CN103915358B - Process-corner automatic detection device and method - Google Patents
- ️Wed Feb 08 2017
CN103915358B - Process-corner automatic detection device and method - Google Patents
Process-corner automatic detection device and method Download PDFInfo
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- CN103915358B CN103915358B CN201210591270.5A CN201210591270A CN103915358B CN 103915358 B CN103915358 B CN 103915358B CN 201210591270 A CN201210591270 A CN 201210591270A CN 103915358 B CN103915358 B CN 103915358B Authority
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- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
- H01L22/26—Acting in response to an ongoing measurement without interruption of processing, e.g. endpoint detection, in-situ thickness measurement
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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- H01L21/67005—Apparatus not specifically provided for elsewhere
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- H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
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Abstract
The invention proposes a process-corner automatic detection device and method. The process-corner automatic detection device includes a phase discriminator, a voltage-controlled oscillator, a loop frequency divider and an automatic judgment and correction module. Frequency signals input at an input end of the phase discriminator include process corner information. The automatic judgment and correction module outputs different control words to the voltage-controlled oscillator according to the size of a control voltage output by the phase discriminator; the voltage-controlled oscillator outputs frequency bands under the control of the control words and the output frequency bands are in one-to-one correspondence to the sizes of the control words. The loop frequency divider feeds back frequency-band information output by the voltage-controlled oscillator to the phase discriminator and adjusts the size of the control voltage output by the phase discriminator. When the size of the control voltage output by the phase discriminator meets a threshold demand, the sizes of the control words are related with the sizes of processor corners. The process-corner automatic detection device and method perform automatic correction on a multiband phase-locked loop through the control words output by the automatic judgment and correction module so that process-corner automatic detection is realized and a demand that a high-precision analog circuit should correct process-corner deviations is met.
Description
Technical field
The present invention relates to technical field of circuit design, particularly to a kind of detection dress being capable of automatic detection process corner size Put and method.
Background technology
Process corner reflects the situation of change of some technological parameters during chip production, such as gate oxide thickness, and doping is dense Degree etc., the performance parameter variations scope of current chip is generally given in the form of process corner.If adopting 3-corner model, Have TT, FF and SS3 corners.TT refers to NFET-Typical corner and PFET-Typical corner（N-type field is imitated Answer the typical process angle of transistor and the typical process angle of p-type field-effect transistor）, FF refer to NFET-Fast corner and PFET-Fast corner（The fast process corner of n type field effect transistor and the fast process corner of p-type field-effect transistor）, SS refers to NFET-Slowcorner and PFET-Slow corner（The slow process corner of n type field effect transistor and p-type field-effect transistor Slow process corner）.Wherein, Typical refers to transistor drive current is a mean value, and it is that it is maximum that Fast refers to driving current Value, and Slow to refer to driving current be its minimum of a value, this is it is understood that fast for carrier mobility from measurement interpretation Slowly.
In the case of at present to chip index high request, generally require to adjust relevant configuration for the deviation of technique, Eliminate the penalty that process deviation brings as far as possible, so could obtain the high performance chip of high accuracy.In this context, Process corner automatic detection circuit is had on chip be just particularly important.
Existing process angle detection method is the size judging process corner using the delay of standard block, the delay of standard block By supply voltage, temperature and process corner determine, if two of which variable, such as supply voltage and temperature are fixed, then process corner Determined by this time delay, although this method is capable of detecting when the size of process corner, this scheme needs two electricity Source, circuit is complicated.
Content of the invention
It is contemplated that at least solving technical problem present in prior art, especially innovatively propose a kind of process corner Automatic detection device and method.
In order to realize the above-mentioned purpose of the present invention, according to the first aspect of the invention, the invention provides a kind of technique Angle automatic detecting device, including：Phase discriminator, voltage controlled oscillator, loop divider and automatic decision correct module, described phase demodulation Device, voltage controlled oscillator and loop divider constitute phaselocked loop, the input of described phase discriminator respectively with described loop divider Output end is connected with External frequency signals, and described External frequency signals contain technique angle information；Described automatic decision corrects module Input be connected with the output end of described phase discriminator, described automatic decision corrects the control that module exports according to described phase discriminator Voltage swing is to the different control word of described voltage controlled oscillator output；The input of described voltage controlled oscillator respectively with described phase demodulation The output end that the output end of device corrects module with described automatic decision is connected, and described voltage controlled oscillator is in the control of described control word Lower output band, the size of described frequency band is corresponded with the size of described control word；The input of described loop divider with The output end of described voltage controlled oscillator is connected, and the band information that described voltage controlled oscillator exports is fed back to by described loop divider Described phase discriminator, the control voltage size of adjustment described phase discriminator output, when the control voltage of described phase discriminator output is slight greatly In first threshold voltage and more than second threshold voltage when, according to described automatic decision correct module output control word size Corresponding frequency band size obtains the size of described process corner.
