CN111089545A - Multi-probe scanning imaging system - Google Patents
- ️Fri May 01 2020
CN111089545A - Multi-probe scanning imaging system - Google Patents
Multi-probe scanning imaging system Download PDFInfo
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- CN111089545A CN111089545A CN201911412580.4A CN201911412580A CN111089545A CN 111089545 A CN111089545 A CN 111089545A CN 201911412580 A CN201911412580 A CN 201911412580A CN 111089545 A CN111089545 A CN 111089545A Authority
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- 239000000523 sample Substances 0.000 title claims abstract description 194
- 238000003384 imaging method Methods 0.000 title claims abstract description 58
- 230000003287 optical effect Effects 0.000 claims abstract description 89
- 238000012545 processing Methods 0.000 claims abstract description 29
- 238000001228 spectrum Methods 0.000 claims abstract description 29
- 238000001514 detection method Methods 0.000 claims abstract description 19
- 239000011521 glass Substances 0.000 claims description 12
- 239000013307 optical fiber Substances 0.000 claims description 4
- 239000000835 fiber Substances 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 9
- 238000012014 optical coherence tomography Methods 0.000 description 19
- 239000002775 capsule Substances 0.000 description 12
- 238000010586 diagram Methods 0.000 description 9
- 239000003814 drug Substances 0.000 description 4
- 238000002360 preparation method Methods 0.000 description 4
- 238000007789 sealing Methods 0.000 description 4
- 230000009286 beneficial effect Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 230000001427 coherent effect Effects 0.000 description 2
- 230000002596 correlated effect Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 239000008358 core component Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/22—Measuring arrangements characterised by the use of optical techniques for measuring depth
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- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The application discloses many probes scanning imaging system, this many probes scanning imaging system includes: the device comprises a light source unit, a reference arm light path unit, a sample detection table and a signal processing unit; the sample arm light path unit further comprises a probe selection device and at least two probes connected with the probe selection device; the light source unit generates reference light and sample light, and the reference light passes through the reference arm optical path to form reference return light; the sample light irradiates the sample to be detected of the sample detection platform through one of the at least two probes to form sample return light; the signal processing unit detects interference spectrums generated by interference of the reference return light and the sample return light, and calculates depth information of the sample to be detected based on the interference spectrums. By the method, multi-channel scanning can be realized, and multiple samples can be scanned and imaged in a time-sharing mode.
Description
Technical Field
The application relates to the field of medical detection, in particular to a multi-probe scanning imaging system.
Background
Optical Coherence Tomography (OCT) is an emerging imaging technology in recent ten years, and attracts more and more attention because of its advantages such as high resolution, non-invasive, non-contact measurement, and the like. The method utilizes the basic principle of a weak coherent optical interferometer, and the core components of the method are a broadband light source and a Michelson interferometer. In the signal acquisition process, coherent light from a broadband light source is divided into two parts in a Michelson interferometer, one part is that reference light is reflected by a detector, the other part enters a sample as sample light, and reflected light or scattered light with different sample depths forms interference with the reference light, so that depth information of the sample can be obtained by detecting the interference signal. And controlling the collection point to move on the sample to obtain the three-dimensional information of the sample.
However, the current OCT imaging system must be equipped with one spectrometer and one light source, and when multi-channel scanning imaging is required, multiple spectrometers and multiple light sources are also required. The spectrometer and the light source are used as core devices, so that the price is high, the cost is high in multi-path scanning, and the application of the OCT technology is difficult to popularize in industrial production, particularly in medicine preparation.
Disclosure of Invention
The application provides a many probes scanning imaging system to solve among the prior art OCT imaging system can't realize multichannel scanning formation of image, problem with high costs.
In order to solve the technical problem, the application adopts a technical scheme that: there is provided a multi-probe scanning imaging system, comprising:
the device comprises a light source unit, a reference arm light path unit, a sample detection table and a signal processing unit; the sample arm optical path unit further comprises a probe selection device and at least two probes connected with the probe selection device;
the light source unit generates reference light and sample light, and the reference light passes through the reference arm optical path to form reference return light; the sample light irradiates the sample to be detected of the sample detection platform through one of the at least two probes to form sample return light;
the signal processing unit detects an interference spectrum generated by interference of the reference return light and the sample return light, and calculates the depth information of the sample to be detected based on the interference spectrum.
