patents.google.com

Agrawal, 2004 - Google Patents

  • ️Thu Jan 01 2004
A latching MEMS relay for DC and RF applications

Agrawal, 2004

Document ID
14391716753643176122
Author Publication year
2004
Publication venue
Proceedings of the 50th IEEE Holm Conference on Electrical Contacts and the 22nd International Conference on Electrical Contacts Electrical Contacts, 2004.

External Links

Snippet

A latching MEMS relay, based on thermal actuator, for both DC and RF applications are described. In contrast to electrostatic MEMS relays that require a voltage to hold a closed state, this relay is a true mechanical latching design where no power is required to hold a …

Continue reading at ieeexplore.ieee.org (other versions)
  • 238000002955 isolation 0 abstract description 8

Classifications

    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/12—Contacts characterised by the manner in which co-operating contacts engage
    • H01H1/14—Contacts characterised by the manner in which co-operating contacts engage by abutting
    • H01H1/20—Bridging contacts
    • H01H1/2083—Bridging contact surfaces directed at an oblique angle with respect to the movement of the bridge
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0078—Switches making use of microelectromechanical systems [MEMS] with parallel movement of the movable contact relative to the substrate
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/50—Means for increasing contact pressure, preventing vibration of contacts, holding contacts together after engagement, or biasing contacts to the open position
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H61/00—Electrothermal relays
    • H01H2061/006—Micromechanical thermal relay
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H61/00—Electrothermal relays
    • H01H61/02—Electrothermal relays wherein the thermally-sensitive member is heated indirectly, e.g. resistively, inductively
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H57/00—Electrostrictive relays; Piezo-electric relays
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H67/00—Electrically-operated selector switches
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H33/00—High-tension or heavy-current switches with arc-extinguishing or arc-preventing means
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H37/00—Thermally-actuated switches
    • H01H37/02—Details
    • H01H37/32—Thermally-sensitive members
    • H01H37/58—Thermally-sensitive members actuated due to thermally controlled change of magnetic permeability

Similar Documents

Publication Publication Date Title
US7489228B2 (en) 2009-02-10 Low power consumption bistable microswitch
EP2073236B1 (en) 2011-03-02 MEMS Microswitch having a conductive mechanical stop
KR101230284B1 (en) 2013-02-06 Rf mems switch a flexible and free switch membrane
KR20010030305A (en) 2001-04-16 Folded spring based micro electromechanical RF switch and method of making
Agrawal 2004 A latching MEMS relay for DC and RF applications
US7653985B1 (en) 2010-02-02 Method of fabricating an RF MEMS switch with spring-loaded latching mechanism
US20050183938A1 (en) 2005-08-25 Head electrode region for a reliable metal-to-metal contact micro-relay MEMS switch
KR20080019577A (en) 2008-03-04 MEMS actuators and MEMS switches
Wright et al. 1997 A large-force, fully-integrated MEMS magnetic actuator
US6962832B2 (en) 2005-11-08 Fabrication method for making a planar cantilever, low surface leakage, reproducible and reliable metal dimple contact micro-relay MEMS switch
US20050189204A1 (en) 2005-09-01 Microengineered broadband electrical switches
KR101745725B1 (en) 2017-06-09 Switch structures
Bansal et al. 2019 Improved design of ohmic RF MEMS switch for reduced fabrication steps
EP2200063A2 (en) 2010-06-23 Micro-electromechanical system switch
Wang et al. 2002 Low-voltage lateral-contact microrelays for RF applications
US6919784B2 (en) 2005-07-19 High cycle MEMS device
Liu et al. 2011 Improving performance of the metal-to-metal contact RF MEMS switch with a Pt–Au microspring contact design
US7280015B1 (en) 2007-10-09 Metal contact RF MEMS single pole double throw latching switch
US8120133B2 (en) 2012-02-21 Micro-actuator and locking switch
US7256669B2 (en) 2007-08-14 Method of preparing electrical contacts used in switches
US7230513B2 (en) 2007-06-12 Planarized structure for a reliable metal-to-metal contact micro-relay MEMS switch
US20050062565A1 (en) 2005-03-24 Method of using a metal platform for making a highly reliable and reproducible metal contact micro-relay MEMS switch
US6753747B2 (en) 2004-06-22 Integrated microsprings for high speed switches
Lee et al. 2004 Micro-electro-mechanical relays-design concepts and process demonstrations
Borwick et al. 2003 A hybrid approach to low-voltage MEMS switches