The technique angle automatic detecting device of the present invention by automatic decision correct module output control word to multifrequency locking phase Ring is corrected the automatic detection it is achieved that process corner automatically, meets high-precision analog circuit and technique angular displacement is repaiied Positive needs.
In the preferred embodiment of the present invention, described automatic decision correction module includes first comparator and second Comparator, the positive pole of the positive pole of described first comparator and the second comparator control voltage phase all with the output of described phase discriminator Even, the negative electrode of described first comparator is connected with first threshold voltage, the negative electrode of described second comparator and second threshold voltage It is connected, described first threshold voltage is higher than described second threshold voltage.
The automatic decision of the present invention is corrected module and is included first comparator and the second comparator, by control voltage and first The size of threshold voltage and second threshold voltage compares the control word size controlling output, realizes automatic to multiband phaselocked loop Correct.
In another kind of preferred embodiment of the present invention, described voltage controlled oscillator output under the control of different control words Frequency band according to by little greatly to order number consecutively be：band_1,band_2,…,band_L,band_L+1,band_L+ 2 ..., band_m, band_m+1, band_m+2 ..., band_n, band_n+1, band_n+2 ..., when the output of described phase discriminator Control voltage size be less than first threshold voltage and during more than second threshold voltage, the frequency band of described voltage controlled oscillator is stablized defeated When going out, if stablizing the corresponding frequency band number of frequency band is band_L+1, process corner is fast process corner, if stablize frequency band corresponded to Frequency band number be band_n+1, then process corner is slow process corner, if stablize the corresponding frequency band number of frequency band for band_m+1, Then process corner is typical process angle, and described L, n, m are positive integer, described n>m>L.
The present invention utilizes the input-output characteristic of voltage controlled oscillator, and different control words are controlled with lower voltage controlled oscillator output Frequency band according to by little greatly to order number consecutively, phase discriminator output control voltage meet threshold requirement, voltage controlled oscillator When frequency band stably exports, stablize the corresponding frequency band number of frequency band and reflect the size of process corner it is achieved that the automatic inspection of process corner Survey.
In the preferred embodiment of the present invention, low pass filter, the input of described low pass filter are also included It is connected with the output end of described phase discriminator, the input of the output end of described low pass filter and described voltage controlled oscillator and described The input that automatic decision corrects module is respectively connected with.
The present invention filters noise and the interference component of phase discriminator output voltage by low pass filter, carries high-tension pure Only.
In another kind of preferred embodiment of the present invention, also include charge pump, the input of described charge pump with described The output end of phase discriminator is connected, and the output end of described charge pump is connected with the input of described low pass filter.
The present invention is adjusted by the voltage swing that charge pump exports to phase discriminator.
In order to realize the above-mentioned purpose of the present invention, according to the second aspect of the invention, the invention provides a kind of technique Angle automatic testing method, comprises the steps：
S1：Automatic decision is corrected module and is exported initial control word k to voltage controlled oscillator；
S2：After phaselocked loop reaches stable state, judge that described automatic decision corrects the control voltage of module input and the One threshold voltage and the magnitude relationship of second threshold voltage；
S3：If control voltage is more than first threshold voltage, make k=k-1, if control voltage is less than Second Threshold electricity Pressure, then make k=k+1, return to step S2, if control voltage is less than first threshold voltage and is more than second threshold voltage, execute Step S4；
S4：Output control word k simultaneously checks the corresponding frequency band number of described control word k, thus judging process corner size.
The present invention passes through to adjust the control word size that automatic decision corrects module output, realizes the automatic of multiband phaselocked loop Correct it is achieved that the automatic detection of process corner, meet the needs that high-precision analog circuit is modified to technique angular displacement.