Different from the prior art, the beneficial effects of this application lie in: the multi-probe scanning imaging system comprises: the device comprises a light source unit, a reference arm light path unit, a sample detection table and a signal processing unit; the sample arm light path unit further comprises a probe selection device and at least two probes connected with the probe selection device; the light source unit generates reference light and sample light, and the reference light passes through the reference arm optical path to form reference return light; the sample light irradiates the sample to be detected of the sample detection platform through one of the at least two probes to form sample return light; the signal processing unit detects interference spectrums generated by interference of the reference return light and the sample return light, and calculates depth information of the sample to be detected based on the interference spectrums. By the method, multi-channel scanning can be realized, and multiple samples can be scanned and imaged in a time-sharing mode.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
FIG. 1 is a schematic diagram of an embodiment of a high depth scan imaging system provided herein;
FIG. 2 is a schematic structural diagram of another embodiment of a high depth scan imaging system provided herein;
FIG. 3 is a schematic diagram of an embodiment of a multi-probe scanning imaging system provided herein;
FIG. 4 is a schematic block diagram of another embodiment of a multi-probe scanning imaging system provided herein;
FIG. 5 is a schematic diagram of the structure of the probe selection device of FIG. 4;
fig. 6 is a schematic view of the structure of the probe of fig. 4.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
An optical coherence tomography system can be classified into two types due to its structure: time domain OCT (TD-OCT) and frequency domain (SD-OCT). The TD-OCT is the first generation OCT, and the sample spectrum mode is that the depth information of the sample to be detected can be directly obtained by moving the reflector of the reference arm and detecting the light intensity at the same time. And the SD-OCT indirectly detects the interference spectrum of the reflected light and the reference light of the sample to be detected by using a high-speed spectrometer, and obtains the depth information of the sample to be detected through Fourier change.
For a frequency-domain OCT system, the scan depth of the sample to be examined is determined by the wavelength resolution of the spectrometer:
wherein Z ismaxIs the scanning depth of the frequency domain OCT system, n is the refractive index of the sample to be detected, λ0Is the central wavelength of the light source, RλIs the wavelength resolution of the spectrometer. Therefore, in the current frequency domain OCT system, if the scanning depth of the frequency domain OCT system needs to be increased, the wavelength resolution of the spectrometer can only be increased, namely R is reducedλThis means that the frequency domain OCT system needs to be replaced with a high resolution spectrometer.
Therefore, on the basis of the principle of the frequency domain OCT system, the OCT imaging system aims to solve the technical problems that the OCT imaging system in the prior art can only replace spectrometers with other resolutions when adjusting the scanning depth, the operation steps are complex, and the replacement cost is high. The application provides a scheme for increasing OCT scanning depth based on a scanning galvanometer.
Referring to fig. 1, fig. 1 is a schematic structural diagram of an embodiment of a high depth scanning imaging system provided in the present application. The high-depth
scanning imaging system100 of the present embodiment includes at least a
light source unit11, a reference arm
optical path unit12, a sample arm
optical path unit13, a
sample detection stage14, and a
signal processing unit15.
The
light source unit11 generates reference light and sample light, the reference light passes through the reference arm
optical path unit12 to form reference return light, and the optical path of the reference return light is consistent with that of the reference light and opposite in direction; the sample light is irradiated onto the sample to be detected of the sample detection table 14 through the sample arm
optical path unit13 to form a sample return light, and the optical path of the sample return light is consistent with the optical path of the sample light and has an opposite direction.
The
signal processing unit15 detects an interference spectrum generated by interference of the reference return light and the sample return light, and calculates depth information of the sample to be detected based on the interference spectrum.
Wherein the reference arm
optical path unit12 has a first position a and a second position B, and the optical path of the reference light passing through the reference arm
optical path unit12 at the second position B is larger than the optical path of the reference arm
optical path unit12 at the first position a.
