CN109556548B - Standard device for detecting joint error and joint error detection method - Google Patents
- ️Fri Sep 02 2022
CN109556548B - Standard device for detecting joint error and joint error detection method - Google Patents
Standard device for detecting joint error and joint error detection method Download PDFInfo
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- CN109556548B CN109556548B CN201811427274.3A CN201811427274A CN109556548B CN 109556548 B CN109556548 B CN 109556548B CN 201811427274 A CN201811427274 A CN 201811427274A CN 109556548 B CN109556548 B CN 109556548B Authority
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- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
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Abstract
本发明涉及一种用于检测联合误差的标准器，包括下表面为平面的底座，在所述底座上表面围绕同一中心点O环形分布有至少3个竖直的测量孔，并且测量孔的中心均在以中心点O为圆心、R为半径的圆形曲线上；所述测量孔由同轴线的锥孔和圆孔构成，锥孔的小端与圆孔一端连接，锥孔的小端直径等于圆孔直径；所述圆孔直径d为10mm≤d≤51mm，圆孔的高度c≤0.3mm，圆孔的圆度小于1μm；所述锥孔的锥角θ为30°≤θ≤60°。本发明还涉及一种联合误差检测方法，用于检测多传感器测量系统的联合误差，采用本发明的标准器进行联合误差检测。本发明解决了现有技术中的标准器不能定量检测联合误差量值的技术问题，能够用于定量检测联合误差量值，能够提高检测效率。
The invention relates to a standard device for detecting joint errors, comprising a base with a flat lower surface, at least three vertical measuring holes are annularly distributed around the same center point O on the upper surface of the base, and the center of the measuring holes is All are on a circular curve with the center point O as the center and R as the radius; the measuring hole is composed of a coaxial tapered hole and a circular hole, the small end of the tapered hole is connected to one end of the circular hole, and the small end of the tapered hole is connected to one end of the circular hole. The diameter is equal to the diameter of the circular hole; the diameter d of the circular hole is 10mm≤d≤51mm, the height of the circular hole c≤0.3mm, and the circularity of the circular hole is less than 1μm; the taper angle θ of the tapered hole is 30°≤θ≤ 60°. The invention also relates to a joint error detection method, which is used to detect the joint error of the multi-sensor measurement system, and uses the standard device of the present invention to carry out joint error detection. The invention solves the technical problem that the standard device in the prior art cannot quantitatively detect the joint error value, can be used for quantitatively detecting the joint error value, and can improve the detection efficiency.
Description
技术领域technical field
本发明涉及一种标准器，尤其是一种用于检测多传感器测量系统的联合误差检测的标准器。本发明还涉及一种联合误差检测方法。The present invention relates to a standard device, in particular to a standard device for detecting the joint error detection of a multi-sensor measurement system. The invention also relates to a joint error detection method.
背景技术Background technique
随着汽车摩托车、航空航天、高铁、船舶、医疗器械等先进制造领域的飞速发展，大量高端产品使用了复杂零件，这些零件具有多尺度特征尺寸和测量难度大的特点，其精度直接影响产品最终质量及使用寿命。任何单一传感器都不能完成此类零件的全部特征测量。在几何量测量领域，多传感器坐标测量系统利用光学-影像-接触式传感器之间的互补性，成为了复杂零部件多要素高精度测量的重要手段，而集成不同类型传感器的复合式测量方式也正成为工业检测的重要发展趋势。据统计，多传感器坐标测量机大都分布在各企业的高端产品制造加工领域。以重庆先进制造产业为例，长安汽车、力帆、长安工业、四联仪器仪表、重庆机床、綦江齿轮等多家企业都引进了不同类型的多传感器坐标测量机，用于汽车模具、汽缸盖、涡轮、叶片、凸轮、机身及不规则空间型面的复杂零件多要素三维几何测量。With the rapid development of advanced manufacturing fields such as automobiles and motorcycles, aerospace, high-speed rail, ships, and medical equipment, a large number of high-end products use complex parts. These parts have the characteristics of multi-scale feature size and difficult measurement, and their accuracy directly affects the product. Final quality and service life. No single sensor can measure all features of such parts. In the field of geometric measurement, the multi-sensor coordinate measurement system utilizes the complementarity between optical-image-contact sensors and has become an important means of multi-element high-precision measurement of complex parts, and the composite measurement method integrating different types of sensors is also It is becoming an important development trend of industrial testing. According to statistics, most of the multi-sensor coordinate measuring machines are distributed in the high-end product manufacturing and processing fields of various enterprises. Taking Chongqing's advanced manufacturing industry as an example, many companies such as Changan Automobile, Lifan, Changan Industry, Quadruple Instruments, Chongqing Machine Tool, Qijiang Gear and other companies have introduced different types of multi-sensor coordinate measuring machines for automotive molds, cylinder heads, etc. Multi-element 3D geometric measurement of complex parts of turbines, blades, cams, fuselage and irregular space profiles.
