CN204269547U - A Microscopic Imaging System for Obtaining Appearance Image and Element Distribution Image Simultaneously - Google Patents
- ️Wed Apr 15 2015
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- CN204269547U CN204269547U CN201420712258.XU CN201420712258U CN204269547U CN 204269547 U CN204269547 U CN 204269547U CN 201420712258 U CN201420712258 U CN 201420712258U CN 204269547 U CN204269547 U CN 204269547U Authority
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Abstract
本实用新型公开了一种同时获得外观图像和元素分布影像的显微成像系统，主要包括：激光器，其发射短脉冲激光信号；照明光源，其发射可见光信号；折射反射光路，其中包过多个透射反射镜，以使所述激光器和照明光源发出的光信号均竖直向下传播；物镜，其位于所述折射反射光路的下方，竖直向下传播的光信号穿过所述物镜，照射在物镜下方的待检测物体上；移动机构，其移动所述光信号或移动所述待检测物体，使得所述光信号遍历所述待检测物体的所有部分。本实用新型将LIBS分析技术与激光扫描共聚焦技术有机结合，采用光谱显微成像技术实现对待测样品的逐点扫描，实现了一种同时获得外观图像和元素分布影像的显微成像系统。
The utility model discloses a microscopic imaging system for obtaining appearance images and element distribution images at the same time, mainly comprising: a laser, which emits short-pulse laser signals; an illumination source, which emits visible light signals; a transmission reflector, so that the optical signals sent by the laser and the illumination light source are transmitted vertically downward; the objective lens is located below the refraction and reflection optical path, and the optical signal transmitted vertically downward passes through the objective lens to irradiate On the object to be detected below the objective lens; a moving mechanism that moves the optical signal or the object to be detected so that the optical signal traverses all parts of the object to be detected. The utility model organically combines LIBS analysis technology and laser scanning confocal technology, adopts spectral microscopic imaging technology to realize point-by-point scanning of the sample to be tested, and realizes a microscopic imaging system that simultaneously obtains appearance images and element distribution images.
Description
技术领域technical field
本实用新型涉及一种显微光学成像技术，特别涉及一种同时获得外观图像和元素分布影像的显微成像系统。The utility model relates to a microscopic optical imaging technology, in particular to a microscopic imaging system for simultaneously obtaining appearance images and element distribution images.
背景技术Background technique
高分辨显微光学成像技术是人们从宏观转向微观，在细胞分子水平实时动态揭示生命的构成和调控机制，获得一系列原创性科学发现，实现生命科学与物理、化学等学科的全面交叉融合的重要手段。从最早的常规显微镜到现在的超级显微镜，如超分辨显微镜、双光子显微镜以及隧道扫描显微镜等，可以说每一项新成像技术的出现都具有里程碑式的意义。随着激光技术的出现，将光与物质相互作用应用于显微成像和材料分析，不但可以大大地提高光学显微技术的空间分辨率，更可以实现被测物组分和结构的检测，同时还可以进行三维成像。High-resolution micro-optical imaging technology is a way for people to shift from the macro to the micro, to reveal the composition and regulation mechanism of life in real time at the cellular molecular level, to obtain a series of original scientific discoveries, and to realize the comprehensive cross-integration of life science, physics, chemistry and other disciplines. important means. From the earliest conventional microscopes to the current super microscopes, such as super-resolution microscopes, two-photon microscopes, and tunneling scanning microscopes, it can be said that the emergence of each new imaging technology is a milestone. With the emergence of laser technology, the application of the interaction between light and matter in microscopic imaging and material analysis can not only greatly improve the spatial resolution of optical microscopy technology, but also realize the detection of the composition and structure of the measured object. Three-dimensional imaging is also possible.
目前报道的非线性光学成像技术如多光子荧光成像、二次谐波及三次谐波成像等，都出现了很好的应用实例。不过多光子荧光技术大多数情况需要注入荧光标记物，而二次谐波和三次谐波成像也由于其对被测物非线性性质的特殊要求，应用范围受到了极大影响。The nonlinear optical imaging techniques reported so far, such as multiphoton fluorescence imaging, second harmonic and third harmonic imaging, etc., all have good application examples. However, in most cases, multiphoton fluorescence technology needs to inject fluorescent markers, and the second harmonic and third harmonic imaging are also greatly affected due to their special requirements for the nonlinear nature of the analyte.
