26 of the lower left support is supported on the left lower yoke On the right end face 27 of the iron, the two are fastened by screws, and the lower left side of the left lower support structure 13 is processed into a lower annular plane 28; The left upper group outer edge 29 is formed, and the left upper group inner edge 30 is formed on the inner edge, and a left upper group spring center hole 31 with a diameter of d is machined in the axial direction at the central part, wherein the left upper group outer edge 29 is placed on the left upper support structure 12 above the upper annular plane 25, and fastened by screws; the left lower plate spring group 9 is formed by superimposing a number of single leaf spring sheets, forming the outer edge 32 of the lower left group on the outer edge, and the inner edge of the lower left group on the inner edge 33. A central hole 34 of the left lower group spring body with a diameter of d is machined axially at the central part, wherein the outer edge 32 of the left lower group is placed on the lower annular plane 28 of the left lower support structure 13 and fastened by screws; The left piston 7 is made up of the left piston head 35, the left piston middle transition platform 36 and the left piston rod 37, and the left rod thread section 49 with a length of 2mm is processed at the end of the left piston rod 37, and the left piston head 35 The outer diameter of the left cylinder 41 is 20 μm smaller than the inner diameter of the left cylinder 41, while ensuring that the diameter of the left piston rod 37 is less than d; The inner through hole 43 of the left magnet, the inner through hole 44 of the left upper yoke, the center hole 31 of the left upper group spring body; 37 are fastened together, and the left lower plate structure 11 fastens the inner edge 33 of the left lower group and the middle transition table 36 of the left piston together, thereby ensuring that the left current-carrying coil 5, the left coil skeleton 6 and the left piston 7 , the left upper leaf spring group 8, and the left lower leaf spring group 9 are connected as a whole that can move at the same time; the left iron core threaded section 51 matched with the left rod threaded section 49 is processed inside the left displacement sensor iron core 14, The left rod threaded section 49 is screwed into the left iron core threaded section 51 and fastened; the left part displacement sensor coil 15 fastened together with the left part displacement sensor support 16 is set outside the left part displacement sensor iron core 14, and the left part The displacement sensor support 16 is further supported on the left upper support structure 12 and fastened together with it; the left casing 17 is welded and fixed with the left lower support outer end surface 52 through the left casing outer end surface 61, thereby forming a left airtight Cavity, the left cylinder liner 1, the left permanent magnet 2, the left upper yoke 3, the left lower yoke 4, the left current-carrying coil 5, the left coil skeleton 6, the left piston 7, the left Upper plate spring group 8, left lower plate spring group 9, left upper pressing structure 10, left lower pressing structure 11, left upper support The supporting structure 12, the lower supporting structure 13 of the left part, the iron core 14 of the displacement sensor of the left part, the coil 15 of the displacement sensor of the left part, the support 16 of the displacement sensor of the left part, and the casing 17 of the left part are all covered therein; The corresponding components and structural arrangement on the left are mirror images of the vertical center line 40, and the right casing 17' is welded and fixed by the outer end surface 61' of the right casing and the outer end surface 52' of the lower right support to form a closed cavity on the right. Right cylinder liner 1', right permanent magnet 2', right upper yoke 3', right lower yoke 4', right current-carrying coil 5', right coil bobbin 6', right piston 7' , Right upper leaf spring group 8', right lower leaf spring group 9', right upper pressing structure 10', right lower pressing structure 11', right upper supporting structure 12', right lower supporting structure 13', The right displacement sensor core 14', the right displacement sensor coil 15', the right displacement sensor support 16', and the right casing 17' are all covered in it, thus forming a kind of opposed type that adopts long coil axial magnetization Dynamic linear compressor.

