CN1775655A - Rapid Fabrication Method of 3D Complex Microstructure - Google Patents
- ️Wed May 24 2006
CN1775655A - Rapid Fabrication Method of 3D Complex Microstructure - Google Patents
Rapid Fabrication Method of 3D Complex Microstructure Download PDFInfo
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Publication number
- CN1775655A CN1775655A CN200510123004.XA CN200510123004A CN1775655A CN 1775655 A CN1775655 A CN 1775655A CN 200510123004 A CN200510123004 A CN 200510123004A CN 1775655 A CN1775655 A CN 1775655A Authority
- CN
- China Prior art keywords
- layer
- dimensional complex
- micro
- photosensitive resin
- rapidly manufacturing Prior art date
- 2005-12-13 Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 20
- 238000004519 manufacturing process Methods 0.000 title claims description 17
- 239000011347 resin Substances 0.000 claims abstract description 34
- 229920005989 resin Polymers 0.000 claims abstract description 34
- 239000000463 material Substances 0.000 claims abstract description 18
- 239000007921 spray Substances 0.000 claims abstract description 15
- 239000003086 colorant Substances 0.000 claims description 7
- 238000000465 moulding Methods 0.000 claims description 7
- 239000004925 Acrylic resin Substances 0.000 claims description 2
- 229920000178 Acrylic resin Polymers 0.000 claims description 2
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 2
- 239000005543 nano-size silicon particle Substances 0.000 claims description 2
- 239000000049 pigment Substances 0.000 claims description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 2
- 238000005507 spraying Methods 0.000 claims 3
- 239000002245 particle Substances 0.000 claims 2
- 239000007787 solid Substances 0.000 claims 1
- 238000005516 engineering process Methods 0.000 description 12
- 230000015572 biosynthetic process Effects 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 230000032798 delamination Effects 0.000 description 3
- 238000003754 machining Methods 0.000 description 2
- 238000007493 shaping process Methods 0.000 description 2
- AXDJCCTWPBKUKL-UHFFFAOYSA-N 4-[(4-aminophenyl)-(4-imino-3-methylcyclohexa-2,5-dien-1-ylidene)methyl]aniline;hydron;chloride Chemical compound Cl.C1=CC(=N)C(C)=CC1=C(C=1C=CC(N)=CC=1)C1=CC=C(N)C=C1 AXDJCCTWPBKUKL-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004040 coloring Methods 0.000 description 1
- 239000011370 conductive nanoparticle Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Images
Abstract
The invention relates to a method for fast making 3D complex microstructure, including the following steps of: establishing a computer entity model for the 3D complex microstructure, splicing and layering the computer entity model and extracting modeling data of each layer; the computer controls a micro laser head installed an X-Y scanner to make set motion according to the modeling data of each layer, and a micro nozzle sprays photosensitive resin, superfine laser beams irradiate the photosensitive resin just sprayed so as to cure a pattern of this layer; filling the uncured region with supporting material to act as the support for the next cured layer; in turn making each layer according to the modeling data of each layer, bonding and superposing layer on layer and finally making the 3D complex microstructure.
Description
Technical field
The present invention relates to the three-dimensional complex micro structure method for fast mfg, belong to the technical field of micromachined.
Background technology
Micro-structural is as the important component part of MEMS (MEMS), and its application is very extensive.The manufacturing process of micro-structural mainly contains silicon processing, LIGA, micro discharge processing and low-light moulding etc.First three is planted manufacturing process and is difficult to make complicated three-dimensional microstructures, and cost of manufacture height, cycle are long; Low-light moulding worker artistic skill is made three-dimensional complex micro structure, and shaping speed is fast, and cost is low, but can't produce the different micro-structural of each several part material property at present, also can't produce the color three dimension part.
Summary of the invention
Technical problem: the object of the present invention is to provide a kind of can be fast, the method for fast mfg of three-dimensional complex micro structure cheaply.
