CN109556548A - For detecting the standard and joint error detection method of joint error - Google Patents
- ️Tue Apr 02 2019
CN109556548A - For detecting the standard and joint error detection method of joint error - Google Patents
For detecting the standard and joint error detection method of joint error Download PDFInfo
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- CN109556548A CN109556548A CN201811427274.3A CN201811427274A CN109556548A CN 109556548 A CN109556548 A CN 109556548A CN 201811427274 A CN201811427274 A CN 201811427274A CN 109556548 A CN109556548 A CN 109556548A Authority
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- 238000001514 detection method Methods 0.000 title claims abstract description 28
- 238000005259 measurement Methods 0.000 claims abstract description 71
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 33
- 238000005070 sampling Methods 0.000 claims description 23
- 238000000034 method Methods 0.000 claims description 11
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 5
- 229910052782 aluminium Inorganic materials 0.000 claims description 5
- 238000009826 distribution Methods 0.000 claims description 4
- 229910000997 High-speed steel Inorganic materials 0.000 claims description 3
- 239000000696 magnetic material Substances 0.000 claims description 3
- 238000004806 packaging method and process Methods 0.000 claims 3
- 238000012545 processing Methods 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 5
- 239000004411 aluminium Substances 0.000 description 3
- 241000208340 Araliaceae Species 0.000 description 2
- 235000005035 Panax pseudoginseng ssp. pseudoginseng Nutrition 0.000 description 2
- 235000003140 Panax quinquefolius Nutrition 0.000 description 2
- 239000007795 chemical reaction product Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 235000008434 ginseng Nutrition 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
- G01B21/042—Calibration or calibration artifacts
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/30—Computing systems specially adapted for manufacturing
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- General Physics & Mathematics (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
本发明涉及一种用于检测联合误差的标准器，包括下表面为平面的底座，在所述底座上表面围绕同一中心点O环形分布有至少3个竖直的测量孔，并且测量孔的中心均在以中心点O为圆心、R为半径的圆形曲线上；所述测量孔由同轴线的锥孔和圆孔构成，锥孔的小端与圆孔一端连接，锥孔的小端直径等于圆孔直径；所述圆孔直径d为10mm≤d≤51mm，圆孔的高度c≤0.3mm，圆孔的圆度小于1μm；所述锥孔的锥角θ为30°≤θ≤60°。本发明还涉及一种联合误差检测方法，用于检测多传感器测量系统的联合误差，采用本发明的标准器进行联合误差检测。本发明解决了现有技术中的标准器不能定量检测联合误差量值的技术问题，能够用于定量检测联合误差量值，能够提高检测效率。
The invention relates to a standard device for detecting joint errors, comprising a base with a flat lower surface, at least three vertical measuring holes are annularly distributed around the same center point O on the upper surface of the base, and the center of the measuring holes is All are on a circular curve with the center point O as the center and R as the radius; the measuring hole is composed of a coaxial taper hole and a round hole, the small end of the tapered hole is connected with one end of the round hole, and the small end of the tapered hole is The diameter is equal to the diameter of the circular hole; the diameter d of the circular hole is 10mm≤d≤51mm, the height of the circular hole c≤0.3mm, and the roundness of the circular hole is less than 1μm; the taper angle θ of the tapered hole is 30°≤θ≤ 60°. The invention also relates to a joint error detection method, which is used to detect the joint error of the multi-sensor measurement system, and uses the standard device of the present invention to carry out joint error detection. The invention solves the technical problem that the standard device in the prior art cannot quantitatively detect the joint error value, can be used for quantitatively detecting the joint error value, and can improve the detection efficiency.
Description
Technical field
The present invention relates to a kind of standard, especially a kind of joint error for detecting multi-sensor measurement system is detected Standard.The invention further relates to a kind of joint error detection methods.
Background technique
With the rapid development of the advanced manufacturing fields such as automobile and motorcycle, aerospace, high-speed rail, ship, medical instrument, greatly Amount high-end product has used complex parts, these parts have the characteristics that Analysis On Multi-scale Features size and measurement difficulty are big, precision Directly affect product final mass and service life.Whole features that any single-sensor cannot all complete such part are surveyed Amount.In geometric measurement field, multisensor coordinate measuring system utilizes the complementation between optics-image-touch sensor Property, become the important means of the more element high-acruracy surveys of complex parts, and the combined type of integrated dissimilar sensor is surveyed Amount mode also just becomes the important trend of industrial detection.According to statistics, multisensor coordinate measuring machine is mostly distributed in each enterprise The high-end product of industry manufactures manufacture field.By taking the advanced manufacturing industry in Chongqing as an example, ChangAn Automobile, Lifan, Chang'an industry, tetrad instrument The many enterprises such as instruments and meters, Chongqing Machine Tool, Qijiang gear have all introduced different types of multisensor coordinate measuring machine, are used for vapour Vehicle mold, cylinder cover, turbine, blade, cam, fuselage and the more element three-dimensional geometries of the complex parts in Anomalistic space type face are surveyed Amount.
