US20060191627A1 - Process for cutting out a block of material and formation of a thin film - Google Patents

Images

Classifications

• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
  • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
  • H01L21/76—Making of isolation regions between components
  • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
  • H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
  • H01L21/76251—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques
  • H01L21/76254—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques with separation/delamination along an ion implanted layer, e.g. Smart-cut, Unibond
• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
  • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B81—MICROSTRUCTURAL TECHNOLOGY
  • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
  • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
  • B81C1/00349—Creating layers of material on a substrate
  • B81C1/0038—Processes for creating layers of materials not provided for in groups B81C1/00357 - B81C1/00373
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
  • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
  • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
  • H01L21/20—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy
  • H01L21/2003—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy characterised by the substrate
  • H01L21/2007—Bonding of semiconductor wafers to insulating substrates or to semiconducting substrates using an intermediate insulating layer
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B81—MICROSTRUCTURAL TECHNOLOGY
  • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
  • B81C2201/00—Manufacture or treatment of microstructural devices or systems
  • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
  • B81C2201/0174—Manufacture or treatment of microstructural devices or systems in or on a substrate for making multi-layered devices, film deposition or growing
  • B81C2201/0191—Transfer of a layer from a carrier wafer to a device wafer
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B81—MICROSTRUCTURAL TECHNOLOGY
  • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
  • B81C2201/00—Manufacture or treatment of microstructural devices or systems
  • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
  • B81C2201/0174—Manufacture or treatment of microstructural devices or systems in or on a substrate for making multi-layered devices, film deposition or growing
  • B81C2201/0191—Transfer of a layer from a carrier wafer to a device wafer
  • B81C2201/0192—Transfer of a layer from a carrier wafer to a device wafer by cleaving the carrier wafer
• • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
  • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
  • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
  • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
  • Y10T156/11—Methods of delaminating, per se; i.e., separating at bonding face
  • Y10T156/1153—Temperature change for delamination [e.g., heating during delaminating, etc.]
• • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
  • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
  • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
  • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
  • Y10T156/11—Methods of delaminating, per se; i.e., separating at bonding face
  • Y10T156/1153—Temperature change for delamination [e.g., heating during delaminating, etc.]
  • Y10T156/1158—Electromagnetic radiation applied to work for delamination [e.g., microwave, uv, ir, etc.]
• • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
  • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
  • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
  • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
  • Y10T156/11—Methods of delaminating, per se; i.e., separating at bonding face
  • Y10T156/1168—Gripping and pulling work apart during delaminating
  • Y10T156/1179—Gripping and pulling work apart during delaminating with poking during delaminating [e.g., jabbing, etc.]
  • Y10T156/1184—Piercing layer during delaminating [e.g., cutting, etc.]
• • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
  • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
  • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
  • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
  • Y10T156/19—Delaminating means
  • Y10T156/1911—Heating or cooling delaminating means [e.g., melting means, freezing means, etc.]
• • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
  • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
  • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
  • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
  • Y10T156/19—Delaminating means
  • Y10T156/1961—Severing delaminating means [e.g., chisel, etc.]
  • Y10T156/1967—Cutting delaminating means

