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SG83089A1 - Isolation process for surface micromachined sensors and actuators - Google Patents

  • ️Tue Sep 18 2001

SG83089A1 - Isolation process for surface micromachined sensors and actuators - Google Patents

Isolation process for surface micromachined sensors and actuators

Info

Publication number
SG83089A1
SG83089A1 SG9610874A SG1996010874A SG83089A1 SG 83089 A1 SG83089 A1 SG 83089A1 SG 9610874 A SG9610874 A SG 9610874A SG 1996010874 A SG1996010874 A SG 1996010874A SG 83089 A1 SG83089 A1 SG 83089A1 Authority
SG
Singapore
Prior art keywords
actuators
isolation process
surface micromachined
micromachined sensors
sensors
Prior art date
1996-10-18
Application number
SG9610874A
Inventor
Sridhar Dr Uppili
Pang Dow Dr Foo
Yong Hong Loh
Yu Bo Miao
Lian Jun Dr Liu
Original Assignee
Eg & G Internat
Inst Of Microelectronics
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
1996-10-18
Filing date
1996-10-18
Publication date
2001-09-18
1996-10-18 Application filed by Eg & G Internat, Inst Of Microelectronics filed Critical Eg & G Internat
1996-10-18 Priority to SG9610874A priority Critical patent/SG83089A1/en
2001-09-18 Publication of SG83089A1 publication Critical patent/SG83089A1/en

Links

  • 238000002955 isolation Methods 0.000 title 1
  • 238000000034 method Methods 0.000 title 1
SG9610874A 1996-10-18 1996-10-18 Isolation process for surface micromachined sensors and actuators SG83089A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
SG9610874A SG83089A1 (en) 1996-10-18 1996-10-18 Isolation process for surface micromachined sensors and actuators

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SG9610874A SG83089A1 (en) 1996-10-18 1996-10-18 Isolation process for surface micromachined sensors and actuators

Publications (1)

Publication Number Publication Date
SG83089A1 true SG83089A1 (en) 2001-09-18

Family

ID=20429489

Family Applications (1)

Application Number Title Priority Date Filing Date
SG9610874A SG83089A1 (en) 1996-10-18 1996-10-18 Isolation process for surface micromachined sensors and actuators

Country Status (1)

Country Link
SG (1) SG83089A1 (en)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5242863A (en) * 1990-06-02 1993-09-07 Xiang Zheng Tu Silicon diaphragm piezoresistive pressure sensor and fabrication method of the same
US5316979A (en) * 1992-01-16 1994-05-31 Cornell Research Foundation, Inc. RIE process for fabricating submicron, silicon electromechanical structures
WO1994017557A1 (en) * 1993-01-19 1994-08-04 Hughes Aircraft Company Thermally matched readout/detector assembly and method for fabricating same
WO1994018697A1 (en) * 1993-02-04 1994-08-18 Cornell Research Foundation, Inc. Microstructures and single mask, single-crystal process for fabrication thereof
US5354695A (en) * 1992-04-08 1994-10-11 Leedy Glenn J Membrane dielectric isolation IC fabrication
EP0702221A2 (en) * 1994-09-14 1996-03-20 Delco Electronics Corporation One-chip integrated sensor

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5242863A (en) * 1990-06-02 1993-09-07 Xiang Zheng Tu Silicon diaphragm piezoresistive pressure sensor and fabrication method of the same
US5316979A (en) * 1992-01-16 1994-05-31 Cornell Research Foundation, Inc. RIE process for fabricating submicron, silicon electromechanical structures
US5354695A (en) * 1992-04-08 1994-10-11 Leedy Glenn J Membrane dielectric isolation IC fabrication
WO1994017557A1 (en) * 1993-01-19 1994-08-04 Hughes Aircraft Company Thermally matched readout/detector assembly and method for fabricating same
WO1994018697A1 (en) * 1993-02-04 1994-08-18 Cornell Research Foundation, Inc. Microstructures and single mask, single-crystal process for fabrication thereof
EP0702221A2 (en) * 1994-09-14 1996-03-20 Delco Electronics Corporation One-chip integrated sensor

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