所发明的采用长线圈轴向充磁的对置式动圈直线压缩机的制造方法可按如下方法实施：The invented manufacturing method of the opposed moving coil linear compressor adopting the axial magnetization of the long coil can be implemented as follows:

图2为所发明的采用长线圈轴向充磁的对置式动圈直线压缩机的平面剖视图；以垂直中心线40为对称轴而互为镜像体的左部所有部件与右部相应部件需采用同一批次生产的零件以使个体间的差异最小化；Fig. 2 is a plane sectional view of the invented opposed moving coil linear compressor adopting long coil axial magnetization; with the vertical center line 40 as the axis of symmetry, all the parts on the left and the corresponding parts on the right that are mirror images of each other need to adopt Parts produced in the same batch to minimize individual variation;

图3为共用机座0的立体剖视图；共用机座0采用机械强度高、热膨胀系数小的钛合金材料制作，采用五轴机床同时加工出左部气缸41和右部气缸41′，保证左部气缸41和右部气缸41′关于垂直中心线40对称，并保证左部气缸41和右部气缸41′的同轴度优于1.0μm，同时保证上述两气缸的内孔圆度均优于0.5μm；在左部气缸41和右部气缸41′加工完毕后，使用同一五轴机床加工出共用出气孔42，保证共用出气孔42与左部气缸41以及右部气缸41′的垂直度均优于2.0μm；Figure 3 is a three-dimensional sectional view of the shared machine base 0; the shared machine base 0 is made of titanium alloy material with high mechanical strength and small thermal expansion coefficient, and the left cylinder 41 and the right cylinder 41' are simultaneously processed by a five-axis machine tool to ensure that the left cylinder The cylinder 41 and the right cylinder 41' are symmetrical about the vertical center line 40, and the coaxiality between the left cylinder 41 and the right cylinder 41' is guaranteed to be better than 1.0 μm, and the roundness of the inner holes of the above two cylinders is better than 0.5 μm; After the left cylinder 41 and the right cylinder 41 ' are processed, use the same five-axis machine tool to process the shared air outlet 42 to ensure that the verticality of the shared air outlet 42 and the left cylinder 41 and the right cylinder 41 ' is uniform Better than 2.0μm;

图4为左部气缸衬套1的立体剖视图（对于左右互为镜像体的部件，附图中一般只给出左部的详细示意图，而制造方法则将左部和右部部件一同叙述，下同）；左部气缸衬套1及右部气缸衬套1′均采用硬度大于58的模具钢材料使用慢走丝线切割的方法加工成圆筒状，保证左部气缸衬套1及右部气缸衬套1′的外径分别比左部气缸41及右部气缸41′的内径大0.8mm，然后采用过盈配合和热胀冷缩的方式分别镶嵌入左部气缸41及右部气缸41′内，具体镶嵌方法如下：将如图3所示的共用机座0整体放置于内部温度为160℃的恒温加热箱内均匀加热5小时，在共用机座0取出恒温加热箱前7分钟，将左部气缸衬套1及右部气缸衬套1′同时放置于液氮中浸泡，在共用机座0从恒温加热箱取出的同时，将左部气缸衬套1及右部气缸衬套1′从液氮中取出，然后使用机械外力将左部气缸衬套1及右部气缸衬套1′分别推入左部气缸41及右部气缸41′内部，从而保证左部气缸衬套1及右部气缸衬套1′的外壁分别与左部气缸41及右部气缸41′的内壁紧密结合；然后使用坐标磨床对左部气缸衬套1及右部气缸衬套1′的内孔进行精细研磨，保证其内孔圆度均优于0.5μm；Figure 4 is a three-dimensional sectional view of the left cylinder liner 1 (for the left and right parts that are mirror images of each other, generally only the detailed schematic diagram of the left part is given in the drawings, and the manufacturing method is described together with the left and right parts, below The same); the left cylinder liner 1 and the right cylinder liner 1′ are made of mold steel with a hardness greater than 58 and processed into a cylindrical shape by slow wire cutting to ensure that the left cylinder liner 1 and the right cylinder The outer diameter of the bushing 1' is 0.8mm larger than the inner diameter of the left cylinder 41 and the right cylinder 41' respectively, and then it is inserted into the left cylinder 41 and the right cylinder 41' respectively by means of interference fit and thermal expansion and contraction. Inside, the specific inlay method is as follows: place the shared machine base 0 as shown in Figure 3 in a constant temperature heating box with an internal temperature of 160°C and heat it evenly for 5 hours, and 7 minutes before taking out the shared machine base 0 from the constant temperature heating box, put The left cylinder liner 1 and the right cylinder liner 1′ are soaked in liquid nitrogen at the same time, and the left cylinder liner 1 and the right cylinder liner 1’ are taken out from the constant temperature heating box at the same time. Take it out from the liquid nitrogen, and then push the left cylinder liner 1 and the right cylinder liner 1' into the left cylinder 41 and the right cylinder 41' by mechanical external force, so as to ensure that the left cylinder liner 1 and the right The outer wall of the upper cylinder liner 1' is tightly combined with the inner wall of the left cylinder liner 41 and the right liner 41' respectively; then use a coordinate grinder to finely grind the inner holes of the left liner liner 1 and the right liner liner 1' , to ensure that the roundness of the inner hole is better than 0.5 μm;