Definitions

• the present invention relates to a process for cutting out a block of material. This process can be implemented, in particular, for the formations of thin films.
• Thin films, self-supporting or integral with a support substrate, are widely used in the fields of micro-electronics, opto-electronics and micro-mechanics.
• the invention is applicable to these domains, in particular for producing components or integrated circuits.
• Thin films have a thickness which is usually comprised between a few nanometres and a few micrometres. They also make it possible, for example, to use materials whose usage under the form of a thick substrate would be ruled out for reasons of cost or compatibility With other materials used.
• the compatibility of materials can also constitute an obstacle to the direct formation of a thin film on a support substrate on which it is finally used.
• a certain number of processes have been developed to form first of all a thin film on a source substrate and then to transfer the thin film from the source substrate to a target substrate.
• document [1] describes the possibility of forming an embrittled zone in a plate of material by ionic implantation in order to detach the superficial thin film from the plate later at the level of this zone.
• the separation of the thin film from the source substrate is provoked, or at least assisted, by using a certain number of mechanical or thermal stresses.
• the cutting out of the thin film requires an energy budget under thermal and/or mechanical form, which is linked mainly to the dose of the species implanted to form the embrittled zone.
• the implementation of mechanical forces to separate the source substrate from the thin film also makes it possible to reduce the thermal budget for fracture, especially in the case where the materials in contact have different expansion coefficients.
• the application of mechanical efforts on the source substrate and/or the target support is however not always possible, especially when the materials being used are brittle, or when the cleavage zone has not been sufficiently embrittled by ionic-implantation.
• the aim of the invention is to propose a cutting out method making it possible, in particular, to form and transfer thin films, without the limitations mentioned above.
• a further aim of the invention is to propose a cutting out method able to be implemented with a reduced energy budget and in particular a reduced thermal budget.
• Another aim of the invention is to propose an economical process in which an eventual implantation of impurities, intended to form an embrittled zone, can be carried out with a reduced dose.
• the invention has more precisely the aim of a method for cutting out a block of material, comprising the following stages:
• the separation initiator(s) can be located on all or part of the periphery of the block and/or on local internal zones of the block, and are capable of spreading into the embrittled zone.
• the mechanical stresses which can be used profitably for the separation can be stresses applied from outside the block or internal stresses present in the block.
• stages b and c can also be concomitant.
• closely plane face it is understood a face whose mean plane is flat, but which can comprise surface micro-rugosities whose rugosity values range from a few tenths of nanometres to several hundred nanometres.
• the inventors have been able to show that an implantation across a surface with a micro-rugosity, for example with an RMS (root mean square height) value of 10 nm, does not disturb the embrittling mechanism and subsequent fracture. This fact is interesting since this rugosity is of the order of the rugosity of the free face of the film after transfer. Therefore in these conditions, it is possible to recycle the same substrate several times without recourse to surface polishing.
• embrittled buried zone can be formed by implantation.
• gaseous species such as hydrogen or rare gases, for example, in their atomic form (for example H), in their molecular form (for example H 2 ), in their ionic form (for example H + , H 2 + ), in their isotopic form (for example deuterium), or in their isotopic and ionic form.
• H atomic form
• H 2 molecular form
• ionic form for example H + , H 2 +
• isotopic form for example deuterium
• implantation one means any technique for introducing the species mentioned above into the block, such as bombardment, diffusion etc. These techniques can be implemented separately or in combination of several together.
• the doses of the species implanted to form the embrittled zone can be reduced.
• the reduced doses make it possible to lower the disturbance of the state of the surface of the thin films, or parts cut out, and thus to control the rugosity.
• an implantation can be carried out locally by overdosing to form the separation initiator, the first means of separation then corresponding to an overdosing.
• the separation initiator can be formed in a same plane as the embrittled zone as a prolongation of this zone. If the initiation of the initiator is carried out in another plane than that of the embrittled zone, the propagation of the initiator rejoins the embrittled zone.
• the separation initiator can be formed by an ionic implantation of a species which is different from that reserved for the formation of the embrittled zone.
• the first means of separation then corresponds to the insertion of the tool.
• the separation initiator can be formed by local injection of a fluid on the block.
• the first means of separation then corresponds to the injection of fluid.
• the separation initiator can be formed by local thermal treatment of the block.
• the first means of separation then corresponds to the local thermal treatment.
• the stiffener can be deposited at the surface of the block of material, in contact with the thin film to be cut out, according to any deposit technique. It can also be made integral with the thin film by molecular adhesion or by gluing by means of a binder (glue).
• a stiffener is not indispensable.
• a part or a layer with a thickness or a rigidity sufficient not to tear at the moment of separation will be called a “self-supporting” part or layer.
• FIGS. 1A to 1 D are diagrammatic cross-sections of a substrate and illustrate the stages for cutting out a thin film, supported by a stiffener, according to a method conforming to the invention.
• FIGS. 2A to 2 C are diagrammatic cross-sections of a substrate and illustrate the stages for cutting out a self-supporting thin film, according to a method conforming to the invention.
• FIGS. 3A to 3 D are diagrammatic cross-sections of a substrate and illustrate the stages for cutting out a thin film, supported by a stiffener, according to a method conforming to the invention and constituting a variant relative to the process illustrated by FIGS. 1A to 1 D.
• FIG. 1A shows a substrate 10 which constitutes a block of material, homogeneous or not, such as mentioned in the preceding description.