激光诱导击穿光谱(LIBS)是目前公认的一种重要的新型分析技术。这种技术对被测样品的前期准备要求低，适用范围广，损伤小等特点。但传统LIBS需要使用相对复杂的光谱分析系统，测试数据量大，处理时间长；而且，其光谱分析系统的灵敏度一旦不足，需要依靠增加激发光的光强来提高等离子体信号强度，在增加待测物体损伤的同时，大大降低了空间分辨率。因此在显微成像方面，LIBS的应用有很大的局限性。Laser-induced breakdown spectroscopy (LIBS) is recognized as an important new analytical technique. This technique has the characteristics of low preparation requirements for the sample to be tested, wide application range, and small damage. However, the traditional LIBS needs to use a relatively complex spectral analysis system, which requires a large amount of test data and a long processing time; moreover, once the sensitivity of the spectral analysis system is insufficient, it is necessary to increase the intensity of the plasma signal by increasing the intensity of the excitation light. While measuring the damage of the object, the spatial resolution is greatly reduced. Therefore, in microscopic imaging, the application of LIBS has great limitations.
正因为LIBS技术的局限性，本实用新型结合LIBS分析技术与激光扫描共聚焦技术，实现了一种既可以获得外观图像又可以观察待测物体的元素分布的新型显微成像系统，该系统结构简单，便于操作。Because of the limitations of LIBS technology, the utility model combines LIBS analysis technology and laser scanning confocal technology to realize a new type of microscopic imaging system that can obtain appearance images and observe the element distribution of the object to be measured. The system structure Simple and easy to operate.
实用新型内容Utility model content
本实用新型针对上述局限性，将LIBS分析技术与激光扫描共聚焦技术有机结合，采用光谱显微成像技术实现对待测样品的逐点扫描，实现了一种同时获得外观图像和元素分布影像的显微成像系统。该技术适用于生物医学分析、材料分析、土壤分析及大气分析等各个领域。Aiming at the above-mentioned limitations, the utility model organically combines LIBS analysis technology with laser scanning confocal technology, adopts spectral microscopic imaging technology to realize point-by-point scanning of the sample to be tested, and realizes a visual display that simultaneously obtains appearance images and element distribution images. micro imaging system. This technology is applicable to various fields such as biomedical analysis, material analysis, soil analysis and atmospheric analysis.
本实用新型的一个目的在于，提供一种叠加在激光扫描共聚焦显微镜基础上的元素分布扫描镜，以最大限度地降低成本。An object of the present invention is to provide an element distribution scanning mirror superimposed on the basis of a laser scanning confocal microscope, so as to reduce the cost to the greatest extent.
本实用新型的另一个目的在于，提供一种光路简单的元素分布扫描镜，在探测到物体内元素分布的同时，还能够展示物体的表面影像，实现两者的结合。Another object of the present invention is to provide an element distribution scanning mirror with a simple optical path, which can display the surface image of the object while detecting the element distribution in the object, so as to realize the combination of the two.
为实现上述目的以及一些其它的目的，本实用新型通过以下技术方案实现：In order to achieve the above purpose and some other purposes, the utility model is realized through the following technical solutions:
一种同时获得外观图像和元素分布影像的显微成像系统，包括：A microscopic imaging system that simultaneously obtains appearance images and element distribution images, including:
激光器1，其发射短脉冲激光信号；Laser 1, which emits short-pulse laser signals;
照明光源12，其发射可见光信号；an illuminating light source 12, which emits a visible light signal;
折射反射光路，其中包括多个透射反射镜，以使所述激光器1和照明光源12发出的光信号均竖直向下传播；A refraction and reflection optical path, which includes a plurality of transmissive mirrors, so that the optical signals emitted by the laser 1 and the illumination light source 12 are transmitted vertically downward;
物镜5，其位于所述折射反射光路的下方，竖直向下传播的光信号穿过所述物镜5，照射在物镜下方的待检测物体上；An objective lens 5, which is located below the refraction and reflection optical path, and the optical signal transmitted vertically downward passes through the objective lens 5 and is irradiated on the object to be detected below the objective lens;
移动机构，其移动所述光信号或移动所述待检测物体，使得所述光信号遍历所述待检测物体的所有部分；a moving mechanism that moves the optical signal or the object to be detected so that the optical signal traverses all parts of the object to be detected;
其中，所述短脉冲激光信号激发所述待检测物体产生等离子体，且所述照明光源12的可见光信号经过所述待检测物体反射后返回通过物镜，并到达图像处理器8，得到待检测物体的外观图像；且所述激光器1的短脉冲激光信号经过所述待检测物体反射后返回通过物镜，并穿过中阶梯光栅14，生成分光光谱，通过凹面镜6汇聚后，到达光电探测器15，其通过探测分光光谱中的电磁波强度确定待检测物体的元素分布影像。Wherein, the short-pulse laser signal excites the object to be detected to generate plasma, and the visible light signal of the illumination light source 12 is reflected by the object to be detected, returns through the objective lens, and reaches the image processor 8 to obtain the object to be detected and the short-pulse laser signal of the laser 1 returns to the objective lens after being reflected by the object to be detected, and passes through the echelle grating 14 to generate a spectroscopic spectrum, and after being converged by the concave mirror 6, it reaches the photodetector 15 , which determines the element distribution image of the object to be detected by detecting the intensity of electromagnetic waves in the spectroscopic spectrum.