Technical scheme: the present invention is that the following technical scheme of utilization realizes making fast, cheaply of three-dimensional complex micro structure:
This method may further comprise the steps:
A. set up the computer mock-up of three-dimensional complex micro structure, it is carried out slicing delamination, take out every layer forming data;
B. the miniature laser head that is installed on the X-Y scanner of computer control is done the motion of setting according to every layer forming data, and micro nozzle ejects photosensitive resin, and fine laser beam is radiated on the photosensitive resin that has just ejected, and solidifies rapidly this layer pattern;
C. fill with backing material in uncured zone, with the support as next cured layer;
D. produce each layer according to every layer forming data successively, bonding superposes layer by layer, finally produces the three-dimensional complex micro structure of design.
Micro nozzle is that the micro nozzle of aperture＜80 μ m sprays photosensitive resin.The photosensitive resin that sprays is the photosensitive resin very responsive to the laser of wavelength between 300～680nm.
The photosensitive resin that sprays is an acrylic resin.The miniature laser head is semiconductor laser and the miniature focusing arrangement of wavelength between 300～680nm.When making has the three-dimensional complex micro structure of multiple material, a plurality of shower nozzles that can spray different materials are installed in addition on the X-Y scanner.Mix in the photosensitive resin that sprays conductive nano particle or nano silicon nitride silicon grain are arranged.When making the color three dimension complex micro structure, a plurality of shower nozzles that can spray the different colours material are installed in addition on the X-Y scanner.In photosensitive resin, add fuchsin, cyan, yellow three kinds of pigment respectively, make three kinds of photosensitive resins with different colours, when processing every layer, according to the colouring information that contains in every layer the forming data, control three minute nozzles that spray the photosensitive resin of different colours, thereby eject the color graphics of this layer, and solidified by laser beam rapidly.Backing material is the wax of fusing.
Beneficial effect: technology of the present invention is simple, cost is low, the speed of finished parts is much higher than technologies such as silicon processing, LIGA processing, can make the three-dimensional complex micro structure that technologies such as silicon processing, LIGA can't be processed, the three-dimensional complex micro structure that contains multiple material can be made, also color three dimension macrostructure or micro-structural can be made.
The batch machining that apparatus of the present invention kinematic accuracy height, shaping speed be fast, can realize three-dimensional complex micro structure, processing when also can realize a plurality of difform micro-structural.
Description of drawings
Fig. 1 is the formation system sketch that can make three-dimensional complex micro structure fast of using moulding process exploitation of the present invention,
Fig. 2 is the formation system structure diagram that can make the color three dimension micro-structural;
Fig. 3 is a formation system sketch of making little assembly of the micro element that contains other processing technologys making;
Fig. 4 is the schematic diagram of the micro element of other processing technologys making of location.
Comprise
control computer1 among the above figure,
X scanner2,
Y scanner3, Z axle workbench 4, the
micro nozzle5 of injection backing material,
laser head6, the
micro nozzle7 of ejection function type photosensitive resin, the
backing material8 that solidifies, resin cured
matter9,
substrate10, spray the
micro nozzle11 of colourless photosensitive resin, spray the micro nozzle 12 of the photosensitive resin of carmetta, spray the
micro nozzle13 of cyan photosensitive resin, spray the micro nozzle 14 of yellow photosensitive resin, the
micro element15 that other technology is made, accurate
holding frame X-axis16, accurate holding frame Y-
axis17,
accurate holding frame18,
X-axis screw19, Y-
axis screw20.
The specific embodiment
The present invention is further illustrated below in conjunction with drawings and Examples.
Fig. 1 is a three-dimensional complex micro structure rapid manufacture system sketch.At 1 li physical model of setting up three-dimensional complex micro structure of computer, it is carried out slicing delamination, take out every layer forming data; When making this micro-structural,
micro nozzle7 ejects photosensitive resin; The
miniature laser head6 that
simultaneous computer1 control is installed on
scanner2 and 3 is done the motion of setting according to every layer forming data, and fine laser beam is radiated on the photosensitive resin that has just ejected, and solidifies rapidly this layer pattern; Fill with backing material in uncured zone, with the support as next cured layer; Produce each layer according to every layer forming data successively, finally produce the three-dimensional complex micro structure of design.