图5为左部活塞7的平面剖视图；左部活塞7及右部活塞7′均采用机械强度高、热膨胀系数小的钛合金材料制作，首先采用数控机床加工出毛坯，然后采用坐标磨床进行精细研磨，保证左部活塞头35及右部活塞头35′的圆度均优于0.5μm，并保证左部活塞杆37和右部活塞杆37′沿轴向的跳动低于3.0μm，以及左部活塞杆37与左部活塞头35的垂直度优于1.0μm，右部活塞杆37′与右部活塞头35′的垂直度优于1.0μm；在左部活塞杆37和右部活塞杆37′的末端使用精密数控机床分别加工出左杆螺纹段49和右杆螺纹段49′；左部活塞7及右部活塞7′工作时的最大行程均设计为s，由限位结构保证行程精度优于2.0μm；Figure 5 is a plane sectional view of the left piston 7; both the left piston 7 and the right piston 7' are made of titanium alloy material with high mechanical strength and small thermal expansion coefficient, and the blank is first processed by a numerical control machine tool, and then refined by a jig grinder. Grinding, to ensure that the roundness of the left piston head 35 and the right piston head 35' is better than 0.5 μm, and to ensure that the axial runout of the left piston rod 37 and the right piston rod 37' is less than 3.0 μm, and that the left The verticality of the first piston rod 37 and the left piston head 35 is better than 1.0 μm, and the verticality of the right piston rod 37 ′ and the right piston head 35 ′ is better than 1.0 μm; The end of 37' uses precision numerical control machine tools to process the left rod thread section 49 and the right rod thread section 49' respectively; the maximum stroke of the left piston 7 and the right piston 7' is designed to be s, and the stroke is guaranteed by the limit structure Accuracy better than 2.0μm;

图6为左部上板弹簧组8与左部上压片结构10的组合示意图，图7为左部下板弹簧组9与左部下压片结构11的组合示意图；左部上压片结构10、左部下压片结构11以及右部上压片结构10′、右部下压片结构11′均由机械强度较高、剩磁较低的金属材料采用数控机床加工制作而成，加工精度均优于9.0μm；左部上板弹簧组8、左部下板弹簧组9以及右部上板弹簧组8′、右部下板弹簧组9′均由若干片薄片板弹簧叠加组成，单片薄片板弹簧的厚度和数量由具体应用所需要的弹性刚度决定，材质为铍青铜或不锈钢，采用光刻的方法精确加工出内部型线，内部型线可以是螺旋形，也可以是直臂形，型线要求平滑、无毛刺、无折角，并通过板簧振动试验机进行超过10⁸个循环以上的疲劳检验；Fig. 6 is a schematic diagram of the combination of the left upper leaf spring group 8 and the left upper pressing structure 10, and Fig. 7 is a combined schematic diagram of the left lower leaf spring group 9 and the left lower pressing structure 11; the left upper pressing structure 10, The lower tablet structure 11 on the left, the upper tablet structure 10' on the right, and the lower tablet structure 11' on the right are all made of metal materials with high mechanical strength and low residual magnetism using CNC machine tools, and the machining accuracy is better than 9.0 μm; the left upper leaf spring group 8, the left lower leaf spring group 9, the right upper leaf spring group 8', and the right lower leaf spring group 9' are all composed of several thin leaf springs. The thickness and quantity are determined by the elastic stiffness required by the specific application. The material is beryllium bronze or stainless steel. The internal molding line is precisely processed by photolithography. The internal molding line can be spiral or straight arm. The molding line requirements Smooth, no burrs, no knuckles, and more than 10 ⁸ cycles of fatigue testing through the leaf spring vibration testing machine;