The additional aspect of the present invention and advantage will be set forth in part in the description, and partly will become from the following description Obtain substantially, or recognized by the practice of the present invention.
Brief description
The above-mentioned and/or additional aspect of the present invention and advantage will become from reference to the description to embodiment for the accompanying drawings below Substantially and easy to understand, wherein：
Fig. 1 is the structural representation of technique angle automatic detecting device in the present invention first preferred embodiment；
Fig. 2 is the structural representation of technique angle automatic detecting device in the present invention second preferred embodiment；
Fig. 3 is the output characteristic curve of preferably applying in mode voltage controlled oscillator a kind of in the present invention；
Fig. 4 is that the present invention is a kind of preferably applies the structural representation that automatic decision in mode corrects module；
Fig. 5 is the flow chart of present invention process angle automatic testing method.
Reference：
1 phase discriminator；2 voltage controlled oscillators；3 loop divider；4 automatic decisions correct module；5 low pass filters；6 electric charges Pump；7 first comparators；8 second comparators.
Specific embodiment
Embodiments of the invention are described below in detail, the example of described embodiment is shown in the drawings, wherein from start to finish The element that same or similar label represents same or similar element or has same or like function.Below with reference to attached The embodiment of figure description is exemplary, is only used for explaining the present invention, and is not considered as limiting the invention.
In describing the invention, unless otherwise prescribed and limit, it should be noted that term " installation ", " being connected ", " connection " should be interpreted broadly, for example, it may be the connection of mechanical connection or electrical connection or two element internals, can To be to be joined directly together it is also possible to be indirectly connected to by intermediary, for the ordinary skill in the art, can basis Concrete condition understands the concrete meaning of above-mentioned term.
The invention provides a kind of technique angle automatic detecting device, as shown in figure 1, this technique angle automatic detecting device includes Phase discriminator 1, voltage controlled oscillator 2, loop divider 3 and automatic decision correct module 4.Wherein, phase discriminator 1, voltage controlled oscillator 2 and Loop divider 3 constitutes phaselocked loop.Automatic decision corrects the automatic correction that module 4 is used for phaselocked loop output band.As Fig. 1 institute Show, the input of phase discriminator 1 is connected with the output end of loop divider 3 and External frequency signals Refclk respectively, loop divide The input of device 3 is connected with the output end of voltage controlled oscillator 2, and the band signal that voltage controlled oscillator 2 is exported by loop divider 3 is anti- Feed phase discriminator 1, External frequency signals Refclk contains technique angle information.The output end of phase discriminator 1 corrects mould with automatic decision The input of block 4 is connected, and the size that automatic decision corrects control voltage Vctrl that module 4 exports according to phase discriminator 1 is shaken to voltage-controlled Swing device 2 and export different size of control word.The input of voltage controlled oscillator 2 output end and the automatic decision with phase discriminator 1 respectively The output end correcting module 4 is connected, voltage controlled oscillator 2 output band under the control of control word, under same process corner, frequency band The size of size and control word correspond；When process corner is different, the corresponding frequency band of identical control word is of different sizes.? In present embodiment, the size of control word controls the size of current of injection voltage controlled oscillator 2, and different size of current makes voltage-controlled shaking Swing device 2 and export different frequency bands.In a kind of more preferred embodiment of the present invention, push in the control of different control words Controlled oscillator 2 output frequency band according to by little greatly to order number consecutively be：band_1,band_2,
Band_3 ..., control word and frequency band are one-to-one, and in the present embodiment, control word size can be by four Binary code represents, can design control word 0000 and correspond to frequency band band_1, control word 0001 corresponds to frequency band band_2, control Word 0010 corresponds to frequency band band_3, and the rest may be inferred.The input of loop divider 3 is connected with the output end of voltage controlled oscillator 2, ring The band information that voltage controlled oscillator 2 exports is fed back to phase discriminator 1 by road frequency divider 3, and then adjusts the control electricity of phase discriminator 1 output The size of pressure Vctrl, when control voltage Vctrl of phase discriminator 1 output meets threshold requirement, i.e. the size of control voltage Vctrl Less than first threshold voltage and more than second threshold voltage, after stabilized, the frequency band of voltage controlled oscillator 2 stably exports When, the size of control word is related to the size of process corner, can obtain technique according to the frequency band size corresponding to control word size The size at angle.
