Semi-transparent a-IGZO thin-film transistors with polymeric gate dielectric - PubMed

Semi-transparent a-IGZO thin-film transistors with polymeric gate dielectric

Gun Woo Hyung et al. J Nanosci Nanotechnol. 2013 Jun.

Abstract

We report the fabrication of semi-transparent a-IGZO-based thin-film transistors (TFTs) with crosslinked poly-4-vinylphenol (PVP) gate dielectric layers on PET substrate and thermally-evaporated Al/Ag/Al source and drain (S&D) electrodes, which showed a transmittance of 64% at a 500-nm wavelength and sheet resistance of 16.8 omega/square. The semi-transparent a-IGZO TFTs with a PVP layer exhibited decent saturation mobilities (maximum approximately 5.8 cm2Ns) and on/off current ratios of approximately 10(6).

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