优选的是，一种同时获得外观图像和元素分布影像的显微成像系统，所述折射反射光路包括：Preferably, a microscopic imaging system for simultaneously obtaining appearance images and element distribution images, the refraction-reflection optical path includes:
第一半透半反镜，其与水平方向呈45度角设置，所述激光器1发射的短脉冲激光信号沿水平方向入射所述第一半透半反镜，取其反射的竖直向下的短脉冲激光信号；The first half-mirror, which is set at an angle of 45 degrees to the horizontal direction, the short-pulse laser signal emitted by the laser 1 is incident on the first half-mirror along the horizontal direction, and the reflected one is vertically downward short-pulse laser signal;
第二半透半反镜，其与水平方向呈135度角设置，第一半透半反镜反射的短脉冲激光信号透过第二半透半反镜继续竖直向下传播，且照明光源12从与所述激光器1相反的一侧沿水平方向入射所述第二半透半反镜，取其反射的竖直向下的可见光信号，照明光源12的入射点与所述短脉冲激光信号的穿透点相同；The second half-mirror, which is set at an angle of 135 degrees to the horizontal direction, the short-pulse laser signal reflected by the first half-mirror continues to propagate vertically downward through the second half-mirror, and the illumination source 12 Incident the second half-mirror along the horizontal direction from the side opposite to the laser 1, and get the reflected vertically downward visible light signal, the incident point of the illumination source 12 and the short-pulse laser signal The penetration points are the same;
由此，短脉冲激光信号和可见光信号均变成竖直向下传播的光信号。Thus, both the short-pulse laser signal and the visible light signal become light signals propagating vertically downward.
优选的是，一种同时获得外观图像和元素分布影像的显微成像系统，所述折射反射光路还包括：Preferably, a microscopic imaging system that simultaneously obtains appearance images and element distribution images, the refraction-reflection optical path further includes:
第三半透半反镜，其与水平方向呈45度角设置，竖直向下传播的光信号透过第三半透半反镜继续向下传播，且可见光信号在待检测物体上的反射光返回通过第三半透半反镜，取其反射光，而短脉冲激光信号在待检测物体上的反射光返回第三半透半反镜，取其透射光，以将照明光源12和激光器1的返回光路区分开。The third half-mirror, which is set at an angle of 45 degrees to the horizontal direction, the optical signal transmitted vertically downwards continues to propagate downward through the third half-mirror, and the reflection of the visible light signal on the object to be detected The light returns through the third half-mirror to get its reflected light, and the reflected light of the short-pulse laser signal on the object to be detected returns to the third half-mirror to get its transmitted light to connect the illumination source 12 and the laser 1's return light path is separated.
优选的是，一种同时获得外观图像和元素分布影像的显微成像系统，Preferably, a microscopic imaging system that simultaneously obtains appearance images and element distribution images,
所述移动机构为沿X，Y，Z三向移动的移动架，其设置在所述待检测物体的下方，带动所述待检测物体移动，以实现遍历。The moving mechanism is a moving frame that moves along the three directions of X, Y, and Z, which is arranged under the object to be detected, and drives the object to be detected to move to realize traversal.
优选的是，一种同时获得外观图像和元素分布影像的显微成像系统，Preferably, a microscopic imaging system that simultaneously obtains appearance images and element distribution images,
所述移动机构为扫描振镜17，其设置在所述第三半透半反镜与物镜5之间，通过改变竖直向下传播的光信号的角度，以实现遍历。The moving mechanism is a scanning vibrating mirror 17, which is arranged between the third half-mirror and the objective lens 5, and traverses by changing the angle of the optical signal propagating vertically downward.
优选的是，一种同时获得外观图像和元素分布影像的显微成像系统，还包括：Preferably, a microscopic imaging system that simultaneously obtains appearance images and element distribution images further includes:
成像透镜9，其设置在照明光源的返回光路上，用于汇聚通过第三半透半反镜的可见光中的反射光；Imaging lens 9, which is arranged on the return light path of the illumination light source, for converging the reflected light in the visible light passing through the third half mirror;
图像处理器8，其设置在所述成像透镜9的焦距处，并将汇聚的可见光信号转化为电信号，对图像进行处理。The image processor 8 is arranged at the focal length of the imaging lens 9 and converts the converged visible light signal into an electrical signal to process the image.
优选的是，一种同时获得外观图像和元素分布影像的显微成像系统，还包括：Preferably, a microscopic imaging system that simultaneously obtains appearance images and element distribution images further includes:
信号放大器16，其与所述光电探测器通讯连接，用于放大电信号。A signal amplifier 16, which is in communication connection with the photodetector, is used for amplifying electrical signals.