Specifically, the scanning depth of the high-depth
scanning imaging system100 is positively correlated to the optical paths of the reference light and the reference return light, that is, when the scanning depth of the high-depth
scanning imaging system100 needs to be increased, only the optical paths of the reference light and the reference return light need to be increased, and the high-resolution spectrometer does not need to be replaced. Therefore, the reference arm
optical path unit12 of this embodiment is at least provided with the first position a and the second position B, and the upper computer can control the reference arm
optical path unit12 to switch between the first position a and the second position B, so as to change the optical paths of the reference light and the reference return light, and further achieve the effect of adjusting the scanning depth of the high-depth
scanning imaging system100, and the operation is simple, and no additional cost needs to be added.
Further, according to the requirement of the adjustment precision, the reference arm
optical path unit12 may be further provided with more positions, so that the optical paths of the reference light and the reference return light are changed more, thereby implementing a wider range and more precise adjustment on the scanning depth of the high-depth
scanning imaging system100.
Based on the high-depth
scanning imaging system100 of fig. 1, the present application further provides another specific high-depth
scanning imaging system100, and specifically refer to fig. 2, and fig. 2 is a schematic structural diagram of another embodiment of the high-depth scanning imaging system provided by the present application.
Referring to fig. 1 and fig. 2, the
light source unit11 of the present embodiment further includes a
broadband light source111 and a
coupler112. The
coupler112 may be a 2X2 optical fiber coupler, a first input end of the
coupler112 is connected to the
broadband light source111, a second input end of the
coupler112 is connected to the
signal processing unit15, a first output end of the coupler is connected to the reference arm
optical path unit12, and a second output end of the coupler is connected to the sample arm
optical path unit13.
The high-depth
scanning imaging system100 of the present application uses a Super-luminescent diode (SLD) as the
broadband light source111, and the
broadband light source111 generates light of 780nm to 920nm and inputs the light to the
coupler112. The
coupler112 splits the light into two beams, one beam entering the reference arm
optical path unit12 as reference light, and the other beam entering the sample arm
optical path unit13 as sample light.
The reference arm
optical path unit12 of the present embodiment further includes a
first collimating lens121, a
first galvanometer122, a first focusing
lens123, at least one
glass plate124, and a
mirror125. The galvanometer is an excellent vector scanning device and is used as a special swing motor, and the basic principle is that an electrified coil generates torque in a magnetic field. However, unlike a rotating motor, a rotor of a galvanometer is provided with a reset torque by a mechanical torsion spring or an electronic method, the size of the reset torque is in direct proportion to the angle of the rotor deviating from a balance position, when a coil is electrified with a certain current and the rotor deflects to a certain angle, the size of an electromagnetic torque is equal to that of the reset torque, so that the rotor can not rotate like a common motor and can only deflect, and the deflection angle is in direct proportion to the current.
The
first galvanometer122 has a first position a and a second position B. The main optical axis of the
first collimating lens121 is parallel to the reference light, and the main optical axis of the
first collimating lens121 is perpendicular to the main optical axis of the first focusing
lens123; an included angle formed by the main optical axis of the
first collimating lens121 and the
first polarizer122 at the first position a is larger than an included angle formed by the main optical axis of the
first collimating lens121 and the
first polarizer122 at the second position B.
Since the position of the
first galvanometer122 is adjustable, the reference light path of the present embodiment has at least two types, and the first reference light path is: the reference light passes through the
first collimating lens121, the
first galvanometer122 at the first position A and the first focusing
lens123 in sequence, and is reflected on the surface of the
reflector125; the second reference light path is as follows: the reference light passes through the
first collimating lens121, the
first galvanometer122 at the second position B, the at least one
glass plate124, and the first focusing
lens123 in this order, and is reflected on the surface of the
mirror125.
Further, the reference return light returns along the reference light path and is re-coupled back to the
fiber coupler112, interferes with the sample return light to generate an interference spectrum, and is detected by the
signal processing unit15, and the depth information of the sample to be detected can be obtained by performing fourier transform on the interference spectrum.
Specifically, the optical path difference between the first reference light path and the second reference light path, i.e. the product of the thickness of the
glass sheet124 and the difference between the refractive index of the
glass sheet124 and the refractive index of air, is positively correlated with the scanning depth in both cases, i.e. the larger the optical path difference between the second reference light path and the first reference light path, the more the scanning depth in the second case is increased compared with the scanning depth in the first case.