Fig. 2 is the formation system structure diagram that can make the color three dimension micro-structural.At 1 li physical model of setting up three-dimensional complex micro structure of computer, software carries out slicing delamination to it, takes out every layer forming data; When making this micro-structural, computer drives the photosensitive resin that
micro nozzle12,13,14,15 sprays different colours respectively according to the color information of the every part in every layer; The
miniature laser head6 that
simultaneous computer1 control is installed on
scanner2 and 3 is done the motion of setting according to every layer forming data, and fine laser beam is radiated on the photosensitive resin that has just ejected, and solidifies rapidly this layer pattern; Fill with backing material in uncured zone, with the support as next cured layer; Produce each layer according to every layer forming data successively, finally produce the color three dimension micro-structural of design.
Fig. 3 is a formation system sketch of making little assembly of the micro element that contains other processing technology making.At 1 li physical model of setting up little assembly of control computer, this physical model includes the
micro element15 that other processing technology makes (as pneumatic, electronics and optical element, and the interface that is coupled with these elements and corresponding components and parts etc.), when the physical model of 1 pair of this little assembly of computer carries out layering, just in the moulding file, comprise the layering machining information of micro element 15.When making this little assembly,
micro nozzle7 ejects photosensitive resin; The
miniature laser head6 that
simultaneous computer1 control is installed on
scanner2 and 3 is done the motion of setting according to every layer forming data, and fine laser beam is radiated on the photosensitive resin that has just ejected, and solidifies rapidly this layer pattern; Fill with backing material in uncured zone, with the support as next cured layer; In process, successively these
micro elements15 are fixed in different cured layers place according to method shown in Figure 4, produce each layer according to every layer forming data successively, finally produce little assembly of design.
Fig. 4 is the schematic diagram of the micro element of other processing technologys making of location.When making little assembly, contain the
micro element8 that other processing technologys are made as this little assembly, in manufacturing process, the accurate location of the
micro element8 that other technology is made is vital, takes following measure: the particular location of reserving this
micro element8 during the cad model design; Provide the information of these
device8 present machined layer in the software subsystem; Before placing this
micro element8, solidify in advance and little framework; Adopt the
accurate holding frame16 and 17 of X-Y, under microscopical cooperation, this
micro element8 is put into little framework by
screw19,20.
Claims (10)
1.一种快速制造三维复杂微结构的方法，该方法包括以下步骤：1. A method for rapidly manufacturing a three-dimensional complex microstructure, the method comprising the following steps: a.建立三维复杂微结构的计算机实体模型，对其进行切片分层，取出每层的成型数据；a. Establish a computer solid model of a three-dimensional complex microstructure, slice and layer it, and take out the forming data of each layer; b.计算机控制安装在X-Y扫描器上的微型激光头按照每层的成型数据做设定的运动，微型喷嘴喷射出光敏树脂，微细激光束照射在刚喷射出的光敏树脂上，迅速固化出该层图形；b. The computer controls the micro-laser head installed on the X-Y scanner to move according to the molding data of each layer, the micro-nozzle sprays out the photosensitive resin, and the micro-laser beam irradiates on the photosensitive resin just sprayed out, and quickly solidifies the photosensitive resin. layer graphics; c.未固化的区域用支撑材料填充，以作为下一固化层的支撑；c. The uncured area is filled with support material to serve as a support for the next cured layer; d.依次按照每层的成型数据制作出每一层，层层粘结叠加，最终制造出设计的三维复杂微结构。