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CN109768052B - Flexible display substrate, display device and preparation method thereof - Google Patents

  • ️Tue Jun 01 2021

CN109768052B - Flexible display substrate, display device and preparation method thereof - Google Patents

Flexible display substrate, display device and preparation method thereof Download PDF

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Publication number
CN109768052B
CN109768052B CN201910017379.XA CN201910017379A CN109768052B CN 109768052 B CN109768052 B CN 109768052B CN 201910017379 A CN201910017379 A CN 201910017379A CN 109768052 B CN109768052 B CN 109768052B Authority
CN
China
Prior art keywords
layer
routing layer
wiring layer
flexible display
flexible
Prior art date
2019-01-08
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201910017379.XA
Other languages
Chinese (zh)
Other versions
CN109768052A (en
Inventor
周志伟
宋艳芹
李威龙
刘权
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kunshan Govisionox Optoelectronics Co Ltd
Original Assignee
Kunshan Govisionox Optoelectronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
2019-01-08
Filing date
2019-01-08
Publication date
2021-06-01
2019-01-08 Application filed by Kunshan Govisionox Optoelectronics Co Ltd filed Critical Kunshan Govisionox Optoelectronics Co Ltd
2019-01-08 Priority to CN201910017379.XA priority Critical patent/CN109768052B/en
2019-05-17 Publication of CN109768052A publication Critical patent/CN109768052A/en
2021-06-01 Application granted granted Critical
2021-06-01 Publication of CN109768052B publication Critical patent/CN109768052B/en
Status Active legal-status Critical Current
2039-01-08 Anticipated expiration legal-status Critical

Links

  • 239000000758 substrate Substances 0.000 title claims abstract description 84
  • 238000002360 preparation method Methods 0.000 title abstract description 5
  • 239000002184 metal Substances 0.000 claims abstract description 111
  • 229910052751 metal Inorganic materials 0.000 claims abstract description 111
  • 239000000463 material Substances 0.000 claims description 6
  • 238000000034 method Methods 0.000 claims description 6
  • 241001391944 Commicarpus scandens Species 0.000 abstract description 7
  • 238000004519 manufacturing process Methods 0.000 abstract description 5
  • 239000010410 layer Substances 0.000 description 193
  • 239000010936 titanium Substances 0.000 description 4
  • 239000010408 film Substances 0.000 description 3
  • 239000010409 thin film Substances 0.000 description 3
  • RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
  • 229910052782 aluminium Inorganic materials 0.000 description 2
  • XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
  • 238000005336 cracking Methods 0.000 description 2
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  • 238000010586 diagram Methods 0.000 description 2
  • 239000011810 insulating material Substances 0.000 description 2
  • 239000007769 metal material Substances 0.000 description 2
  • 229920001230 polyarylate Polymers 0.000 description 2
  • 229920000139 polyethylene terephthalate Polymers 0.000 description 2
  • 239000005020 polyethylene terephthalate Substances 0.000 description 2
  • 229910052719 titanium Inorganic materials 0.000 description 2
  • 229920002430 Fibre-reinforced plastic Polymers 0.000 description 1
  • 229920012266 Poly(ether sulfone) PES Polymers 0.000 description 1
  • 238000004891 communication Methods 0.000 description 1
  • 238000013461 design Methods 0.000 description 1
  • 238000011161 development Methods 0.000 description 1
  • 238000005516 engineering process Methods 0.000 description 1
  • 230000002708 enhancing effect Effects 0.000 description 1
  • 239000011151 fibre-reinforced plastic Substances 0.000 description 1
  • 239000011152 fibreglass Substances 0.000 description 1
  • 239000011521 glass Substances 0.000 description 1
  • 150000003949 imides Chemical class 0.000 description 1
  • 239000004973 liquid crystal related substance Substances 0.000 description 1
  • 238000012986 modification Methods 0.000 description 1
  • 230000004048 modification Effects 0.000 description 1
  • 239000012044 organic layer Substances 0.000 description 1
  • 229920000515 polycarbonate Polymers 0.000 description 1
  • 239000004417 polycarbonate Substances 0.000 description 1
  • 239000011112 polyethylene naphthalate Substances 0.000 description 1
  • -1 polyethylene terephthalate Polymers 0.000 description 1
  • 239000002861 polymer material Substances 0.000 description 1
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  • 239000002356 single layer Substances 0.000 description 1