Further, assume that the scanning depth of the first reference light path is 0-ZmaxThe thickness of the
glass sheet124 is selected to be
Wherein n is the refractive index of the glass. At this time, the optical path length of the second reference light path is increased by Z compared with that of the first reference light pathmaxThe detection depth of the sample arm
light path unit12 also needs to be increased by ZmaxThe optical path length of (1). Therefore, the depth information of the sample to be detected obtained by the
signal processing unit15 performing fourier transform on the interference spectrum is equivalent to that in Zmax-2*ZmaxThat is, when the
first galvanometer122 is at the second position B, the scanning depth of the sample to be detected is Zmax-2*Zmax. It can be seen that for the entire high depth
scanning imaging system100, the high depth is scanned by introducing the
first galvanometer122 and at least one
glass plate124 in the reference arm optical path unit 12The scan depth of the
imaging system100 is doubled.
Further, the scanning depth of the high-depth
scanning imaging system100 of the embodiment may also be further adjusted by introducing a plurality of
glass sheets124 or increasing the thickness of the
glass sheets124 by multiple times, which is not described herein again.
The
signal processing unit15 of the present embodiment includes a
spectrometer151 and a computer processing system (not shown in the figure); the
spectrometer151 forms an interference spectrum based on the reference return light and the sample return light, and transmits the interference spectrum to a computer processing system, which calculates depth information of the sample to be detected based on the interference spectrum.
The sample arm
optical path unit13 of the present embodiment includes a
second collimator lens131, a
second galvanometer132, and a second focusing
lens133. The sample light passes through the
second collimating lens131, the
second galvanometer132 and the second focusing
lens133 in sequence, and is emitted to the sample to be detected on the sample detection table 14.
The main optical axis of the
second collimating lens131 is parallel to the sample light, the included angle formed between the main optical axis of the
second collimating lens131 and the
second galvanometer132 is 45 °, and the main optical axis of the
second collimating lens131 is perpendicular to the main optical axis of the second focusing
lens133.
In the above embodiment, the high-depth
scanning imaging system100 realizes different optical paths of the reference light by adjusting the position of the
first galvanometer122 in the reference arm
optical path unit12, so as to adjust the scanning depth of the imaging system, and the operation is simple, which is beneficial to saving cost.
The sample to be detected can be tissues such as glasses and skin of a user, and can also be part of medical supplies such as capsules. Among them, the capsule in medicine is a common medicine, and for the capsule with liquid sealed inside, the capsule with poor sealing performance will fail due to liquid leakage, while the capsule with solid sealed inside may be easy to be oxidized and fail due to poor sealing performance, so the sealing performance of the capsule directly affects the shelf life of the capsule. At present, no very good method for detecting the sealing performance of the capsule exists in the field of medicine preparation. The application provides an OCT imaging system as a nondestructive test technique, can detect the sample, capsule subsurface's fault condition promptly, can in time discover the poor capsule of leakproofness and reject on the one hand, improves the yields of capsule preparation, and on the other hand also can monitor the production state of preparation equipment.
In order to improve the detection efficiency of the capsule, the application provides a scheme of multi-path OCT scanning based on a scanning galvanometer.
Referring to fig. 3, fig. 3 is a schematic structural diagram of an embodiment of a multi-probe scanning imaging system provided in the present application. The multi-probe
scanning imaging system200 of the present embodiment includes at least a
light source unit21, a reference arm
optical path unit22, a sample arm
optical path unit23, a sample detection stage (not shown in the figure), and a
signal processing unit25. Wherein, the sample arm
optical path unit23 further comprises a
probe selection device231 and at least two
probes232 connected with the
probe selection device231.
The
light source unit21 generates reference light and sample light, the reference light passes through the reference arm
optical path unit22 to form reference return light, and the optical path of the reference return light is consistent with that of the reference light and opposite in direction; the sample light is irradiated onto the sample to be detected of the sample detection platform through one
probe232 of the at least two
probes232 in the sample arm
optical path unit23 to form a sample return light, and the optical path of the sample return light is consistent with the optical path of the sample light and has an opposite direction.
The
signal processing unit25 detects an interference spectrum generated by interference of the reference return light and the sample return light, and calculates depth information of the sample to be detected based on the interference spectrum.