标准器是坐标测量系统验证检测和复检检测的关键。由于图像传感器、光学传感器多属于2D测头，采用非接触测量方式；接触式传感器属于3D测头，采用接触测量方式；因此，需要找到一种三种传感器测量均能够适用的标准器。鉴于此，发明人设计了一种用于多传感器测量系统的多孔板标准器，参见中国专利“用于多传感器测量系统的多孔板标准器及联合误差检测方法(公布号CN107063330A)”，该多孔板标准器需要按拓扑结构加工多个测量孔，一方面造成标准器结构复杂，加工制造难度大，另一方，由于测量孔的数量较多使得采样路径长，采样点数量庞大，检测效率有待提升。更突出的缺陷在于：只局限于定性判断联合误差是否合格，不能用于定量计算联合误差的量值。但是，联合误差的量值能够用于补偿多传感器测量系统的测量误差，对提高测量精度具有重要意义。The standard is the key to the verification test and retest test of the coordinate measuring system. Since image sensors and optical sensors are mostly 2D probes and use non-contact measurement methods; contact sensors belong to 3D probes and use contact measurement methods; therefore, it is necessary to find a standard that can be used for all three sensor measurements. In view of this, the inventor designed a multi-well plate standard for multi-sensor measurement system, see Chinese patent "Multi-well plate standard for multi-sensor measurement system and combined error detection method (publication number CN107063330A)", the multi-hole plate standard The board standard needs to process multiple measuring holes according to the topology structure. On the one hand, the standard structure is complex and difficult to manufacture. On the other hand, due to the large number of measuring holes, the sampling path is long, the number of sampling points is large, and the detection efficiency needs to be improved. . The more prominent defect is that it is limited to qualitatively judging whether the joint error is qualified or not, and cannot be used to quantitatively calculate the magnitude of the joint error. However, the magnitude of the joint error can be used to compensate the measurement error of the multi-sensor measurement system, which is of great significance to improve the measurement accuracy.
发明内容SUMMARY OF THE INVENTION
针对现有技术中存在的上述不足，本发明提供一种用于检测联合误差的标准器，以解决现有技术中的标准器不能定量检测联合误差量值的技术问题，能够用于定量检测联合误差量值，能够提高检测效率。In view of the above deficiencies in the prior art, the present invention provides a standard device for detecting joint errors, so as to solve the technical problem that the standard device in the prior art cannot quantitatively detect the joint error value, and can be used for quantitative detection of joint errors. The error value can improve the detection efficiency.
为解决上述技术问题，本发明采用了如下技术手段：一种用于检测联合误差的标准器，包括下表面为平面的底座，在所述底座上表面围绕同一中心点O环形分布有至少3个竖直的测量孔，并且测量孔的中心均在以中心点O为圆心、R为半径的圆形曲线上；所述测量孔由同轴线的锥孔和圆孔构成，锥孔的小端与圆孔一端连接，锥孔的小端直径等于圆孔直径；所述圆孔直径d为10mm≤d≤51mm，圆孔的高度c≤0.3mm，圆孔的圆度小于1μm；所述锥孔的锥角θ为30°≤θ≤60°。In order to solve the above-mentioned technical problems, the present invention adopts the following technical means: a standard device for detecting the joint error, comprising a base whose lower surface is a plane, and at least 3 circularly distributed around the same center point O on the upper surface of the base. Vertical measuring hole, and the center of the measuring hole is on the circular curve with the center point O as the center and R as the radius; the measuring hole is composed of a coaxial tapered hole and a circular hole, and the small end of the tapered hole is Connected with one end of the circular hole, the diameter of the small end of the tapered hole is equal to the diameter of the circular hole; the diameter d of the circular hole is 10mm≤d≤51mm, the height of the circular hole c≤0.3mm, and the roundness of the circular hole is less than 1μm; The taper angle θ of the hole is 30°≤θ≤60°.
优选的，所述测量孔的数量为3个，相邻测量孔之间的夹角为120°。Preferably, the number of the measurement holes is 3, and the included angle between adjacent measurement holes is 120°.
优选的，单个测量孔被加工在单孔标准器上，各单孔标准器按照测量孔的分布方式安装在底座上表面，从而使得各测量孔绕同心O环形分布。Preferably, a single measurement hole is processed on the single-hole standard, and each single-hole standard is installed on the upper surface of the base according to the distribution of the measurement holes, so that the measurement holes are distributed in a circle around a concentric O.
优选的，底座上表面为平面；所述各单孔标准器通过对应的圆柱支架安装在底座上表面；各圆柱支架的高度均不相同。Preferably, the upper surface of the base is flat; the single-hole standards are installed on the upper surface of the base through corresponding cylindrical brackets; the heights of the cylindrical brackets are different.
优选的，所述底座下表面设有水平调节机构；所述水平调节机构包括对应各圆柱支架设置的支撑脚；所述支撑脚包括带有外螺纹的螺纹杆与半球形顶头，螺纹杆下端与半球形顶头的圆形平面连接；所述圆柱支架上设有用于连接支撑脚的内螺纹孔；所述支撑脚的螺纹杆通过底座上的通孔贯穿底座并旋入圆柱支架的内螺纹孔中，从而与圆柱支架螺纹连接。Preferably, the lower surface of the base is provided with a horizontal adjustment mechanism; the horizontal adjustment mechanism includes support feet arranged corresponding to each cylindrical bracket; the support feet include a threaded rod with an external thread and a hemispherical head, and the lower end of the threaded rod is connected to The circular plane connection of the hemispherical head; the cylindrical bracket is provided with an inner threaded hole for connecting the supporting foot; the threaded rod of the supporting foot penetrates the base through the through hole on the base and is screwed into the inner threaded hole of the cylindrical bracket , so as to be threadedly connected with the cylindrical bracket.