d. Make each layer in turn according to the molding data of each layer, layer by layer bonding and superimposition, and finally manufacture the designed three-dimensional complex microstructure. 2.如权利要求1所述的快速制造三维复杂微结构的方法，其特征在于微型喷嘴为孔径＜80μm的微型喷嘴喷射光敏树脂。2. The method for rapidly manufacturing three-dimensional complex microstructures according to claim 1, characterized in that the micro-nozzles are micro-nozzles with an aperture of <80 μm to spray the photosensitive resin. 3.如权利要求1或2所述的快速制造三维复杂微结构的方法，其特征在于喷射的光敏树脂为对波长在300～680nm之间的激光束极其敏感的光敏树脂。3. The method for rapidly manufacturing three-dimensional complex microstructures according to claim 1 or 2, characterized in that the sprayed photosensitive resin is extremely sensitive to laser beams with a wavelength between 300 and 680 nm. 4.如权利要求3所述的快速制造三维复杂微结构的方法，其特征在于喷射的光敏树脂为丙烯酸酯类树脂。4. The method for rapidly manufacturing three-dimensional complex microstructures as claimed in claim 3, characterized in that the sprayed photosensitive resin is an acrylic resin. 5.如权利要求1所述的快速制造三维复杂微结构的方法，其特征在于微型激光头为波长在300～680nm之间的激光器和微型聚焦装置。5. The method for rapidly manufacturing three-dimensional complex microstructures as claimed in claim 1, characterized in that the micro-laser head is a laser with a wavelength between 300-680 nm and a micro-focusing device. 6.如权利要求1所述的快速制造三维复杂微结构的方法，其特征在于当制作的三维复杂微结构为具有多种材料的三维复杂微结构时，在X-Y扫描器上另安装多个能喷射不同材料的喷头。6. the method for rapidly manufacturing three-dimensional complex microstructure as claimed in claim 1, is characterized in that when the three-dimensional complex microstructure of making is the three-dimensional complex microstructure with multiple materials, a plurality of energy can be installed in addition on the X-Y scanner. Nozzles for spraying different materials. 7.如权利要求1或2所述的快速制造三维复杂微结构的方法，其特征在于喷射的光敏树脂中混杂有纳米导电颗粒或纳米氮化硅颗粒。7. The method for rapidly manufacturing three-dimensional complex microstructures according to claim 1 or 2, characterized in that nano conductive particles or nano silicon nitride particles are mixed in the sprayed photosensitive resin. 8.如权利要求1所述的快速制造三维复杂微结构的方法，其特征在于当制作的三维复杂微结构是彩色三维复杂微结构时，在X-Y扫描器上另安装多个能喷射不同颜色材料的喷头。8. The method for rapidly manufacturing three-dimensional complex microstructures as claimed in claim 1 is characterized in that when the three-dimensional complex microstructures made are colored three-dimensional complex microstructures, a plurality of materials capable of spraying different colors are installed on the X-Y scanner of nozzles. 9.如权利要求1或2所述的快速制造三维复杂微结构的方法，其特征在于在光敏树脂中分别加入洋红、青色、黄色三种颜料，制成三种具有不同颜色的光敏树脂，在加工每层时，根据每层的成型数据中含有的颜色信息，控制三个喷射不同颜色的光敏树脂的微细喷嘴，从而喷射出该层的彩色图形，并迅速被激光束固化。9. The method for rapidly manufacturing three-dimensional complex microstructures as claimed in claim 1 or 2, wherein three kinds of pigments of magenta, cyan, and yellow are respectively added to the photosensitive resin to make three kinds of photosensitive resins with different colors. When processing each layer, according to the color information contained in the molding data of each layer, three fine nozzles for spraying photosensitive resins of different colors are controlled, so that the color graphics of the layer are sprayed out, and are quickly cured by the laser beam. 10.如权利要求1所述的快速制造三维复杂微结构的方法，其特征在于支撑材料为熔化的蜡。10. The method for rapidly manufacturing three-dimensional complex microstructures according to claim 1, characterized in that the support material is melted wax.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB200510123004XA CN1325368C (en) | 2005-12-13 | 2005-12-13 | Method for rapid manufacturing three-dimensional complex micro structure |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB200510123004XA CN1325368C (en) | 2005-12-13 | 2005-12-13 | Method for rapid manufacturing three-dimensional complex micro structure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1775655A true CN1775655A (en) | 2006-05-24 |
| CN1325368C CN1325368C (en) | 2007-07-11 |
Family
ID=36765400