优选的是，一种同时获得外观图像和元素分布影像的显微成像系统，还包括：Preferably, a microscopic imaging system that simultaneously obtains appearance images and element distribution images further includes:
计算机2，用于收集和分析信号放大器和图像处理器的电信号，进行显示和分析图像。The computer 2 is used for collecting and analyzing the electrical signals of the signal amplifier and the image processor, and displaying and analyzing images.
优选的是，一种同时获得外观图像和元素分布影像的显微成像系统，还包括：Preferably, a microscopic imaging system that simultaneously obtains appearance images and element distribution images further includes:
步进电机7，其与所述计算机2线路连接，用于控制所述中阶梯光栅14的转动。A stepper motor 7 is connected to the computer 2 and used to control the rotation of the echelle grating 14 .
本实用新型公开的一种同时获得外观图像和元素分布影像的显微成像系统的有益效果至少包括：将LIBS分析技术与激光扫描共聚焦技术有机结合，采用光谱显微成像技术实现对待测样品的逐点扫描，实现了一种同时获得外观图像和元素分布影像的显微成像系统。The beneficial effects of the microscopic imaging system for simultaneously obtaining appearance images and element distribution images disclosed by the utility model at least include: organically combining LIBS analysis technology with laser scanning confocal technology, and using spectral microscopic imaging technology to realize the imaging of samples to be tested. Point-by-point scanning realizes a microscopic imaging system that simultaneously obtains appearance images and element distribution images.
附图说明Description of drawings
图1为本实用新型一实施例所述的一种同时获得外观图像和元素分布影像的显微成像系统示意图。FIG. 1 is a schematic diagram of a microscopic imaging system for simultaneously obtaining appearance images and element distribution images according to an embodiment of the present invention.
具体实施方式Detailed ways
下面结合实施例对本实用新型做进一步的详细说明，以令本领域技术人员参照说明书文字能够据以实施。The utility model will be described in further detail below in conjunction with the embodiments, so that those skilled in the art can implement it with reference to the description.
如附图1所示，本实用新型公开了一种同时获得外观图像和元素分布影像的显微成像系统，即既能够展示物体的外观影像，又能够反映出物体内各种元素的分布状况。例如对铁皮进行检测，在展示其细微影像的同时，还反应出该铁皮内包含内的铬元素、碳元素、氧化铁化合物等的含量及分布。所述显微成像系统包括：As shown in Figure 1, the utility model discloses a microscopic imaging system that obtains appearance images and element distribution images at the same time, that is, it can not only display the appearance images of objects, but also reflect the distribution of various elements in the objects. For example, when detecting the iron sheet, while displaying its subtle images, it also reflects the content and distribution of chromium, carbon, and iron oxide compounds contained in the iron sheet. The microscopic imaging system includes:
激光器1，其发射出短脉冲激光信号。短脉冲激光打到待分析物质的某一位置处时，能够在该位置激发物体产生等离子体。而通过等离子对该短脉冲激光产生的反射光进行分光，得到反射光的光谱之后，又能够通过分析光谱而得到物质在被扫描位置处的元素成分。因此，只要让短脉冲激光逐行扫描待分析物质的所有位置，就能得到所有位置处的元素成分，将位置关系和相应的元素成分绘制成图表，就能够的得到待测物体的元素分布图。Laser 1, which emits short pulse laser signals. When the short-pulse laser hits a certain position of the substance to be analyzed, it can excite the object at that position to generate plasma. The reflected light generated by the short pulse laser is split by the plasma to obtain the spectrum of the reflected light, and then the elemental composition of the substance at the scanned position can be obtained by analyzing the spectrum. Therefore, as long as the short-pulse laser scans all positions of the substance to be analyzed line by line, the elemental composition at all positions can be obtained, and the positional relationship and the corresponding elemental composition are drawn into a chart, and the elemental distribution map of the object to be measured can be obtained. .
照明光源12，其发射出可见光信号，用于照射待测物体。同样，照明光源一次照射待测物体上的一个位置点，得到该位置点的反射光，利用反射光对这个位置点进行成像。之后通过移动待测物体本身或通过移动照明光源的照射角度，使得照明光源12遍历待测物体上的每一个位置点，直到最后获得了待测物体所有位置的图像。最后将位置关系和相应的图像绘制成图表，就能够得到其外观图像。The illuminating light source 12 emits visible light signals for illuminating the object to be measured. Similarly, the illuminating light source irradiates a position point on the object to be measured once to obtain the reflected light of the position point, and use the reflected light to image the position point. Then, by moving the object to be measured itself or by moving the illumination angle of the illumination source, the illumination light source 12 traverses every point on the object to be measured until images of all positions of the object to be measured are finally obtained. Finally, the positional relationship and the corresponding image are drawn into a graph, and its appearance image can be obtained.