Standard is the key that coordinate measuring system verifying detection and reverification test.Due to imaging sensor, optical sensing Device belongs to 2D gauge head more, using non-contact measurement；Touch sensor belongs to 3D gauge head, using contact measurement mode；Cause This, needs to find a kind of standard that three kinds of sensor measurements can be applicable in.In consideration of it, inventor devises one kind for more The porous plate standard of sensor measuring system, referring to Chinese patent " the porous plate standard for multi-sensor measurement system And joint error detection method (publication No. CN107063330A) ", which needs to process by topological structure multiple Measured hole, on the one hand causing standard, structure is complicated, and processing and manufacturing difficulty is big, and another party makes since the quantity of measured hole is more Sample path it is long, sampled point substantial amounts, detection efficiency has to be hoisted.Defect more outstanding is: being confined to qualitative sentence Whether disconnected joint error is qualified, it is impossible to be used in quantitatively calculates the magnitude of joint error.But the magnitude of joint error can be used in The measurement error for compensating multi-sensor measurement system is of great significance to measurement accuracy is improved.
Summary of the invention
Aiming at the above shortcomings existing in the prior art, the present invention provides a kind of for detecting the standard of joint error, To solve the technical issues of standard in the prior art is unable to quantitative detection joint error magnitude, it can be used in quantitative detection connection Error magnitude is closed, can be improved detection efficiency.
In order to solve the above technical problems, present invention employs following technological means: a kind of for detecting the mark of joint error Quasi- device is the pedestal of plane including lower surface, and there is at least three on surface around same central point O annular spread on the base Vertical measured hole, and the center of measured hole is being the center of circle, R on the circular curve of radius using central point O；The measurement Hole is made of the taper hole of coaxial line and circular hole, and the small end of taper hole is connect with circular hole one end, and it is straight that the end diameter of taper hole is equal to circular hole Diameter；The Circularhole diameter d is 10mm≤d≤51mm, and height c≤0.3mm of circular hole, the circularity of circular hole is less than 1 μm；The taper hole Taper angle theta be 30 °≤θ≤60 °.
Preferably, the quantity of the measured hole is 3, and the angle between adjacent measured hole is 120 °.
Preferably, single measured hole is formed on single hole standard, each single hole standard according to measured hole distribution side Formula is mounted on the base surface, so that each measured hole is around concentric O annular spread.
Preferably, base upper surface is plane；Each single hole standard is mounted on pedestal by corresponding cylindrical holder Upper surface；The height of each cylindrical holder is all different.
Preferably, the base lower surface is equipped with level(l)ing mechanism；The level(l)ing mechanism includes corresponding each cylinder The support leg of bracket setting；The support leg includes coming directly towards with externally threaded threaded rod and hemispherical, threaded rod lower end and half The circular flat of Spherical plug connects；The cylindrical holder is equipped with the internal thread hole for connecting support leg；The support leg Threaded rod by the through-hole on pedestal through pedestal and screwing in the internal thread hole of cylindrical holder, thus with cylindrical holder screw thread Connection.
It preferably, further include the cap being encapsulated on pedestal, the cap, which corresponds to, is equipped with phase at each column position The convex cover answered, the top surface of each convex cover are flushed with corresponding single hole standard top surface, and the top surface of convex cover is provided with can expose single hole The via hole of measured hole on standard；The cap is all made of aluminium with pedestal and is made；The single hole standard uses high-speed steel It is made, the cylindrical holder is made of magnetic material, so that single hole standard can be located in cylinder by magnetic attraction Cradle top surface.
