CN106092008B - Coordinate unified calibrator and calibration method of high-precision compound measuring machine - Google Patents
- ️Tue Mar 12 2019
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Publication number
- CN106092008B CN106092008B CN201610496535.1A CN201610496535A CN106092008B CN 106092008 B CN106092008 B CN 106092008B CN 201610496535 A CN201610496535 A CN 201610496535A CN 106092008 B CN106092008 B CN 106092008B Authority
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- sensor
- coordinate
- frustum
- cone
- measuring machine Prior art date
- 2016-06-28 Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
A kind of the coordinate unification calibration device and scaling method of high-accuracy composite type measuring machine, calibration device is the calibration for integrating the combined type coordinate measuring machine of imaging sensor, touch sensor and non-contact displacement sensor, including cylindrical body, the upper surface of cylindrical body is fixedly installed the frustum of a cone, and the frustum of a cone and the cylindrical body are coaxially disposed.Method includes: that imaging sensor, touch sensor and non-contact displacement sensor is respectively adopted to measure calibration device；Premised on single sensor completes calibration, the measurement of workpiece is completed, the coordinate two-by-two or three's coordinate unification of imaging sensor, touch sensor, non-contact displacement sensor are specifically realized with a calibration device.The image sensor of that present invention is Polaroid to vertex of a cone circle, seeks the center of circle；Touch sensor two dimensional motion takes a little in periphery, seeks the center of circle, thus mechanical movement error when reducing measurement.Be conducive to the coordinate unification or location position of high-precision duplex measurement machine.
Description
Technical field
The present invention relates to a kind of calibration devices.More particularly to a kind of collection imaging sensor, touch sensor and non-contact The coordinate unification calibration device and scaling method of the combined type measuring machine of the multiple sensors such as displacement sensor.
Background technique
Coordinate measuring machine is the important means of workpiece size measurement, is widely applied in multiple industries.Currently, due to workpiece More precise treatment, specialization, structure is also more exquisite complicated, and traditional contact single-sensor is difficult to meet in many cases The demand of measurement.Multisensor duplex measurement machine can be realized previous single sensor and be difficult to the measurement work completed.By image Multiple sensors such as sensor, touch sensor and non-contact displacement sensor etc. are integrated on the same measuring machine, can It realizes different characteristic, the competitive type of size, cooperation type and complementary type measurement, is optimal the purpose of measurement.Such as: utilize image The diameter for measuring micropore utilizes the free form surface etc. of non-contact displacement sensor measurement camera lens.
The duplex measurement for realizing multisensor needs to carry out multiple sensors the unification of coordinate, i.e., by multiple coordinate systems It is unified to arrive under the same coordinate system.The usually material standard device conduct with certain geometrical characteristic or certain several geometrical characteristic combination Multisensor coordinate merges the medium of (registration), such as the standard ball that traditional coordinate machine examination timing institute longest uses.It is being used only On the measuring machine of single touch sensor, very good effect is shown using standard ball as material standard device, widely industry receives. Theoretically, touch sensor takes a little in many places in standard ball, can measure the three-dimensional coordinate of the centre of sphere；Imaging sensor measures The equatorial circle of standard ball can solve centre of sphere two-dimensional coordinate；The zenith pole of non-contact range sensor capture standard ball, can also Know centre of sphere two-dimensional coordinate.But when required precision is higher, as submicron order high-precision duplex measurement in, how will be multiple Under the different coordinates unification to the same coordinate system of sensor, above-mentioned conventional method Shortcomings.With non-contact Distance-sensing For device captures zenith pole, power limit is differentiated by range sensor, sensor obtains pole, when numerical value no longer changes, X --- a corresponding not unique point, a region on Y plane.For another example, imaging sensor is in standard ball equatorial circle When upper sampling site, very high request is proposed to light source lighting quality.In addition, the processing of sphere needs special process, when needs and other objects In conjunction with or reprocessing when all there is technology difficulty.
By the high-precision unification of the different coordinates of multiple sensors to the same seat in submicron order duplex measurement In mark system, to realize the high-acruracy survey of measuring machine.
Summary of the invention
The technical problem to be solved by the invention is to provide one kind can support the high-precision of measuring machine high-precision duplex measurement Spend the coordinate unification calibration device and scaling method of combined type measuring machine.
The technical scheme adopted by the invention is that: a kind of coordinate unification calibration device of high-accuracy composite type measuring machine and calibration Method.A kind of coordinate unification calibration device of high-accuracy composite type measuring machine, be for collect imaging sensor, touch sensor and The calibration for the combined type coordinate measuring machine that non-contact displacement sensor is integrated, including cylindrical body, the upper surface of the cylindrical body It is fixedly installed the frustum of a cone, the frustum of a cone and the cylindrical body are coaxially disposed.