折射反射光路，其中包括多个透射反射镜，以使所述激光器1和照明光源12发出的光信号均竖直向下传播，正好可以正入射进物镜。在折射放射光路中，本领域技术人员可以根据光路的基础知识，设置透射反射镜，使得最终所述激光器1和照明光源12发出的光信号均竖直向下传播即可。并且最好是使得所述激光器1和照明光源12发出的光信号沿相同的路径传播，这样待检测物体上的某个位置点同时获得光照和短脉冲激光。The refraction-reflection optical path includes a plurality of transmissive mirrors, so that the optical signals emitted by the laser 1 and the illumination light source 12 are transmitted vertically downward, and can just enter the objective lens at normal incidence. In the refraction radiation optical path, those skilled in the art can set a transmissive mirror according to the basic knowledge of the optical path, so that finally the optical signals emitted by the laser 1 and the illumination light source 12 are transmitted vertically downward. And preferably, the light signals emitted by the laser 1 and the illumination light source 12 propagate along the same path, so that a certain position on the object to be detected can obtain illumination and short-pulse laser light at the same time.
在本实用新型的一个优选实例中，所述折射放射光路可以包括：In a preferred example of the present utility model, the refraction radiation optical path may include:
第一半透半反镜，其与水平方向呈45度角设置，所述激光器1发射的短脉冲激光信号沿水平方向入射所述第一半透半反镜，取其反射的竖直向下的短脉冲激光信号；The first half-mirror, which is set at an angle of 45 degrees to the horizontal direction, the short-pulse laser signal emitted by the laser 1 is incident on the first half-mirror along the horizontal direction, and the reflected one is vertically downward short-pulse laser signal;
第二半透半反镜，其与水平方向呈135度角设置，第一半透半反镜反射的短脉冲激光信号透过第二半透半反镜继续竖直向下传播，且照明光源12从与所述激光器1相反的一侧沿水平方向入射所述第二半透半反镜，取其反射的竖直向下的可见光信号，照明光源12的入射点与所述短脉冲激光信号的穿透点相同；The second half-mirror, which is set at an angle of 135 degrees to the horizontal direction, the short-pulse laser signal reflected by the first half-mirror continues to propagate vertically downward through the second half-mirror, and the illumination source 12 Incident the second half-mirror along the horizontal direction from the side opposite to the laser 1, and get the reflected vertically downward visible light signal, the incident point of the illumination source 12 and the short-pulse laser signal The penetration points are the same;
由此，短脉冲激光信号和可见光信号均变成竖直向下传播的光信号。Thus, both the short-pulse laser signal and the visible light signal become light signals propagating vertically downward.
所述折射反射光路还包括：第三半透半反镜，其与水平方向呈45度角设置，竖直向下传播的光信号透过第三半透半反镜继续向下传播，且可见光信号在待检测物体上的反射光返回通过第三半透半反镜，取其反射光，而短脉冲激光信号在待检测物体上的反射光返回第三半透半反镜，取其透射光，以将照明光源12和激光器1的返回光路区分开；The refraction and reflection light path also includes: a third half-mirror, which is set at an angle of 45 degrees to the horizontal direction, and the optical signal that propagates vertically downward passes through the third half-mirror and continues to propagate downward, and the visible light The reflected light of the signal on the object to be detected returns through the third half-mirror, and the reflected light is taken, while the reflected light of the short-pulse laser signal on the object to be detected returns to the third half-mirror, and the transmitted light is taken , to distinguish the return light path of the illumination light source 12 from the laser 1;
物镜5，其位于所述折射反射光路的下方，竖直向下传播的光信号穿过所述物镜5，照射在物镜下方的待检测物体上；An objective lens 5, which is located below the refraction and reflection optical path, and the optical signal transmitted vertically downward passes through the objective lens 5 and is irradiated on the object to be detected below the objective lens;
移动机构，其通过微移扫描振镜17来改变竖直向下传播的光信号的角度或沿X，Y，Z三向移动移动架来移动所述待检测物体。也可以同时采用两者，通过两者的紧密配合，使得所述光信号遍历所述待检测物体的所有部分；The moving mechanism changes the angle of the optical signal propagating vertically downward by slightly moving the scanning galvanometer 17 or moves the moving frame along the X, Y, and Z directions to move the object to be detected. Both can also be used at the same time, and through the close cooperation of the two, the optical signal can traverse all parts of the object to be detected;
进一步地，一种同时获得外观图像和元素分布影像的显微成像系统，还包括：Further, a microscopic imaging system for simultaneously obtaining appearance images and element distribution images further includes:
成像透镜9，其设置在照明光源的返回光路上，用于汇聚通过第三半透半反镜的可见光中的反射光。The imaging lens 9 is arranged on the return light path of the illumination light source, and is used for converging the reflected light in the visible light passing through the third half mirror.