The present invention also provides a kind of joint error detection methods, for detecting the joint error of multi-sensor measurement system, The sensor that there is the multi-sensor measurement system n kind to be used for dimensional measurement, using described in claim 1 for detecting connection Close the standard of error；The standard has m measured hole, m >=3；The following steps are included:
Step 1: using the highest sensor of measurement accuracy in the sensor as reference sensor；
Step 2: standard being lain in a horizontal plane on the workbench of multi-sensor measurement system, then each sensor is successively right Each measured hole on standard is sampled, and sampled point is on the circular curve that conical bore and circular hole are had a common boundary；Enable i-th kind of sensing Device is combined into the sampling point set of j-th of measured hole And it enables with reference to sensing Device is combined into the sampling point set of j-th of measured hole
Step 3: according to reference sensor to the sampled point set of each measured hole, fitting the ginseng of corresponding measured hole respectively Fitting circle is examined, and reference center coordinate is obtained according to reference fitting circle, wherein the reference center coordinate of j-th of measured hole is Oj (xj,yj,zj)；
Step 4: according to each sensor to the combined sampling point set of same measured hole, the joint for fitting the measured hole is quasi- Circle is closed, and fits the joint fitting circle of whole measured holes；Then each measurement is obtained according to the joint fitting circle of each measured hole The joint central coordinate of circle in hole；Wherein, combined sampling point set of each sensor to j-th of measured holeThe joint central coordinate of circle O ' of j-th of measured holej(x′j,y′j,z′j)；
Step 5: calculate the co-location error in joint error:
Firstly, go out reference center coordinate O (x, y, z) using minimum circumscribed circle method and according to each reference center coordinate fitting, With the actual coordinate of reference center coordinate O (x, y, z) the central point O surrounded as measured hole；
Then, using minimum circumscribed circle method and according to each joint central coordinate of circle fit United Center coordinate O ' (x ', y ', Z '), with the measurement coordinate of United Center coordinate O ' (x ', y ', z ') the central point O surrounded as measured hole；
Finally, regarding United Center's coordinate as co-location error delta L at a distance from reference center coordinate, and by joint bit It sets error to be decomposed on three directions in X-axis, Y-axis, Z axis, to respectively obtain the co-location error on three directions Magnitude Δ x, Δ y, Δ z.
Preferably, it is also followed the steps below after step 5:
Step 6: calculating the joint form error in joint error: calculating form error for each measured hole respectively, so Joint form error of the maximum value in selected shape error as multi-sensor measurement system afterwards；Wherein, it is measured for j-th The form error in hole is calculated as follows: calculating the combined sampling point set of j-th of measured hole In all sampled points to joint central coordinate of circle O 'j(x′j,y′j,z′j) distance, and with the difference of maximum distance and minimum range work For the form error for j-th of measured hole；
Step 7: calculating the associating size error in joint error: scale error being calculated to each measured hole respectively, then Choose associating size error of the maximum value in scale error as multisensor device measuring system；Wherein, it is measured for j-th The scale error in hole is calculated as follows: the joint for calculating j-th of measured hole is fitted diameter of a circle, and to combine fitting circle Scale error of the difference of the nominal value of diameter and measured hole Circularhole diameter as j-th of measured hole.
Preferably, distance of the taper hole small end in each measured hole apart from base upper surface is all different；Also carry out Z axis joint The detection of error:
Firstly, calculating following difference according to the Z axis coordinate in joint central coordinate of circle: the Z axis in central coordinate of circle will be combined and sat Marking combination of two is one group, calculates the measurement difference of every group of combination, wherein the measurement difference of kth kind combination is Δ z 'k,M is the number of measured hole；
Then, following difference is calculated according to the Z axis coordinate in reference center coordinate: the Z axis in reference center coordinate is sat Marking combination of two is one group, calculates the reference difference of every group of combination, wherein the reference difference of kth kind combination is Δ zk,M is the number of measured hole；
Finally, calculating the difference of corresponding measurement difference and reference difference, as follows: Δ z 'k-Δzk, and to calculate Z axis joint error of the maximum difference arrived as multi-sensor measurement system.
Compared with prior art, the invention has the following beneficial effects:
1, the measured hole of standard of the invention is around same central point annular spread, so that only needing 3 measured holes just It is able to cooperate the detection that minimum circumscribed circle fitting process realizes joint error, the quantity of measured hole is greatly reduced, simplifies standard Structure reduces processing and manufacturing difficulty.
2, the distribution mode of measured hole not only simplifies structure, while being also the basis for quantitatively calculating joint error, especially Be that quantitative calculating for co-location error is particularly important: the position matching of multiple sensors is that co-location is caused to be missed The principal element of difference, according to the definition (measurement position is at a distance from physical location) of location error, reference sensor is according to this hair Bright standard, which carries out sampling, can fit the reference coordinate (as physical location) of central point, and multisensor is according to the present invention Standard carry out combined sampling and can fit the measurement position at center, so as to quantitatively calculate co-location error. However, standard in the prior art quantitatively can not calculate co-location error due to ununified center, it can only According to the location error of 3 measured holes randomly selected whether setover error threshold come qualitatively judge multisensor measurement system Whether the location error of system is qualified.
3, of the invention in order to which height of the taper hole small end apart from base upper surface realized in each measured hole is all different, respectively Provide two schemes: 1) measured hole is directly processed on pedestal, but the depth of measured hole is different；2) single measured hole quilt On single hole standard, each single hole standard is supported by the cylindrical holder of different height for processing.Due to the machining accuracy of measured hole It is more demanding, difficulty of processing is then increased using the first scheme；However, difficult processing can be substantially reduced using second scheme Degree, is easy to implement.