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Abstract

The embodiment of the invention relates to the technical field of display, and discloses a flexible display substrate, which comprises: the flexible substrate, a plurality of pixel islands on the flexible substrate and a metal wiring layer connected with the pixel islands, wherein the metal wiring layer is arranged on the flexible substrate and comprises a main body part and a connecting part for connecting the main body part and the pixel islands; the metal thickness of the connecting part is larger than that of the main body part. The embodiment of the invention also provides a flexible display device and a manufacturing method of the flexible display substrate. According to the flexible display substrate, the display substrate and the preparation method thereof, provided by the embodiment of the invention, the connection part of the pixel island and the metal wiring layer is not easy to break, so that the reliability of the flexible display substrate in stretching is improved.

Description

Flexible display substrate, display device and preparation method thereof

Technical Field

The embodiment of the invention relates to the technical field of display, in particular to a flexible display substrate, a display device and a preparation method of the flexible display substrate.

Background

With the development of the information-oriented society, a display device for displaying an image has been increasingly demanded. Recently, various types of flat panel display devices, such as liquid crystal display devices, plasma display devices, and electrophoretic display devices, have been developed. However, the conventional display device is made of rigid materials such as glass, and the size and the shape of the display device are fixed after being produced, so that the display device cannot be used in multiple occasions and complex environments.

The screen body of the stretchable display device can be bent and stretched at a certain angle without being damaged, and is easily applied to various complex environments, which makes the research of the stretchable display technology more and more important.

Disclosure of Invention

The invention aims to provide a flexible display substrate, which enables the joint of a pixel island and a metal wiring layer not to be easily broken, thereby improving the reliability of the flexible display substrate during stretching.

In order to solve the above technical problem, an embodiment of the present invention provides a flexible display substrate, including: the flexible substrate, a plurality of pixel islands on the flexible substrate and a metal wiring layer connected with the pixel islands, wherein the metal wiring layer is arranged on the flexible substrate and comprises a main body part and a connecting part for connecting the main body part and the pixel islands; the metal thickness of the connecting part is larger than that of the main body part.

Embodiments of the present invention also provide a flexible display device including the flexible display substrate as described above.

The embodiment of the invention also provides a preparation method of the flexible display substrate, which comprises the following steps: forming a plurality of pixel islands and a metal wiring layer connected with the pixel islands on a flexible substrate; the metal wiring layer is arranged on the flexible substrate and comprises a main body part and a connecting part for connecting the main body part and the pixel island; the metal thickness of the connecting part is larger than that of the main body part.

Compared with the prior art, the embodiment of the invention provides a flexible display substrate, which comprises: the flexible substrate, a plurality of pixel islands on the flexible substrate and a metal wiring layer connected with the pixel islands, wherein the metal wiring layer is arranged on the flexible substrate and comprises a main body part and a connecting part for connecting the main body part and the pixel islands; the metal thickness of the connecting part is larger than that of the main body part. The metal thickness of the connecting part of the metal wiring layer connecting with the pixel island is larger than the metal thickness of the metal wiring layer main body part, so that the stress bearing capacity of the metal wiring layer connecting part is improved, the connecting part of the metal wiring layer connecting with the pixel island is not easy to break when the flexible display substrate is stretched or bent, and the reliability of the flexible display substrate when the flexible display substrate is stretched or bent is improved.

In addition, the metal routing layer comprises a first routing layer arranged on the flexible substrate and a second routing layer arranged above the first routing layer and facing to a partial area of the first routing layer, the connecting part comprises the second routing layer and a partial area of the first routing layer facing to the second routing layer, and the main body part comprises other areas of the first routing layer. In the scheme, the connecting part of the metal wiring layer is arranged to be a double-layer wiring structure, and the stress of the connecting part of the metal wiring layer, which is connected with the pixel island, is dispersed and applied to the metal wiring layer through the double-layer wiring structure, so that the stress bearing capacity of the metal wiring layer is improved.

In addition, the second routing layer is laid on the surface of the first routing layer. The second routing layer is directly laid above the first routing layer in the scheme, and when any routing layer is broken in the middle of the second routing layer, the metal routing layer can still be conducted through the other routing layer when stress is dispersed, so that the reliability of the metal routing layer is enhanced.