图像处理器8，其设置在所述成像透镜9的焦距处，并将汇聚的可见光信号转化为电信号，实现图像的获取、存储、传输、处理和复现。The image processor 8 is arranged at the focal length of the imaging lens 9 and converts the converged visible light signal into an electrical signal to realize image acquisition, storage, transmission, processing and reproduction.
进一步地，一种同时获得外观图像和元素分布影像的显微成像系统，还包括：Further, a microscopic imaging system for simultaneously obtaining appearance images and element distribution images further includes:
信号放大器16，其与所述光电探测器通讯连接，用于放大所述光电探测器所转化出的电信号。The signal amplifier 16 is connected in communication with the photodetector, and is used for amplifying the electrical signal converted by the photodetector.
进一步地，一种同时获得外观图像和元素分布影像的显微成像系统，还包括：Further, a microscopic imaging system for simultaneously obtaining appearance images and element distribution images further includes:
计算机2，用于收集和分析信号放大器和图像处理器的电信号，并根据电信号绘制成其外观成像以及其元素分布影像。The computer 2 is used to collect and analyze the electrical signal of the signal amplifier and the image processor, and draw its appearance image and its element distribution image according to the electrical signal.
进一步地，一种同时获得外观图像和元素分布影像的显微成像系统，还包括：Further, a microscopic imaging system for simultaneously obtaining appearance images and element distribution images further includes:
步进电机7，其与计算机2线路连接，用于控制中阶梯光栅14的转动。The stepping motor 7 is connected with the computer 2 and is used to control the rotation of the echelle grating 14 .
进一步地，一种同时获得外观图像和元素分布影像的显微成像系统，构成四条光路：Furthermore, a microscopic imaging system that simultaneously obtains appearance images and element distribution images constitutes four optical paths:
第1条光路：由照明光源12发出的照明光，经过第二半透半反镜11反射后进入物镜5，聚焦在待检测物体3；The first optical path: the illuminating light emitted by the illuminating light source 12 enters the objective lens 5 after being reflected by the second half mirror 11, and focuses on the object 3 to be detected;
第2条光路：待检测物体3反射的照明光沿照明光的反方向传播，再被物镜5收集后，依次经过第三半透半反镜10、成像透镜9及图像处理器8，通过计算机2实现观察待检测物体的外观图像；The second optical path: the illumination light reflected by the object 3 to be detected propagates in the opposite direction of the illumination light, and then is collected by the objective lens 5, then passes through the third half mirror 10, imaging lens 9 and image processor 8 in sequence, and passes through the computer 2 Realize the observation of the appearance image of the object to be detected;
第3条光路：短脉冲激光器1输出的激光脉冲经过第一半透半反镜13的反射后进入物镜5，经该物镜聚焦后照射到待检测物体3；The third optical path: the laser pulse output by the short-pulse laser 1 enters the objective lens 5 after being reflected by the first half-mirror 13, and irradiates the object 3 to be detected after being focused by the objective lens;
第4条光路：激光激发待检测物体3产生的等离子体辐射光沿激发光相反的方向传播，经物镜5收集，通过第一半透半反镜13和中阶梯光栅14，生成分光光谱，通过凹面镜6汇聚到高灵敏光电探测器15，转化为电信号，再通过信号放大器16放大电信号，并传输给计算机2，从而观察待检测物体的元素分布。The fourth optical path: the plasma radiation light generated by the laser excitation object 3 to be detected propagates in the direction opposite to the excitation light, is collected by the objective lens 5, passes through the first half mirror 13 and the echelle grating 14, and generates a spectroscopic spectrum. The concave mirror 6 converges to the high-sensitivity photodetector 15, converts it into an electrical signal, and then amplifies the electrical signal through the signal amplifier 16, and transmits it to the computer 2, so as to observe the element distribution of the object to be detected.
尽管本实用新型的实施方案已公开如上，但其并不仅仅限于说明书和实施方式中所列运用，它完全可以被适用于各种适合本实用新型的领域，对于熟悉本领域的人员而言，可容易地实现另外的修改，因此在不背离权利要求及等同范围所限定的一般概念下，本实用新型并不限于特定的细节和这里示出与描述的图例。Although the embodiment of the present utility model has been disclosed as above, it is not limited to the use listed in the description and the implementation, and it can be applied to various fields suitable for the present utility model. For those familiar with the art, Further modifications can be readily effected, so the invention is not limited to the specific details and examples shown and described herein without departing from the general concept defined by the claims and their equivalents.