Specifically, the multi-probe
scanning imaging system200 switches the
probe232 to be operated through the
probe selection device231, so as to realize fast switching of the scanning position and the scanning object, thereby eliminating the need to configure multiple instruments, simplifying the switching operation, and eliminating the need to add additional cost.
Further, according to the adjustment industry, the sample arm
optical path unit23 can be provided with more probes, so that the sample light can irradiate more detection positions, thereby enabling the multi-probe
scanning imaging system200 of the present embodiment to have a larger detection range and higher detection efficiency.
Based on the multi-probe
scanning imaging system200 of fig. 3, the present application further provides another specific multi-probe
scanning imaging system200, and specifically refer to fig. 4, and fig. 4 is a schematic structural diagram of another embodiment of the multi-probe scanning imaging system provided by the present application.
Referring to fig. 3 to 6, the
light source unit21 of the present embodiment further includes a
broadband light source211 and a
coupler212. The
coupler212 may be a 2X2 optical fiber coupler, and a first input end of the
coupler212 is connected to the
broadband light source211, a second input end is connected to the
signal processing unit25, a first output end is connected to the reference arm
optical path unit22, and a second output end is connected to the sample arm
optical path unit23.
The multi-probe
scanning imaging system200 of the present application uses a Super-luminescent diode (SLD) as the
broadband light source211, and the
broadband light source211 generates light of 780nm to 920nm and inputs the light to the
coupler212. The
coupler212 divides the light into two beams, one beam entering the reference arm
optical path unit22 as reference light, and the other beam entering the sample arm
optical path unit23 as sample light.
The at least two
probes232 of the present embodiment include a
first probe2321 and a
second probe2322; the
probe selection device231 includes a
first collimating lens2311, a
first galvanometer2312, and a first focusing
lens2313.
The
first galvanometer2312 has a first position C and a second position D. A main optical axis of the
first collimating lens2311 is parallel to the reference light, and a main optical axis of the
first collimating lens2311 is perpendicular to a main optical axis of the first focusing
lens2313; an included angle formed by the main optical axis of the
first collimating lens2311 and the first vibrating
mirror2312 at the first position C is larger than an included angle formed by the main optical axis of the
first collimating lens2311 and the first vibrating
mirror2312 at the second position D.
Since the position of the
first galvanometer2312 is adjustable, the sample light path of the embodiment has at least two types, and the first sample light path is: the sample light passes through the
first collimating lens2311, the
first galvanometer2312 at the first position C and the first focusing
lens2313 in sequence, and enters the
first probe2321; the second sample light path is: the sample light passes through the
first collimating lens2311, the
first galvanometer2312 at the second position D, and the first focusing
lens2313 in sequence, and enters the
second probe2322.
Further, the return sample light returns along the optical path of the sample light and is re-coupled back to the
optical fiber coupler212, and interferes with the reference return light to generate an interference spectrum, and the interference spectrum is detected by the
signal processing unit25, and the depth information of the sample to be detected can be obtained by performing fourier transform on the interference spectrum.
Specifically, the
first probe2321 and/or the
second probe2322 include a
second collimating lens2323, a
second galvanometer2324, and a second focusing
lens2325. A primary optical axis of the
second collimating lens2323 is parallel to the sample light, an included angle formed between the primary optical axis of the
second collimating lens2323 and the second
oscillating mirror2324 is 45 °, and the primary optical axis of the
second collimating lens2323 is perpendicular to the primary optical axis of the second focusing
lens2325.
The reference arm
optical path unit22 of the present embodiment includes a
third collimating lens221 and a reflecting
mirror222, and the reference light passes through the
third collimating lens221 and is reflected on the surface of the reflecting
mirror222 to generate reference return light.
The
signal processing unit25 of the present embodiment includes a
spectrometer251 and a computer processing system (not shown in the figure); the
spectrometer251 forms an interference spectrum based on the reference return light and the sample return light, and transmits the interference spectrum to a computer processing system, which calculates depth information of the sample to be detected based on the interference spectrum.
In the above embodiment, the multi-probe
scanning imaging system200 introduces
different probes232 by adjusting the position of the
first galvanometer2312 in the sample arm
optical path unit23, so as to adjust the scanning position, and the operation is simple, which is beneficial to saving cost.