In addition, a first insulating layer is laid above the first wiring layer, and through holes are formed in the first insulating layer; the second routing layer is laid on the first insulating layer and penetrates through the through hole to be electrically connected with the first routing layer, a contact part is formed at the part of the second routing layer, which is electrically connected with the first routing layer, and a flat part is formed at the part of the second routing layer, which deviates from the through hole. In the scheme, when the reliability of the metal wiring is enhanced, the flat part of the second wiring layer is laid on the first insulating layer, so that the contact part of the second wiring layer can transmit the stress borne by the first wiring layer to the flat part laid on the first insulating layer, and further the stress is released by the flat part, so that the connecting part of the metal wiring layer connected with the pixel island is not easy to break.

In addition, a first insulating layer is laid above the first routing layer, and a second routing layer is laid on the insulating layer. In this embodiment, the stress is released by peeling the second wiring layer and peeling the first insulating layer.

In addition, the first insulating layer is made of a flexible material. According to the scheme, the first insulating layer is made of a flexible insulating material, when the display substrate is bent or stretched, the insulating layer is not prone to cracking, and stress of a connecting portion, used for connecting the metal wiring layer and the pixel island, of the metal wiring layer can be dispersed and improved in stress bearing capacity of the overall structure of the metal wiring layer.

Drawings

One or more embodiments are illustrated by way of example in the accompanying drawings, which correspond to the figures in which like reference numerals refer to similar elements and which are not to scale unless otherwise specified.

FIG. 1 is a schematic structural diagram of a pixel island and metal trace layer connection according to a first embodiment of the present invention;

FIG. 2 is a schematic lengthwise cross-sectional view of a metal routing layer according to a first embodiment of the present invention;

FIG. 3 is a schematic cross-sectional view of a metal trace layer connecting pixel islands in a width direction of a connection portion according to a second embodiment of the present invention;

FIG. 4 is a schematic cross-sectional view of an alternative metal trace layer connecting the width of the connecting portions of pixel islands in accordance with a second embodiment of the present invention;

FIG. 5 is a schematic cross-sectional view of another alternative metal trace layer connecting the width direction of the connecting portions of pixel islands in accordance with the second embodiment of the present invention;

fig. 6 is a schematic flow chart of a method for manufacturing a flexible display substrate according to a fourth embodiment of the present invention.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present invention more apparent, embodiments of the present invention will be described in detail below with reference to the accompanying drawings. However, it will be appreciated by those of ordinary skill in the art that numerous technical details are set forth in order to provide a better understanding of the present application in various embodiments of the present invention. However, the technical solution claimed in the present application can be implemented without these technical details and various changes and modifications based on the following embodiments.

The pixel islands refer to the part of the non-stretchable device when the flexible display substrate is stretched for display. To protect the device, the location of the device is usually set as a whole, and so is called a "pixel island". In the prior art, the metal wiring layer adopts a single-layer wire structure, and the connecting part of the metal wiring layer connected with the pixel island is easy to break when the display substrate is stretched or bent, so that the reliability of the display substrate is reduced.

A first embodiment of the present invention relates to a flexible display substrate, as shown in fig. 1 and 2, including: the pixel structure comprises a

flexible substrate

1, a plurality of

pixel islands

2 positioned on the

flexible substrate

1 and a metal wiring layer 3 connected with the

pixel islands

2, wherein the metal wiring layer 3 is arranged on the

flexible substrate

1, and the metal wiring layer 3 comprises a

main body part

301 and a connecting

part

302 for connecting the

main body part

301 and the

pixel islands

2; the metal thickness of the

connection portion

302 is greater than that of the

body portion

301.

Specifically, in the present embodiment, the metal thickness of the connecting

portion

302 connecting the metal wiring layer 3 to the

pixel island

2 is set to be greater than the metal thickness of the

main body portion

301 of the metal wiring layer 3, so that the stress tolerance of the connecting

portion

302 of the metal wiring layer 3 is improved, and the connecting portion connecting the metal wiring layer 3 to the

pixel island

2 is not easily broken when the flexible display substrate is stretched or bent, thereby improving the reliability of the flexible display substrate when it is stretched or bent.

Further, in the present embodiment, the metal wiring layer 3 is made of a metal material such as titanium Ti, aluminum Al, or the like. The

main body

31 of the metal wiring layer 3 may be provided in a curved shape, such as a horseshoe shape, a wave shape. Alternatively, the

main portion

31 of the metal wiring layer 3 may be disposed in a zigzag structure, such as zigzag, which is not described herein. Because the stretchability of the metal wire is inferior to that of the flexible wire, if the metal wire is set into a linear structure, the overall stretchability of the flexible display substrate is affected, and therefore, the metal wire can be set into a curved structure or a zigzag structure, so that the stretchability of the metal wire can be improved, and the effective connection of the circuit can be ensured when the flexible display substrate is bent.