In the present embodiment, as shown in Fig. 2 this technique angle automatic detecting device also includes low pass filter 5, low pass filtered The input of ripple device 5 is connected with the output end of phase discriminator 1, the output end input with voltage controlled oscillator 2 respectively of low pass filter 5 The input that module 4 is corrected with automatic decision in end is connected.In the other preferred embodiment of the present invention, this process corner is examined automatically Survey device also include charge pump 6, the input of charge pump 6 is connected with the output end of phase discriminator 1, the output end of charge pump 6 with low The input of bandpass filter 5 is respectively connected with.
As shown in Fig. 2 External frequency signals Refclk and the signal through loop divider 3 frequency dividing enter phase discriminator 1, phase demodulation The pulse width signal that device 1 compares output enters charge pump 6, and 6 pulse width information of charge pump are converted to current signal, and current signal is through low Bandpass filter 5 output voltage signal, automatic decision corrects the size that module 4 adjusts control word according to voltage signal, and then adjusts The frequency of the output band of voltage controlled oscillator 2, frequency signal arrives phase discriminator 1 through loop divider 3 frequency dividing output, in phase discriminator 1 In be compared with External frequency signals Refclk.
Fig. 3 shows the input-output characteristic curve at typical process angle for the voltage controlled oscillator 2, the different curves pair in Fig. 3 Answer the control of different control words.In figure flock is that the size of control voltage Vctrl of phase discriminator 1 output meets threshold requirement When, after stabilized, the Frequency point of voltage controlled oscillator 2 output locking.
In the present embodiment, the frequency band that voltage controlled oscillator 2 exports under the control of different control words is according to size order Number consecutively, in a preferred embodiment of the present invention, the frequency of voltage controlled oscillator 2 output under the control of different control words Band according to by little greatly to order number consecutively be：band_1,band_2,…,band_L,band_L+1,band_L+2,…, Band_m, band_m+1, band_m+2 ..., band_n, band_n+1, band_n+2 ..., control word and frequency band are one a pair Answer.In a more preferred embodiment of the present invention, control word 0000 can be designed and correspond to frequency band band_1, control Word 0001 corresponds to frequency band band_2, and control word 0010 corresponds to frequency band band_3, and the rest may be inferred.Point flock is corresponding for Fig. 3 medium frequency It is frequency band band_m+1, but when considering the change of process corner, in the case of slow process corner, whole frequency band can drag down, frequency band band_ At this moment m+1 also drags down, the frequency values step-down that it covers, and can not cover Frequency point flock, covers frequency this when The frequency band being just above frequency band band_m+1 of rate point flock, such as frequency band band_n+1.Equally, in fast process corner situation Under, whole frequency band meeting lifting, frequency band band_m+1 at this moment also lifting, the frequency values that it covers uprise, and can not cover Frequency point flock, covers the frequency band being just less than frequency band band_m of Frequency point flock, such as frequency band this when band_L+1.
In the present embodiment, the type selecting of voltage controlled oscillator 2 is the voltage controlled oscillator based on ring oscillator, this Sample, under same control voltage Vctrl, the speed of process corner is just reflected on the frequency height of oscillator output band.? In present embodiment, can first set the excursion of process corner, by emulation, obtain, under different process angle, covering frequency The frequency band number information of rate point flock, for example, determines the numerical value of m, n and L, makes typical process corner correspond to frequency band band_m+1, Slow process corner corresponds to frequency band band_n+1, and fast process corner corresponds to frequency band band_L+1.Because slow process corner can allow voltage-controlled Oscillator 2 output frequency step-down under same input voltage, so when process corner is slow process corner, whole in Fig. 3 Frequency band can move down.Fast process corner is contrary, and the whole frequency band in Fig. 3 can move up.When actually detected, work as phase discriminator Control voltage Vctrl of 1 output meets threshold requirement, when the frequency band of voltage controlled oscillator 2 stably exports, if stablize frequency band corresponded to Frequency band number be band_L+1, then process corner is fast process corner, if stablize the corresponding frequency band number of frequency band for band_n+1, Then process corner is slow process corner, if stablizing the corresponding frequency band number of frequency band is band_m+1, process corner is typical process angle, L, n, m are positive integer, and n>m>L..