优选的，还包括封装在底座上的封装盖，所述封装盖对应于各圆柱位置处设有相应的凸罩，各凸罩的顶面与相应单孔标准器顶面齐平，并且凸罩的顶面开有能够露出单孔标准器上的测量孔的过孔；所述封装盖与底座均采用铝制成；所述单孔标准器采用高速钢制成，所述圆柱支架采用磁性材料制成，从而使得单孔标准器能够被磁力吸合定位在圆柱支架顶面。Preferably, it also includes a packaging cover packaged on the base, the packaging cover is provided with a corresponding convex cover corresponding to each cylindrical position, the top surface of each convex cover is flush with the top surface of the corresponding single-hole standard, and the convex cover is The top surface of the standard is provided with a via hole that can expose the measurement hole on the single-hole standard; the package cover and the base are made of aluminum; the single-hole standard is made of high-speed steel, and the cylindrical bracket is made of magnetic material It is made so that the single-hole standard can be magnetically attracted and positioned on the top surface of the cylindrical support.
本发明还提供一种联合误差检测方法，用于检测多传感器测量系统的联合误差，所述多传感器测量系统具有n种用于尺寸测量的传感器，采用权利要求1所述的用于检测联合误差的标准器；所述标准器具有m个测量孔，m≥3；包括以下步骤：The present invention also provides a joint error detection method for detecting joint errors of a multi-sensor measurement system, wherein the multi-sensor measurement system has n types of sensors for size measurement, and the method for detecting joint errors according to claim 1 is adopted. The standard device; the standard device has m measurement holes, m≥3; including the following steps:
步骤1：以所述传感器中测量精度最高的传感器作为参考传感器；Step 1: Take the sensor with the highest measurement accuracy among the sensors as the reference sensor;
步骤2：将标准器水平放置在多传感器测量系统的工作台上，然后各传感器依次对标准器上的各测量孔进行采样，采样点在圆锥孔与圆孔所交界的圆形曲线上；令第i种传感器对第j个测量孔的采样点集合为
步骤3：根据参考传感器对各测量孔的采样点集合，分别拟合出对应个测量孔的参考拟合圆，并根据参考拟合圆获取参考圆心坐标，其中，第j个测量孔的参考圆心坐标为Oj(xj,yj,zj)；Step 3: According to the set of sampling points of each measuring hole by the reference sensor, fit the reference fitting circle of the corresponding measuring hole respectively, and obtain the coordinates of the reference circle center according to the reference fitting circle, wherein the reference circle center of the jth measuring hole is The coordinates are O j (x j , y j , z j );
步骤4：根据各传感器对同一测量孔的联合采样点集合，拟合出该测量孔的联合拟合圆，并拟合出全部测量孔的联合拟合圆；然后根据各测量孔的联合拟合圆获取个各测量孔的联合圆心坐标；其中，各传感器对第j个测量孔的联合采样点集合
步骤5：计算联合误差中的联合位置误差：Step 5: Calculate the joint position error in the joint error:
首先，采用最小外接圆法并根据各参考圆心坐标拟合出参考中心坐标O(x,y,z)，以参考中心坐标O(x,y,z)作为测量孔所围绕的中心点O的实际坐标；First, the minimum circumscribed circle method is used and the reference center coordinates O(x, y, z) are fitted according to the coordinates of each reference circle center. actual coordinates;
然后，采用最小外接圆法并根据各联合圆心坐标拟合出联合中心坐标O′(x′,y′,z′)，以联合中心坐标O′(x′,y′,z′)作为测量孔所围绕的中心点O的测量坐标；Then, adopt the least circumscribed circle method and fit the joint center coordinates O'(x', y', z') according to the coordinates of each joint center, and take the joint center coordinates O' (x', y', z') as the measurement The measurement coordinates of the center point O around the hole;
最后，将联合中心坐标与参考中心坐标的距离作为联合位置误差ΔL，并将联合位置误差在X轴、Y轴、Z轴三个方向上进行分解，从而分别得到三个方向上的联合位置误差的量值Δx、Δy、Δz。Finally, the distance between the joint center coordinate and the reference center coordinate is taken as the joint position error ΔL, and the joint position error is decomposed in the three directions of the X axis, the Y axis, and the Z axis, so as to obtain the joint position error in the three directions respectively. The magnitude of Δx, Δy, Δz.
优选的，步骤5之后还进行以下步骤：Preferably, the following steps are also performed after step 5:
步骤6：计算联合误差中的联合形状误差：分别针对每个测量孔计算形状误差，然后选取形状误差中的最大值作为多传感器测量系统的联合形状误差；其中，针对第j个测量孔的形状误差按如下方式计算：计算第j个测量孔的联合采样点集合
步骤7：计算联合误差中的联合尺寸误差：分别对每个测量孔计算尺寸误差，然后选取尺寸误差中的最大值作为多传感器器测量系统的联合尺寸误差；其中，针对第j个测量孔的尺寸误差按如下方式计算：计算第j个测量孔的联合拟合圆的直径，并以联合拟合圆的直径与测量孔圆孔直径的名义值的差值作为第j个测量孔的尺寸误差。Step 7: Calculate the joint size error in the joint error: Calculate the size error for each measurement hole respectively, and then select the maximum value of the size error as the joint size error of the multi-sensor measurement system; The size error is calculated as follows: Calculate the diameter of the joint fitting circle of the jth measuring hole, and take the difference between the diameter of the joint fitting circle and the nominal value of the diameter of the circular hole of the measuring hole as the size error of the jth measuring hole .