4, the height apart from pedestal of measured hole is designed as difference, successively carried out with identical difference it is incremental, to keep Z The linear increase of axis direction can be improved the precision of detection Z axis joint error.
5, level(l)ing mechanism is arranged in base lower surface, can be improved the levelness of pedestal, to improve detection accuracy.It adopts It uses support leg as level(l)ing mechanism, the contact area of level(l)ing mechanism and workbench can be greatly reduced, to reduce work Make influence of the platform to pedestal levelness.
6, support leg is threadedly coupled with cylindrical holder, is not only convenient for adjusting the height of support leg, and support leg also acts as Cylindrical holder is located in the effect on pedestal, it is ingenious in design, simplify the structure of standard.
7, single hole standard is located on cylindrical holder by magnetic attraction, right centered on the cross section of single hole standard Claim figure, and cylindrical holder can generate uniform magnetic field, to guarantee single hole standard by uniform magnetic force, in this way list The center of hole standard is overlapped with cylindrical holder center, is being the center of circle, R on the circular curve of radius using central point O.
8, cap can play the role of protecting single hole standard, and cap and pedestal, which are adopted, is formed from aluminium the standard of can reduce Weight, and cap be aluminum can by cylindrical holder generate magnetic field be isolated in cap, avoid to multisensor Measuring system generates magnetic interference.
9, joint error detection method of the invention has independence to the sampling of each measured hole, without establishing each measured hole Between sample path improve sampling efficiency to enormously simplify sampling process.
10, the magnitude for calculating co-location error that joint error detection method of the invention can be scientific and reasonable, from It and is to realize that the measurement error of compensation multi-sensor measurement system produces breakthrough progress.
11, joint error detection method of the invention give associating size error with combine the magnitude of form error, But due to scale error and form error be not between sensor with caused by, be to be determined by itself precision, no It is appropriate for error compensation.
Detailed description of the invention
Fig. 1 is the top view of present embodiment Plays device；
Fig. 2 is the structural schematic diagram of measured hole in present embodiment；
Fig. 3 is the main view of present embodiment Plays device；
Fig. 4 is the detection principle diagram of co-location error.
Specific embodiment
Further description of the technical solution of the present invention with reference to the accompanying drawings and detailed description.
As shown in Figures 1 and 2, a kind of for detecting the standard of joint error, it is the pedestal 1 of plane including lower surface, The measured hole 101 that same central point O annular spread has at least three vertical, and measured hole are surrounded in 1 upper surface of pedestal 101 center is being the center of circle, R on the circular curve of radius using central point O；The measured hole 101 by coaxial line taper hole It is constituted with circular hole, the small end of taper hole is connect with circular hole one end, and the end diameter of taper hole is equal to Circularhole diameter；The Circularhole diameter d For 10mm≤d≤51mm, height c≤0.3mm of circular hole, the circularity of circular hole is less than 1 μm；The taper angle theta of the taper hole is 30 °≤θ ≤60°。
The quantity of measured hole can be increased according to the size of standard, and standard size is bigger, the quantity of measured hole It is more；The pedestal 1 of standard can be cylindrical or prismatic.In present embodiment, pedestal 1 is the circle that radius is 60nm Cylindricality, the quantity of measured hole are 3, and the angle between adjacent measured hole is 120 °, the Circularhole diameter of measured hole be respectively 10nm, 10nm, 15nm, and be distributed in centered on 1 center of circle of pedestal, radius is on the circular curve of 36nm.
In order to realize that height of the taper hole small end in each measured hole apart from 1 upper surface of pedestal is all different, present invention difference Provide two schemes:
1) measured hole is directly processed on pedestal 1, but the depth of measured hole is different, specifically, table on the pedestal 1 Face is plane, and measured hole upper surface is flushed with 1 upper surface of pedestal；The depth of each measured hole is all different, and successively with equal Difference carries out incremental.
2) single measured hole is formed on single hole standard, and each single hole standard is by the cylindrical holder branch of different height Support.Specifically, as shown in figure 3, single measured hole is formed on single hole standard 3, each single hole standard 3 is according to measured hole Distribution mode is mounted on 1 upper surface of pedestal, so that each measured hole is around same center O annular spread；1 upper surface of pedestal is flat Face；Each single hole standard is mounted on 1 upper surface of pedestal by corresponding cylindrical holder 2；The height of each cylindrical holder 2 is not It is identical, and successively carried out with double altitudes difference incremental.