It should be noted that the

pixel island

2 includes a pixel group, i.e. a group of sub-pixels, and the signal communication between adjacent pixel groups can be realized by means of the metal wiring layer 3. Each

pixel island

2 may include one or more sub-pixels, which is not limited in this embodiment. A thin film transistor and a signal line electrically connected to the thin film transistor, such as a scan signal line, a data signal line, and/or a power signal line, are provided in the

pixel island

2. The metal wiring layer 3 connects the same kind of signal lines of two

adjacent pixel islands

2, and the metal wiring layer 3 may include: a first metal wiring layer electrically connecting scanning signal lines of

adjacent pixel islands

2, a second metal wiring layer electrically connecting data signal lines of

adjacent pixel islands

2, and/or a third metal wiring layer electrically connecting power signal lines of

adjacent pixel islands

2, and the like. The pixel group, the thin film transistor, and the signal line are not shown in this embodiment mode.

In this embodiment, the pixel unit for displaying in the

pixel island

2 is an Organic Light-Emitting Diode (OLED), and it is understood that the pixel unit in the

pixel island

2 is an OLED device, which is only a specific example in this embodiment, and is not limited thereto, and may be other display elements that can be used for displaying.

Compared with the prior art, the embodiment of the invention provides the flexible display substrate, the metal thickness of the connecting

part

302 of the metal wiring layer 3 connected with the

pixel island

2 is set to be larger than that of the

main body part

301 of the metal wiring layer 3, so that the stress bearing capacity of the connecting

part

302 of the metal wiring layer 3 is improved, the connecting part of the metal wiring layer 3 connected with the

pixel island

2 is not easy to break when the flexible display substrate is stretched or bent, and the reliability of the flexible display substrate is improved when the flexible display substrate is stretched or bent.

A second embodiment of the present invention relates to a flexible display substrate. As shown in fig. 3, 4 and 5, the second embodiment is an improvement of the first embodiment, and the main improvement is that, in the present embodiment, the metal wiring layer 3 includes a

first wiring layer

31 disposed on the

flexible substrate

1, a

second wiring layer

32 disposed above the

first wiring layer

31 and facing a partial area of the

first wiring layer

31, the

connection portion

302 includes the

second wiring layer

32 and a partial area of the

first wiring layer

31 facing the

second wiring layer

32, and the

main body portion

301 includes other areas of the

first wiring layer

31.

Specifically, in the present embodiment, the

connection portion

302 of the metal wiring layer 3 is configured as a double-layer wiring structure, and the stress applied to the connection portion of the metal wiring layer 3 and the

pixel island

2 is dispersed by the double-layer wiring structure, so that the stress tolerance of the metal wiring layer 3 is improved.

Further, in the present embodiment, a structural style of the metal routing layer 3 is given, and the

second routing layer

32 is laid flat above the

first routing layer

31. The connecting part of the metal wiring layer 3 with the structure is connected with the

pixel island

2, the cross section schematic diagram of the width direction is shown in fig. 3, the lower surface of the

second wiring layer

32 is attached to and electrically conducted with the upper surface of the

first wiring layer

31, the

second wiring layer

32 is in dispersed action on the stress on the

first wiring layer

31, if any one wiring layer is broken in the middle, the metal wiring layer 3 can still be conducted through the other wiring layer, and therefore the reliability of the metal wiring layer 3 is enhanced.

It should be noted that, although fig. 3 shows that the width of

second routing layer

32 is equal to that of

first routing layer

31, in practical applications, the width of

second routing layer

32 may be set narrower than that of

first routing layer

31, and by setting

second routing layer

32 at an intermediate position on the upper surface of

first routing layer

31, the narrower

second routing layer

32 has a stronger stress bearing capability and is less prone to cracking.