Claims (9)
1.一种同时获得外观图像和元素分布影像的显微成像系统，其特征在于，包括：1. A microscopic imaging system for simultaneously obtaining appearance images and element distribution images, characterized in that it comprises: 激光器(1)，其发射短脉冲激光信号；a laser (1), which emits a short-pulse laser signal; 照明光源(12)，其发射可见光信号；an illuminating light source (12), which emits a visible light signal; 折射反射光路，其中包括多个透射反射镜，以使所述激光器(1)和照明光源(12)发出的光信号均竖直向下传播；A refraction and reflection optical path, which includes a plurality of transmissive mirrors, so that the optical signals emitted by the laser (1) and the illumination light source (12) are transmitted vertically downward; 物镜(5)，其位于所述折射反射光路的下方，竖直向下传播的光信号穿过所述物镜(5)，照射在物镜下方的待检测物体上；Objective lens (5), it is positioned at the below of described refraction and reflection light path, and the light signal that propagates vertically downwards passes through described objective lens (5), is irradiated on the object to be detected under objective lens; 移动机构，其移动所述光信号或移动所述待检测物体，使得所述光信号遍历所述待检测物体的所有部分；a moving mechanism that moves the optical signal or the object to be detected so that the optical signal traverses all parts of the object to be detected; 其中，所述短脉冲激光信号激发所述待检测物体产生等离子体，且所述照明光源(12)的可见光信号经过所述待检测物体反射后返回通过物镜，并到达图像处理器(8)，得到待检测物体的外观图像；且所述激光器(1)的短脉冲激光信号经过所述待检测物体反射后返回通过物镜，并穿过中阶梯光栅(14)，生成分光光谱，通过凹面镜(6)汇聚后，到达光电探测器(15)，其通过探测分光光谱中的电磁波强度确定待检测物体的元素分布影像。Wherein, the short-pulse laser signal excites the object to be detected to generate plasma, and the visible light signal of the illumination light source (12) returns through the objective lens after being reflected by the object to be detected, and reaches the image processor (8), Obtain the appearance image of the object to be detected; and the short-pulse laser signal of the laser (1) returns through the objective lens after being reflected by the object to be detected, and passes through the echelle grating (14) to generate a spectroscopic spectrum, and passes through the concave mirror ( 6) After converging, it reaches the photodetector (15), which determines the element distribution image of the object to be detected by detecting the intensity of electromagnetic waves in the spectroscopic spectrum. 2.如权利要求1所述的同时获得外观图像和元素分布影像的显微成像系统，其特征在于，所述折射反射光路包括：2. The microscopic imaging system for simultaneously obtaining appearance images and element distribution images as claimed in claim 1, wherein the refraction-reflection optical path comprises: 第一半透半反镜，其与水平方向呈45度角设置，所述激光器(1)发射的短脉冲激光信号沿水平方向入射所述第一半透半反镜，取其反射的竖直向下的短脉冲激光信号；The first half-mirror, which is set at an angle of 45 degrees to the horizontal direction, the short-pulse laser signal emitted by the laser (1) is incident on the first half-mirror along the horizontal direction, and the vertical reflection of the first half-mirror is taken Downward short-pulse laser signal; 第二半透半反镜，其与水平方向呈135度角设置，第一半透半反镜反射的短脉冲激光信号透过第二半透半反镜继续竖直向下传播，且照明光源(12)从与所述激光器(1)相反的一侧沿水平方向入射所述第二半透半反镜，取其反射的竖直向下的可见光信号，照明光源(12)的入射点与所述短脉冲激光信号的穿透点相同；The second half-mirror, which is set at an angle of 135 degrees to the horizontal direction, the short-pulse laser signal reflected by the first half-mirror continues to propagate vertically downward through the second half-mirror, and the illumination source (12) Incident the second half-mirror along the horizontal direction from the side opposite to the laser (1), get the reflected vertically downward visible light signal, the incident point of the illumination source (12) and The penetration points of the short pulse laser signals are the same; 由此，短脉冲激光信号和可见光信号均变成竖直向下传播的光信号。Thus, both the short-pulse laser signal and the visible light signal become light signals propagating vertically downward. 3.如权利要求2所述的同时获得外观图像和元素分布影像的显微成像系统，其特征在于，所述折射反射光路还包括：3. The microscopic imaging system for simultaneously obtaining appearance images and element distribution images as claimed in claim 2, wherein the refraction-reflection optical path further comprises: 第三半透半反镜，其与水平方向呈45度角设置，竖直向下传播的光信号透过第三半透半反镜继续向下传播，且可见光信号在待检测物体上的反射光返回通过第三半透半反镜，取其反射光，而短脉冲激光信号在待检测物体上的反射光返回第三半透半反镜，取其透射光，以将照明光源(12)和激光器(1)的返回光路区分开。The third half-mirror, which is set at an angle of 45 degrees to the horizontal direction, the optical signal transmitted vertically downwards continues to propagate downward through the third half-mirror, and the reflection of the visible light signal on the object to be detected The light returns through the third half-mirror, and the reflected light is taken, while the reflected light of the short pulse laser signal on the object to be detected returns to the third half-mirror, and the transmitted light is taken to illuminate the light source (12) It is distinguished from the return optical path of the laser (1). 