内部型线为螺旋形的单片薄片板弹簧的示意图如图8所示，在薄片上以光刻法刻蚀出螺旋形型线38，从而自然形成螺旋形板簧臂39，外侧留出单片板弹簧外缘53，并在其上以光刻法均匀刻蚀出若干用于螺钉固定的螺钉孔54，在内侧留出单片板弹簧内缘55；As shown in Figure 8, the schematic diagram of a single-piece thin leaf spring with a spiral inner shape line is etched with a spiral shape line 38 on the sheet by photolithography, thereby naturally forming a spiral shape leaf spring arm 39, leaving a single leaf spring arm 39 outside. Leaf spring outer edge 53, and a number of screw holes 54 for screw fixing are evenly etched on it by photolithography, leaving a single leaf spring inner edge 55 on the inside;

内部型线为直臂形的单片薄片板弹簧的示意图如图9所示，在薄片上以光刻法刻蚀出直臂型板弹簧臂56以及运动臂57，外侧留出单片板弹簧外缘58，并在其上以光刻法均匀刻蚀出若干用于螺钉固定的螺钉孔59，在内侧留出单片板弹簧内缘60；The schematic diagram of a single-piece leaf spring with a straight arm-shaped internal profile is shown in Figure 9. A straight-arm leaf spring arm 56 and a moving arm 57 are etched on the sheet by photolithography, and a single leaf spring is left on the outside. Outer edge 58, and on it, evenly etches some screw holes 59 for screw fixing with photolithography method, leaves the inner edge 60 of monolithic plate spring in the inner side;

图10和图11分别为左部上支撑结构12和左部下支撑结构13的平面剖视图；左部上支撑结构12及左部下支撑结构13均由机械强度较高、剩磁较低的金属材料采用数控机床加工制作而成，加工精度均优于5.0μm；左部上支撑结构12的左侧使用精密数控机床加工成上环状平面25；左上支撑右端面24支撑于左部下轭铁左端面19之上，二者通过螺钉紧固；左下支撑右端面47支撑于共用机座左侧面48之上，二者通过电子束焊接技术焊接在一起，左下支撑左前侧面26支撑于左部下轭铁右端面27之上，二者通过螺钉紧固，左部下支撑结构13的左下侧面使用精密数控机床加工出下环状平面28，左部下支撑结构13的左上侧面使用精密数控机床加工出左下支撑外端面52；Fig. 10 and Fig. 11 are respectively the plane sectional views of the left upper support structure 12 and the left lower support structure 13; the left upper support structure 12 and the left lower support structure 13 are all made of metal materials with higher mechanical strength and lower residual magnetism Manufactured by CNC machine tools, the machining accuracy is better than 5.0 μm; the left side of the left upper support structure 12 is processed into an upper ring-shaped plane 25 using a precision CNC machine tool; the right end surface 24 of the left upper support is supported by the left end surface 19 of the left lower yoke Above, the two are fastened by screws; the lower left support and the right end surface 47 are supported on the left side 48 of the shared machine base, the two are welded together by electron beam welding technology, the left lower support and the left front side 26 are supported on the right end of the left lower yoke On the surface 27, the two are fastened by screws, the lower left side of the left lower support structure 13 is processed with a precision numerical control machine tool to form a lower annular plane 28, and the upper left side of the left lower support structure 13 is processed with a precision numerical control machine tool to produce the outer end surface of the left lower support 52;