Alternatively, an alternative design of metal routing layer 3 is shown in this embodiment. A

first insulating layer

41 is laid above the

first wiring layer

31, and a through

hole

5 is formed on the first

insulating layer

41; the

second wiring layer

32 is laid on the first

insulating layer

41 and electrically connected to the

first wiring layer

31 through the through

hole

5, a

contact portion

321 is formed at a portion of the

second wiring layer

32 electrically connected to the

first wiring layer

31, and a

flat portion

322 is formed at a portion of the

second wiring layer

32 away from the through

hole

5. The metal wiring layer 3 having such a structure is connected to the connection portion of the

pixel island

2, and a schematic cross-sectional view in the width direction thereof is shown in fig. 4. The inventors found that the

second wiring layer

32 is electrically connected to the

first wiring layer

31 only through the

contact portion

321, and the

contact portion

321 is peeled off from the

first wiring layer

31 under stress, so as to relieve the stress, but this does not affect the conduction state of the pixel island, thereby improving the stress bearing capability of the whole structure of the metal wiring layer.

Optionally, another alternative metal routing layer 3 structure is also shown in this embodiment. A first

insulating layer

41 is laid on the

first wiring layer

31, and a

second wiring layer

32 is laid on the

insulating layer

41. The connection portion of the

pixel island

2 connected to the metal wiring layer 3 having such a structure is schematically illustrated in fig. 5, which shows a cross-sectional view in the width direction, and the

first wiring layer

31 and the

second wiring layer

32 are not in conduction, so that the stress is released by peeling the

second wiring layer

32 and the first insulating

layer

41.

It should be noted that in this embodiment, a second insulating layer (not shown) is laid above the

second routing layer

32, and the second routing layer is made of a flexible material. Further distributing the stress transmitted to

second routing layer

32 and enhancing the stress-bearing capacity of the overall structure of metal routing layer 3.

Preferably, the first insulating

layer

41 is made of a flexible material in this embodiment, and the first insulating

layer

41 is made of a flexible insulating material in this embodiment, so that when the flexible display substrate is bent or stretched, the first insulating

layer

41 is not easily cracked, and can disperse the stress acting on the metal wiring layer 3, thereby improving the stress bearing capacity of the whole structure of the metal wiring layer 3.

Compared with the prior art, in the embodiment of the present invention, the

second routing layer

32 is a flat conductive layer laid on the surface of the connection portion 312 of the

first routing layer

31, and a structural style of the

second routing layer

32 is provided.

A third embodiment of the present invention relates to a flexible display device including: such as the flexible display substrate of the first or second embodiment.

A fourth embodiment of the present invention relates to a method for manufacturing a flexible display substrate, and the method for manufacturing a flexible display substrate in this embodiment is as shown in fig. 6, and specifically includes:

step 401: a flexible substrate is provided.

Specifically, the flexible substrate 11 may be formed of a polymer material such as imide (PI), Polycarbonate (PC), Polyethersulfone (PES), polyethylene terephthalate (PET), polyethylene naphthalate (PEN), Polyarylate (PAR), or glass Fiber Reinforced Plastic (FRP). The flexible substrate 11 may be transparent, translucent or opaque.

Step 402: a plurality of pixel islands and a metal routing layer connecting the pixel islands are formed on a flexible substrate.

Specifically, the metal wiring layer is arranged on the flexible substrate and comprises a main body part and a connecting part for connecting the main body part and the pixel island; the metal thickness of the connecting part is larger than that of the main body part. The metal wiring layer may be a metal material such as titanium Ti, aluminum Al, or the like. The metal thickness of the connecting part of the metal wiring layer and the pixel island is larger than the metal thickness of the main body part of the metal wiring layer, so that the stress bearing capacity of the connecting part of the metal wiring layer is improved, the connecting part of the metal wiring layer and the pixel island is not easy to break when the flexible display substrate is stretched or bent, and the reliability of the flexible display substrate is improved when the flexible display substrate is stretched or bent.

Further, before forming the second routing layer over the first routing layer, forming a first insulating layer over the first routing layer, and then depositing the second routing layer on the first insulating layer may be further included. It should be noted that, since a part of the connection portion of the metal wiring layer is disposed on the pixel island, that is, a part of each of the first wiring layer and the second wiring layer is disposed on the pixel island, when the insulating layer is actually deposited on the first wiring layer, a part of the deposited insulating layer is disposed on the pixel island. However, when other film layers of the pixel island are manufactured, in order to ensure normal connection between the other film layers and the wire layer, the insulating layer of the pixel island portion is usually etched away, and then the other film layers are manufactured. Of course, a mask may be used to avoid depositing an insulating layer on the pixel island portion when the organic layer on the second wiring layer is initially formed.