4.如权利要求3所述的同时获得外观图像和元素分布影像的显微成像系统，其特征在于，4. The microscopic imaging system for simultaneously obtaining appearance images and element distribution images as claimed in claim 3, characterized in that, 所述移动机构为沿X，Y，Z三向移动的移动架，其设置在所述待检测物体的下方，带动所述待检测物体移动，以实现遍历。The moving mechanism is a moving frame that moves along the three directions of X, Y, and Z, which is arranged under the object to be detected, and drives the object to be detected to move to realize traversal. 5.如权利要求4所述的同时获得外观图像和元素分布影像的显微成像系统，其特征在于，5. The microscopic imaging system for simultaneously obtaining appearance images and element distribution images as claimed in claim 4, characterized in that, 所述移动机构为扫描振镜(17)，其设置在所述第三半透半反镜与物镜(5)之间，通过改变竖直向下传播的光信号的角度，以实现遍历。The moving mechanism is a scanning vibrating mirror (17), which is arranged between the third half-mirror and the objective lens (5), and traverses by changing the angle of the optical signal propagating vertically downward. 6.如权利要求5所述的同时获得外观图像和元素分布影像的显微成像系统，其特征在于，还包括：6. The microscopic imaging system for simultaneously obtaining appearance images and element distribution images as claimed in claim 5, further comprising: 成像透镜(9)，其设置在照明光源的返回光路上，用于汇聚通过第三半透半反镜的可见光中的反射光；An imaging lens (9), which is arranged on the return light path of the illumination light source, is used to converge the reflected light in the visible light passing through the third half-mirror; 图像处理器(8)，其设置在所述成像透镜(9)的焦距处，并将汇聚的可见光信号转化为电信号，对图像进行处理。An image processor (8), which is arranged at the focal length of the imaging lens (9), converts the converged visible light signal into an electrical signal, and processes the image. 7.如权利要求6所述的同时获得外观图像和元素分布影像的显微成像系统，其特征在于，还包括：7. The microscopic imaging system for simultaneously obtaining appearance images and element distribution images as claimed in claim 6, further comprising: 信号放大器(16)，其与所述光电探测器通讯连接，用于放大电信号。A signal amplifier (16), which communicates with the photodetector, is used for amplifying electrical signals. 8.如权利要求7所述的同时获得外观图像和元素分布影像的显微成像系统，其特征在于，还包括：8. The microscopic imaging system for simultaneously obtaining appearance images and element distribution images as claimed in claim 7, further comprising: 计算机(2)，用于收集和分析信号放大器和图像处理器的电信号，进行显示和分析图像。The computer (2) is used for collecting and analyzing the electrical signals of the signal amplifier and the image processor, displaying and analyzing images. 9.如权利要求8所述的同时获得外观图像和元素分布影像的显微成像系统，其特征在于，还包括：9. The microscopic imaging system for simultaneously obtaining appearance images and element distribution images as claimed in claim 8, further comprising: 步进电机(7)，其与所述计算机(2)线路连接，用于控制所述中阶梯光栅(14)的转动。A stepping motor (7), which is connected to the computer (2) and used to control the rotation of the echelle grating (14).
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| CN107049242A (en) * | 2017-01-24 | 2017-08-18 | 青岛大学 | Scanning type human body micro blood vessel ultra-micro structure three-dimensional imaging system |
| CN107883895A (en) * | 2017-11-21 | 2018-04-06 | 苏州睿牛机器人技术有限公司 | Multiple light courcess laser beam detecting sensor and its detection method |
| CN115791756A (en) * | 2022-11-24 | 2023-03-14 | 北京杏林睿光科技有限公司 | Laser-induced breakdown spectroscopy device for measuring full spectrum at one time |
-
2014
- 2014-11-24 CN CN201420712258.XU patent/CN204269547U/en not_active Expired - Lifetime
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104390943A (en) * | 2014-11-24 | 2015-03-04 | 中国科学院苏州生物医学工程技术研究所 | Microscopic imaging system capable of simultaneously obtaining appearance image and element distribution image |
| CN107049242A (en) * | 2017-01-24 | 2017-08-18 | 青岛大学 | Scanning type human body micro blood vessel ultra-micro structure three-dimensional imaging system |
| CN107049242B (en) * | 2017-01-24 | 2023-08-29 | 青岛大学 | Scanning human microvascular ultrastructure three-dimensional imaging system |
| CN107883895A (en) * | 2017-11-21 | 2018-04-06 | 苏州睿牛机器人技术有限公司 | Multiple light courcess laser beam detecting sensor and its detection method |
| CN107883895B (en) * | 2017-11-21 | 2024-02-13 | 苏州睿牛机器人技术有限公司 | Multi-light source laser detection sensor and detection method thereof |
| CN115791756A (en) * | 2022-11-24 | 2023-03-14 | 北京杏林睿光科技有限公司 | Laser-induced breakdown spectroscopy device for measuring full spectrum at one time |
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