优选的，各测量孔中的锥孔小端距离底座上表面的距离均不相同；还进行Z轴联合误差的检测：Preferably, the distance between the small end of the tapered hole and the upper surface of the base in each measuring hole is different; the detection of the Z-axis joint error is also carried out:
首先，根据联合圆心坐标中的Z轴坐标计算以下差值：将联合圆心坐标中的Z轴坐标两两组合为一组，计算每组组合的测量差值，其中，第k种组合的测量差值为Δz′k，
然后，根据参考圆心坐标中的Z轴坐标计算以下差值：将参考圆心坐标中的Z轴坐标两两组合为一组，计算每组组合的参考差值，其中，第k种组合的参考差值为Δzk，
最后，计算相应测量差值与参考差值的差值，按如下公式：Δz′k-Δzk，并以计算得到的最大差值作为多传感器测量系统的Z轴联合误差。Finally, the difference between the corresponding measured difference and the reference difference is calculated according to the following formula: Δz′ k -Δz k , and the calculated maximum difference is used as the Z-axis joint error of the multi-sensor measurement system.
与现有技术相比，本发明具有如下有益效果：Compared with the prior art, the present invention has the following beneficial effects:
1、本发明的标准器的测量孔绕同一中心点环形分布，从而使得只需3个测量孔便能配合最小外接圆拟合法实现联合误差的检测，大大减少了测量孔的数量，简化了标准器结构，降低加工制造难度。1. The measuring holes of the standard device of the present invention are annularly distributed around the same center point, so that only three measuring holes can be combined with the minimum circumscribed circle fitting method to realize the detection of joint errors, which greatly reduces the number of measuring holes and simplifies the standard. The structure of the device reduces the difficulty of processing and manufacturing.
2、测量孔的分布方式不仅简化了结构，同时也是定量计算联合误差的基础，尤其是对于联合位置误差的定量计算尤为重要：多个传感器的位置配合关系是引起联合位置误差的主要因素，根据位置误差的定义(测量位置与实际位置的距离)，参考传感器根据本发明的标准器进行采样可以拟合出中心点的参考坐标(作为实际位置)，多传感器根据本发明的标准器进行联合采样可以拟合出中心的测量位置，从而能够定量计算出联合位置误差。然而，现有技术中的标准器由于没有统一的中心，因此无法定量计算出联合位置误差，只能根据随机选取的3个测量孔的位置误差是否超过位置误差阈值来定性判断多传感器测量系统的位置误差是否合格。2. The distribution of measuring holes not only simplifies the structure, but also is the basis for quantitative calculation of joint error, especially for the quantitative calculation of joint position error: the positional coordination relationship of multiple sensors is the main factor that causes joint position error. The definition of the position error (the distance between the measurement position and the actual position), the reference sensor can fit the reference coordinates of the center point (as the actual position) by sampling according to the standard device of the present invention, and the multi-sensors perform joint sampling according to the standard device of the present invention. The measured position of the center can be fitted, so that the joint position error can be quantitatively calculated. However, since the standard device in the prior art does not have a unified center, it is impossible to quantitatively calculate the joint position error, and can only qualitatively judge the multi-sensor measurement system according to whether the position errors of the three randomly selected measurement holes exceed the position error threshold. Whether the position error is qualified.
3、本发明为了实现各测量孔中的锥孔小端距离底座上表面的高度均不相同，分别提供了两种方案：1)测量孔被直接加工在底座上，但是测量孔的深度不同；2)单个测量孔被加工在单孔标准器上，各单孔标准器被不同高度的圆柱支架支撑。由于测量孔的加工精度要求较高，采用第一种方案则增加了加工难度；然而，采用第二种方案能够大大降低加工难度，便于实现。3. In order to realize that the height of the small end of the tapered hole in each measuring hole from the upper surface of the base is different, the present invention provides two solutions: 1) The measuring hole is directly processed on the base, but the depth of the measuring hole is different; 2) A single measuring hole is machined on a single-hole standard, and each single-hole standard is supported by cylindrical brackets of different heights. Since the machining accuracy of the measuring hole is required to be high, the first solution increases the machining difficulty; however, the second solution can greatly reduce the machining difficulty and facilitate implementation.
4、将测量孔的距离底座的高度设计为不同，依次以相同差值进行递增，从而保持Z轴方向的线性增长，能够提高检测Z轴联合误差的精度。4. The height of the measuring hole from the base is designed to be different, and the same difference is incremented in turn, so as to maintain the linear growth in the Z-axis direction and improve the accuracy of detecting the Z-axis joint error.
5、底座下表面设置水平调节机构，能够提高底座的水平度，从而提高检测精度。采用支撑脚作为水平调节机构，能大大减少水平调节机构与工作台的接触面积，从而减少工作台对底座水平度的影响。5. A leveling mechanism is set on the lower surface of the base, which can improve the levelness of the base, thereby improving the detection accuracy. Using the support feet as the leveling mechanism can greatly reduce the contact area between the leveling mechanism and the worktable, thereby reducing the influence of the worktable on the levelness of the base.
6、支撑脚与圆柱支架螺纹连接，不仅便于调节支撑脚的高度，并且支撑脚还起到将圆柱支架定位在底座上的作用，设计巧妙，简化了标准器的结构。6. The threaded connection between the support feet and the cylindrical bracket not only facilitates the adjustment of the height of the support feet, but also plays the role of positioning the cylindrical support on the base. The clever design simplifies the structure of the standard device.
7、单孔标准器通过磁力吸合定位在圆柱支架上，当单孔标准器的横截面为中心对称图形，并且圆柱支架能够产生均匀的磁场，从而保证单孔标准器受到均匀的磁力，这样单孔标准器的中心与圆柱支架中心重合，均在以中心点O为圆心、R为半径的圆形曲线上。7. The single-hole standard is positioned on the cylindrical support by magnetic attraction. When the cross-section of the single-hole standard is a center-symmetrical figure, and the cylindrical support can generate a uniform magnetic field, so as to ensure that the single-hole standard is subjected to a uniform magnetic force, so that The center of the single-hole standard coincides with the center of the cylindrical support, and both are on a circular curve with the center point O as the center and R as the radius.