图12为右部下支撑结构13′的平面剖视图；右部下支撑结构13′由机械强度较高、剩磁较低的金属材料采用数控机床加工制作而成，加工精度优于5.0μm，其右上侧面使用精密数控机床加工出左下支撑外端面52′；Figure 12 is a plane sectional view of the lower support structure 13' on the right; the lower support structure 13' on the right is made of a metal material with high mechanical strength and low residual magnetism by CNC machine tools, and the machining accuracy is better than 5.0 μm. Use a precision numerical control machine tool to process the outer end surface 52' of the lower left support;

图13为左部位移传感器铁芯14的平面剖视图；左部位移传感器铁芯14及右部位移传感器铁芯14′均由纯铁材料制作，内部分别加工有与左杆螺纹段49及右杆螺纹段49′相配合的左铁芯螺纹段51及右铁芯螺纹段51′，左杆螺纹段49及右杆螺纹段49′分别旋入左铁芯螺纹段51及右铁芯螺纹段51′内并紧固；Fig. 13 is the plane sectional view of the left part displacement sensor iron core 14; Left part displacement sensor iron core 14 and right part displacement sensor iron core 14 ' are all made of pure iron material, and the inside is respectively processed with left rod threaded section 49 and right rod The threaded section 49' matches the left iron core threaded section 51 and the right iron core threaded section 51', and the left bar threaded section 49 and the right bar threaded section 49' are screwed into the left iron core threaded section 51 and the right iron core threaded section 51 respectively. 'inside and fastened;

左部线圈骨架6、右部线圈骨架6′、左部位移传感器支撑16、左部位移传感器支撑16′均由机械强度较高、剩磁较低的金属材料采用数控机床加工制作而成，加工精度均优于9.0μm；左部位移传感器线圈15及右部位移传感器线圈15′均由漆包铜线在相应骨架上绕制而成；The left bobbin 6, the right bobbin 6', the left displacement sensor support 16, and the left displacement sensor support 16' are all made of metal materials with high mechanical strength and low residual magnetism using CNC machine tools. The accuracy is better than 9.0μm; the left displacement sensor coil 15 and the right displacement sensor coil 15' are all wound on the corresponding skeleton by enamelled copper wire;

图14为左部永磁体2的平面剖视图；左部永磁体2及右部永磁体2′均采用磁能积较高的稀土永磁材料制作，使用激光加工的方式加工成型，左部永磁体2及右部永磁体2′均使用脉冲充磁机沿轴向充磁至饱和；Figure 14 is a plane sectional view of the left permanent magnet 2; the left permanent magnet 2 and the right permanent magnet 2' are made of rare earth permanent magnet materials with high magnetic energy products, and are processed and formed by laser processing. The left permanent magnet 2 and the right permanent magnet 2' are magnetized axially to saturation using a pulse magnetizer;

图15为左部上轭铁3的平面剖视图；左部上轭铁3及右部上轭铁3′均采用导磁率较高的纯铁材料，使用精密数控机床加工而成，左部上轭铁3及右部上轭铁3′的轴向厚度均为δ，加工精度均优于2.0μm；Figure 15 is a plane sectional view of the upper yoke 3 on the left; the upper yoke 3 on the left and the upper yoke 3' on the right are made of pure iron materials with high magnetic permeability, processed by precision numerical control machine tools, and the upper yoke on the left The axial thickness of the iron 3 and the right upper yoke 3′ are both δ, and the machining accuracy is better than 2.0 μm;

图16为左部下轭铁4的平面剖视图；左部下轭铁4及右部下轭铁4′均采用导磁率较高的纯铁材料，使用精密数控机床加工而成；Figure 16 is a plane sectional view of the lower yoke 4 on the left; the lower yoke 4 on the left and the lower yoke 4' on the right are all made of pure iron materials with high magnetic permeability and processed by precision numerical control machine tools;