In the present embodiment, as shown in figure 4, automatic decision corrects module 4 includes first comparator 7 and the second comparator 8, the positive pole of the positive pole of first comparator 7 and the second comparator 8 is all connected with control voltage Vctrl, the negative electrode of first comparator 7 It is connected with first threshold voltage VH, the negative electrode of the second comparator 8 is connected with second threshold voltage VL, and first threshold voltage VH is higher than Second threshold voltage VL.In the present embodiment, the size of control voltage Vctrl of phase discriminator 1 output threshold value to be met will Seeking Truth refers to control voltage Vctrl and is less than first threshold voltage VH and is more than second threshold voltage VL.In other preferred of the present invention In embodiment, automatic decision corrects the first comparator 7 of module 4 and the annexation of the input of the second comparator 8 also may be used With as follows, the negative pole of the positive pole of first comparator 7 and the second comparator 8 is all connected with control voltage Vctrl, first comparator 7 Negative electrode be connected with first threshold voltage VH, the positive pole of the second comparator 8 is connected with second threshold voltage VL, now control voltage The threshold requirement that the size of Vctrl meets is constant, is still that control voltage Vctrl is less than first threshold voltage VH and is more than the second threshold Threshold voltage VL.
Automatic decision corrects External frequency signals Refclk and control voltage Vctrl of module 4, External frequency signals Refclk provides clock signal, when after phaselocked loop institute phase required time, control voltage Vctrl and automatic decision is entangled First threshold voltage VH in positive module 4 and second threshold voltage VL are compared, as shown in Figure 4.If control voltage Vctrl More than first threshold voltage VH, then output control word automatic decision being corrected module 4 increases, and thus means corresponding frequency band Cover is the frequency band of higher frequency；On the contrary, if control voltage Vctrl is less than second threshold voltage VL, then automatic decision is entangled The output control word of positive module 4 reduces, and thus mean corresponding frequency band covering is the frequency band of more low frequency.If control voltage Vctrl be located between first threshold voltage VH and second threshold voltage VL, then explanation lock successfully, now the size of control word and The size of process corner is related, and that is, now output control word just can correctly reflect process corner.It should be noted that control voltage Vctrl can be affected by process corner, because the present invention is designed to the structure of multiband, the control electricity of whole voltage controlled oscillator 2 The narrow scope that the corresponding single frequency band of pressure Vctrl covers, thus finally embody technique angle information be control word rather than The size of control voltage Vctrl.
In the present embodiment, correct module 4 with reference to automatic decision to illustrate with the situation of slow process corner, due to Slow process corner can allow whole frequency band decline, thus the corresponding frequency band range of frequency band band_m+1 can not cover flock this Individual Frequency point.Through repeatedly comparing correction, increase control word, complete in band_n+1 to lock, at this moment band_n+1 corresponds to Output control word just reflect the situation of slow process corner.
It should be noted that due to the impact of temperature, under different temperatures, the corresponding frequency band of slow process corner is also likely to be band_ N or band_n+2, but what the corresponding control word of these frequency bands was connected to, as long as therefore control word is in a little error Within the scope of, can be regarded as correctly reflecting slow process corner, control word under different temperatures can be set by mistake in the present invention Difference scope.In the same manner, under different temperatures, the fast corresponding frequency band of process corner is also likely to be band_L or band_L+2, under different temperatures The corresponding frequency band in typical process angle is also likely to be band_m or band_m+2.
In the other preferred embodiment of the present invention, also to first pass through emulation, obtain, under typical process angle, covering The frequency band number information of Frequency point flock, that is, determine the numerical value of m, makes typical process corner correspond to frequency band band_m+1, works as reality When the corresponding control word of frequency band number covering Frequency point flock of detection exceedes the error range of setting, that is, think technique Angle has not been typical process corner, now, if the frequency band number covering Frequency point flock become big then it is assumed that process corner For slow process corner；If the frequency band number covering Frequency point flock diminishes then it is assumed that process corner is fast process corner.