Since the requirement on machining accuracy of measured hole is higher, difficulty of processing is then increased using the first scheme；This is specific real Difficulty of processing can be substantially reduced using second scheme by applying mode, be easy to implement, and single hole mark can be replaced on pedestal 1 Quasi- device, to be combined into the standard of different size.
In this specific embodiment party, as shown in figure 3,1 lower surface of the pedestal is equipped with level(l)ing mechanism；The Level tune Mechanism includes the support leg 4 of corresponding each cylindrical holder setting；The support leg includes having externally threaded threaded rod and hemispherical Top, threaded rod lower end is connect with the circular flat that hemispherical comes directly towards；The cylindrical holder is equipped with for connecting support leg Internal thread hole；The threaded rod of the support leg runs through pedestal 1 by the through-hole on pedestal 1 and screws in the internal thread hole of cylindrical holder In, to be threadedly coupled with cylindrical holder.
It further include the cap (not shown) being encapsulated on pedestal 1, the cap pair in present embodiment Corresponding convex cover should be equipped at each column position, the top surface of each convex cover is flushed with corresponding single hole standard top surface, and convex cover Top surface be provided with the via hole that can expose the measured hole on single hole standard；The cap is all made of aluminium with pedestal 1 and is made；Institute It states single hole standard to be made of high-speed steel, the cylindrical holder is made of magnetic material, so that single hole standard energy It is enough that cylindrical holder top surface is located in by magnetic attraction.
A kind of joint error detection method, for detecting the joint error of multi-sensor measurement system, the multisensor The sensor that there is measuring system n kind to be used for dimensional measurement, using the mark for being used to detect joint error in present embodiment Quasi- device；The standard has m measured hole, m >=3；The following steps are included:
Step 1: using the highest sensor of measurement accuracy in the sensor as reference sensor；
Step 2: standard being lain in a horizontal plane on the workbench of multi-sensor measurement system, then each sensor is successively right Each measured hole on standard is sampled, and sampled point is on the circular curve that conical bore and circular hole are had a common boundary；Enable i-th kind of sensing Device is combined into the sampling point set of j-th of measured hole And it enables with reference to sensing Device is combined into the sampling point set of j-th of measured hole
Step 3: according to reference sensor to the sampled point set of each measured hole, fitting the ginseng of corresponding measured hole respectively Fitting circle is examined, and reference center coordinate is obtained according to reference fitting circle, wherein the reference center coordinate of j-th of measured hole is Oj (xj,yj,zj)；
Step 4: according to each sensor to the combined sampling point set of same measured hole, the joint for fitting the measured hole is quasi- Circle is closed, and fits the joint fitting circle of whole measured holes；Then each measurement is obtained according to the joint fitting circle of each measured hole The joint central coordinate of circle in hole；Wherein, combined sampling point set of each sensor to j-th of measured holeThe joint central coordinate of circle O ' of j-th of measured holej(x′j,y′j,z′j)；
Step 5: calculate the co-location error in joint error:
Firstly, go out reference center coordinate O (x, y, z) using minimum circumscribed circle method and according to each reference center coordinate fitting, With the actual coordinate of reference center coordinate O (x, y, z) the central point O surrounded as measured hole；
Then, using minimum circumscribed circle method and according to each joint central coordinate of circle fit United Center coordinate O ' (x ', y ', Z '), with the measurement coordinate of United Center coordinate O ' (x ', y ', z ') the central point O surrounded as measured hole；
Finally, as shown in figure 4, by United Center's coordinate at a distance from reference center coordinate be used as co-location error delta L, And decompose co-location error on three directions in X-axis, Y-axis, Z axis, to respectively obtain the joint on three directions Magnitude Δ x, Δ y, the Δ z of location error.
In present embodiment, also followed the steps below after step 5:
Step 6: calculating the joint form error in joint error: calculating form error for each measured hole respectively, so Joint form error of the maximum value in selected shape error as multi-sensor measurement system afterwards；Wherein, it is measured for j-th The form error in hole is calculated as follows: calculating the combined sampling point set of j-th of measured hole In all sampled points to joint central coordinate of circle O 'j(x′j,y′j,z′j) distance, and with the difference of maximum distance and minimum range work For the form error for j-th of measured hole；
Step 7: calculating the associating size error in joint error: scale error being calculated to each measured hole respectively, then Choose associating size error of the maximum value in scale error as multisensor device measuring system；Wherein, it is measured for j-th The scale error in hole is calculated as follows: the joint for calculating j-th of measured hole is fitted diameter of a circle, and to combine fitting circle Scale error of the difference of the nominal value of diameter and measured hole Circularhole diameter as j-th of measured hole.