A kind of scaling method of the coordinate unification calibration device of high-accuracy composite type measuring machine, includes the following steps:
1) imaging sensor, touch sensor and non-contact displacement sensor is respectively adopted to measure calibration device； Wherein:
The measurement of imaging sensor includes:
(1) frustum of a cone upper surface of any one calibration device in imaging sensor V alignment criteria device is focused, is focused The frustum of a cone upper surface of calibration device is in the visual field of imaging sensor V after clear；
(2) round edge circle of calibration device frustum of a cone upper surface is obtained by imaging sensor；
(3) center of circle of frustum of a cone upper surface is obtained by round edge circle；
(4) center of circle for obtaining step (3) is as position of the imaging sensor on combined type coordinate measuring machine or coordinate Point V0；
The measurement of touch sensor includes:
(1) using multiple points of touch sensor measurement cylindrical body (1) same cross-sectional periphery；
(2) center of circle in section, position of the center of circle as touch sensor on combined type coordinate measuring machine are extracted Or coordinate points P0；
The measurement of non-contact displacement sensor includes:
(1) frustum of a cone is scanned with Y-direction in X direction respectively using non-contact displacement sensor；
(2) center of the symmetrical centre or symmetry axis of the frustum of a cone as frustum of a cone upper surface is found out according to scanning result；
(3) position using the center of frustum of a cone upper surface as non-contact displacement sensor on combined type coordinate measuring machine Or coordinate points L0。
2) height Zp is obtained using the upper surface of touch sensor measurement cylinder；
3) height Z is obtained using the upper surface of the non-contact displacement sensor measurement frustum of a conel；
4) position of imaging sensor or coordinate points V under the X/Y plane of the same coordinate system are found out0, touch sensor Position or coordinate points P0Position or coordinate points L with non-contact displacement sensor0Between difference and cylinder upper surface it is high Spend the upper surface height Z of Zp and the frustum of a conelDifference, to obtain imaging sensor, touch sensor and non-contact displacement pass The positional relationship of sensor completes imaging sensor, touch sensor and the triangular coordinate unification of non-contact displacement sensor.
The coordinate unification calibration device and scaling method of high-accuracy composite type measuring machine of the invention, it is complete with single sensor Premised on calibration, the measurement of workpiece can be individually completed, specifically realizes imaging sensor, contact with a calibration device The coordinate two-by-two or three's coordinate unification of sensor, non-contact displacement sensor, it is simple to operate, it demarcates high-efficient.This hair Bright calibration device is made with cylindrical base material, classical turning process, by microstoning equipment clamped one time, technical maturity；And it can obtain Circularity, cylindricity, concentricity, verticality equal error less than tens Nano grades product.Imaging sensor is to vertex of a cone circle one Secondary imaging, seeks the center of circle；Touch sensor two dimensional motion takes a little in periphery, seeks the center of circle, reduces multi-dimensional movement band The influence entered, thus mechanical movement error when reducing measurement.Be conducive to coordinate unification or the position of high-precision duplex measurement machine Set calibration.
Detailed description of the invention
Fig. 1 is the structure chart of the coordinate unification calibration device of high-accuracy composite type measuring machine of the present invention；
Fig. 2 is the side view of the coordinate unification calibration device of high-accuracy composite type measuring machine of the present invention；
Fig. 3 is the top view of Fig. 2；
Fig. 4 is the structural schematic diagram of combined type coordinate measuring machine；
Schematic diagram when Fig. 5 is the coordinate unification calibration device calibration of high-accuracy composite type measuring machine of the present invention；
Fig. 6 is the model schematic in the combined type coordinate measuring machine calibration direction XY；
Fig. 7 is the model schematic of combined type coordinate measuring machine calibration Z-direction.
In figure
1: cylindrical body 2: the frustum of a cone
3: combined type coordinate measuring machine X-axis 4: combined type coordinate measuring machine Z axis
5: workbench (Y-axis) 6: calibration device
7: rack V: imaging sensor
P: touch sensor L: non-contact displacement sensor
Specific embodiment
Below with reference to embodiment and attached drawing to the coordinate unification calibration device and mark of high-accuracy composite type measuring machine of the invention The method of determining is described in detail.
As shown in figure 1, figure 2, figure 3, figure 4 and figure 5, the coordinate unification calibration device of high-accuracy composite type measuring machine of the invention, It is the mark for integrating the combined type coordinate measuring machine of imaging sensor, touch sensor and non-contact displacement sensor Fixed, the calibration device includes cylindrical body 1, and the upper top surface of the cylindrical body 1 is fixedly installed the frustum of a cone 2, the frustum of a cone 2 with The cylindrical body 1 is coaxially disposed.