• This block can, for example, be an ingot or a plate of semiconducting or piezo-electric or ferro-electric material. It may be pre-treated or not. In the case where the block is a semiconducting plate, treated or not, it can, for example, be a silicon substrate.
• Ionic implantation of hydrogen with a dose of the order of 7.10 16 H + /cm 2 at an energy of 100 keV, for example, makes it possible to form an embrittled zone 12 in the substrate. This extends closely along a plane parallel to the surface of the substrate through which the impurities have been implanted. In the example shown in the figure the impurities are implanted through a face of the substrate 18 which, in the text below, is called the superficial face. In the substrate 10 the embrittled zone defines a superficial thin film 14 and a mass part 16 .
• FIG. 1B shows the mounting of the superficial face of the thin film 14 on a second substrate 20 called the target substrate and which can constitute a stiffener for the thin film. It can, for example, be a substrate of fused silica, commonly called quartz.
• Solidarisation of the layer 14 with the substrate 20 can be carried out either directly by molecular adhesion, or as shown in the FIGS. 1 by the intermediary of at least one layer of material 22 set on the thin film and/or on the substrate.
• the intermediary layer 22 is chosen either to encourage the molecular adhesion (for example SiO 2 ) or to produce an adhesive gluing (for example a layer of glue).
• the substrates undergo, for example, a chemical cleaning treatment intended to make the faces to be assembled hydrophilic.
• the substrates can possibly undergo a first thermal treatment intended to strengthen the adhesion forces. This treatment is carried out, for example, with a thermal budget of the order of 300° C. for 2 hours.
• FIG. 1C shows the formation of a separation initiator 30 in the substrate 10 .
• the separation initiator 30 extends from the outside face 32 of the substrate 10 , in this case a lateral face on the figure, up to the embrittled zone 12 .
• the separation initiator can be provoked by different means, represented symbolically on the figure under the form of an arrow with reference 34 . These means can comprise injection of water or another fluid, or a tool such as a blade, inserted at the level of the embrittled zone.
• the separation initiator can be provoked by ionic implantation with an overdose limited to a region at the edge of the substrate. Such a region is shown on the figures with the reference 36 .
• the overdose can be made in other regions of the substrate such as, for example, a central region.
• region 36 is over-implanted, for example with a dose of 9.10 16 H + /cm 2 .
• a separation initiator can be provoked by overheating the substrate locally (for example with the aid of a laser or a local heat source).
• separation initiator means, within the framework of the present description, either a region in which the separation has already been started, or a region, particularly brittle, in which the separation will be started at a later stage of actual separation.
• An arrow 34 a with dotted lines indicates the possibility of forming a plurality of separation initiators.
• FIG. 1D shows a final stage of separation of the thin film 14 and the mass part 16 of the substrate.
• the separation can be assisted by applying mechanical forces, under the form of pressure, traction forces of shearing or peeling, and/or a thermal treatment.
• a thermal treatment of a few minutes at 350° C. to obtain total separation.
• the thermal budget used to obtain separation of the parts takes into account preceding thermal treatments which have been carried out such as, for example, thermal treatment to increase the adherence between the substrates. In every case, this thermal budget is reduced due to the use of the separation initiator.
• the mass part 16 of the first substrate can be re-used for later cut-outs of another thin film. Possibly, it can also act as target substrate for the support of another thin film of another material.
• FIGS. 1A to 1 D it is possible, for example, to obtain other structures as well, comprising non-semiconductor materials on a silicon substrate, for example, such as LiNbO 3 , LiTaO 3 or SrTiO 3 . It is also possible to transfer layers of semiconductor materials III-V on silicon or on other III-V semiconductors. The process can also be implemented to obtain substrates of the SOI type (silicon on insulator).
• This implantation makes it possible to define a thin film limited by an embrittled zone.
• a local overdosing at 9.10 16 H + /cm 2 is carried out at the periphery of the embrittled zone.
• the overdosing makes it possible to form a separation initiator in the meaning of the invention along a length of 1 to 2 cm, from the edge of the plate in the case of an initiator at the edge of the plate.
• a thermal separation treatment After mounting the plate on another silicon plate on which the oxide layer is adhered, one proceeds with a thermal separation treatment. It is seen that a treatment of 4 hours at 350° C. makes it possible to obtain a separation which spreads from the initiator to the whole of the embrittled zone.
• FIG. 2A which shows the first stage of a second possibility of implementation of the invention, is identical to FIG. 1A . Therefore one can refer to the description above concerning this figure.
• FIG. 2B illustrates the formation of a separation initiator 30 . It can be seen that the initiator 30 is used close to the level of the embrittled zone 12 and that, moreover, the surface 18 of the thin film 14 is left free.
• FIG. 2C shows the final stage of separation which is provoked without equipping the thin film 14 with a stiffener.
• Such an implementation of the process is adapted in particular to the formation of self-supporting thin films.
• FIGS. 3A to 3 D show another possibility of implementing the process.
• FIGS. 3A and 3B are identical to FIGS. 1A and 1B , and therefore they do not have to described again.
• FIG. 3C which illustrates the formation of a separation initiator, shows that the means of separation 34 can be applied elsewhere than at the level of the embrittled zone 12 .
• a tool such as a blade
• the tool is inserted on a lateral side 32 of the structure, at the level of the interface between the first substrate 10 and the target substrate 20 .
• the tool is inserted at the level of the intermediary layer 22 when this exists. Because of the relatively fine thickness of the thin film, for example lower than or of the order of several ⁇ m, that is to say of the low depth of the zone embrittled in the first substrate 20 , the separation initiator spreads through the thin layer to rejoin the embrittled zone 12 .
• Figure D illustrates the final separation which spreads from the initiator 30 across the whole of the surface of the thin film following the embrittled zone.
• the presence of a separation initiator makes it possible to reduce the thermal budget of the final stage and/or reduce the implantation dose of the embrittled zone. By playing on these two parameters, it is thus possible to control the rugosity of the mass part 16 and, above all, the thin film 14 .