图17为左部载流线圈5的示意图；左部载流线圈5及右部载流线圈5′均采用漆包铜线在固体支撑上绕制而成，漆包铜线的直径和厚度由需要提供的电机力决定；左部载流线圈5与右部载流线圈5′的轴向高度均为h，制作时由机床精度及绕制工艺保证h的精度优于2.0μm；Fig. 17 is the schematic diagram of left part current-carrying coil 5; Left part current-carrying coil 5 and right part current-carrying coil 5 ' all adopt enamelled copper wire to be wound on solid support and form, and the diameter and thickness of enameled copper wire are determined by The motor force that needs to be provided is determined; the axial heights of the left current-carrying coil 5 and the right current-carrying coil 5' are both h, and the accuracy of h is guaranteed to be better than 2.0 μm by the precision of the machine tool and the winding process during production;

图18为左部永磁体2、左部上轭铁3、左部下轭铁4以及左部载流线圈5的组合平面剖视图；左部上轭铁3与左部下轭铁4将左部永磁体2完全包裹其中，共同形成左部环状气隙46，左部载流线圈5同心地插入左部环状气隙46内；右部上轭铁3′与右部下轭铁4′将右部永磁体2′完全包裹其中，共同形成右部环状气隙46′，右部载流线圈5′同心地插入右部环状气隙46′内；左部上轭铁3、左部载流线圈5、左部活塞7以及右部上轭铁3′与右部载流线圈5′、右部活塞7′在制作时均需保证满足：h＞s+δ，以保证在整个活塞行程中，始终确保稳定磁场处在载流线圈之内；Figure 18 is a combined plane sectional view of the left permanent magnet 2, the left upper yoke 3, the left lower yoke 4, and the left current-carrying coil 5; the left upper yoke 3 and the left lower yoke 4 combine the left permanent magnet 2 completely wrapped in it to form the left annular air gap 46 together, and the left current-carrying coil 5 is concentrically inserted into the left annular air gap 46; the right upper yoke 3' and the right lower yoke 4' connect the right The permanent magnet 2' is completely wrapped in it, together forming the right annular air gap 46', the right current-carrying coil 5' is concentrically inserted into the right annular air gap 46'; the left upper yoke 3, the left current-carrying coil The coil 5, the left piston 7, the right upper yoke 3', the right current-carrying coil 5', and the right piston 7' all need to meet the following requirements during production: h>s+δ, so as to ensure that during the entire piston stroke , always ensure that the stable magnetic field is within the current-carrying coil;

图19和图20分别为左部机壳17及右部机壳17′的平面剖视图；左部机壳17及右部机壳17′均由机械强度高、结构致密、剩磁较低的金属材料使用精密数控机床加工制作成形；左部机壳外端面61与左下支撑外端面52使用电子束技术焊接在一起，形成左侧密闭腔体；右部机壳外端面61′与右下支撑外端面52′使用电子束技术焊接在一起，形成右部密闭腔体，对上述两个焊接完毕的密闭腔体均充入高纯氦气检验，耐压强度均需高于5.0MPa，氦气泄漏率均需低于3.0×10^-8Pa·m³/s。Fig. 19 and Fig. 20 are the plane sectional views of left part casing 17 and right part casing 17'respectively; Left part casing 17 and right part casing 17' are all made of metal with high mechanical strength, compact structure and low residual magnetism. The material is processed and formed by precision CNC machine tools; the outer end surface 61 of the left casing and the outer end surface 52 of the lower left support are welded together by electron beam technology to form a closed cavity on the left; the outer end surface 61' of the right casing is connected to the outer surface of the lower right support. The end faces 52' are welded together by electron beam technology to form a closed cavity on the right. The above two welded closed cavities are filled with high-purity helium for inspection, and the compressive strength must be higher than 5.0MPa. Helium leakage All rates need to be lower than 3.0×10 ^-8 Pa·m ³ /s.