Wherein:
The diameter lv of the 2 upper surface Zs of the frustum of a cone is less than the measurement view of the imaging sensor V of combined type coordinate measuring machine Field range.The size of the angle theta of top surface Zx is surveyed in combined type coordinate on bus (inclined-plane) Zm and cylindrical body 1 of the frustum of a cone 2 In the angular range that non-contact displacement sensor L on amount machine the is capable of measuring or upper surface of the frustum of a cone 2 is vertical with lower end surface Distance hlIn the measurement range of non-contact displacement sensor.
The scaling method of the coordinate unification calibration device of high-accuracy composite type measuring machine of the invention, includes the following steps:
1) imaging sensor V, touch sensor P shown in Fig. 4 and non-contact displacement sensor L is respectively adopted to mark Determine device to measure, wherein
The measurement of imaging sensor includes:
(1) 22 upper surface of the frustum of a cone of any one calibration device 2 in imaging sensor V alignment criteria device is focused, 22 upper surface of the frustum of a cone of calibration device 2 is in the visual field of imaging sensor V after focusing is clear；
(2) round edge circle of 2 upper surface Zs of the calibration device frustum of a cone is obtained by imaging sensor V；
(3) center of circle V of 2 upper surface of the frustum of a cone is obtained by round edge circle0；
(4) center of circle V for obtaining step (3)0As position of the imaging sensor V on combined type coordinate measuring machine or seat Mark.
Center of circle V at this time0Acquisition be it is Polaroid in imaging sensor, combined type coordinate measuring machine is without complete under mechanical displacement At, therefore be not in mechanical movement error.
The measurement of touch sensor includes:
(1) using multiple points of the cross-sectional periphery of touch sensor P measurement 1 same position Ysc of cylindrical body；
(2) center of circle P in section is extracted0, the center of circle P0As touch sensor P on combined type coordinate measuring machine Position or coordinate.
Combined type coordinate measuring machine Z axis is in the lock state at this time, only realizes that data obtain by 2 maintenance and operations of X-axis and Y-axis are dynamic It takes, it is dynamic compared to 3 commonly required maintenance and operations of sphere centre coordinate are measured, reduce mechanical movement error.
The measurement of non-contact displacement sensor includes:
(1) frustum of a cone 2 is scanned with Y-direction in X direction respectively using non-contact displacement sensor L；
(2) center of the symmetrical centre or symmetry axis of the frustum of a cone 2 as 2 upper surface of the frustum of a cone is found out according to scanning result L0；
(3) by the center L of 2 upper surface of the frustum of a cone0As non-contact displacement sensor L on combined type coordinate measuring machine Position or coordinate.
2) height Zp is obtained using the top surface of touch sensor measurement cylinder；
3) height Z is obtained using the upper surface of the non-contact displacement sensor measurement frustum of a cone 2l；
4) the location point V of imaging sensor0, touch sensor location point P0With the position of non-contact displacement sensor Point L0It should be the same point, still, step under the X/Y plane of the same coordinate system (its Z axis is parallel with the symmetry axis of calibration device) 1) the location point V of imaging sensor as shown in FIG. 6 is obtained using calibration device 6 of the invention0, touch sensor location point P0With the location point L of non-contact displacement sensor0Between difference, find out three location point V0、P0And L0Between alternate position spike △ YVL, △ YPV, △ YPL, △ XVP, △ XPL, △ XVL, by the difference obtain imaging sensor V, touch sensor P and The positional relationship in X/Y plane between non-contact displacement sensor L three；Obtain the difference △ Z of Z-direction coordinate as shown in Figure 7.
To achievable imaging sensor V, touch sensor P and the triangular coordinate system of non-contact displacement sensor L One or calibration.
In the scaling method of the coordinate unification calibration device of high-accuracy composite type measuring machine of the invention, the contact Sensor is the touch sensor for three coordinate measuring machine.The non-contact displacement sensor is Spectral Confocal sensing One of device, Laser Triangulation Sensor, laser focus sensor.The imaging sensor is using image measurer Imaging sensor used.
Claims (5)
1. a kind of coordinate unification calibration device of high-accuracy composite type measuring machine, is for collecting imaging sensor, touch sensor The calibration for the combined type coordinate measuring machine being integrated with non-contact displacement sensor, which is characterized in that including cylindrical body (1), institute The upper surface for stating cylindrical body (1) is fixedly installed the frustum of a cone (2), and the frustum of a cone (2) and the cylindrical body (1) are coaxially disposed, The imaging sensor that the diameter of the frustum of a cone (2) upper surface is less than combined type coordinate measuring machine measures field range, the circle Non-contact displacement sensing of the size of top surface angle on combined type coordinate measuring machine on the bus of frustum (2) and cylindrical body (1) In the angular range of device measurement, the upper surface of the frustum of a cone (2) and lower end surface vertical range are in non-contact displacement sensor In measurement range.