8、封装盖能起到保护单孔标准器的作用，封装盖与底座采用铝制成能够减轻标准的重量，并且封装盖为铝制能够将圆柱支架产生的磁场隔离在封装盖内，避免对多传感器测量系统产生磁场干扰。8. The encapsulation cover can protect the single-hole standard device. The encapsulation cover and base are made of aluminum to reduce the weight of the standard, and the encapsulation cover is made of aluminum, which can isolate the magnetic field generated by the cylindrical bracket in the encapsulation cover to avoid damage to the standard. Multi-sensor measurement systems generate magnetic field disturbances.
9、本发明的联合误差检测方法对各测量孔的采样具有独立性，无需建立各测量孔之间的采样路径，从而大大简化了采样过程，提高采样效率。9. The joint error detection method of the present invention is independent of the sampling of each measurement hole, and does not need to establish a sampling path between each measurement hole, thereby greatly simplifying the sampling process and improving the sampling efficiency.
10、本发明的联合误差检测方法能够科学合理的计算出联合位置误差的量值，从而为实现补偿多传感器测量系统的测量误差产生了突破性的进展。10. The joint error detection method of the present invention can scientifically and reasonably calculate the magnitude of the joint position error, thereby making a breakthrough in compensating the measurement error of the multi-sensor measurement system.
11、本发明的联合误差检测方法还给出了联合尺寸误差与联合形状误差的量值，但是由于尺寸误差与形状误差不是由传感器之间的配合引起的，是由自身精度决定的，不适合进行误差补偿。11. The joint error detection method of the present invention also provides the magnitude of joint size error and joint shape error, but since the size error and shape error are not caused by the cooperation between the sensors, they are determined by their own accuracy, which is not suitable for Perform error compensation.
附图说明Description of drawings
图1为本具体实施方式中标准器的俯视图；Fig. 1 is the top view of the standard device in the specific embodiment;
图2是本具体实施方式中测量孔的结构示意图；Fig. 2 is the structural representation of the measuring hole in this specific embodiment;
图3是本具体实施方式中标准器的主视图；Fig. 3 is the front view of the standard device in this specific embodiment;
图4是联合位置误差的检测原理图。FIG. 4 is a schematic diagram of the detection principle of the joint position error.
具体实施方式Detailed ways
下面结合附图和具体实施方式对本发明的技术方案作进一步的说明。The technical solutions of the present invention will be further described below with reference to the accompanying drawings and specific embodiments.
如图1与图2所示，一种用于检测联合误差的标准器，包括下表面为平面的底座1，在所述底座1上表面围绕同一中心点O环形分布有至少3个竖直的测量孔101，并且测量孔101的中心均在以中心点O为圆心、R为半径的圆形曲线上；所述测量孔101由同轴线的锥孔和圆孔构成，锥孔的小端与圆孔一端连接，锥孔的小端直径等于圆孔直径；所述圆孔直径d为10mm≤d≤51mm，圆孔的高度c≤0.3mm，圆孔的圆度小于1μm；所述锥孔的锥角θ为30°≤θ≤60°。As shown in FIG. 1 and FIG. 2 , a standard for detecting joint errors includes a base 1 whose lower surface is a plane, and at least three vertical The measuring hole 101 is measured, and the center of the measuring hole 101 is on a circular curve with the center point O as the center and R as the radius; the measuring hole 101 is composed of a coaxial tapered hole and a circular hole, and the small end of the tapered hole is Connected with one end of the circular hole, the diameter of the small end of the tapered hole is equal to the diameter of the circular hole; the diameter d of the circular hole is 10mm≤d≤51mm, the height of the circular hole c≤0.3mm, and the roundness of the circular hole is less than 1μm; The taper angle θ of the hole is 30°≤θ≤60°.
测量孔的数量可以根据标准器的尺寸进行增加，标准器尺寸越大，测量孔的数量越多；标准器的底座1可以为圆柱形或棱柱形。本具体实施方式中，底座1为半径为60nm的圆柱形，测量孔的数量为3个，相邻测量孔之间的夹角为120°，测量孔的圆孔直径分别为10nm、10nm、15nm，并分布在底座1圆心为中心，半径为36nm的圆形曲线上。The number of measurement holes can be increased according to the size of the standard. The larger the size of the standard, the greater the number of measurement holes; the base 1 of the standard can be cylindrical or prismatic. In this specific embodiment, the base 1 is a cylindrical shape with a radius of 60 nm, the number of measurement holes is 3, the angle between adjacent measurement holes is 120°, and the diameters of the circular holes of the measurement holes are 10 nm, 10 nm, and 15 nm, respectively. , and distributed on a circular curve with the center of the base 1 as the center and a radius of 36 nm.
为了实现各测量孔中的锥孔小端距离底座1上表面的高度均不相同，本发明分别提供了两种方案：In order to realize that the heights of the small ends of the tapered holes in each measuring hole from the upper surface of the base 1 are all different, the present invention provides two solutions:
1)测量孔被直接加工在底座1上，但是测量孔的深度不同，具体的，所述底座1上表面为平面，测量孔上表面与底座1上表面齐平；各测量孔的深度均不相同，并且依次以相等差值进行递增。1) The measuring hole is directly processed on the base 1, but the depth of the measuring hole is different. Specifically, the upper surface of the base 1 is flat, and the upper surface of the measuring hole is flush with the upper surface of the base 1; the depth of each measuring hole is different. are the same, and are sequentially incremented by equal differences.
