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JPS53114349A - Impurity diffusing method - Google Patents

  • ️Thu Oct 05 1978

JPS53114349A - Impurity diffusing method - Google Patents

Impurity diffusing method

Info

Publication number
JPS53114349A
JPS53114349A JP2798377A JP2798377A JPS53114349A JP S53114349 A JPS53114349 A JP S53114349A JP 2798377 A JP2798377 A JP 2798377A JP 2798377 A JP2798377 A JP 2798377A JP S53114349 A JPS53114349 A JP S53114349A Authority
JP
Japan
Prior art keywords
impurity diffusing
diffusing method
impurity
substrates
optimums
Prior art date
1977-03-16
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2798377A
Other languages
Japanese (ja)
Inventor
Mitsuo Nanba
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
1977-03-16
Filing date
1977-03-16
Publication date
1978-10-05
1977-03-16 Application filed by Hitachi Ltd filed Critical Hitachi Ltd
1977-03-16 Priority to JP2798377A priority Critical patent/JPS53114349A/en
1978-10-05 Publication of JPS53114349A publication Critical patent/JPS53114349A/en
Status Pending legal-status Critical Current

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Abstract

PURPOSE: To form a high-density Sb diffusion layer, by arranging rough-surface substrates and semiconductor substrates at the interval of less than approximate 32mm and by controlling the current speed of the contained gas of Sb2O3 at their optimums.

COPYRIGHT: (C)1978,JPO&Japio

JP2798377A 1977-03-16 1977-03-16 Impurity diffusing method Pending JPS53114349A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2798377A JPS53114349A (en) 1977-03-16 1977-03-16 Impurity diffusing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2798377A JPS53114349A (en) 1977-03-16 1977-03-16 Impurity diffusing method

Publications (1)

Publication Number Publication Date
JPS53114349A true JPS53114349A (en) 1978-10-05

Family

ID=12236077

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2798377A Pending JPS53114349A (en) 1977-03-16 1977-03-16 Impurity diffusing method

Country Status (1)

Country Link
JP (1) JPS53114349A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016149507A (en) * 2015-02-13 2016-08-18 三菱電機株式会社 Semiconductor device manufacturing method, soar cell manufacturing method and solar cell

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016149507A (en) * 2015-02-13 2016-08-18 三菱電機株式会社 Semiconductor device manufacturing method, soar cell manufacturing method and solar cell

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