2. a kind of scaling method of the coordinate unification calibration device of high-accuracy composite type measuring machine described in claim 1, feature It is, includes the following steps:
1) imaging sensor, touch sensor and non-contact displacement sensor is respectively adopted to measure calibration device；Wherein:
The measurement of imaging sensor includes:
(1) frustum of a cone (2) upper surface of imaging sensor V alignment calibration device is focused, the circle for clear rear calibration device of focusing Frustum (2) upper surface is in the visual field of imaging sensor V；
(2) round edge circle of the calibration device frustum of a cone (2) upper surface is obtained by imaging sensor；
(3) center of circle of the frustum of a cone (2) upper surface is obtained by round edge circle；
(4) center of circle for obtaining step (3) is as position of the imaging sensor on combined type coordinate measuring machine or coordinate points V0；
The measurement of touch sensor includes:
(1) using multiple points of touch sensor measurement cylindrical body (1) same cross-sectional periphery；
(2) center of circle in section is extracted, the center of circle is as position of the touch sensor on combined type coordinate measuring machine or seat Punctuate P0；
The measurement of non-contact displacement sensor includes:
(1) frustum of a cone (2) are scanned with Y-direction in X direction respectively using non-contact displacement sensor；
(2) center of the symmetrical centre or symmetry axis of the frustum of a cone (2) as the frustum of a cone (2) upper surface is found out according to scanning result；
(3) position using the center of the frustum of a cone (2) upper surface as non-contact displacement sensor on combined type coordinate measuring machine Or coordinate points L0；
2) height Zp is obtained using the upper surface of touch sensor measurement cylindrical body (1)；
3) height Z is obtained using the upper surface of the non-contact displacement sensor measurement frustum of a cone (2)l；
4) position of imaging sensor or coordinate points V under the X/Y plane of the same coordinate system are found out0, touch sensor position Or coordinate points P0Position or coordinate points L with non-contact displacement sensor0Between difference and cylindrical body (1) upper surface it is high Spend the upper surface height Z of Zp and the frustum of a cone (2)lDifference, to obtain imaging sensor, touch sensor and non-contact displacement The positional relationship of sensor completes imaging sensor, touch sensor and the triangular coordinate system of non-contact displacement sensor One.
3. the scaling method of the coordinate unification calibration device of high-accuracy composite type measuring machine according to claim 2, feature It is, the touch sensor is the touch sensor for three coordinate measuring machine.
4. the scaling method of the coordinate unification calibration device of high-accuracy composite type measuring machine according to claim 2, feature It is, the non-contact displacement sensor is spectral confocal sensor, Laser Triangulation Sensor, laser focus sensor One of.
5. the scaling method of the coordinate unification calibration device of high-accuracy composite type measuring machine according to claim 2, feature It is, the imaging sensor is using imaging sensor used in image measurer.
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| CN110793439B (en) * | 2019-10-25 | 2021-04-20 | 天津大学 | A Coordinate Unification Standard and Coordinate Unification Method of Multi-sensor Measuring Machine |
| CN110954041B (en) * | 2019-12-25 | 2021-09-24 | 中国计量科学研究院 | Calibration method of three-dimensional thread measuring instrument |
| CN111238372B (en) * | 2020-02-24 | 2021-05-25 | 重庆市计量质量检测研究院 | Synchronous detection method for joint position error of double-compound coordinate measurement system |
| CN112611325B (en) * | 2020-12-07 | 2022-05-24 | 东莞市兆丰精密仪器有限公司 | Calibration method of laser center and calibration method of laser center synchronous with image center |
| CN115420237A (en) * | 2022-07-27 | 2022-12-02 | 深圳市辰卓科技有限公司 | Calibration method and device of image measuring instrument, image measuring instrument and storage medium |
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| US7869026B2 (en) * | 2007-12-21 | 2011-01-11 | United Technologies Corp. | Targeted artifacts and methods for evaluating 3-D coordinate system measurement accuracy of optical 3-D measuring systems using such targeted artifacts |
| CN102980542B (en) * | 2012-10-31 | 2015-04-29 | 天津大学 | Multiple-sensor united calibration method |
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Effective date of registration: 20210111 Address after: 300350 No.3, Wanggang Road, Jinnan Economic Development Zone (West District), Tianjin Patentee after: ATV (Tianjin) Technology Co.,Ltd. Address before: 300072 Tianjin City, Nankai District Wei Jin Road No. 92 Patentee before: Tianjin University |
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