In present embodiment, height of the taper hole small end apart from 1 upper surface of pedestal in each measured hole is all different, and It is successively carried out with identical difference incremental；Also carry out the detection of Z axis joint error:
Firstly, calculating following difference according to the Z axis coordinate in joint central coordinate of circle: the Z axis in central coordinate of circle will be combined and sat Marking combination of two is one group, calculates the measurement difference of every group of combination, wherein the measurement difference of kth kind combination is Δ z 'k,M is the number of measured hole；
Then, following difference is calculated according to the Z axis coordinate in reference center coordinate: the Z axis in reference center coordinate is sat Marking combination of two is one group, calculates the reference difference of every group of combination, wherein the reference difference of kth kind combination is Δ zk,M is the number of measured hole；
Finally, calculating the difference of corresponding measurement difference and reference difference, as follows: Δ z 'k-Δzk, and to calculate Z axis joint error of the maximum difference arrived as multi-sensor measurement system.
Claims (10)
1.一种用于检测联合误差的标准器，其特征在于：包括下表面为平面的底座，在所述底座上表面围绕同一中心点O环形分布有至少3个竖直的测量孔，并且测量孔的中心均在以中心点O为圆心、R为半径的圆形曲线上；所述测量孔由同轴线的锥孔和圆孔构成，锥孔的小端与圆孔一端连接，锥孔的小端直径等于圆孔直径；所述圆孔直径d为10mm≤d≤51mm，圆孔的高度c≤0.3mm，圆孔的圆度小于1μm；所述锥孔的锥角θ为30°≤θ≤60°。1. a standard device for detecting combined error, it is characterized in that: comprising the pedestal that the lower surface is a plane, on the upper surface of the pedestal, at least 3 vertical measuring holes are annularly distributed around the same center point O, and measure The center of the hole is on a circular curve with the center point O as the center and R as the radius; the measuring hole is composed of a coaxial tapered hole and a circular hole, the small end of the tapered hole is connected with one end of the circular hole, and the tapered hole is formed. The diameter of the small end is equal to the diameter of the circular hole; the diameter d of the circular hole is 10mm≤d≤51mm, the height of the circular hole c≤0.3mm, the circularity of the circular hole is less than 1μm; the taper angle θ of the tapered hole is 30° ≤θ≤60°. 2.根据权利要求1所述的用于检测联合误差的标准器，其特征在于：所述测量孔的数量为3个，相邻测量孔之间的夹角为120°。2 . The standard device for detecting joint error according to claim 1 , wherein the number of the measurement holes is 3, and the included angle between adjacent measurement holes is 120°. 3 . 3.根据权利要求1所述的用于检测联合误差的标准器，其特征在于：所述底座上表面为平面，测量孔上表面与底座上表面齐平；各测量孔的深度均不相同，并且依次以相等差值进行递增。3. The standard device for detecting joint error according to claim 1, characterized in that: the upper surface of the base is a plane, and the upper surface of the measuring hole is flush with the upper surface of the base; the depths of each measuring hole are different, And in turn increment by equal difference. 4.根据权利要求1所述的用于检测联合误差的标准器，其特征在于：单个测量孔被加工在单孔标准器上，各单孔标准器按照测量孔的分布方式安装在底座上表面，从而使得各测量孔绕同一中心O环形分布。4. The standard device for detecting combined errors according to claim 1, wherein a single measuring hole is processed on the single-hole standard device, and each single-hole standard device is installed on the upper surface of the base according to the distribution of the measuring holes , so that the measurement holes are distributed annularly around the same center O. 5.根据权利要求4所述的用于检测联合误差的标准器，其特征在于：底座上表面为平面；所述各单孔标准器通过对应的圆柱支架安装在底座上表面；各圆柱支架的高度均不相同，并且依次以相等高度差值进行递增。5. The standard device for detecting combined error according to claim 4, characterized in that: the upper surface of the base is a plane; the single-hole standard devices are installed on the upper surface of the base by corresponding cylindrical supports; The heights are all different, and are sequentially incremented by equal height differences. 6.根据权利要求5所述的用于检测联合误差的标准器，其特征在于：所述底座下表面设有水平调节机构；所述水平调节机构包括对应各圆柱支架设置的支撑脚；所述支撑脚包括带有外螺纹的螺纹杆与半球形顶头，螺纹杆下端与半球形顶头的圆形平面连接；所述圆柱支架上设有用于连接支撑脚的内螺纹孔；所述支撑脚的螺纹杆通过底座上的通孔贯穿底座并旋入圆柱支架的内螺纹孔中，从而与圆柱支架螺纹连接。