2)单个测量孔被加工在单孔标准器上，各单孔标准器被不同高度的圆柱支架支撑。具体的，如图3所示，单个测量孔被加工在单孔标准器3上，各单孔标准器3按照测量孔的分布方式安装在底座1上表面，从而使得各测量孔绕同一中心O环形分布；底座1上表面为平面；所述各单孔标准器通过对应的圆柱支架2安装在底座1上表面；各圆柱支架2的高度均不相同，并且依次以相等高度差值进行递增。2) A single measuring hole is machined on a single-hole standard, and each single-hole standard is supported by cylindrical brackets of different heights. Specifically, as shown in FIG. 3 , a single measuring hole is processed on the single-hole standard 3, and each single-hole standard 3 is installed on the upper surface of the base 1 according to the distribution of the measuring holes, so that each measuring hole surrounds the same center O The upper surface of the base 1 is flat; the single-hole standard devices are installed on the upper surface of the base 1 through the corresponding cylindrical brackets 2;
由于测量孔的加工精度要求较高，采用第一种方案则增加了加工难度；本具体实施方式采用第二种方案能够大大降低加工难度，便于实现，并且可以在底座1上更换单孔标准器，从而组合成不同规格的标准器。Since the machining accuracy of the measuring hole is required to be high, the first solution increases the machining difficulty; the second solution in this specific embodiment can greatly reduce the machining difficulty and facilitate implementation, and the single-hole standard can be replaced on the base 1 , so as to form standard devices of different specifications.
本具体实施方中，如图3所示，所述底座1下表面设有水平调节机构；所述水平调节机构包括对应各圆柱支架设置的支撑脚4；所述支撑脚包括带有外螺纹的螺纹杆与半球形顶头，螺纹杆下端与半球形顶头的圆形平面连接；所述圆柱支架上设有用于连接支撑脚的内螺纹孔；所述支撑脚的螺纹杆通过底座1上的通孔贯穿底座1并旋入圆柱支架的内螺纹孔中，从而与圆柱支架螺纹连接。In this specific embodiment, as shown in FIG. 3 , the lower surface of the base 1 is provided with a level adjustment mechanism; the level adjustment mechanism includes a support foot 4 corresponding to each cylindrical bracket; the support foot includes a The threaded rod is connected to the hemispherical plug, and the lower end of the threaded rod is connected to the circular plane of the hemispherical plug; the cylindrical bracket is provided with an inner threaded hole for connecting the supporting foot; the threaded rod of the supporting foot passes through the through hole on the base 1 It penetrates through the base 1 and is screwed into the inner threaded hole of the cylindrical bracket, so as to be threadedly connected with the cylindrical bracket.
本具体实施方式中，还包括封装在底座1上的封装盖(图中未示出)，所述封装盖对应于各圆柱位置处设有相应的凸罩，各凸罩的顶面与相应单孔标准器顶面齐平，并且凸罩的顶面开有能够露出单孔标准器上的测量孔的过孔；所述封装盖与底座1均采用铝制成；所述单孔标准器采用高速钢制成，所述圆柱支架采用磁性材料制成，从而使得单孔标准器能够被磁力吸合定位在圆柱支架顶面。In this specific embodiment, it also includes an encapsulation cover (not shown in the figure) encapsulated on the base 1 , the encapsulation cover is provided with a corresponding convex cover corresponding to each cylindrical position, and the top surface of each convex cover is connected to the corresponding single The top surface of the hole standard is flush, and the top surface of the convex cover is provided with a via hole that can expose the measurement hole on the single-hole standard; the package cover and the base 1 are made of aluminum; the single-hole standard is made of aluminum. Made of high-speed steel, the cylindrical support is made of magnetic material, so that the single-hole standard can be magnetically attracted and positioned on the top surface of the cylindrical support.
一种联合误差检测方法，用于检测多传感器测量系统的联合误差，所述多传感器测量系统具有n种用于尺寸测量的传感器，采用本具体实施方式中用于检测联合误差的标准器；所述标准器具有m个测量孔，m≥3；包括以下步骤：A joint error detection method for detecting joint errors of a multi-sensor measurement system, wherein the multi-sensor measurement system has n types of sensors for size measurement, and the standard device used for detecting joint errors in this specific embodiment is adopted; The standard device has m measurement holes, m≥3; it includes the following steps:
步骤1：以所述传感器中测量精度最高的传感器作为参考传感器；Step 1: Take the sensor with the highest measurement accuracy among the sensors as the reference sensor;
步骤2：将标准器水平放置在多传感器测量系统的工作台上，然后各传感器依次对标准器上的各测量孔进行采样，采样点在圆锥孔与圆孔所交界的圆形曲线上；令第i种传感器对第j个测量孔的采样点集合为
步骤3：根据参考传感器对各测量孔的采样点集合，分别拟合出对应个测量孔的参考拟合圆，并根据参考拟合圆获取参考圆心坐标，其中，第j个测量孔的参考圆心坐标为Oj(xj,yj,zj)；Step 3: According to the set of sampling points of each measuring hole by the reference sensor, fit the reference fitting circle of the corresponding measuring hole respectively, and obtain the coordinates of the reference circle center according to the reference fitting circle, wherein the reference circle center of the jth measuring hole is The coordinates are O j (x j , y j , z j );
步骤4：根据各传感器对同一测量孔的联合采样点集合，拟合出该测量孔的联合拟合圆，并拟合出全部测量孔的联合拟合圆；然后根据各测量孔的联合拟合圆获取个各测量孔的联合圆心坐标；其中，各传感器对第j个测量孔的联合采样点集合
步骤5：计算联合误差中的联合位置误差：Step 5: Calculate the joint position error in the joint error:
首先，采用最小外接圆法并根据各参考圆心坐标拟合出参考中心坐标O(x,y,z)，以参考中心坐标O(x,y,z)作为测量孔所围绕的中心点O的实际坐标；First, the minimum circumscribed circle method is used and the reference center coordinates O(x, y, z) are fitted according to the coordinates of each reference circle center. actual coordinates;
然后，采用最小外接圆法并根据各联合圆心坐标拟合出联合中心坐标O′(x′,y′,z′)，以联合中心坐标O′(x′,y′,z′)作为测量孔所围绕的中心点O的测量坐标；Then, adopt the least circumscribed circle method and fit the joint center coordinates O'(x', y', z') according to the coordinates of each joint center, and take the joint center coordinates O' (x', y', z') as the measurement The measurement coordinates of the center point O around the hole;
最后，如图4所示，将联合中心坐标与参考中心坐标的距离作为联合位置误差ΔL，并将联合位置误差在X轴、Y轴、Z轴三个方向上进行分解，从而分别得到三个方向上的联合位置误差的量值Δx、Δy、Δz。Finally, as shown in Figure 4, the distance between the joint center coordinate and the reference center coordinate is taken as the joint position error ΔL, and the joint position error is decomposed in the three directions of the X axis, the Y axis, and the Z axis, so as to obtain three The magnitudes Δx, Δy, Δz of the joint position error in the direction.