Compared with the prior art, the method for manufacturing the flexible display substrate provided in this embodiment includes: forming a plurality of pixel islands and a metal wiring layer connected with the pixel islands on a flexible substrate; the metal wiring layer is arranged on the flexible substrate and comprises a main body part and a connecting part for connecting the main body part and the pixel island; the metal thickness of the connecting part is larger than that of the main body part. The metal thickness of the connecting part of the metal wiring layer and the pixel island is larger than the metal thickness of the main body part of the metal wiring layer, so that the stress bearing capacity of the connecting part of the metal wiring layer is improved, the connecting part of the metal wiring layer and the pixel island is not easy to break when the flexible display substrate is stretched or bent, and the reliability of the flexible display substrate is improved when the flexible display substrate is stretched or bent.

It should be noted that the above embodiments are method embodiments corresponding to embodiments of the flexible display substrate, and therefore, details of implementation in both the first embodiment and the second embodiment can be applied to this embodiment.

It will be understood by those of ordinary skill in the art that the foregoing embodiments are specific examples for carrying out the invention, and that various changes in form and details may be made therein without departing from the spirit and scope of the invention in practice.

Claims (9)

1. A flexible display substrate, comprising: the pixel structure comprises a flexible substrate, a plurality of pixel islands on the flexible substrate and a metal wiring layer connected with the pixel islands;

the metal wiring layer is arranged on the flexible substrate and comprises a main body part and a connecting part for connecting the main body part and the pixel island; the metal thickness of the connecting part is larger than that of the main body part;

the metal routing layer comprises a first routing layer arranged on the flexible substrate, a second routing layer arranged above the first routing layer and right facing to a partial area of the first routing layer, the connecting portion comprises the second routing layer and a partial area of the first routing layer right facing to the second routing layer, and the main body portion comprises other areas of the first routing layer.

2. The flexible display substrate of claim 1, wherein the second routing layer is laid on a surface of the first routing layer.

3. The flexible display substrate according to claim 1, wherein a first insulating layer is laid over the first routing layer, and a through hole is formed in the first insulating layer;

the second routing layer is laid on the first insulating layer and penetrates through the through hole to be electrically connected with the first routing layer, a contact part is formed at the part, electrically connected with the first routing layer, of the second routing layer, and a flat part is formed at the part, deviated from the through hole, of the second routing layer.

4. The flexible display substrate of claim 1, wherein a first insulating layer is disposed over the first routing layer, and wherein the second routing layer is disposed over the insulating layer.

5. The flexible display substrate according to any one of claims 3 or 4, wherein the first insulating layer is made of a flexible material.

6. The flexible display substrate of claim 1, wherein a second insulating layer is laid over the second routing layer, the second insulating layer being made of a flexible material.

7. The flexible display substrate of claim 1, wherein the body portion is curved.

8. A flexible display device comprising the flexible display substrate according to any one of claims 1 to 7.

9. A method for preparing a flexible display substrate is characterized by comprising the following steps: forming a plurality of pixel islands and a metal wiring layer connected with the pixel islands on a flexible substrate; the metal wiring layer is arranged on the flexible substrate and comprises a main body part and a connecting part for connecting the main body part and the pixel island; the metal thickness of the connecting part is larger than that of the main body part;

the metal routing layer comprises a first routing layer arranged on the flexible substrate, and a second routing layer arranged above the first routing layer and just facing to a partial area of the first routing layer, the connecting portion comprises the second routing layer and a partial area of the first routing layer just facing to the second routing layer, and the main body portion comprises other areas of the first routing layer.

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CN110265423B (en) * 2019-06-21 2021-10-22 京东方科技集团股份有限公司 A flexible display substrate, flexible display panel, flexible display device
WO2022016399A1 (en) * 2020-07-22 2022-01-27 Huawei Technologies Co., Ltd. Stretchable display and method of manufacturing display device using the same
CN111862815B (en) * 2020-07-29 2022-02-25 上海天马微电子有限公司 Stretchable display panel and flexible display device
CN115735185A (en) 2021-03-31 2023-03-03 京东方科技集团股份有限公司 Touch substrate and display device
CN114171665B (en) * 2021-12-09 2024-07-16 惠州华星光电显示有限公司 Display panel and preparation method thereof
CN114220831B (en) 2021-12-10 2023-12-01 武汉华星光电半导体显示技术有限公司 Stretchable display panel and manufacturing method thereof
CN114938563B (en) * 2022-05-12 2024-08-27 京东方科技集团股份有限公司 Integrated circuit board, manufacturing method thereof and electronic equipment

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