As shown in figure 5, the invention provides a kind of process corner automatic testing method, comprising the steps：
S1：Automatic decision is corrected module 4 and is exported initial control word k to voltage controlled oscillator 2；
S2：After phaselocked loop reaches stable state, judge automatic decision correct module 4 input control voltage Vctrl with First threshold voltage VH and the magnitude relationship of second threshold voltage VL；
S3：If control voltage Vctrl is more than first threshold voltage VH, make k=k-1, if control voltage Vctrl is little In second threshold voltage VL, then make k=k+1, return to step S2, if control voltage Vctrl is less than first threshold voltage VH and big In second threshold voltage VL, then execution step S4；
S4：Output control word k simultaneously checks the corresponding frequency band number of control word k, thus judging process corner size, in this enforcement In mode, judge that the method for process corner is according to the corresponding frequency band number of control word k：By corresponding for different control words frequency band according to By little greatly to order number consecutively be：band_1,band_2,…,band_L,band_L+1,band_L+2,…,band_m, Band_m+1, band_m+2 ..., band_n, band_n+1, band_n+2 ..., when the corresponding frequency band number of control word k is During band_L+1, process corner is fast process corner, and when the corresponding frequency band number of control word k is band_n+1, process corner is slow work Skill angle, when the corresponding frequency band number of control word k is band_m+1, process corner is typical process angle（Average process angle）, wherein, L, n, m are positive integer, and n>m>L..
In the present embodiment, can also have following steps before step S1：By emulation, obtain in different process Under angle, cover the frequency band number information of Frequency point flock.In the other preferred embodiment of we, before step S1 Can also have following steps：By emulation, obtain the frequency band number letter covering Frequency point flock under typical process angle Breath.
In the preferred embodiment of the present invention, when starting detection, automatic decision is corrected module 4 and is given initial output Control word k, to voltage controlled oscillator 2, subsequently into wait state, waits certain time to be because that phaselocked loop needs the regular hour To complete to lock；After waiting for, judge input control voltage Vctrl of voltage controlled oscillator 2, if control voltage Vctrl is big In first threshold voltage VH, then the output control word that automatic decision corrects module 4 is k+1, subsequently into wait state, waits knot Proceed such deterministic process after bundle；If control voltage Vctrl is less than second threshold voltage VL, then automatic decision is corrected The control word of module 4 output is k-1, subsequently into wait state, waits and proceeds such deterministic process after terminating;If Control voltage Vctrl is more than second threshold voltage VL and is less than first threshold voltage VH, then automatic decision corrects module 4 output control Word processed is k.Then, check the corresponding frequency band number of k value in simulation result, if k is the corresponding control of frequency band Band_n+1 Word, then judge that process corner is slow process corner;If k is the control word of corresponding frequency band Band_m+1, judge process corner for allusion quotation The process corner of type；If k value is the control word of corresponding frequency band Band_L+1, judge that process corner is fast process corner.
The present invention passes through to adjust the control word size that automatic decision corrects module output, realizes the automatic of multiband phaselocked loop Correct it is achieved that the automatic detection of process corner, meet the needs that high-precision analog circuit is modified to technique angular displacement.
In the description of this specification, reference term " embodiment ", " some embodiments ", " example ", " specifically show The description of example " or " some examples " etc. means specific features, structure, material or the spy describing with reference to this embodiment or example Point is contained at least one embodiment or the example of the present invention.In this manual, to the schematic representation of above-mentioned term not Necessarily refer to identical embodiment or example.And, the specific features of description, structure, material or feature can be any One or more embodiments or example in combine in an appropriate manner.
Although an embodiment of the present invention has been shown and described, it will be understood by those skilled in the art that：Not Multiple changes, modification, replacement and modification can be carried out to these embodiments in the case of the principle of the disengaging present invention and objective, this The scope of invention is limited by claim and its equivalent.
Claims (7)
1. a kind of technique angle automatic detecting device is it is characterised in that include：Phase discriminator, voltage controlled oscillator, loop divider and from Module is corrected in dynamic judgement, and described phase discriminator, voltage controlled oscillator and loop divider constitute phaselocked loop,
The input of described phase discriminator is connected with the output end of described loop divider and External frequency signals respectively, described outside Frequency signal contains technique angle information；
The input that described automatic decision corrects module is connected with the output end of described phase discriminator, and described automatic decision corrects module Control voltage size according to the output of described phase discriminator is to the different control word of described voltage controlled oscillator output；
The input of described voltage controlled oscillator corrects the defeated of module with the output end of described phase discriminator and described automatic decision respectively Go out end to be connected, described voltage controlled oscillator output band under the control of described control word, the size of described frequency band and described control The size of word corresponds；
The input of described loop divider is connected with the output end of described voltage controlled oscillator, and described loop divider is by described pressure The band information of controlled oscillator output feeds back to described phase discriminator, the control voltage size of adjustment described phase discriminator output, works as institute State phase discriminator output control voltage size be less than first threshold voltage and more than second threshold voltage when, automatically sentenced according to described The disconnected frequency band size corresponding to the size of control word correcting module output obtains the size of described process corner.