本具体实施方式中，步骤5之后还进行以下步骤：In this specific embodiment, the following steps are also performed after step 5:
步骤6：计算联合误差中的联合形状误差：分别针对每个测量孔计算形状误差，然后选取形状误差中的最大值作为多传感器测量系统的联合形状误差；其中，针对第j个测量孔的形状误差按如下方式计算：计算第j个测量孔的联合采样点集合
步骤7：计算联合误差中的联合尺寸误差：分别对每个测量孔计算尺寸误差，然后选取尺寸误差中的最大值作为多传感器器测量系统的联合尺寸误差；其中，针对第j个测量孔的尺寸误差按如下方式计算：计算第j个测量孔的联合拟合圆的直径，并以联合拟合圆的直径与测量孔圆孔直径的名义值的差值作为第j个测量孔的尺寸误差。Step 7: Calculate the joint size error in the joint error: Calculate the size error for each measurement hole respectively, and then select the maximum value of the size error as the joint size error of the multi-sensor measurement system; The size error is calculated as follows: Calculate the diameter of the joint fitting circle of the jth measuring hole, and take the difference between the diameter of the joint fitting circle and the nominal value of the diameter of the circular hole of the measuring hole as the size error of the jth measuring hole .
本具体实施方式中，各测量孔中的锥孔小端距离底座1上表面的高度均不相同，并依次以相同差值进行递增；还进行Z轴联合误差的检测：In this specific embodiment, the heights of the small ends of the tapered holes in each measuring hole from the upper surface of the base 1 are all different, and they are incremented by the same difference in turn; the detection of the Z-axis joint error is also performed:
首先，根据联合圆心坐标中的Z轴坐标计算以下差值：将联合圆心坐标中的Z轴坐标两两组合为一组，计算每组组合的测量差值，其中，第k种组合的测量差值为Δz′k，
然后，根据参考圆心坐标中的Z轴坐标计算以下差值：将参考圆心坐标中的Z轴坐标两两组合为一组，计算每组组合的参考差值，其中，第k种组合的参考差值为Δzk，
最后，计算相应测量差值与参考差值的差值，按如下公式：Δz′k-Δzk，并以计算得到的最大差值作为多传感器测量系统的Z轴联合误差。Finally, the difference between the corresponding measured difference and the reference difference is calculated according to the following formula: Δz′ k -Δz k , and the calculated maximum difference is used as the Z-axis joint error of the multi-sensor measurement system.