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB200510123004XA Expired - Fee Related CN1325368C (en) | 2005-12-13 | 2005-12-13 | Method for rapid manufacturing three-dimensional complex micro structure |
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| Country | Link |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100423869C (en) * | 2006-11-24 | 2008-10-08 | 佛山市峰华自动成形装备有限公司 | Method for manufacturing casting mould and mould manufactured therefor |
| CN101293628B (en) * | 2008-04-03 | 2010-08-04 | 华中科技大学 | A method of manufacturing a three-dimensional micro-mold |
| CN101521828B (en) * | 2009-02-20 | 2011-04-27 | 南京师范大学 | Implantable True 3D Stereo Rendering Method for ESRI 3D GIS Module |
| CN101723310B (en) * | 2009-12-02 | 2013-06-05 | 吉林大学 | Light processing method for preparing conducting micro-nano structure by utilizing graphene oxide |
| CN103395206A (en) * | 2013-07-24 | 2013-11-20 | 北京数码视讯科技股份有限公司 | True color printing method and true color printing device |
| CN108734763A (en) * | 2018-06-15 | 2018-11-02 | 重庆大学 | The digitizing solution and system in the micro assemby space of microassembly system |
| CN114559651A (en) * | 2022-04-28 | 2022-05-31 | 之江实验室 | An integrated additive manufacturing method for a micro-electrostatic motor actuator |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
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| KR100650089B1 (en) * | 1998-10-29 | 2006-11-27 | 제트 코포레이션 | 3D printing material system and method |
| CN1304148C (en) * | 2001-11-22 | 2007-03-14 | 北京工业大学 | Selective laser evaporating-sintering technology and system for quickly shaping thin wall with powder material |
| KR101148770B1 (en) * | 2003-05-21 | 2012-05-24 | 3디 시스템즈 인코오퍼레이티드 | Thermoplastic Powder Material System for Appearance Models from 3D Printing Systems |
| US7807077B2 (en) * | 2003-06-16 | 2010-10-05 | Voxeljet Technology Gmbh | Methods and systems for the manufacture of layered three-dimensional forms |
| CN1218218C (en) * | 2003-09-22 | 2005-09-07 | 西安交通大学 | Manufacture of ture 3D microelectronic mechanical system based on composite imprinting photoetched material |
| US7329379B2 (en) * | 2003-11-04 | 2008-02-12 | Hewlett-Packard Development Company, Lp. | Method for solid freeform fabrication of a three-dimensional object |
| CN1247444C (en) * | 2004-01-06 | 2006-03-29 | 华中科技大学 | Three dimensional micro structure mould pressing etching method compatible with integrated circuit technology |
| US7255825B2 (en) * | 2004-03-10 | 2007-08-14 | Hewlett-Packard Development Company, L.P. | Materials and methods for freeform fabrication of solid three-dimensional objects using fusible, water-containing support materials |
-
2005
- 2005-12-13 CN CNB200510123004XA patent/CN1325368C/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100423869C (en) * | 2006-11-24 | 2008-10-08 | 佛山市峰华自动成形装备有限公司 | Method for manufacturing casting mould and mould manufactured therefor |
| CN101293628B (en) * | 2008-04-03 | 2010-08-04 | 华中科技大学 | A method of manufacturing a three-dimensional micro-mold |
| CN101521828B (en) * | 2009-02-20 | 2011-04-27 | 南京师范大学 | Implantable True 3D Stereo Rendering Method for ESRI 3D GIS Module |
| CN101723310B (en) * | 2009-12-02 | 2013-06-05 | 吉林大学 | Light processing method for preparing conducting micro-nano structure by utilizing graphene oxide |
| CN103395206A (en) * | 2013-07-24 | 2013-11-20 | 北京数码视讯科技股份有限公司 | True color printing method and true color printing device |
| CN108734763A (en) * | 2018-06-15 | 2018-11-02 | 重庆大学 | The digitizing solution and system in the micro assemby space of microassembly system |
| CN108734763B (en) * | 2018-06-15 | 2022-07-05 | 重庆大学 | Method and system for digitizing micro-assembly space of micro-assembly system |
| CN114559651A (en) * | 2022-04-28 | 2022-05-31 | 之江实验室 | An integrated additive manufacturing method for a micro-electrostatic motor actuator |
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|---|---|
| CN1325368C (en) | 2007-07-11 |
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