Landscapes

• Engineering & Computer Science (AREA)
• Manufacturing & Machinery (AREA)
• Microelectronics & Electronic Packaging (AREA)
• Physics & Mathematics (AREA)
• Condensed Matter Physics & Semiconductors (AREA)
• General Physics & Mathematics (AREA)
• Computer Hardware Design (AREA)
• Power Engineering (AREA)
• Element Separation (AREA)
• Physical Vapour Deposition (AREA)
• Processing Of Stones Or Stones Resemblance Materials (AREA)
• Perforating, Stamping-Out Or Severing By Means Other Than Cutting (AREA)
• Cutting Tools, Boring Holders, And Turrets (AREA)

Abstract

Description

Claims (32)

Priority Applications (1)

Applications Claiming Priority (5)

Related Parent Applications (2)

Publications (1)

Family

ID=8852419

Family Applications (2)

Family Applications Before (1)

Country Status (11)

Cited By (8)

Families Citing this family (31)

Citations (46)

Family Cites Families (13)

• 2000
  • 2000-07-12 FR FR0009129A patent/FR2811807B1/en not_active Expired - Fee Related
• 2001
  • 2001-07-11 DE DE60133649T patent/DE60133649T2/en not_active Expired - Lifetime
  • 2001-07-11 AT AT01954078T patent/ATE392711T1/en not_active IP Right Cessation
  • 2001-07-11 AU AU2001276432A patent/AU2001276432A1/en not_active Abandoned
  • 2001-07-11 KR KR1020037000449A patent/KR100854799B1/en active IP Right Grant
  • 2001-07-11 MY MYPI20013297A patent/MY137543A/en unknown
  • 2001-07-11 JP JP2002509103A patent/JP5111713B2/en not_active Expired - Lifetime
  • 2001-07-11 TW TW090116949A patent/TW505962B/en not_active IP Right Cessation
  • 2001-07-11 US US10/312,864 patent/US7029548B2/en not_active Expired - Lifetime
  • 2001-07-11 WO PCT/FR2001/002239 patent/WO2002005344A1/en active IP Right Grant
  • 2001-07-11 EP EP01954078A patent/EP1299905B1/en not_active Expired - Lifetime
• 2006
  • 2006-03-10 US US11/372,542 patent/US20060191627A1/en not_active Abandoned
• 2012
  • 2012-04-18 JP JP2012094512A patent/JP2012160754A/en active Pending

Patent Citations (51)

Also Published As

Similar Documents

Legal Events