Claims (8)
1. A joint error detection method for detecting a joint error of a multi-sensor measurement system having n kinds of sensors for size measurement, characterized in that: the etalon used to detect the joint error was as follows: the standard comprises a base with a plane lower surface, wherein 3 vertical measuring holes are annularly distributed on the upper surface of the base around a same central point O, the included angle between every two adjacent measuring holes is 120 degrees, so that regular triangle distribution is formed, and the centers of the measuring holes are all on a circular curve taking the central point O as the center of a circle and R as the radius; the measuring hole is composed of a conical hole and a round hole which are coaxial, the small end of the conical hole is connected with one end of the round hole, and the diameter of the small end of the conical hole is equal to that of the round hole; the diameter d of the round hole is more than or equal to 10mm and less than or equal to 51mm, the height c of the round hole is less than or equal to 0.3mm, and the roundness of the round hole is less than 1 mu m; the cone angle theta of the conical hole is more than or equal to 30 degrees and less than or equal to 60 degrees; the standard device is provided with m measuring holes, wherein m is 3;
the main factor causing the joint position error is the position error caused by the position matching relationship of a plurality of sensors, and the position error refers to the distance between the measured position and the actual position; the method comprises the following steps:
step 1: taking the sensor with the highest measurement precision in the sensors as a reference sensor;
step 2: horizontally placing the standard device on a workbench of a multi-sensor measuring system, then sequentially sampling each measuring hole on the standard device by each sensor, wherein a sampling point is on a circular curve intersected by the taper hole and the round hole; the sampling points of the ith sensor to the jth measuring hole are integrated into
And the sampling points of the jth measuring hole of the reference sensor are collected into
And step 3: according to the referenceRespectively fitting a reference fitting circle corresponding to each measuring hole by a sensor to the sampling point set of each measuring hole, and acquiring a reference circle center coordinate according to the reference fitting circle, wherein the reference circle center coordinate of the jth measuring hole is O j (x j ,y j ,z j )；
And 4, step 4: fitting a combined fitting circle of the measuring hole according to the combined sampling point set of each sensor to the same measuring hole, and fitting combined fitting circles of all the measuring holes; then acquiring the combined circle center coordinate of each measuring hole according to the combined fitting circle of each measuring hole; wherein, each sensor is to the joint sampling point set of the jth measuring hole
Combined circle center coordinate O 'of jth measuring hole' j (x′ j ,y′ j ,z′ j )；
And 5: calculating a joint position error in the joint error:
firstly, fitting a reference center coordinate O (x, y, z) by adopting a minimum circumcircle method according to the coordinates of the centers of reference circles, and taking the reference center coordinate O (x, y, z) as an actual coordinate of a central point O surrounded by a measuring hole;
then, fitting a joint center coordinate O '(x', y ', z') according to the coordinates of the joint circle centers by adopting a minimum circumcircle method, and taking the joint center coordinate O '(x', y ', z') as a measurement coordinate of a central point O surrounded by the measurement hole;
and finally, taking the distance between the joint center coordinate and the reference center coordinate as a joint position error delta L, and decomposing the joint position error in the X-axis direction, the Y-axis direction and the Z-axis direction to respectively obtain the magnitude delta X, delta Y and delta Z of the joint position error in the three directions.
2. A joint error detection method according to claim 1, characterized by: the following steps are also carried out after the step 5:
step 6: calculating a joint shape error in the joint error: calculating shape error for each measuring hole, and selecting shapeThe maximum value in the errors is used as the joint shape error of the multi-sensor measuring system; wherein, the shape error of the jth measuring hole is calculated according to the following mode: calculating the joint sampling point set of the jth measuring hole
From all sampling points to joint circle center coordinate O' j (x′ j ,y′ j ,z′ j ) And the difference between the maximum distance and the minimum distance is taken as the shape error of the jth measuring hole;
and 7: calculating a joint size error in the joint errors: calculating the size error of each measuring hole respectively, and then selecting the maximum value in the size errors as the combined size error of the multi-sensor measuring system; the dimension error of the jth measuring hole is calculated as follows: and calculating the diameter of the combined fitting circle of the jth measuring hole, and taking the difference value of the diameter of the combined fitting circle and the nominal value of the diameter of the round hole of the measuring hole as the size error of the jth measuring hole.
3. A joint error detection method according to claim 1, characterized by: the heights of the small ends of the taper holes in the measuring holes from the upper surface of the base are different, and the heights are increased progressively by the same difference value in sequence; detection of Z-axis joint error is also performed:
firstly, calculating the following difference value according to the Z-axis coordinate in the combined circle center coordinate: combining the Z-axis coordinates in the combined circle center coordinates into a group in pairs, and calculating the measurement difference value of each group, wherein the measurement difference value of the kth group is delta Z' k ，
m is the number of the measuring holes;
then, the following difference is calculated from the Z-axis coordinate in the reference circle center coordinate: combining the Z-axis coordinates in the reference circle center coordinates into a group in pairs, and calculating the reference difference of each group, wherein the reference difference of the kth group is delta Z k ，
m is the number of the measuring holes;
finally, the difference between the corresponding measured difference and the reference difference is calculated according to the following formula: delta z' k -Δz k And taking the maximum difference value obtained by calculation as the Z-axis joint error of the multi-sensor measuring system.
4. The joint error detection method of claim 1, wherein: the upper surface of the base is a plane, and the upper surface of the measuring hole is flush with the upper surface of the base; the depth of each measurement hole is different and is sequentially increased by equal difference.
5. The joint error detection method of claim 1, wherein: the single measuring holes are processed on the single-hole standard devices, and the single-hole standard devices are arranged on the upper surface of the base according to the distribution mode of the measuring holes, so that the measuring holes are annularly distributed around the same central point O.
6. The joint error detection method of claim 5, wherein: the upper surface of the base is a plane; each single-hole standard device is arranged on the upper surface of the base through a corresponding cylindrical support; the heights of the cylindrical supports are different, and the heights of the cylindrical supports are sequentially increased by equal height difference values.
7. The joint error detection method of claim 5, wherein: the lower surface of the base is provided with a horizontal adjusting mechanism; the horizontal adjusting mechanism comprises supporting legs which are arranged corresponding to the cylindrical supports; the supporting leg comprises a threaded rod with external threads and a hemispherical top head, and the lower end of the threaded rod is connected with a circular plane of the hemispherical top head; the cylindrical bracket is provided with an internal threaded hole for connecting a supporting leg; the threaded rod of the supporting leg penetrates through the base through a through hole in the base and is screwed into the inner threaded hole of the cylindrical support, so that the threaded rod is in threaded connection with the cylindrical support.
8. The joint error detection method according to claim 6 or 7, characterized in that: the top surface of each convex cover is flush with the top surface of the corresponding single-hole standard device, and the top surface of each convex cover is provided with a through hole capable of exposing the measuring hole on the single-hole standard device; the packaging cover and the base are both made of aluminum; the single-hole standard device is made of high-speed steel, and the cylindrical support is made of magnetic materials, so that the single-hole standard device can be attracted by magnetic force and positioned on the top surface of the cylindrical support.
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