In this application, by combining the technologies of the high-depth
scanning imaging system100 and the multi-probe
scanning imaging system200 of the above embodiments, a scanning imaging system can be obtained by combining, the scanning imaging system can achieve the adjustment of the scanning depth by adjusting the reference arm optical path unit, and can also achieve the switching of the working probes by adjusting the sample arm optical path unit, and the specific structure is please refer to fig. 1 to 6, which is not described herein again.
The above description is only an embodiment of the present invention, and not intended to limit the scope of the present invention, and all modifications of equivalent structures and equivalent processes performed by the present specification and drawings, or directly or indirectly applied to other related technical fields, are included in the scope of the present invention.
Claims (10)
1.一种多探头扫描成像系统，其特征在于，所述多探头扫描成像系统包括：光源单元、参考臂光路单元、样品臂光路单元、样品检测台和信号处理单元；所述样品臂光路单元进一步包括探头选择装置以及与所述探头选择装置连接的至少两个探头；1. A multi-probe scanning imaging system, characterized in that the multi-probe scanning imaging system comprises: a light source unit, a reference arm optical path unit, a sample arm optical path unit, a sample detection stage and a signal processing unit; the sample arm optical path unit further comprising a probe selection device and at least two probes connected to the probe selection device; 所述光源单元产生参考光和样品光，所述参考光通过所述参考臂光路，以形成参考回光；所述样品光通过所述至少两个探头中的一个探头照射到所述样品检测台的待检测样品上，以形成样品回光；The light source unit generates reference light and sample light, and the reference light passes through the reference arm optical path to form a reference return light; the sample light is irradiated to the sample detection stage through one of the at least two probes on the sample to be detected to form the sample back light; 所述信号处理单元探测所述参考回光和所述样品回光干涉产生的干涉光谱，并基于所述干涉光谱计算所述待检测样品的深度信息。The signal processing unit detects an interference spectrum generated by the interference of the reference return light and the sample return light, and calculates depth information of the sample to be detected based on the interference spectrum. 2.根据权利要求1所述的多探头扫描成像系统，其特征在于，2. The multi-probe scanning imaging system according to claim 1, wherein, 所述至少两个探头包括第一探头和第二探头；所述探头选择装置包括第一准直透镜、第一振镜以及第一聚焦透镜；所述第一准直透镜的主光轴与所述样品光平行，所述第一振镜具有第一位置和第二位置；The at least two probes include a first probe and a second probe; the probe selection device includes a first collimating lens, a first galvanometer and a first focusing lens; the main optical axis of the first collimating lens and the The sample light is parallel, and the first galvanometer has a first position and a second position; 所述样品光依次通过所述第一准直透镜、所述第一位置的第一振镜和所述第一聚焦透镜，照射到所述第一探头；The sample light is irradiated to the first probe through the first collimating lens, the first galvanometer mirror at the first position and the first focusing lens in sequence; 或者，所述样品光依次通过所述第一准直透镜、所述第二位置的第一振镜和所述第一聚焦透镜，照射到所述第二探头。Alternatively, the sample light passes through the first collimating lens, the first galvanometer at the second position, and the first focusing lens in sequence, and then irradiates the second probe. 3.根据权利要求2所述的多探头扫描成像系统，其特征在于，3. The multi-probe scanning imaging system according to claim 2, wherein, 所述第一准直透镜的主光轴与所述第一聚焦透镜的主光轴垂直，所述第一准直透镜的主光轴与所述第一位置的第一振镜所形成的夹角大于所述第一准直透镜的主光轴与所述第二位置的第一振镜所形成的夹角。The main optical axis of the first collimating lens is perpendicular to the main optical axis of the first focusing lens, and the main optical axis of the first collimating lens and the first galvanometer in the first position form a clip. The angle is greater than the included angle formed by the main optical axis of the first collimating lens and the first galvanometer mirror at the second position. 4.