6. The standard device for detecting joint error according to claim 5, characterized in that: the lower surface of the base is provided with a leveling mechanism; The support foot includes a threaded rod with an external thread and a hemispherical plug, and the lower end of the threaded rod is connected with the circular plane of the hemispherical plug; the cylindrical bracket is provided with an internal threaded hole for connecting the support foot; the thread of the support foot The rod penetrates through the base through the through hole on the base and is screwed into the inner threaded hole of the cylindrical support so as to be threadedly connected with the cylindrical support. 7.根据权利要求5或6所述的用于检测联合误差的标准器，其特征在于：还包括封装在底座上的封装盖，所述封装盖对应于各圆柱位置处设有相应的凸罩，各凸罩的顶面与相应单孔标准器顶面齐平，并且凸罩的顶面开有能够露出单孔标准器上的测量孔的过孔；所述封装盖与底座均采用铝制成；所述单孔标准器采用高速钢制成，所述圆柱支架采用磁性材料制成，从而使得单孔标准器能够被磁力吸合定位在圆柱支架顶面。7. The standard device for detecting joint error according to claim 5 or 6, characterized in that: further comprising a packaging cover packaged on the base, and the packaging cover is provided with a corresponding convex cover corresponding to each cylindrical position , the top surface of each convex cover is flush with the top surface of the corresponding single-hole standard device, and the top surface of the convex cover is provided with a via hole that can expose the measurement hole on the single-hole standard device; the packaging cover and the base are made of aluminum The single-hole standard is made of high-speed steel, and the cylindrical support is made of magnetic material, so that the single-hole standard can be magnetically attracted and positioned on the top surface of the cylindrical support. 8.一种联合误差检测方法，用于检测多传感器测量系统的联合误差，所述多传感器测量系统具有n种用于尺寸测量的传感器，其特征在于：采用权利要求1所述的用于检测联合误差的标准器；所述标准器具有m个测量孔，m≥3；包括以下步骤：8. A joint error detection method for detecting joint errors of a multi-sensor measurement system, the multi-sensor measurement system having n kinds of sensors for size measurement, characterized in that: using the method described in claim 1 for detecting A standard device for combined errors; the standard device has m measurement holes, m≥3; including the following steps: 步骤1：以所述传感器中测量精度最高的传感器作为参考传感器；Step 1: Take the sensor with the highest measurement accuracy among the sensors as the reference sensor; 步骤2：将标准器水平放置在多传感器测量系统的工作台上，然后各传感器依次对标准器上的各测量孔进行采样，采样点在圆锥孔与圆孔所交界的圆形曲线上；令第i种传感器对第j个测量孔的采样点集合为 并且令参考传感器对第j个测量孔的采样点集合为 Step 2: Place the standard horizontally on the workbench of the multi-sensor measurement system, and then each sensor samples each measuring hole on the standard in turn, and the sampling point is on the circular curve at the junction of the conical hole and the circular hole; let The set of sampling points of the i-th sensor for the j-th measurement hole is: And let the set of sampling points of the reference sensor for the jth measurement hole be 步骤3：根据参考传感器对各测量孔的采样点集合，分别拟合出对应个测量孔的参考拟合圆，并根据参考拟合圆获取参考圆心坐标，其中，第j个测量孔的参考圆心坐标为Oj(xj,yj,zj)；Step 3: According to the set of sampling points of each measuring hole by the reference sensor, fit the reference fitting circle of the corresponding measuring hole respectively, and obtain the coordinates of the reference circle center according to the reference fitting circle, wherein the reference circle center of the jth measuring hole is The coordinates are O j (x j , y j , z j ); 步骤4：根据各传感器对同一测量孔的联合采样点集合，拟合出该测量孔的联合拟合圆，并拟合出全部测量孔的联合拟合圆；然后根据各测量孔的联合拟合圆获取个各测量孔的联合圆心坐标；其中，各传感器对第j个测量孔的联合采样点集合第j个测量孔的联合圆心坐标O′j(x′j,y′j,z′j)；Step 4: According to the set of joint sampling points of each sensor for the same measurement hole, fit the joint fitting circle of the measurement hole, and fit the joint fitting circle of all the measurement holes; then according to the joint fitting of each measurement hole The circle obtains the joint center coordinates of each measurement hole; among them, the joint sampling point set of each sensor for the jth measurement hole The joint center coordinate of the jth measurement hole O' j (x' j , y' j , z' j ); 步骤5：计算联合误差中的联合位置误差：Step 5: Calculate the joint position error in the joint error: 首先，采用最小外接圆法并根据各参考圆心坐标拟合出参考中心坐标O(x,y,z)，以参考中心坐标O(x,y,z)作为测量孔所围绕的中心点O的实际坐标；First, the minimum circumscribed circle method is used and the reference center coordinates O(x, y, z) are fitted according to the coordinates of each reference circle center. actual coordinates; 然后，采用最小外接圆法并根据各联合圆心坐标拟合出联合中心坐标O′(x′,y′,z′)，以联合中心坐标O′(x′,y′,z′)作为测量孔所围绕的中心点O的测量坐标；Then, adopt the least circumscribed circle method and fit the joint center coordinates O'(x', y', z') according to the coordinates of each joint center, and take the joint center coordinates O' (x', y', z') as the measurement The measurement coordinates of the center point O around the hole; 最后，将联合中心坐标与参考中心坐标的距离作为联合位置误差ΔL，并将联合位置误差在X轴、Y轴、Z轴三个方向上进行分解，从而分别得到三个方向上的联合位置误差的量值Δx、Δy、Δz。