2. technique angle automatic detecting device as claimed in claim 1 is it is characterised in that described automatic decision correction module includes First comparator and the second comparator, the positive pole of the positive pole of described first comparator and the second comparator is all defeated with described phase discriminator The control voltage going out is connected, and the negative electrode of described first comparator is connected with first threshold voltage, the negative electrode of described second comparator It is connected with second threshold voltage, described first threshold voltage is higher than described second threshold voltage.
3. technique angle automatic detecting device as claimed in claim 1 is it is characterised in that described under the control of different control words Voltage controlled oscillator output frequency band according to ascending order number consecutively be：band_1,band_2,…,band_L, band_L+1,band_L+2,…,band_m,band_m+1,ban d_m+2,…,band_n,band_n+1,band_n+ 2 ..., when the control voltage size of described phase discriminator output is less than first threshold voltage and is more than second threshold voltage, described When the frequency band of voltage controlled oscillator stably exports, if stablizing the corresponding frequency band number of frequency band is band_L+1, process corner is fast Process corner, if stablizing the corresponding frequency band number of frequency band is band_n+1, process corner is slow process corner, if stablizing frequency band pair The frequency band number answered is band_m+1, then process corner is typical process angle, and described L, n, m are positive integer, described n>m>L.
4. technique angle automatic detecting device as claimed in claim 1 is it is characterised in that also including low pass filter, described low The input of bandpass filter is connected with the output end of described phase discriminator, the output end of described low pass filter and described VCO The input of the input of device and described automatic decision correction module is respectively connected with.
5. technique angle automatic detecting device as claimed in claim 4 is it is characterised in that also include charge pump, described charge pump Input be connected with the output end of described phase discriminator, the input phase of the output end of described charge pump and described low pass filter Even.
6. a kind of process corner automatic testing method is it is characterised in that comprise the steps：
S1：Automatic decision is corrected module and is exported initial control word k to voltage controlled oscillator；
S2：After phaselocked loop reaches stable state, judge that described automatic decision corrects control voltage and first threshold of module input Threshold voltage and the magnitude relationship of second threshold voltage；
S3：If control voltage is more than first threshold voltage, make k=k-1, return to step S2, if control voltage is less than the Two threshold voltages, then make k=k+1, return to step S2, if control voltage is less than first threshold voltage and more than Second Threshold electricity Pressure, then execution step S4；
S4：Output control word k simultaneously checks the corresponding frequency band number of described control word k, thus judging process corner size.
7. process corner automatic testing method as claimed in claim 6 is it is characterised in that according to control word in described step S4 The corresponding frequency band number of k judges that the method for process corner is：By corresponding for different control words frequency band according to ascending order according to Secondary numbering is：band_1,band_2,…,band_L,band_L+1,band_L+2,…,band_m,band_m+1,band_m+ 2,…,band_n,band_n+1,
Band_n+2 ..., when the corresponding frequency band number of control word k is band_L+1, process corner is fast process corner, works as control word When the corresponding frequency band number of k is band_n+1, process corner is slow process corner, when the corresponding frequency band number of control word k is band_m+ When 1, process corner is typical process angle, and described L, n, m are positive integer, described n>m>L.
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| CN106601643B (en) * | 2016-11-15 | 2019-04-05 | 珠海格力电器股份有限公司 | Method, device and system for measuring MOS (Metal oxide semiconductor) process corner of chip |
| TWI707220B (en) * | 2019-05-23 | 2020-10-11 | 瑞昱半導體股份有限公司 | Voltage control circuit and voltage control method |
| CN112507654A (en) * | 2020-11-20 | 2021-03-16 | 上海华力微电子有限公司 | Method for acquiring parameters of SPICE (simulation program with Integrated Circuit emphasis) model at MOS (Metal oxide semiconductor) process corner |
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