根据权利要求2所述的多探头扫描成像系统，其特征在于，4. The multi-probe scanning imaging system according to claim 2, wherein, 所述第一探头和/或所述第二探头包括第二准直透镜、第二振镜以及第二聚焦透镜；其中，所述第二准直透镜的主光轴与所述样品光平行，所述第二准直透镜的主光轴与所述第二振镜所形成的夹角为45°，所述第二准直透镜的主光轴与所述第二聚焦透镜的主光轴垂直。The first probe and/or the second probe include a second collimating lens, a second galvanometer and a second focusing lens; wherein, the main optical axis of the second collimating lens is parallel to the sample light, The included angle formed by the main optical axis of the second collimating lens and the second galvanometer mirror is 45°, and the main optical axis of the second collimating lens is perpendicular to the main optical axis of the second focusing lens . 5.根据权利要求1所述的多探头扫描成像系统，其特征在于，5. The multi-probe scanning imaging system according to claim 1, wherein, 所述参考臂光路单元包括第三准直透镜和反射镜，所述参考光通过所述第三准直透镜后在所述反射镜表面发生反射，产生所述参考回光。The reference arm optical path unit includes a third collimating lens and a reflecting mirror, and the reference light is reflected on the surface of the reflecting mirror after passing through the third collimating lens to generate the reference return light. 6.根据权利要求5所述的多探头扫描成像系统，其特征在于，6. The multi-probe scanning imaging system according to claim 5, wherein, 所述参考臂光路单元进一步包括第三振镜、第三聚焦透镜以及至少一个玻璃片；所述第三准直透镜的主光轴与所述参考光平行，所述第三振镜具有第一位置和第二位置；The reference arm optical path unit further includes a third galvanometer, a third focusing lens and at least one glass sheet; the main optical axis of the third collimating lens is parallel to the reference light, and the third galvanometer has a first position and second position; 所述参考光依次通过所述第三准直透镜、所述第一位置的第三振镜和所述第三聚焦透镜，并在所述反射镜表面反射；The reference light sequentially passes through the third collimating lens, the third galvanometer at the first position and the third focusing lens, and is reflected on the surface of the reflecting mirror; 或者，所述参考光依次通过所述第三准直透镜、所述第二位置的第三振镜、所述至少一个玻璃片和所述第三聚焦透镜，并所述反射镜表面反射。Alternatively, the reference light sequentially passes through the third collimating lens, the third galvanometer mirror at the second position, the at least one glass sheet and the third focusing lens, and is reflected on the surface of the mirror. 7.根据权利要求1所述的多探头扫描成像系统，其特征在于，7. The multi-probe scanning imaging system according to claim 1, wherein, 所述信号处理单元包括光谱仪和计算机处理系统；The signal processing unit includes a spectrometer and a computer processing system; 所述光谱仪基于所述参考回光和所述样品回光形成所述干涉光谱，并将所述干涉光谱传输至所述计算机处理系统；The spectrometer forms the interference spectrum based on the reference return light and the sample return light, and transmits the interference spectrum to the computer processing system; 所述计算机处理系统基于所述干涉光谱计算所述待检测样品的深度信息。The computer processing system calculates depth information of the sample to be detected based on the interference spectrum. 8.根据权利要求1所述的多探头扫描成像系统，其特征在于，8. The multi-probe scanning imaging system according to claim 1, wherein, 所述光源单元包括宽带光源和耦合器；the light source unit includes a broadband light source and a coupler; 所述宽带光源产生的光源通过所述耦合器分为所述参考光和所述样品光；The light source generated by the broadband light source is divided into the reference light and the sample light by the coupler; 所述参考回光和所述样品回光经过所述耦合器耦合后，输入所述信号处理单元进行处理，以获取所述待检测样品的深度信息。After the reference return light and the sample return light are coupled by the coupler, they are input to the signal processing unit for processing to obtain depth information of the sample to be detected. 9.根据权利要求8所述的多探头扫描成像系统，其特征在于，9. The multi-probe scanning imaging system according to claim 8, wherein: 所述耦合器为2X2光纤耦合器，所述光纤耦合器通过光纤连接头与所述探头选择装置连接。The coupler is a 2X2 fiber optic coupler, and the fiber optic coupler is connected to the probe selection device through an optical fiber connector. 10.根据权利要求8所述的多探头扫描成像系统，其特征在于，10. The multi-probe scanning imaging system according to claim 8, wherein, 所述宽带光源为超辐射发光二极管。The broadband light source is a superluminescent light emitting diode.
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