Finally, the distance between the joint center coordinate and the reference center coordinate is taken as the joint position error ΔL, and the joint position error is decomposed in the three directions of the X axis, the Y axis, and the Z axis, so as to obtain the joint position error in the three directions respectively. The magnitude of Δx, Δy, Δz. 9.根据权利要求8所述的一种联合误差检测方法，其特征在于：步骤5之后还进行以下步骤：9. a kind of joint error detection method according to claim 8 is characterized in that: also carry out the following steps after step 5: 步骤6：计算联合误差中的联合形状误差：分别针对每个测量孔计算形状误差，然后选取形状误差中的最大值作为多传感器测量系统的联合形状误差；其中，针对第j个测量孔的形状误差按如下方式计算：计算第j个测量孔的联合采样点集合中所有采样点到联合圆心坐标O′j(x′j,y′j,z′j)的距离，并以最大距离与最小距离之差作为针对第j个测量孔的形状误差；Step 6: Calculate the joint shape error in the joint error: Calculate the shape error for each measurement hole respectively, and then select the maximum value in the shape error as the joint shape error of the multi-sensor measurement system; wherein, for the shape of the jth measurement hole The error is calculated as follows: Calculate the joint sampling point set of the jth measurement hole The distance between all sampling points in the joint circle center coordinate O′ j (x′ j , y′ j , z′ j ), and the difference between the maximum distance and the minimum distance is used as the shape error for the jth measurement hole; 步骤7：计算联合误差中的联合尺寸误差：分别对每个测量孔计算尺寸误差，然后选取尺寸误差中的最大值作为多传感器器测量系统的联合尺寸误差；其中，针对第j个测量孔的尺寸误差按如下方式计算：计算第j个测量孔的联合拟合圆的直径，并以联合拟合圆的直径与测量孔圆孔直径的名义值的差值作为第j个测量孔的尺寸误差。Step 7: Calculate the joint size error in the joint error: Calculate the size error for each measurement hole respectively, and then select the maximum value of the size error as the joint size error of the multi-sensor measurement system; The size error is calculated as follows: Calculate the diameter of the joint fitting circle of the jth measuring hole, and take the difference between the diameter of the joint fitting circle and the nominal value of the diameter of the circular hole of the measuring hole as the size error of the jth measuring hole . 10.根据权利要求8所述的一种联合误差检测方法，其特征在于：各测量孔中的锥孔小端距离底座上表面的高度均不相同，并依次以相同差值进行递增；还进行Z轴联合误差的检测：10. A joint error detection method according to claim 8, characterized in that: the heights of the small end of the tapered hole in each measuring hole from the upper surface of the base are all different, and are successively increased by the same difference; Joint error detection: 首先，根据联合圆心坐标中的Z轴坐标计算以下差值：将联合圆心坐标中的Z轴坐标两两组合为一组，计算每组组合的测量差值，其中，第k种组合的测量差值为m为测量孔的个数；First, calculate the following difference values according to the Z-axis coordinates in the joint circle center coordinates: Combine the Z-axis coordinates in the joint circle center coordinates into a group, and calculate the measurement difference of each group of combinations, where the measurement difference of the kth combination value is m is the number of measuring holes; 然后，根据参考圆心坐标中的Z轴坐标计算以下差值：将参考圆心坐标中的Z轴坐标两两组合为一组，计算每组组合的参考差值，其中，第k种组合的参考差值为m为测量孔的个数；Then, calculate the following difference values according to the Z-axis coordinates in the reference circle center coordinates: combine the Z-axis coordinates in the reference circle center coordinates into a group, and calculate the reference difference value of each group of combinations, where the reference difference of the kth combination is value is m is the number of measuring holes; 最后，计算相应测量差值与参考差值的差值，按如下公式：Δz′k-Δzk，并以计算得到的最大差值作为多传感器测量系统的Z轴联合误差。Finally, the difference between the corresponding measured difference and the reference difference is calculated according to the following formula: Δz′ k -Δz k , and the calculated maximum difference is used as the Z-axis joint error of the multi-sensor measurement system.
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